公开(公告)号：US07036374B2

公开(公告)日：2006-05-02

申请号：US10851029

申请日：2004-05-21

申请人： William Thomas Pike ,  Ian Standley ,  Richard Syms

发明人： William Thomas Pike ,  Ian Standley ,  Richard Syms

IPC分类号： G01P15/125 ,  G01H11/00

CPC分类号： G01P15/0802 ,  G01P15/08 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/181

摘要： An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states.

摘要翻译： 一种使用具有悬挂板和至少一个固定电容板的面内悬挂几何形状的加速度计或地震仪。 悬挂板由单件形成，并且包括外框，一对弯曲元件以及挠曲件之间的集成的证明块。 弯曲元件允许检测质量在悬架平面中的敏感方向上移动，同时限制所有离轴方向上的移动。 通过使用在弯曲元件内部和之间分配的中间框架来使得证明物质的离轴运动最小化。 中间框架可以包括运动停止，以防止过载条件下进一步的相对运动。 该装置还可以包括阻尼结构，例如弹簧或气体结构，其包括梯形活塞和相应的气缸，以在非供电状态下提供阻尼。

公开(公告)号：US20050097959A1

公开(公告)日：2005-05-12

申请号：US10851029

申请日：2004-05-21

申请人： William Pike ,  Ian Standley ,  Richard Syms

发明人： William Pike ,  Ian Standley ,  Richard Syms

IPC分类号： G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/18

CPC分类号： G01P15/0802 ,  G01P15/08 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/181

摘要： An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states.

摘要翻译： 一种使用具有悬挂板和至少一个固定电容板的面内悬挂几何形状的加速度计或地震仪。 悬挂板由单件形成，并且包括外框，一对弯曲元件以及挠曲件之间的集成的证明块。 弯曲元件允许检测质量在悬架平面中的敏感方向上移动，同时限制所有离轴方向上的移动。 通过使用在弯曲元件内部和之间分配的中间框架来使得证明物质的离轴运动最小化。 中间框架可以包括运动停止，以防止过载条件下进一步的相对运动。 该装置还可以包括阻尼结构，例如弹簧或气体结构，其包括梯形活塞和相应的气缸，以在非供电状态下提供阻尼。

公开(公告)号：US20080282802A1

公开(公告)日：2008-11-20

申请号：US11414866

申请日：2006-05-01

申请人： William T. Pike ,  Ian Standley

发明人： William T. Pike ,  Ian Standley

IPC分类号： G01P15/125 ,  H05K3/34

CPC分类号： G01V13/00 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/18 ,  G01V1/181 ,  Y10T29/49002 ,  Y10T29/49144

摘要： An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states. The capacitive plate is made of insulating material. A new method of soldering the capacitive plate to the suspension plate is also disclosed.

摘要翻译： 一种使用具有悬挂板和至少一个固定电容板的面内悬挂几何形状的加速度计或地震仪。 悬挂板由单件形成，并且包括外框，一对弯曲元件以及挠曲件之间的集成的证明块。 弯曲元件允许检测质量在悬架平面中的敏感方向上移动，同时限制所有离轴方向上的移动。 通过使用在弯曲元件内部和之间分配的中间框架来使得证明物质的离轴运动最小化。 中间框架可以包括运动停止，以防止过载条件下进一步的相对运动。 该装置还可以包括阻尼结构，例如弹簧或气体结构，其包括梯形活塞和相应的气缸，以在非供电状态下提供阻尼。 电容板由绝缘材料制成。 还公开了将电容板焊接到悬挂板的新方法。

公开(公告)号：US08978246B2

公开(公告)日：2015-03-17

申请号：US13007975

申请日：2011-01-17

申请人： William T. Pike ,  Ian Standley

发明人： William T. Pike ,  Ian Standley

IPC分类号： H05K3/34 ,  B29C65/00 ,  B32B37/00 ,  B32B38/04 ,  B21D39/00 ,  B23K31/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/18

CPC分类号： G01V13/00 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/18 ,  G01V1/181 ,  Y10T29/49002 ,  Y10T29/49144

摘要： A method of attaching two wafers in a seismometer comprising the steps of forming a patterned wetting metal layer on a first wafer and forming a plurality of cavities mirroring the pattern of the wetting metal layer on the first wafer. The steps further include pouring a plurality of solder balls on the surface of an alignment wafer, pouring off excess solder balls, aligning the first wafer with the alignment wafer, and connecting the first wafer with the alignment wafer. The solder balls are immobilized on the wetting metal layer by performing a partial reflow onto the wetting metal layer and removing the alignment wafer. The first and second wafers are aligned so that each solder ball is immobilized between the first and second wafer. The wafers are then bonded together.

摘要翻译： 一种在地震仪中安装两个晶片的方法，包括以下步骤：在第一晶片上形成图案化的润湿金属层，并形成多个镜像第一晶片上的润湿金属层图案的腔。 所述步骤还包括在对准晶片的表面上浇注多个焊球，排出多余的焊球，使第一晶片与对准晶片对准，以及将第一晶片与对准晶片连接。 通过对润湿金属层进行部分回流并除去对准晶片，将焊球固定在润湿金属层上。 对准第一和第二晶片，使得每个焊球固定在第一和第二晶片之间。 然后将晶片粘合在一起。

公开(公告)号：US20110170376A1

公开(公告)日：2011-07-14

申请号：US13007975

申请日：2011-01-17

申请人： William T. Pike ,  Ian Standley

发明人： William T. Pike ,  Ian Standley

IPC分类号： H04R19/00 ,  B23K31/02 ,  B23K1/20 ,  B32B38/00 ,  B32B37/02 ,  B32B37/14 ,  C23F1/02

CPC分类号： G01V13/00 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/18 ,  G01V1/181 ,  Y10T29/49002 ,  Y10T29/49144

摘要： An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states. The capacitive plate is made of insulating material. A new method of soldering the capacitive plate to the suspension plate is also disclosed.

摘要翻译： 一种使用具有悬挂板和至少一个固定电容板的面内悬挂几何形状的加速度计或地震仪。 悬挂板由单件形成，并且包括外框，一对弯曲元件以及挠曲件之间的集成的证明块。 弯曲元件允许检测质量在悬架平面中的敏感方向上移动，同时限制所有离轴方向上的移动。 通过使用在弯曲元件内部和之间分配的中间框架来使得证明物质的离轴运动最小化。 中间框架可以包括运动停止，以防止过载条件下进一步的相对运动。 该装置还可以包括阻尼结构，例如弹簧或气体结构，其包括梯形活塞和相应的气缸，以在非供电状态下提供阻尼。 电容板由绝缘材料制成。 还公开了将电容板焊接到悬挂板的新方法。

公开(公告)号：US07870788B2

公开(公告)日：2011-01-18

申请号：US11414866

申请日：2006-05-01

申请人： William T. Pike ,  Ian Standley

发明人： William T. Pike ,  Ian Standley

IPC分类号： G01P15/125 ,  G01H11/00

CPC分类号： G01V13/00 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P15/132 ,  G01P2015/0814 ,  G01P2015/082 ,  G01V1/18 ,  G01V1/181 ,  Y10T29/49002 ,  Y10T29/49144

摘要： An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states. The capacitive plate is made of insulating material. A new method of soldering the capacitive plate to the suspension plate is also disclosed.

摘要翻译： 一种使用具有悬挂板和至少一个固定电容板的面内悬挂几何形状的加速度计或地震仪。 悬挂板由单件形成，并且包括外框，一对弯曲元件以及挠曲件之间的集成的证明块。 弯曲元件允许检测质量在悬架平面中的敏感方向上移动，同时限制所有离轴方向上的移动。 通过使用在弯曲元件内部和之间分配的中间框架来使得证明物质的离轴运动最小化。 中间框架可以包括运动停止，以防止过载条件下进一步的相对运动。 该装置还可以包括阻尼结构，例如弹簧或气体结构，其包括梯形活塞和相应的气缸，以在非供电状态下提供阻尼。 电容板由绝缘材料制成。 还公开了将电容板焊接到悬挂板的新方法。