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    Method and structure to process thick and thin fins and variable fin to fin spacing
    4.
    发明授权
    Method and structure to process thick and thin fins and variable fin to fin spacing 有权
    处理厚薄翅片和可变翅片翅片间距的方法和结构

    公开(公告)号：US07301210B2

    公开(公告)日：2007-11-27

    申请号：US11306827

    申请日：2006-01-12

    申请人： Wagdi W. Abadeer ,  Jeffrey S. Brown ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  William R. Tonti

    发明人： Wagdi W. Abadeer ,  Jeffrey S. Brown ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  William R. Tonti

    IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： H01L29/785 ,  H01L21/845 ,  H01L27/1211

    摘要： Disclosed is an integrated circuit with multiple semiconductor fins having different widths and variable spacing on the same substrate. The method of forming the circuit incorporates a sidewall image transfer process using different types of mandrels. Fin thickness and fin-to-fin spacing are controlled by an oxidation process used to form oxide sidewalls on the mandrels, and more particularly, by the processing time and the use of intrinsic, oxidation-enhancing and/or oxidation-inhibiting mandrels. Fin thickness is also controlled by using sidewalls spacers combined with or instead of the oxide sidewalls. Specifically, images of the oxide sidewalls alone, images of sidewall spacers alone, and/or combined images of sidewall spacers and oxide sidewalls are transferred into a semiconductor layer to form the fins. The fins with different thicknesses and variable spacing can be used to form a single multiple-fin FET or, alternatively, various single-fin and/or multiple-fin FETs.

    摘要翻译： 公开了一种集成电路，其具有在相同基板上具有不同宽度和可变间隔的多个半导体散热片。 形成电路的方法包括使用不同类型的心轴的侧壁图像转印过程。 翅片厚度和翅片翅片间距由用于在心轴上形成氧化物侧壁的氧化工艺控制，更具体地，通过处理时间和使用固有的，氧化增强的和/或氧化抑制的心轴来控制。 翅片厚度也通过使用与氧化物侧壁结合或代替氧化物侧壁的侧壁间隔来控制。 具体地，单独的氧化物侧壁的图像，侧壁间隔物的图像和/或侧壁间隔物和氧化物侧壁的组合图像被转移到半导体层中以形成散热片。 可以使用具有不同厚度和可变间隔的散热片来形成单个多鳍FET，或者替代地，各种单鳍和/或多鳍FET。

    Methods for forming back-end-of-line resistive semiconductor structures
    5.
    发明授权
    Methods for forming back-end-of-line resistive semiconductor structures 有权
    形成后端电阻半导体结构的方法

    公开(公告)号：US07977201B2

    公开(公告)日：2011-07-12

    申请号：US12191633

    申请日：2008-08-14

    申请人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  Robert Robison ,  Yun Shi ,  William R. Tonti

    发明人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  Robert Robison ,  Yun Shi ,  William R. Tonti

    IPC分类号： H01L21/20

    CPC分类号： H01L23/5228 ,  H01L21/76816 ,  H01L23/5226 ,  H01L28/20 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In one embodiment, a second metal line embedded in a second dielectric layer overlies a first metal line embedded in a first dielectric layer. A portion of the second dielectric layer overlying the first metal line is recessed employing a photoresist and the second metal line as an etch mask. A doped semiconductor spacer is formed within the recess to provide a resistive link between the first metal line and the second metal line. In another embodiment, a first metal line and a second metal line are embedded in a dielectric layer. An area of the dielectric layer laterally abutting the first and second metal lines is recessed employing a photoresist and the first and second metal lines as an etch mask. A doped semiconductor spacer is formed on sidewalls of the first and second metal lines, providing a resistive link between the first and second metal lines.

    摘要翻译： 在一个实施例中，嵌入在第二介电层中的第二金属线覆盖在嵌入第一介电层中的第一金属线上。 覆盖第一金属线的第二电介质层的一部分是使用光致抗蚀剂凹陷的，而第二金属线作为蚀刻掩模。 在凹槽内形成掺杂半导体衬垫，以在第一金属线和第二金属线之间提供电阻连接。 在另一个实施例中，第一金属线和第二金属线嵌入在电介质层中。 使用光致抗蚀剂和第一和第二金属线作为蚀刻掩模来凹入与第一和第二金属线横向邻接的电介质层的区域。 掺杂半导体衬垫形成在第一和第二金属线的侧壁上，提供第一和第二金属线之间的电阻连接。

    Device structures for a memory cell of a non-volatile random access memory and design structures for a non-volatile random access memory
    6.
    发明授权
    Device structures for a memory cell of a non-volatile random access memory and design structures for a non-volatile random access memory 失效
    用于非易失性随机存取存储器的存储器单元的装置结构和用于非易失性随机存取存储器的设计结构

    公开(公告)号：US07804124B2

    公开(公告)日：2010-09-28

    申请号：US12118241

    申请日：2008-05-09

    申请人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  Yun Shi ,  William R. Tonti

    发明人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, Jr. ,  Jed H. Rankin ,  Yun Shi ,  William R. Tonti

    IPC分类号： H01L29/788

    CPC分类号： H01L29/7881 ,  H01L21/28273 ,  H01L29/42324

    摘要： Device and design structures for memory cells in a non-volatile random access memory (NVRAM). The device structure includes a semiconductor body in direct contact with the insulating layer, a control gate electrode, and a floating gate electrode in direct contact with the insulating layer. The semiconductor body includes a source, a drain, and a channel between the source and the drain. The floating gate electrode is juxtaposed with the channel of the semiconductor body and is disposed between the control gate electrode and the insulating layer. A first dielectric layer is disposed between the channel of the semiconductor body and the floating gate electrode. A second dielectric layer is disposed between the control gate electrode and the floating gate electrode.

    摘要翻译： 非易失性随机存取存储器（NVRAM）中存储单元的器件和设计结构。 器件结构包括与绝缘层直接接触的半导体本体，控制栅电极和与绝缘层直接接触的浮栅电极。 半导体本体包括源极，漏极以及源极和漏极之间的沟道。 浮置栅电极与半导体本体的沟道并置并且设置在控制栅电极和绝缘层之间。 第一电介质层设置在半导体本体的沟道和浮栅之间。 第二介电层设置在控制栅电极和浮栅电极之间。

    Methods For Forming Back-End-Of-Line Resistive Semiconductor Structures
    8.
    发明申请
    Methods For Forming Back-End-Of-Line Resistive Semiconductor Structures 有权
    形成后端电阻半导体结构的方法

    公开(公告)号：US20100041202A1

    公开(公告)日：2010-02-18

    申请号：US12191633

    申请日：2008-08-14

    申请人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, JR. ,  Jed H. Rankin ,  Robert Robison ,  Yun Shi ,  William R. Tonti

    发明人： Wagdi W. Abadeer ,  Kiran V. Chatty ,  Robert J. Gauthier, JR. ,  Jed H. Rankin ,  Robert Robison ,  Yun Shi ,  William R. Tonti

    IPC分类号： H01L21/02

    CPC分类号： H01L23/5228 ,  H01L21/76816 ,  H01L23/5226 ,  H01L28/20 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In one embodiment, a second metal line embedded in a second dielectric layer overlies a first metal line embedded in a first dielectric layer. A portion of the second dielectric layer overlying the first metal line is recessed employing a photoresist and the second metal line as an etch mask. A doped semiconductor spacer is formed within the recess to provide a resistive link between the first metal line and the second metal line. In another embodiment, a first metal line and a second metal line are embedded in a dielectric layer. An area of the dielectric layer laterally abutting the first and second metal lines is recessed employing a photoresist and the first and second metal lines as an etch mask. A doped semiconductor spacer is formed on sidewalls of the first and second metal lines, providing a resistive link between the first and second metal lines.

    摘要翻译： 在一个实施例中，嵌入在第二介电层中的第二金属线覆盖在嵌入第一介电层中的第一金属线上。 覆盖第一金属线的第二电介质层的一部分使用光致抗蚀剂凹陷，第二金属线作为蚀刻掩模。 在凹槽内形成掺杂半导体衬垫，以在第一金属线和第二金属线之间提供电阻连接。 在另一个实施例中，第一金属线和第二金属线嵌入在电介质层中。 使用光致抗蚀剂和第一和第二金属线作为蚀刻掩模来凹入与第一和第二金属线横向邻接的电介质层的区域。 掺杂半导体衬垫形成在第一和第二金属线的侧壁上，提供第一和第二金属线之间的电阻连接。