Roller assembly having pre-aligned for on-line thickness measurements
    1.
    发明授权
    Roller assembly having pre-aligned for on-line thickness measurements 失效
    辊组件具有预对准的在线厚度测量

    公开(公告)号:US5850287A

    公开(公告)日:1998-12-15

    申请号:US893432

    申请日:1997-07-11

    IPC分类号: G01B11/06 G01N21/45 G01B9/02

    CPC分类号: G01B11/0691

    摘要: An apparatus for measuring the thickness of a film on a production line or the like. The apparatus includes a moveable member in contact with the film. The moveable member rotates about a fixed member and includes a transparent region. The apparatus also includes an optical probe attached to the fixed member. The optical probe has an optical fiber for coupling a light signal to the film through the transparent region of the moveable member and for returning light reflected from the film to a receiver for determining the thickness of the film. The optical probe may also include a lens assembly for imaging the light signal onto the film and imaging the reflected light signals back into the optical probe. The optical probe may also include a partially reflecting reference reflector for simplifying the analysis of multi-layer films.

    摘要翻译: 一种用于测量生产线上的薄膜厚度的装置。 该装置包括与薄膜接触的可移动部件。 可移动构件围绕固定构件旋转并且包括透明区域。 该装置还包括附接到固定构件的光学探头。 光学探针具有用于通过可移动部件的透明区域将光信号耦合到膜的光纤,并且用于将从膜反射的光返回到接收器以确定膜的厚度。 光学探针还可以包括用于将光信号成像到胶片上并将反射光信号成像回到光学探针中的透镜组件。 光学探针还可以包括用于简化多层膜的分析的部分反射的参考反射器。

    Method and apparatus for on-line determination of the thickness of a
multilayer film using a partially reflecting roller and low coherence
reflectometry
    2.
    发明授权
    Method and apparatus for on-line determination of the thickness of a multilayer film using a partially reflecting roller and low coherence reflectometry 失效
    使用部分反射辊在线测定多层膜厚度的方法和装置以及低相干反射测定法

    公开(公告)号:US5731876A

    公开(公告)日:1998-03-24

    申请号:US718077

    申请日:1996-09-17

    IPC分类号: G01B11/06 G01B9/02

    CPC分类号: G01B11/0675

    摘要: An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned against a roller having a partially reflecting surface that is positioned at a fixed distance from the film. The probe light signal is applied to the film and is then reflected back through the film by the partially reflecting surface. The light leaving the film is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film. The receiver output may also be used to determine the thickness of the various layers in a multi-layer film.

    摘要翻译: 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜被定位在具有位于离胶片固定距离的部分反射表面的辊子上。 将探测光信号施加到膜上,然后通过部分反射表面反射回膜。 收集离开胶片的光以形成接收器的输入,该接收器确定从胶片的顶表面和底表面反射的光之间的时间延迟。 接收器输出也可用于确定多层膜中各层的厚度。

    Method and apparatus for determining the thickness and index of
refraction of a film using low coherence reflectometry and a reference
surfaces
    3.
    发明授权
    Method and apparatus for determining the thickness and index of refraction of a film using low coherence reflectometry and a reference surfaces 失效
    使用低相干反射计和参考表面确定膜的厚度和折射率的方法和装置

    公开(公告)号:US5633712A

    公开(公告)日:1997-05-27

    申请号:US520198

    申请日:1995-08-28

    IPC分类号: G01B11/06 G01N21/41 G01B9/02

    CPC分类号: G01N21/41 G01B11/0675

    摘要: An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned between first and second reference reflectors, the first reference reflector being partially reflecting. The probe light signal is applied to the film after passing through the first reference reflector. Part of the portion of the probe light signal leaving the film is reflected back toward the first reference reflector by the second reference reflector. The light exiting through the first reference reflector is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film as well as the change in optical path length between said first and second reflectors resulting from the introduction of said film between said first and second reflectors. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal. Embodiments in which only one of the reference reflectors is utilized provide a means for simplifying the output spectrum from the receiver when multi-layer films are utilized.

    摘要翻译: 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜位于第一和第二参考反射器之间,第一参考反射器被部分地反射。 探针光信号通过第一参考反射器后施加到膜。 离开膜的探测光信号的一部分的一部分被第二参考反射器反射回第一参考反射器。 收集通过第一参考反射器射出的光以形成接收器的输入,该接收器确定从膜的顶表面和底表面反射的光之间的时间延迟以及所述第一和第二反射器之间的光程长度的变化,从而得到 从所述第一和第二反射器之间的所述膜的引入。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从组合的光信号测量的频域频谱的傅里叶变换的电路。 其中仅使用一个参考反射器的实施例提供了当使用多层膜时简化来自接收器的输出光谱的装置。

    Method and apparatus for measuring film thickness utilizing the slope of
the phase of the Fourier transform of an autocorrelator signal
    4.
    发明授权
    Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal 失效
    利用自相关器信号的傅立叶变换的相位斜率来测量膜厚度的方法和装置

    公开(公告)号:US5610716A

    公开(公告)日:1997-03-11

    申请号:US520029

    申请日:1995-08-28

    IPC分类号: G01B11/06 G01N21/45 G01B9/02

    CPC分类号: G01B11/06

    摘要: An apparatus and method for measuring the thickness of a film. The film is illuminated with a low coherence light signal that is preferably generated from a source including two or more LEDs. The light reflected from the surfaces of the film is collected and coupled to an interferometer. The slope of the Fourier transform of the output of the signal from the interferometer is measured to provide a determination of the thickness of the film. In the preferred embodiment of the present invention, the interferometer output is sampled at fewer than two points per cycle of the low coherence light signal.

    摘要翻译: 一种用于测量薄膜厚度的装置和方法。 该薄膜用低相干光信号照亮,该信号优选地由包括两个或更多个LED的源产生。 从膜的表面反射的光被收集并耦合到干涉仪。 测量来自干涉仪的信号的输出的傅里叶变换的斜率,以确定膜的厚度。 在本发明的优选实施例中,干涉仪输出在低相干光信号的每个周期以少于两个点采样。

    Autoalignment and autofocus mechanism for coupling light between an optical fiber and a physical specimen

    公开(公告)号:US06316764B2

    公开(公告)日:2001-11-13

    申请号:US09783571

    申请日:2001-02-12

    IPC分类号: G01J1104

    摘要: An apparatus for applying an optical signal to a surface and collecting the light leaving the surface in response to the application of the optical signal. The optical signal and the collected light traverse an optical fiber having an end proximate to the surface which delivers light to the surface with the aid of a lens that couples the optical signal to the surface, collects the light emitted by the surface, and couples collected light into the optical fiber. A detector measures the intensity of light delivered into the optical fiber and generates a detection signal indicative of the measured intensity as a function of time. A set of actuators dither the position of the lens relative to the proximate end of the fiber. Each actuator operates at a different dither frequency and moves the lens relative to fiber along a different axis. The average position of the lens relative to the proximate end of the fiber along each axis is adjusted so as to maximize the average power detected at the corresponding dither frequency.

    Autoalignment and autofocus mechanism for coupling light between an optical fiber and a physical specimen
    6.
    发明授权
    Autoalignment and autofocus mechanism for coupling light between an optical fiber and a physical specimen 失效
    用于在光纤和物理样本之间耦合光的自动对准和自动对焦机制

    公开(公告)号:US06215118B1

    公开(公告)日:2001-04-10

    申请号:US08556890

    申请日:1995-11-02

    IPC分类号: G01J104

    摘要: An apparatus for applying an optical signal to a surface and collecting the light leaving the surface in response to the application of the optical signal. The optical signal and the collected light traverse an optical fiber having an end proximate to the surface which delivers light to the surface with the aid of a lens that couples the optical signal to the surface, collects the light emitted by the surface, and couples collected light into the optical fiber. A detector measures the intensity of light delivered into the optical fiber and generates a detection signal indicative of the measured intensity as a function of time. A set of actuators dither the position of the lens relative to the proximate end of the fiber. Each actuator operates at a different dither frequency and moves the lens relative to fiber along a different axis. The average position of the lens relative to the proximate end of the fiber along each axis is adjusted so as to maximize the average power detected at the corresponding dither frequency.

    摘要翻译: 一种用于将光学信号施加到表面并且响应于光信号的应用而收集离开表面的光的装置。 光信号和收集的光穿过具有靠近表面的端部的光纤,该表面借助于将光信号耦合到表面的透镜而将光传送到表面,收集由表面发射的光并将所收集的光 光入光纤。 检测器测量输送到光纤中的光的强度,并产生指示作为时间的函数的测量强度的检测信号。 一组致动器使透镜的位置相对于光纤的近端部抖动。 每个致动器以不同的抖动频率进行操作,并使镜头沿着不同的轴线相对于光纤移动。 调整透镜相对于沿着每个轴的光纤的近端的平均位置,以使在相应抖动频率处检测到的平均功率最大化。

    Polarization independent optical coherence-domain reflectometry
    7.
    发明授权
    Polarization independent optical coherence-domain reflectometry 失效
    偏振独立光学相干域反射测量

    公开(公告)号:US5202745A

    公开(公告)日:1993-04-13

    申请号:US844905

    申请日:1992-03-02

    IPC分类号: G01B9/02 G01M11/00

    摘要: An optical coherence-domain reflectometry system provides an interferometer driven by a broadband incoherent light source with the device under test connected to one arm of the interferometer and a movable scanning mirror in the other arm providing a reference signal. The mirror moves at a controlled velocity to produce a Doppler shift in the reference signal frequency. The reference signal arm also includes a piezoelectric transducer which modulates the phase of the reference signal at a given frequency, causing a further shift in the reference signal frequency. The interference signal is detected and measured by a polarization diversity receiver. A linear polarizer in the reference signal arm is adjusted to produce equal reference signal powers in each arm of the polarization diversity receiver in the absence of a reflection signal from the test arm. The measured reflectometry signal is substantially independent of the state of polarization of the reflected signal from the device under test.

    摘要翻译: 光学相干域反射系统提供由宽带非相干光源驱动的干涉仪,被测器件连接到干涉仪的一个臂,另一个臂上的可移动扫描镜提供参考信号。 镜子以受控的速度移动,以产生参考信号频率的多普勒频移。 参考信号臂还包括压电换能器,其在给定频率下调制参考信号的相位,导致参考信号频率的进一步移位。 干扰信号由偏振分集接收器检测和测量。 在不存在来自测试臂的反射信号的情况下,参考信号臂中的线性偏振器被调整以在偏振分集接收器的每个臂中产生相等的参考信号功率。 所测量的反射信号基本上与被测器件的反射信号的偏振状态无关。

    Delay line interferometer having a stepped delay element
    9.
    发明申请
    Delay line interferometer having a stepped delay element 审中-公开
    延迟线干涉仪具有阶梯式延迟元件

    公开(公告)号:US20080225381A1

    公开(公告)日:2008-09-18

    申请号:US11799435

    申请日:2007-05-01

    IPC分类号: G02F2/00

    摘要: An optical receiver apparatus and methods for mitigating intersymbol interference (ISI) in a differentially-encoded modulation transmission system by controlling constructive and destructive transfer functions. The receiver includes a bandwidth control element for controlling transfer function bandwidth, a transfer phase controller for controlling transfer function phase and/or an imbalancer for imbalancing the transfer functions for compensating for intersymbol interference and optimizing the quality of the received optical signal.

    摘要翻译: 一种用于通过控制建构性和破坏性传递函数来减轻差分编码的调制传输系统中的符号间干扰(ISI)的光接收机装置和方法。 接收机包括用于控制传送功能带宽的带宽控制元件,用于控制传送功能相位的传输相位控制器和/或用于不平衡传输功能的不平衡器,用于补偿符号间干扰并优化接收到的光信号的质量。