公开(公告)号：US20250093412A1

公开(公告)日：2025-03-20

申请号：US18966905

申请日：2024-12-03

Applicant: VueReal Inc.

Inventor： Gholamreza CHAJI ,  Chang Ho PARK

IPC: G01R31/28 ,  G01R1/067 ,  G01R1/073

Abstract: What is disclosed are methods and structures of an improved probe card assembly to inspect micro devices.

公开(公告)号：US20240120173A1

公开(公告)日：2024-04-11

申请号：US18263406

申请日：2022-01-28

Applicant: VueReal Inc.

Inventor： Gholamreza CHAJI ,  Ehsanollah FATHI ,  Chang Ho PARK

IPC: H01J37/252 ,  H01J37/063 ,  H01J37/09 ,  H01J37/24

CPC classification number: H01J37/252 ,  H01J37/063 ,  H01J37/09 ,  H01J37/243

Abstract: The present disclosure relates to integrating microdevices into a system substrate. In particular it relates to measuring microdevices using an electron beam method using one or several tips as Ebeam sources. The disclosure further outlines methods to target Ebeams effectively to produce an optimum result with minimal damage to adjacent microdevices and components.

公开(公告)号：US20220003815A1

公开(公告)日：2022-01-06

申请号：US17432575

申请日：2020-02-20

Applicant: VueReal Inc.

Inventor： Gholamreza CHAJI ,  Chang Ho PARK

IPC: G01R31/28 ,  G01R1/067 ,  G01R1/073

Abstract: What is disclosed are methods and structures of an improved probe card assembly to inspect micro devices.