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    Test-glass changer
    1.
    发明授权
    Test-glass changer 失效
    测试玻璃更换器

    公开(公告)号：US4828391A

    公开(公告)日：1989-05-09

    申请号：US881645

    申请日：1986-07-03

    申请人： Walter Zultzke ,  Walter Lehnert

    发明人： Walter Zultzke ,  Walter Lehnert

    IPC分类号： C23C14/54 ,  G01B11/06 ,  G01N21/00 ,  G01N21/25 ,  G01N21/84

    CPC分类号： C23C14/547 ,  G01B11/0616 ,  G01N21/253 ,  G01N21/8422

    摘要： Test-glass changer for measuring layer properties optically in vacuum coating installations. A holding device (10) that accommodates several test glasses (12) is rotatably supported on a substrate holder (4), which serves to transport substrates (5) through a stream (22) of coating material. A control mechanism (16) serves to introduce in each case one test glass (12) into a path of rays (A-A) of a measuring device (7,8) and into the stream (22) of coating material. The control mechanism (16) is an incremental motor, by means of which in each case one test glass (12) can be changed over into a position, stationary relative to the substrate holder (4), in which position it can be passed alternately with the substrates (5) through the path of rays (A-A) of the measuring device (8,8) and through the stream (22) of coating material.

    摘要翻译： 用于在真空镀膜设备中光学测量层性能的玻璃化转换器。 容纳多个测试眼镜（12）的保持装置（10）被可旋转地支撑在用于通过涂料的流（22）输送基板（5）的基板保持器（4）上。 控制机构（16）用于在每种情况下将一个测试玻璃（12）引入到测量装置（7,8）的射线路径（A-A）中并进入涂层材料流（22）中。 控制机构（16）是增量电动机，在每种情况下，一个测试玻璃（12）可以被转换到相对于衬底保持器（4）固定的位置，在该位置中它可以交替地通过 基板（5）穿过测量装置（8,8）的射线（AA）和涂层材料的流（22）。

    Method for producing a multilayer coating and device for carrying out said method
    3.
    发明申请
    Method for producing a multilayer coating and device for carrying out said method 有权
    制造多层涂层的方法和用于实施所述方法的装置

    公开(公告)号：US20060151312A1

    公开(公告)日：2006-07-13

    申请号：US10537224

    申请日：2003-12-03

    申请人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

    发明人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

    IPC分类号： C23C14/00

    CPC分类号： H01J37/3473 ,  C23C14/0078 ,  C23C14/0094 ,  C23C14/024 ,  C23C14/08 ,  C23C14/547 ,  H01J37/34 ,  H01J37/3405 ,  H01J37/3476 ,  H01J2237/3321

    摘要： A method for producing one or more coating on a displaccable substrate in a vacuum chamber with the aid of a residual gas, by means of a sputtering device said coating being formed from at least two constituents, whereby a sputtering material of the sputtering device constitutes at least one first constituent and a reactive component of the residual gas constitutes a second constituent. The method comprises the following steps: reactive deposition of a coating on the substrate by the addition of a reactive component, with a predetermined stoichiometric deficit of the reactive component in a zone of the sputtering device; displacement of the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device; modification of the structure and/or stoichiometry of the coating by the action of the plasma of the plasma source, preferably by the addition of a predetermined quantity of the reactive component, to reduce the optical loss of the coating. The aim of the invention is to reduce the optical loss of the multilayer coating to below a predetermined value in a zone of the second coating adjoining the first coating. To achieve this, an interface is created with a thickness d1 and a value for the deficit of the reactive component DEF that is less than a value DEF1.

    摘要翻译： 一种利用溅射装置借助于残留气体在真空室中在可置换基板上产生一个或多个涂层的方法，所述涂层由至少两种成分形成，由此溅射装置的溅射材料构成 剩余气体的至少一个第一组分和反应性组分构成第二组分。 该方法包括以下步骤：通过添加反应性组分将涂层反应沉积在衬底上，在溅射装置的区域中具有预定的化学计量的反应性组分的缺陷; 将基板与沉积的涂层位移到距离溅射装置预定距离处的真空室中的等离子体源附近; 通过等离子体源的等离子体的作用改变涂层的结构和/或化学计量，优选地通过添加预定量的反应成分，以减少涂层的光学损失。 本发明的目的是在与第一涂层相邻的第二涂层的区域中将多层涂层的光学损耗降低到预定值以下。 为了实现这一点，创建具有厚度d 1> 1的接口和小于值DEF <1的反应分量DEF的缺陷值。