Method for fabricating a magnetic write pole having an improved sidewall angle profile
    2.
    发明授权
    Method for fabricating a magnetic write pole having an improved sidewall angle profile 有权
    具有改进的侧壁角轮廓的磁性写入极的制造方法

    公开(公告)号:US09431038B1

    公开(公告)日:2016-08-30

    申请号:US14753630

    申请日:2015-06-29

    摘要: A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.

    摘要翻译: 一种方法提供具有空气轴承表面(ABS)位置的磁性装置。 提供包括第一和第二子层的层。 第一子层包括ABS位置。 第二子层从ABS位置凹陷,使得第一子层的一部分位于第二子层和ABS位置之间。 第一子层具有从垂直于ABS位置的表面定向成非零锐角的后表面。 在该层中形成沟槽。 沟槽具有底部,顶部和侧壁。 在ABS位置处,侧壁与垂直于底部的方向形成第一角度。 侧壁与第二子层的一部分中的方向形成第二角度。 第二角度小于第一角度。 侧壁角沿第一子层的后表面变化。 沟槽中设有主极。

    Method for fabricating a magnetic writer having half-side shields
    3.
    发明授权
    Method for fabricating a magnetic writer having half-side shields 有权
    一种具有半边屏蔽的磁性写入器的制造方法

    公开(公告)号:US08988825B1

    公开(公告)日:2015-03-24

    申请号:US14279608

    申请日:2014-05-16

    IPC分类号: G11B5/147 G11B5/31 G11B5/11

    CPC分类号: G11B5/3163 G11B5/3116

    摘要: A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. An intermediate is provided. The intermediate layer includes a first sublayer and a second sublayer in at least a side shield region. The first sublayer has a first sublayer top. The second sublayer is on the first sublayer top in the shield region. A trench is formed in the intermediate layer using at least one etch. A main pole is provided in the trench. The main pole has a bottom and a top wider than the bottom. The first sublayer top is between the top and the bottom of the main pole. At least a portion of the second sublayer is removed in the shield region. At least one half side shield is provided. A bottom of the at least one half side shield being between the top and the bottom of the main pole.

    摘要翻译: 一种方法和系统提供具有空气轴承表面(ABS)位置的磁换能器。 提供中间体。 中间层包括至少一个侧屏蔽区域中的第一子层和第二子层。 第一子层具有第一子层顶部。 第二子层位于屏蔽区域中的第一子层顶部。 使用至少一个蚀刻在中间层中形成沟槽。 沟槽中设有主极。 主杆的底部和顶部宽于底部。 第一子层顶部位于主极的顶部和底部之间。 第二子层的至少一部分在屏蔽区域中被去除。 提供至少一个半边屏蔽。 至少一个半侧护罩的底部位于主杆的顶部和底部之间。

    Method for providing a side shield for a magnetic recording transducer using an air bridge
    8.
    发明授权
    Method for providing a side shield for a magnetic recording transducer using an air bridge 有权
    用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法

    公开(公告)号:US08879207B1

    公开(公告)日:2014-11-04

    申请号:US13887252

    申请日:2013-05-03

    IPC分类号: G11B5/127 G11B5/11

    摘要: A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.

    摘要翻译: 一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。 非磁性层在其中具有极沟槽。 极沟具有对应于极的形状和位置。 沉积湿蚀刻层。 湿蚀刻层的一部分位于极沟槽中。 一个极点形成。 电极具有底部和顶部宽于电极尖端区域中的底部。 极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。 去除湿蚀刻层和非磁性层的至少一部分,形成空气桥。 空气桥在ABS位置的极点的一部分和下层之间。 基本上填充空气桥的侧面屏蔽层被沉积。

    Method for fabricating a magnetic writer using multiple etches of damascene materials
    10.
    发明授权
    Method for fabricating a magnetic writer using multiple etches of damascene materials 有权
    用多层蚀刻材料制造磁性刻录机的方法

    公开(公告)号:US09305583B1

    公开(公告)日:2016-04-05

    申请号:US14280342

    申请日:2014-05-16

    IPC分类号: G11B5/31 G11B5/855 G11B5/127

    摘要: A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer that includes a first sublayer in a side shield region and a second sublayer outside of the side shield region is provided. A trench is formed in the intermediate layer using multiple etches. A first etch removes part of the second sublayer, providing a first portion of the trench having a first sidewall angle. A second etch removes part of the first sublayer, providing a second portion of the trench having a second sidewall angle. The second sidewall angle is greater than the first sidewall angle. A main pole is provided in the trench and has a plurality of sidewalls. The sidewalls have the second sidewall angle in the second portion of the trench and at least one main pole sidewall angle corresponding to the first sidewall angle in the first portion of the trench.

    摘要翻译: 一种方法提供具有空气轴承表面(ABS)位置的磁换能器。 提供了包括侧屏蔽区域中的第一子层和侧屏蔽区域外侧的第二子层的中间层。 使用多个蚀刻在中间层中形成沟槽。 第一蚀刻移除第二子层的一部分,提供具有第一侧壁角的沟槽的第一部分。 第二蚀刻去除第一子层的一部分,提供具有第二侧壁角的沟槽的第二部分。 第二侧壁角度大于第一侧壁角度。 主极设置在沟槽中并且具有多个侧壁。 侧壁在沟槽的第二部分具有第二侧壁角,并且至少一个主极侧壁角对应于沟槽的第一部分中的第一侧壁角。