公开(公告)号：US5850287A

公开(公告)日：1998-12-15

申请号：US893432

申请日：1997-07-11

申请人： Wayne V. Sorin ,  Shalini Venkatesh ,  Brian L. Heffner

发明人： Wayne V. Sorin ,  Shalini Venkatesh ,  Brian L. Heffner

IPC分类号： G01B11/06 ,  G01N21/45 ,  G01B9/02

CPC分类号： G01B11/0691

摘要： An apparatus for measuring the thickness of a film on a production line or the like. The apparatus includes a moveable member in contact with the film. The moveable member rotates about a fixed member and includes a transparent region. The apparatus also includes an optical probe attached to the fixed member. The optical probe has an optical fiber for coupling a light signal to the film through the transparent region of the moveable member and for returning light reflected from the film to a receiver for determining the thickness of the film. The optical probe may also include a lens assembly for imaging the light signal onto the film and imaging the reflected light signals back into the optical probe. The optical probe may also include a partially reflecting reference reflector for simplifying the analysis of multi-layer films.

摘要翻译： 一种用于测量生产线上的薄膜厚度的装置。 该装置包括与薄膜接触的可移动部件。 可移动构件围绕固定构件旋转并且包括透明区域。 该装置还包括附接到固定构件的光学探头。 光学探针具有用于通过可移动部件的透明区域将光信号耦合到膜的光纤，并且用于将从膜反射的光返回到接收器以确定膜的厚度。 光学探针还可以包括用于将光信号成像到胶片上并将反射光信号成像回到光学探针中的透镜组件。 光学探针还可以包括用于简化多层膜的分析的部分反射的参考反射器。

公开(公告)号：US06215118B1

公开(公告)日：2001-04-10

申请号：US08556890

申请日：1995-11-02

申请人： Brian L. Heffner ,  Wayne V. Sorin

发明人： Brian L. Heffner ,  Wayne V. Sorin

IPC分类号： G01J104

CPC分类号： G01N21/645 ,  G01N2021/6484 ,  G11B7/09 ,  G11B7/1384

摘要： An apparatus for applying an optical signal to a surface and collecting the light leaving the surface in response to the application of the optical signal. The optical signal and the collected light traverse an optical fiber having an end proximate to the surface which delivers light to the surface with the aid of a lens that couples the optical signal to the surface, collects the light emitted by the surface, and couples collected light into the optical fiber. A detector measures the intensity of light delivered into the optical fiber and generates a detection signal indicative of the measured intensity as a function of time. A set of actuators dither the position of the lens relative to the proximate end of the fiber. Each actuator operates at a different dither frequency and moves the lens relative to fiber along a different axis. The average position of the lens relative to the proximate end of the fiber along each axis is adjusted so as to maximize the average power detected at the corresponding dither frequency.

摘要翻译： 一种用于将光学信号施加到表面并且响应于光信号的应用而收集离开表面的光的装置。 光信号和收集的光穿过具有靠近表面的端部的光纤，该表面借助于将光信号耦合到表面的透镜而将光传送到表面，收集由表面发射的光并将所收集的光 光入光纤。 检测器测量输送到光纤中的光的强度，并产生指示作为时间的函数的测量强度的检测信号。 一组致动器使透镜的位置相对于光纤的近端部抖动。 每个致动器以不同的抖动频率进行操作，并使镜头沿着不同的轴线相对于光纤移动。 调整透镜相对于沿着每个轴的光纤的近端的平均位置，以使在相应抖动频率处检测到的平均功率最大化。

公开(公告)号：US06316764B2

公开(公告)日：2001-11-13

申请号：US09783571

申请日：2001-02-12

申请人： Brian L. Heffner ,  Wayne V. Sorin

发明人： Brian L. Heffner ,  Wayne V. Sorin

IPC分类号： G01J1104

CPC分类号： G01N21/645 ,  G01N2021/6484 ,  G11B7/09 ,  G11B7/1384

摘要： An apparatus for applying an optical signal to a surface and collecting the light leaving the surface in response to the application of the optical signal. The optical signal and the collected light traverse an optical fiber having an end proximate to the surface which delivers light to the surface with the aid of a lens that couples the optical signal to the surface, collects the light emitted by the surface, and couples collected light into the optical fiber. A detector measures the intensity of light delivered into the optical fiber and generates a detection signal indicative of the measured intensity as a function of time. A set of actuators dither the position of the lens relative to the proximate end of the fiber. Each actuator operates at a different dither frequency and moves the lens relative to fiber along a different axis. The average position of the lens relative to the proximate end of the fiber along each axis is adjusted so as to maximize the average power detected at the corresponding dither frequency.

公开(公告)号：US5731876A

公开(公告)日：1998-03-24

申请号：US718077

申请日：1996-09-17

申请人： Shalini Venkatesh ,  Brian L. Heffner ,  Wayne V. Sorin

发明人： Shalini Venkatesh ,  Brian L. Heffner ,  Wayne V. Sorin

IPC分类号： G01B11/06 ,  G01B9/02

CPC分类号： G01B11/0675

摘要： An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned against a roller having a partially reflecting surface that is positioned at a fixed distance from the film. The probe light signal is applied to the film and is then reflected back through the film by the partially reflecting surface. The light leaving the film is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film. The receiver output may also be used to determine the thickness of the various layers in a multi-layer film.

摘要翻译： 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜被定位在具有位于离胶片固定距离的部分反射表面的辊子上。 将探测光信号施加到膜上，然后通过部分反射表面反射回膜。 收集离开胶片的光以形成接收器的输入，该接收器确定从胶片的顶表面和底表面反射的光之间的时间延迟。 接收器输出也可用于确定多层膜中各层的厚度。

公开(公告)号：US5202745A

公开(公告)日：1993-04-13

申请号：US844905

申请日：1992-03-02

申请人： Wayne V. Sorin ,  Brian L. Heffner

发明人： Wayne V. Sorin ,  Brian L. Heffner

IPC分类号： G01B9/02 ,  G01M11/00

CPC分类号： G01M11/3172 ,  G01B9/02002 ,  G01B9/02072 ,  G01B9/0209 ,  G01M11/3181 ,  G01B2290/45 ,  G01B2290/70

摘要： An optical coherence-domain reflectometry system provides an interferometer driven by a broadband incoherent light source with the device under test connected to one arm of the interferometer and a movable scanning mirror in the other arm providing a reference signal. The mirror moves at a controlled velocity to produce a Doppler shift in the reference signal frequency. The reference signal arm also includes a piezoelectric transducer which modulates the phase of the reference signal at a given frequency, causing a further shift in the reference signal frequency. The interference signal is detected and measured by a polarization diversity receiver. A linear polarizer in the reference signal arm is adjusted to produce equal reference signal powers in each arm of the polarization diversity receiver in the absence of a reflection signal from the test arm. The measured reflectometry signal is substantially independent of the state of polarization of the reflected signal from the device under test.

摘要翻译： 光学相干域反射系统提供由宽带非相干光源驱动的干涉仪，被测器件连接到干涉仪的一个臂，另一个臂上的可移动扫描镜提供参考信号。 镜子以受控的速度移动，以产生参考信号频率的多普勒频移。 参考信号臂还包括压电换能器，其在给定频率下调制参考信号的相位，导致参考信号频率的进一步移位。 干扰信号由偏振分集接收器检测和测量。 在不存在来自测试臂的反射信号的情况下，参考信号臂中的线性偏振器被调整以在偏振分集接收器的每个臂中产生相等的参考信号功率。 所测量的反射信号基本上与被测器件的反射信号的偏振状态无关。

公开(公告)号：US5633712A

公开(公告)日：1997-05-27

申请号：US520198

申请日：1995-08-28

申请人： Shalini Venkatesh ,  Wayne V. Sorin ,  Brian L. Heffner

发明人： Shalini Venkatesh ,  Wayne V. Sorin ,  Brian L. Heffner

IPC分类号： G01B11/06 ,  G01N21/41 ,  G01B9/02

CPC分类号： G01N21/41 ,  G01B11/0675

摘要： An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned between first and second reference reflectors, the first reference reflector being partially reflecting. The probe light signal is applied to the film after passing through the first reference reflector. Part of the portion of the probe light signal leaving the film is reflected back toward the first reference reflector by the second reference reflector. The light exiting through the first reference reflector is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film as well as the change in optical path length between said first and second reflectors resulting from the introduction of said film between said first and second reflectors. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal. Embodiments in which only one of the reference reflectors is utilized provide a means for simplifying the output spectrum from the receiver when multi-layer films are utilized.

摘要翻译： 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括产生探测光信号的低相干光源。 薄膜位于第一和第二参考反射器之间，第一参考反射器被部分地反射。 探针光信号通过第一参考反射器后施加到膜。 离开膜的探测光信号的一部分的一部分被第二参考反射器反射回第一参考反射器。 收集通过第一参考反射器射出的光以形成接收器的输入，该接收器确定从膜的顶表面和底表面反射的光之间的时间延迟以及所述第一和第二反射器之间的光程长度的变化，从而得到 从所述第一和第二反射器之间的所述膜的引入。 在本发明的优选实施例中，接收机由光学自相关器或光谱分析仪构成，光谱分析仪包括用于提供从组合的光信号测量的频域频谱的傅里叶变换的电路。 其中仅使用一个参考反射器的实施例提供了当使用多层膜时简化来自接收器的输出光谱的装置。

公开(公告)号：US5610716A

公开(公告)日：1997-03-11

申请号：US520029

申请日：1995-08-28

申请人： Wayne V. Sorin ,  Brian L. Heffner ,  Shalini Venkatesh

发明人： Wayne V. Sorin ,  Brian L. Heffner ,  Shalini Venkatesh

IPC分类号： G01B11/06 ,  G01N21/45 ,  G01B9/02

CPC分类号： G01B11/06

摘要： An apparatus and method for measuring the thickness of a film. The film is illuminated with a low coherence light signal that is preferably generated from a source including two or more LEDs. The light reflected from the surfaces of the film is collected and coupled to an interferometer. The slope of the Fourier transform of the output of the signal from the interferometer is measured to provide a determination of the thickness of the film. In the preferred embodiment of the present invention, the interferometer output is sampled at fewer than two points per cycle of the low coherence light signal.

摘要翻译： 一种用于测量薄膜厚度的装置和方法。 该薄膜用低相干光信号照亮，该信号优选地由包括两个或更多个LED的源产生。 从膜的表面反射的光被收集并耦合到干涉仪。 测量来自干涉仪的信号的输出的傅里叶变换的斜率，以确定膜的厚度。 在本发明的优选实施例中，干涉仪输出在低相干光信号的每个周期以少于两个点采样。

公开(公告)号：US09160481B2

公开(公告)日：2015-10-13

申请号：US13877638

申请日：2010-10-08

申请人： Wayne V. Sorin ,  Michael Renne Ty Tan ,  Sagi Varghese Mathai

发明人： Wayne V. Sorin ,  Michael Renne Ty Tan ,  Sagi Varghese Mathai

IPC分类号： H04J14/06 ,  H04J14/02 ,  H04B10/532

CPC分类号： H04J14/06 ,  H04B10/532 ,  H04J14/02

摘要： An optical data system and method are disclosed. An optical data system includes an array of lasers that are modulated by the plurality of modulation signals to provide a plurality of pairs of orthogonally polarized optical data signals. The optical data system further includes an optical multiplexing system to combine each of the pairs of orthogonally polarized optical data signals to provide a plurality of dual-channel optical data signals.

摘要翻译： 公开了一种光学数据系统和方法。 光学数据系统包括由多个调制信号调制以提供多对正交偏振光学数据信号的激光器阵列。 光学数据系统还包括光复用系统，用于组合每对正交偏振光数据信号以提供多个双通道光数据信号。

公开(公告)号：US09065587B2

公开(公告)日：2015-06-23

申请号：US13825950

申请日：2010-10-08

申请人： Wayne V. Sorin ,  Michael Renne Ty Tan ,  Sagi Varghese Mathai

发明人： Wayne V. Sorin ,  Michael Renne Ty Tan ,  Sagi Varghese Mathai

IPC分类号： H04J14/02 ,  H04B10/532 ,  H04B10/50 ,  H04J14/06

CPC分类号： H04J14/02 ,  H04B10/504 ,  H04B10/506 ,  H04B10/532 ,  H04J14/06

摘要： An optical data system and method are disclosed. The system can be an integrated optical data transmission system that includes an array of lasers that are modulated by a plurality of modulation signals to provide a plurality of sets of optical data signals. Each of the optical data signals in each of the plurality of sets can have a distinct wavelength. The system can also include a wavelength division multiplexing system to combine each of the plurality of sets of optical data signals to generate a plurality of multi-channel optical data signals that are transmitted via a respective plurality of optical transmission media.

摘要翻译： 公开了一种光学数据系统和方法。 该系统可以是集成光数据传输系统，其包括由多个调制信号调制以提供多组光数据信号的激光器阵列。 多个组中的每一个中的每个光学数据信号可以具有不同的波长。 该系统还可以包括波分多路复用系统，以组合多组光数据信号中的每一组以产生通过相应的多个光传输介质传输的多个多通道光数据信号。

公开(公告)号：US09014519B2

公开(公告)日：2015-04-21

申请号：US13273983

申请日：2011-10-14

申请人： Sagi Varghese Mathai ,  Michael Renne Ty Tan ,  Paul Kessler Rosenberg ,  Wayne V. Sorin ,  Georgios Panotopoulos ,  Susant K. Patra

发明人： Sagi Varghese Mathai ,  Michael Renne Ty Tan ,  Paul Kessler Rosenberg ,  Wayne V. Sorin ,  Georgios Panotopoulos ,  Susant K. Patra

IPC分类号： G02B6/12 ,  G02B6/36 ,  G02B6/42

CPC分类号： G02B6/423 ,  G02B6/4232 ,  G02B6/4249 ,  H01L2224/16225 ,  H01L2924/15151

摘要： An optoelectronic interface includes an optically transparent substrate; and an alignment layer comprising a pattern of alignment features disposed on said optically transparent substrate.

摘要翻译： 光电接口包括光学透明基板; 以及包括布置在所述光学透明基底上的对准特征图案的取向层。