公开(公告)号：US20060151312A1

公开(公告)日：2006-07-13

申请号：US10537224

申请日：2003-12-03

申请人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

发明人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

IPC分类号： C23C14/00

CPC分类号： H01J37/3473 ,  C23C14/0078 ,  C23C14/0094 ,  C23C14/024 ,  C23C14/08 ,  C23C14/547 ,  H01J37/34 ,  H01J37/3405 ,  H01J37/3476 ,  H01J2237/3321

摘要： A method for producing one or more coating on a displaccable substrate in a vacuum chamber with the aid of a residual gas, by means of a sputtering device said coating being formed from at least two constituents, whereby a sputtering material of the sputtering device constitutes at least one first constituent and a reactive component of the residual gas constitutes a second constituent. The method comprises the following steps: reactive deposition of a coating on the substrate by the addition of a reactive component, with a predetermined stoichiometric deficit of the reactive component in a zone of the sputtering device; displacement of the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device; modification of the structure and/or stoichiometry of the coating by the action of the plasma of the plasma source, preferably by the addition of a predetermined quantity of the reactive component, to reduce the optical loss of the coating. The aim of the invention is to reduce the optical loss of the multilayer coating to below a predetermined value in a zone of the second coating adjoining the first coating. To achieve this, an interface is created with a thickness d1 and a value for the deficit of the reactive component DEF that is less than a value DEF1.

摘要翻译： 一种利用溅射装置借助于残留气体在真空室中在可置换基板上产生一个或多个涂层的方法，所述涂层由至少两种成分形成，由此溅射装置的溅射材料构成 剩余气体的至少一个第一组分和反应性组分构成第二组分。 该方法包括以下步骤：通过添加反应性组分将涂层反应沉积在衬底上，在溅射装置的区域中具有预定的化学计量的反应性组分的缺陷; 将基板与沉积的涂层位移到距离溅射装置预定距离处的真空室中的等离子体源附近; 通过等离子体源的等离子体的作用改变涂层的结构和/或化学计量，优选地通过添加预定量的反应成分，以减少涂层的光学损失。 本发明的目的是在与第一涂层相邻的第二涂层的区域中将多层涂层的光学损耗降低到预定值以下。 为了实现这一点，创建具有厚度d 1> 1的接口和小于值DEF <1的反应分量DEF的缺陷值。

公开(公告)号：US08956511B2

公开(公告)日：2015-02-17

申请号：US10537224

申请日：2003-12-03

申请人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

发明人： Michael Scherer ,  Jurgen Pistner ,  Walter Lehnert ,  Harro Hagedorn ,  Gerd Deppisch ,  Mario Roder

IPC分类号： C23C14/00 ,  C23C14/32 ,  C23C14/02 ,  C23C14/08 ,  C23C14/54 ,  H01J37/34

CPC分类号： H01J37/3473 ,  C23C14/0078 ,  C23C14/0094 ,  C23C14/024 ,  C23C14/08 ,  C23C14/547 ,  H01J37/34 ,  H01J37/3405 ,  H01J37/3476 ,  H01J2237/3321

摘要： A method for reducing the optical loss of the multilayer coating below a predetermined value in a zone by producing coating on a displaceable substrate in a vacuum chamber with the aid of a residual gas using a sputtering device. Reactive depositing a coating on the substrate by adding a reactive component with a predetermined stoichiometric deficit in a zone of the sputtering device. Displacing the substrate with the deposited coating into the vicinity of a plasma source, which is located in the vacuum chamber at a predetermined distance from the sputtering device. The plasma action of the plasma source modifying the structure and/or stoichiometry of the coating, preferably by adding a predetermined quantity of the reactive component to reduce the optical loss of the coating.

摘要翻译： 一种通过使用溅射装置借助于残余气体在真空室中在可位移的基板上产生涂层来将多层涂层的光学损耗降低到预定值的方法。 通过在溅射装置的区域中添加具有预定化学计量不足的反应性组分将反应性沉积在衬底上。 将具有沉积的涂层的基板置于等离子体源附近，该等离子体源位于距离溅射装置预定距离的真空室中。 等离子体源的等离子体作用改变了涂层的结构和/或化学计量，优选地通过加入预定量的反应组分来减少涂层的光学损耗。

公开(公告)号：US08698400B2

公开(公告)日：2014-04-15

申请号：US12765252

申请日：2010-04-22

申请人： Michael Scherer ,  Jurgen Pistner

发明人： Michael Scherer ,  Jurgen Pistner

IPC分类号： H05B31/26

CPC分类号： H01J27/16 ,  H01J37/32082

摘要： A plasma source generates a plasma beam that is extracted from a plasma generated by electric and magnetic fields. An RF electrode device includes an excitation electrode having an excitation area, and a plasma space is arranged between extraction electrode and excitation area. The plasma, relative to the extraction electrode is at a higher potential which accelerates positive plasma ions, and the plasma and the extracted plasma beam are influenced by a magnetic field. At least one magnet north pole and one magnetic south pole generate the magnetic field. Each are arranged such that a curved magnetic field projecting into the interior of the plasma space is formed. At least one of the north or south poles is embodied in elongate fashion to form a tunnel-like region in the plasma, in which charged particles are held and along which the latter can propagate.

摘要翻译： 等离子体源产生从由电场和磁场产生的等离子体中提取的等离子体束。 RF电极器件包括具有激发区域的激励电极，并且在引出电极和激发区域之间设置等离子体空间。 相对于提取电极的等离子体处于更高的电位，其加速正离子离子，等离子体和提取的等离子体束受到磁场的影响。 至少有一个磁铁北极和一个磁性南极产生磁场。 每个布置成使得形成突出到等离子体空间内部的弯曲磁场。 北极或南极中的至少一个以细长的方式体现，以在等离子体中形成隧道状区域，其中带电粒子被保持并且后者可以沿着该区域传播。

公开(公告)号：US20110265583A1

公开(公告)日：2011-11-03

申请号：US13127520

申请日：2009-11-05

申请人： Michael Scherer

发明人： Michael Scherer

IPC分类号： G01N37/00

CPC分类号： C23C14/547 ,  C23C14/042 ,  C23C14/50 ,  C23C14/56 ,  C23C14/566 ,  G01B11/0616 ,  G01B11/0683

摘要： The invention relates to a test glass changing system (10) for selectively coating and optically measuring a test glass (24, 24″) in a coating chamber (1) of a vacuum coating installation (3). In the coating chamber, a movable turntable (2) is used to guide substrates (7) on a path through a stream of a coating material. The test glass changing system (10) comprises a test glass holder (8, 8″) with a test glass plate (26) for holding the test glass (24, 24″), and a cover (28, 28″) for selectively covering the test glass plate (26). The test glass changing system (10) also comprises a rotary apparatus (34) for rotating the test glass plate (26) about an axis (51) which is oriented approximately parallel to the axis of rotation (5) of the turntable (2). The test glass holder (8, 8″) can be positioned on the turntable (2) and removed from the coating chamber (1) in the form of a unit.

摘要翻译： 本发明涉及一种用于选择性地涂覆和光学测量真空涂覆装置（3）的涂覆室（1）中的测试玻璃（24,24“）的测试玻璃更换系统（10）。 在涂覆室中，可动转台（2）用于引导基材（7）穿过涂层材料的流路。 测试玻璃更换系统（10）包括具有用于保持测试玻璃（24,24“）的测试玻璃板（26）的测试玻璃保持器（8,8”）和用于选择性地覆盖的盖（28,28“） 覆盖测试玻璃板（26）。 测试玻璃更换系统（10）还包括旋转设备（34），用于围绕围绕转盘（2）的旋转轴线（5）定向的轴线（51）旋转测试玻璃板（26） 。 测试玻璃支架（8,8“）可以定位在转盘（2）上，并以单元的形式从涂覆室（1）移除。

公开(公告)号：US20050150534A1

公开(公告)日：2005-07-14

申请号：US11033063

申请日：2005-01-11

申请人： Michael Scherer

发明人： Michael Scherer

IPC分类号： E04H15/32 ,  E04H15/42

CPC分类号： E04H15/42 ,  E04H2015/326

摘要： A portable structure has a first support pole forming a first arc, when ends of the first support pole rest on ground, and a second support pole forming a second arc, crossing the first arc, when ends of the second support pole rest on the ground. A curved linking pole crosses, off of the ground, at least one of the first and second arcs.

摘要翻译： 当第二支撑杆的端部搁置在地面上时，便携式结构具有形成第一弧的第一支撑杆，当第一支撑杆的端部搁置在地面上时，形成与第一弧形成第二弧的第二支撑杆 。 弯曲的连接杆与地面相交，第一和第二弧中的至少一个弧。

公开(公告)号：US5698039A

公开(公告)日：1997-12-16

申请号：US587470

申请日：1996-01-17

申请人： Ulrich Patz ,  Michael Scherer ,  Willi Neff ,  Klaus Pochner

发明人： Ulrich Patz ,  Michael Scherer ,  Willi Neff ,  Klaus Pochner

IPC分类号： B01J19/12 ,  B08B6/00 ,  B08B7/00 ,  C23C14/02 ,  H01J37/32 ,  C23C14/00

CPC分类号： H01J37/32348 ,  B01J19/123 ,  B08B6/00 ,  B08B7/0057 ,  C23C14/022 ,  H01J37/32009 ,  H01J2237/335

摘要： A barrier discharge device (4a, 4b, 4c) installed in a vacuum chamber (1) consists essentially of at least two facing electrodes (20, 22); a dielectric (22) situated between the electrodes (20, 22) and in the immediate proximity of one of these electrodes (20); and a power source (26), which is connected electrically to the electrodes (20, 22). The plasma particles and UV radiation generated during the electrical discharge between the electrodes (20, 22) pass through the electrode (22), which is permeable to UV radiation and plasma particles, and thus emerge from the discharge space. On the surfaces (5a, 5b), the UV radiation induces a photochemical cleaning process, and the impinging plasma particles induce a plasma-chemical cleaning process. The cleaning process is essentially independent of pressure and can be used at pressures of up to 10 bars, which means that the cleaning process can be operated in particular during the time in which the vacuum chamber (1) is being pumped out.

摘要翻译： 安装在真空室（1）中的阻挡物排出装置（4a，4b，4c）基本上由至少两个面向电极（20,22）组成; 位于电极（20,22）之间并且紧邻这些电极（20）之一的电介质（22）; 和与电极（20,22）电连接的电源（26）。 在电极（20,22）之间的放电期间产生的等离子体颗粒和UV辐射穿过可透过UV辐射和等离子体颗粒的电极（22），从而从放电空间出射。 在表面（5a，5b）上，UV辐射引起光化学清洗过程，并且冲击等离子体颗粒引起等离子体化学清洗过程。 清洁过程基本上与压力无关，并且可以在高达10巴的压力下使用，这意味着清洁过程可以在真空室（1）被抽出的时间内特别地操作。

公开(公告)号：US4619755A

公开(公告)日：1986-10-28

申请号：US759026

申请日：1985-07-25

申请人： Gerhard Hessberger ,  Michael Scherer

发明人： Gerhard Hessberger ,  Michael Scherer

IPC分类号： C23C14/34 ,  H01J37/34 ,  C23C15/00

CPC分类号： H01J37/34

摘要： Sputtering system for cathode sputtering apparatus, having a cathode base body with a target of the material to be sputtered. In the marginal part of the target an anode is disposed which is provided with at least one groove. For the solution of the problem of obtaining stable operating conditions in the lengthy coating of substrates with insulating materials and of drawing a high portion of the cathode current to the anode for a long period of time, the at least one groove opens, in accordance with the invention, on a side of the anode that is not in line of sight with the target.

摘要翻译： 用于阴极溅射装置的溅射系统，具有阴极基体，其具有要溅射的材料的靶。 在目标的边缘部分中，设置有至少一个凹槽的阳极。 为了解决在具有绝缘材料的衬底的长时间涂覆中获得稳定的工作条件并且将阴极电流的大部分长时间吸入阳极的问题，至少一个凹槽根据 本发明在阳极的不与目标的视线相对的一侧。

公开(公告)号：US4548691A

公开(公告)日：1985-10-22

申请号：US584639

申请日：1984-02-29

申请人： Anton Dietrich ,  Klaus Hartig ,  Werner Lenz ,  Michael Scherer

发明人： Anton Dietrich ,  Klaus Hartig ,  Werner Lenz ,  Michael Scherer

IPC分类号： C03C17/36 ,  C03C27/12 ,  C23C14/00 ,  G02B1/11 ,  G02B5/28 ,  C23C15/00

CPC分类号： C03C17/3618 ,  C03C17/36 ,  C03C17/3644 ,  C03C17/3652 ,  C03C17/366 ,  C03C17/3681 ,  C23C14/0036 ,  G02B5/282

摘要： A method of producing glass sheets having good transmission behavior in the visible spectrum range and having good reflection behavior as regards heat radiation. A transparent substrate S is coated by cathodic atomization with, successively, a first oxide layer 1 comprising indium oxide, tin oxide or mixtures thereof, a layer 2 consisting of silver in a thickness of 5 to 50 n, a metallic layer 3 selected from aluminium, titanium, tantalum, chromium, manganese and zirconium in a thickness ranging from 1 to 5 nm and applied directly to the silver layer 2 for the purpose of maintaining the condition thereof, and a final protective oxide layer 4 of indium oxide, tin oxide or mixtures thereof.

摘要翻译： 一种制造在可见光谱范围内具有良好透射性能并具有良好的热辐射反射性能的玻璃板的方法。 通过阴极雾化，依次包含氧化铟，氧化锡或其混合物的第一氧化物层1，厚度为5-50n的银组成的层2，选自铝的金属层3， ，钛，钽，铬，锰和锆，厚度范围为1至5nm，并直接施加于银层2以保持其状态，以及最终的氧化铟保护氧化物层4，氧化锡或 其混合物。

公开(公告)号：US4534841A

公开(公告)日：1985-08-13

申请号：US592907

申请日：1984-03-23

申请人： Klaus Hartig ,  Anton Dietrich ,  Michael Scherer

发明人： Klaus Hartig ,  Anton Dietrich ,  Michael Scherer

IPC分类号： E06B9/24 ,  C03C15/00 ,  C03C17/34 ,  C23C14/00 ,  C23C14/06 ,  C23C14/34 ,  G02B5/26 ,  G02B5/28 ,  C23C15/00

CPC分类号： C03C17/3435 ,  C23C14/0036 ,  Y10T428/31627

摘要： Solar-controlled glazing having a transmission of between 5 and 40% in the visible spectrum range and having heat-reflection properties is produced by applying an oxide layer having an optical thickness of between 20 and 280 nm directly to a transparent substrate by cathodic evaporation in an oxygen-containing atmosphere to form a first layer. A chromium nitride layer having a geometric thickness of between 10 and 40 nm is then applied in an atmosphere consisting of inert gas and nitrogen to provide a second layer. An optical third dielectric layer may be applied to the second layer. The oxide layer is selected from oxides of tin, titanium and aluminium.

摘要翻译： 通过将具有20至280nm光学厚度的氧化物层直接涂覆到透明基底上，通过阴极蒸发来生产在可见光谱范围内具有5至40％透射率并具有热反射特性的太阳能控制玻璃， 含氧气氛形成第一层。 然后在由惰性气体和氮气组成的气氛中施加几何厚度为10至40nm的氮化铬层，以提供第二层。 光学第三介质层可以施加到第二层。 氧化物层选自锡，钛和铝的氧化物。

公开(公告)号：US20080038969A1

公开(公告)日：2008-02-14

申请号：US11879389

申请日：2007-07-17

申请人： Philip DeRiemer ,  Michael Scherer ,  Steven Swartzendruber

发明人： Philip DeRiemer ,  Michael Scherer ,  Steven Swartzendruber

IPC分类号： B63C9/08

CPC分类号： B63C9/11

摘要： Various exemplary embodiments of the present invention would provide a back floatation panel comprising an inner panel and an outer panel. The inner panel and the outer panel would be joined to each other in such a way as to allow “bellowed” expansion of a space, or a “sleeve,” in between the inner and outer panels. The bellowed expansion space between the inner and outer panels would be adapted for accommodating, for example, a hydration bladder and/or an insert of high density polyethylene (“HDPE”) plastic for protecting the wearer's back. The inner and outer panels would be joined in such a way as to provide a pathway through which a hydration tube can be inserted. Various exemplary embodiments of the present invention would provide differentially cut fabric panels for covering buoyancy panels. An outer fabric panel, comprising an outer panel surface area, would be used to cover an outer surface of a buoyancy panel. An inner fabric panel, comprising an inner panel surface area, would be used to cover an inner surface of the buoyancy panel. In various exemplary embodiments, the outer panel surface area would be greater than inner panel surface area. That is, the outer panel would comprise a greater number of square inches of fabric than will the inner panel. Various embodiments of the present invention would also provide slit buoyancy panels to allow the buoyancy panels to contour over three-dimensional shapes. Various exemplary embodiments of the present invention would provide a personal floatation device with a belt pivotally connected to a back panel of the personal floatation device. Various embodiments of the present invention would provide front floatation panels for a personal floatation device comprising an upper buoyancy panel, a lower buoyancy panel, and a baffle system separating the upper buoyancy panel from the lower buoyancy panel.

摘要翻译： 本发明的各种示例性实施例将提供一种包括内板和外板的回浮式面板。 内板和外板将以这样的方式相互连接，以便允许在内板和外板之间的空间或“套筒”的“膨胀”膨胀。 内壁和外板之间的膨胀膨胀空间将适于容纳例如用于保护穿着者背部的高密度聚乙烯（“HDPE”）塑料的水合气囊和/或插入物。 内部和外部面板将以这样的方式接合，以提供可以插入水合管的通路。 本发明的各种示例性实施例将提供用于覆盖浮力板的差分切割的织物面板。 包括外板表面区域的外部织物面板将用于覆盖浮力面板的外表面。 包括内板表面区域的内部织物面板将用于覆盖浮力面板的内表面。 在各种示例性实施例中，外板表面积将大于内板表面积。 也就是说，外面板将包括比内面板更大数量的平方英寸的织物。 本发明的各种实施例还将提供狭缝浮力板，以允许浮力板在三维形状上轮廓。 本发明的各种示例性实施例将提供具有枢转地连接到个人漂浮装置的后面板的皮带的个人漂浮装置。 本发明的各种实施例将提供用于个人漂浮装置的前浮动面板，其包括上浮力板，下浮力板和将上浮力板与下浮力板分离的挡板系统。