公开(公告)号：US06177290B1

公开(公告)日：2001-01-23

申请号：US09184232

申请日：1998-11-02

申请人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

发明人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

IPC分类号： H01L2131

CPC分类号： C03C17/02 ,  C03C17/3411 ,  C03C2218/33 ,  G02B6/136 ,  G02B2006/1215

摘要： A method of fabricating a planar optical waveguide in one chamber, comprising the steps of depositing a cladding layer and a core layer on a substrate, depositing an etch mask layer on the core layer, and forming a photoresist pattern on the etch mask layer. An etch mask pattern is formed by etching the etch mask layer according to the photoresist pattern using a first gas which reacts with the material of the etch mask layer, and removing the first gas. An optical waveguide is formed by etching the core layer according to the etch mask pattern using a second gas which reacts with the material of the core layer in the same chamber as the chamber where the above steps were performed, and removing the photoresist pattern and the second gas. The etch mask pattern is removed using the first gas which reacts with the material of the etch mask pattern in the same chamber as the chamber where the above steps were performed, and removing the first gas, and depositing an upper cladding layer formed of the same material as the core layer on the resultant structure of the above step. Accordingly, processes for fabricating an optical waveguide can be continuously performed in one chamber, thus simplifying and automating the optical waveguide fabrication method.

摘要翻译： 一种在一个室中制造平面光波导的方法，包括以下步骤：在衬底上沉积包覆层和芯层，在芯层上沉积蚀刻掩模层，以及在蚀刻掩模层上形成光致抗蚀剂图案。 通过使用与蚀刻掩模层的材料反应并且去除第一气体的第一气体，根据光致抗蚀剂图案蚀刻蚀刻掩模层来形成蚀刻掩模图案。 通过使用与在上述步骤的室相同的室中与芯层的材料反应的第二气体根据蚀刻掩模图案蚀刻芯层来形成光波导，并且去除光致抗蚀剂图案和 第二气。 使用与在其中执行上述步骤的室相同的腔室中与蚀刻掩模图案的材料反应的第一气体去除蚀刻掩模图案，并且去除第一气体，并沉积由其形成的上覆层 材料作为上述步骤的结果结构上的核心层。 因此，可以在一个室中连续地进行制造光波导的工艺，从而简化和自动化光波导制造方法。

公开(公告)号：US06442315B1

公开(公告)日：2002-08-27

申请号：US09195660

申请日：1998-11-18

申请人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Sang-yun Yi ,  Byong-gwon You

发明人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Sang-yun Yi ,  Byong-gwon You

IPC分类号： G02B626

CPC分类号： G02B6/305 ,  G02B2006/12195

摘要： An optical waveguide chip includes an output waveguide connected to an optical fiber, an optical fiber array module, or another optical waveguide chip. The output waveguide has a coupling cross-section wider than the core of the optical fiber, the core of an optical fiber of the optical fiber array module, and the waveguide of the other optical waveguide, respectively. The cross-section width of the output waveguide of the optical waveguide chip gradually increases toward an end of the waveguide with a slant angle of 10° or less. Therefore, when the optical waveguide chip is connected to the optical fiber, the optical fiber array module, or the other optical waveguide chip during packaging of an optical waveguide device, an offset of the optical axis of about ±20% of the width of the waveguide guide is allowable. As a result, there are no additional or extra steps in fabrication of an optical waveguide chip and no additional loss of the optical characteristics, and the required interconnection or production time is considerably reduced.

摘要翻译： 光波导芯片包括连接到光纤的输出波导，光纤阵列模块或另一光波导芯片。 输出波导具有比光纤的核心更宽的光耦合横截面，光纤阵列模块的光纤的核心和另一个光波导的波导。 光波导芯片的输出波导的横截面宽度以10°或更小的倾斜角朝向波导的端部逐渐增加。 因此，当光波导芯片在光波导器件的封装期间连接到光纤，光纤阵列模块或另一个光波导芯片时，光轴的偏移约为± 波导引导是允许的。 结果，在光波导芯片的制造中没有额外的或额外的步骤，并且没有额外的光学特性损失，并且所需的互连或生产时间大大降低。

公开(公告)号：US06201913B1

公开(公告)日：2001-03-13

申请号：US09186360

申请日：1998-11-05

申请人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B6/2804 ,  G02B2006/12147 ,  G02B2006/1215

摘要： In an optical power splitter for splitting input light into N equal optical waves, and a manufacturing method therefor, a main waveguide and (N−1) branched waveguides are arranged on one side or both sides of the main waveguide. The main waveguide and the (N−1) branched waveguides form a directional coupler. In each of the directional couplers, the branched waveguide has an appropriate phase mismatch, a proper coupling coefficient, and a suitable coupling length to output 1/N of input optical power in the main waveguide. In the optical power splitter, when the main waveguide is semicircular, a circular substrate can be effectively used when the optical power splitter is manufactured.

摘要翻译： 在用于将输入光分成N个相等光波的光功率分配器及其制造方法中，主波导和（N-1）分支波导布置在主波导的一侧或两侧。 主波导和（N-1）分支波导形成定向耦合器。 在每个定向耦合器中，分支波导具有适当的相位失配，适当的耦合系数和合适的耦合长度以输出主波导中的输入光功率的1 / N。 在光功率分配器中，当主波导是半圆形时，当制造光功率分配器时，可以有效地使用圆形基板。

公开(公告)号：US06404957B1

公开(公告)日：2002-06-11

申请号：US09186358

申请日：1998-11-05

申请人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B2006/1215

摘要： An optical power divider using a beam separator and a beam expander, and a fabrication method therefor. The optical power divider includes an input optical waveguide having an input port for receiving incident light, for guiding the light incident via the input port, a plurality of output optical waveguides having at least two output ports, for outputting the light incident via the input optical waveguide to the output ports, wherein the number of output optical waveguides is equal to that of the output ports, and a beam separator located at a branch area in which the light incident on the input optical waveguide diverges toward the output optical waveguides, the beam separator being made of a material having a refractive index lower than the core of the input and output optical waveguides, for separating the light to the output optical waveguides with a predetermined ratio. Therefore, the length of the optical power divider becomes short and insertion loss can be lowered. Also, an optical power divider for the special application, providing different splitting ratios between inner and outer output ports, can be easily designed by controlling the lengths of a side of each beam separator and beam expanders, and the splitting ratio of the output optical power of the optical power divider can be controlled. Also, the cost of fabricating the optical power divider can be reduced.

摘要翻译： 一种使用光束分离器和光束扩展器的光功率分配器及其制造方法。 光功率分配器包括输入光波导，其具有用于接收入射光的输入端口，用于引导经由输入端口入射的光;多个输出光波导，具有至少两个输出端口，用于输出经由输入光学器件入射的光 波导到输出端口，其中输出光波导的数量等于输出端口的数量;以及位于入射到输入光波导的光向输出光波导发散的分支区域处的光束分离器，光束 分离器由折射率低于输入和输出光波导的芯的材料制成，用于以预定比例将光分离成输出光波导。 因此，光功率分配器的长度变短，并且可以降低插入损耗。 此外，通过控制每个光束分离器和光束扩展器的一侧的长度以及输出光焦度的分离比，可以容易地设计用于特殊应用的光功率分配器，其在内部和外部输出端口之间提供不同的分离比 的光功率分配器可以控制。 此外，可以降低制造光功率分配器的成本。

公开(公告)号：US06268949B1

公开(公告)日：2001-07-31

申请号：US09344125

申请日：1999-06-24

申请人： Jung-hwan Cho ,  Dug-bong Kim ,  Sang-yun Yi ,  Tae-hyung Rhee

发明人： Jung-hwan Cho ,  Dug-bong Kim ,  Sang-yun Yi ,  Tae-hyung Rhee

IPC分类号： G02F103

CPC分类号： G02F1/011

摘要： In an optical intensity modulator, and a fabrication method thereof, the optical intensity modulator includes a substrate made of a predetermined material, an arc shaped optical waveguide formed on the substrate, and an electrode formed on the optical waveguide such that the electrode is in alignment with the optical waveguide, the refractive index of the optical waveguide being changed in accordance with an intensity of an electric field applied to the electrode, and an optical wave passing a predetermined location of the optical waveguide being radiated into the substrate due to the changed refractive index. Accordingly, a large modulation depth can be obtained from only a small refractive index variation by using the radiation loss characteristics of the arc shaped waveguide.

摘要翻译： 在光强度调制器及其制造方法中，光强度调制器包括由预定材料制成的基板，形成在基板上的弧形光波导，以及形成在光波导上的电极，使得电极对准 利用光波导，光波导的折射率根据施加到电极的电场的强度而改变，并且通过光波导的预定位置的光波由于折射率的变化而被辐射到衬底中 指数。 因此，通过使用弧形波导的辐射损耗特性，可以仅从小的折射率变化获得大的调制深度。

公开(公告)号：US06282343B1

公开(公告)日：2001-08-28

申请号：US09440931

申请日：1999-11-16

申请人： Dug-bong Kim ,  Jung-hwan Cho ,  Sang-yun Yi ,  Tae-hyung Rhee

发明人： Dug-bong Kim ,  Jung-hwan Cho ,  Sang-yun Yi ,  Tae-hyung Rhee

IPC分类号： G02B642

CPC分类号： G02B6/125

摘要： An optical coupler and a method of manufacturing the same are provided. The optical coupler includes an input optical waveguide and N output optical waveguides, and divides an optical signal received from the input optical waveguide into N optical signals. The optical coupler further includes a plurality of Y-junction optical waveguide modules configured in m stages, for branching the received optical signal into two optical signals at each stage, and a plurality of curved optical waveguides alternately connected to the Y-junction optical waveguide modules, at least one curved optical waveguide connected between Y-junction optical waveguide modules in the m-th stage and the output optical waveguides, wherein when the guiding direction of the optical signal is set to be the longitudinal axis, and the junction between the input optical waveguide and the first-stage Y-junction optical waveguide module is set to be the starting point, the positions and sizes of the Y-junction optical waveguide modules and the curved optical waveguides are determined in order to minimize the longest path among N paths ranging from the starting point to each of the output optical waveguides. An optical coupler is manufactured using Y-junction optical waveguide modules and connection optical waveguide modules, such that various Y-junction optical waveguide structures can be designed. Also, the degree of freedom upon layout of modules is increased, so that design of the optical coupler is easy.

摘要翻译： 提供一种光耦合器及其制造方法。 光耦合器包括输入光波导和N输出光波导，并将从输入光波导接收的光信号分成N个光信号。 该光耦合器还包括多个以m级配置的Y结光波导模块，用于将接收到的光信号在每一级分支成两个光信号，并且多个弯曲光波导交替地连接到Y结光波导模块 ，连接在第m级的Y结光波导模块和输出光波导之间的至少一个弯曲光波导，其中当光信号的引导方向被设置为纵向轴线时，以及输入端 光波导和第一级Y结光波导模块被设置为起点，确定Y结光波导模块和弯曲光波导的位置和大小，以使N路径中的最长路径最小化 从起始点到每个输出光波导。 使用Y结光波导模块和连接光波导模块制造光耦合器，从而可以设计各种Y结光波导结构。 此外，模块布局时的自由度增加，使得光耦合器的设计容易。

公开(公告)号：US6157759A

公开(公告)日：2000-12-05

申请号：US106840

申请日：1998-06-30

申请人： Phil-seung Seo ,  Hyung-jae Lee ,  Tae-hyung Rhee ,  Hyoun-soo Kim ,  Sang-yun Yi

发明人： Phil-seung Seo ,  Hyung-jae Lee ,  Tae-hyung Rhee ,  Hyoun-soo Kim ,  Sang-yun Yi

IPC分类号： G02B6/24 ,  G02B6/30

CPC分类号： G02B6/30 ,  G02B6/305

摘要： An optical fiber passive alignment apparatus for passively aligning an optical fiber with an input/output optical waveguide of an integrated optical device, and a method therefor. The optical fiber passive alignment apparatus includes: an optical waveguide formed on a planar substrate along the longitudinal direction of the planar substrate, having a core which is shorter than the planar substrate; an optical fiber mounting portion formed to a predetermined length on the planar substrate in the longitudinal direction of the planar substrate, such that the optical waveguide and the optical fiber contact each other, for receiving the optical fiber; and a cavity located between the optical fiber mounting portion and a core of the optical waveguide, filled with a material whose refractive index slightly increases on irradiation by UV rays such that the refractive index of the material is not substantially different from the refractive index of a core of the optical fiber. Therefore, forming the optical waveguide whose core flares gradually reduces dependency of coupling loss on horizontal displacement, and importance of precisely positioning the optical fiber is decreased.

摘要翻译： 一种用于将光纤与集成光学装置的输入/输出光波导无源对准的光纤无源对准装置及其方法。 光纤无源定位装置包括：沿着平面基板的纵向形成在平面基板上的光波导，其具有比平面基板短的芯; 在所述平面基板上在所述平面基板的长度方向上形成规定长度的光纤安装部，使得所述光波导和所述光纤彼此接触，用于接收所述光纤; 以及位于光纤安装部分和光波导芯之间的空腔，其填充有折射率随着紫外线的照射而稍微增加的材料，使得材料的折射率基本上不同于 光纤的核心。 因此，形成光纤的光波导逐渐减小耦合损耗对水平位移的依赖性，光纤的精确定位的重要性降低。

公开(公告)号：US6055342A

公开(公告)日：2000-04-25

申请号：US110944

申请日：1998-07-07

申请人： Sang-yun Yi ,  Woo-hyuk Jang

发明人： Sang-yun Yi ,  Woo-hyuk Jang

IPC分类号： G02F1/1335 ,  G02F1/035 ,  G02F1/29 ,  G02F1/355

CPC分类号： G02F1/3558 ,  G02F1/035

摘要： An integrated optical intensity modulator and a method for fabricating it. The integrated optical intensity modulator includes a substrate having spontaneous polarization, cut in an axial direction; an optical waveguide on the substrate; domain-inversion areas having domains reverse from the direction of spontaneous polarization, arranged in a staggered pattern around the optical waveguide; a first electrode on the optical waveguide on a surface of the substrate, and second and third electrodes on the substrate on opposite sides of and on the same surface as the first electrode. When a voltage is applied to the first electrode, a light wave is deflected and scattered in a domain-inversion area in accordance with a change of the refractive index of the domain-inversion area in the optical waveguide and the refractive index of the spontaneous polarization area. Since the domain-inversion structure of the ferroelectric substrate has a staggered pattern around the optical waveguide, and an optical guided mode is deflected by an applied voltage, only half the driving voltage of prior art structures is required for the optical waveguide. Deflecting the optical guided mode to the right and to the left alternatively, in multiple stages, increases the extinction ratio.

摘要翻译： 一种集成光强度调制器及其制造方法。 集成光强度调制器包括：沿轴向切割的具有自发极化的基板; 基板上的光波导; 具有与自发极化方向相反的畴的畴反转区域，以交错图案布置在光波导周围; 在基板的表面上的光波导上的第一电极，以及在与第一电极相同的表面的相对侧的基板上的第二和第三电极。 当对第一电极施加电压时，光波根据光波导中的畴反转区域的折射率的变化和自发极化的折射率在畴反转区域中偏转和散射 区。 由于铁电体基板的畴反转结构在光波导周围具有交错图案，并且光引导模式被施加的电压偏转，因此光波导仅需要现有技术结构的驱动电压的一半。 可选择性地将光学导向模式向右和向左偏转，在多个阶段，增加消光比。