公开(公告)号：US06177290B1

公开(公告)日：2001-01-23

申请号：US09184232

申请日：1998-11-02

申请人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

发明人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

IPC分类号： H01L2131

CPC分类号： C03C17/02 ,  C03C17/3411 ,  C03C2218/33 ,  G02B6/136 ,  G02B2006/1215

摘要： A method of fabricating a planar optical waveguide in one chamber, comprising the steps of depositing a cladding layer and a core layer on a substrate, depositing an etch mask layer on the core layer, and forming a photoresist pattern on the etch mask layer. An etch mask pattern is formed by etching the etch mask layer according to the photoresist pattern using a first gas which reacts with the material of the etch mask layer, and removing the first gas. An optical waveguide is formed by etching the core layer according to the etch mask pattern using a second gas which reacts with the material of the core layer in the same chamber as the chamber where the above steps were performed, and removing the photoresist pattern and the second gas. The etch mask pattern is removed using the first gas which reacts with the material of the etch mask pattern in the same chamber as the chamber where the above steps were performed, and removing the first gas, and depositing an upper cladding layer formed of the same material as the core layer on the resultant structure of the above step. Accordingly, processes for fabricating an optical waveguide can be continuously performed in one chamber, thus simplifying and automating the optical waveguide fabrication method.

摘要翻译： 一种在一个室中制造平面光波导的方法，包括以下步骤：在衬底上沉积包覆层和芯层，在芯层上沉积蚀刻掩模层，以及在蚀刻掩模层上形成光致抗蚀剂图案。 通过使用与蚀刻掩模层的材料反应并且去除第一气体的第一气体，根据光致抗蚀剂图案蚀刻蚀刻掩模层来形成蚀刻掩模图案。 通过使用与在上述步骤的室相同的室中与芯层的材料反应的第二气体根据蚀刻掩模图案蚀刻芯层来形成光波导，并且去除光致抗蚀剂图案和 第二气。 使用与在其中执行上述步骤的室相同的腔室中与蚀刻掩模图案的材料反应的第一气体去除蚀刻掩模图案，并且去除第一气体，并沉积由其形成的上覆层 材料作为上述步骤的结果结构上的核心层。 因此，可以在一个室中连续地进行制造光波导的工艺，从而简化和自动化光波导制造方法。

公开(公告)号：US06201913B1

公开(公告)日：2001-03-13

申请号：US09186360

申请日：1998-11-05

申请人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B6/2804 ,  G02B2006/12147 ,  G02B2006/1215

摘要： In an optical power splitter for splitting input light into N equal optical waves, and a manufacturing method therefor, a main waveguide and (N−1) branched waveguides are arranged on one side or both sides of the main waveguide. The main waveguide and the (N−1) branched waveguides form a directional coupler. In each of the directional couplers, the branched waveguide has an appropriate phase mismatch, a proper coupling coefficient, and a suitable coupling length to output 1/N of input optical power in the main waveguide. In the optical power splitter, when the main waveguide is semicircular, a circular substrate can be effectively used when the optical power splitter is manufactured.

摘要翻译： 在用于将输入光分成N个相等光波的光功率分配器及其制造方法中，主波导和（N-1）分支波导布置在主波导的一侧或两侧。 主波导和（N-1）分支波导形成定向耦合器。 在每个定向耦合器中，分支波导具有适当的相位失配，适当的耦合系数和合适的耦合长度以输出主波导中的输入光功率的1 / N。 在光功率分配器中，当主波导是半圆形时，当制造光功率分配器时，可以有效地使用圆形基板。

公开(公告)号：US06404957B1

公开(公告)日：2002-06-11

申请号：US09186358

申请日：1998-11-05

申请人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B2006/1215

摘要： An optical power divider using a beam separator and a beam expander, and a fabrication method therefor. The optical power divider includes an input optical waveguide having an input port for receiving incident light, for guiding the light incident via the input port, a plurality of output optical waveguides having at least two output ports, for outputting the light incident via the input optical waveguide to the output ports, wherein the number of output optical waveguides is equal to that of the output ports, and a beam separator located at a branch area in which the light incident on the input optical waveguide diverges toward the output optical waveguides, the beam separator being made of a material having a refractive index lower than the core of the input and output optical waveguides, for separating the light to the output optical waveguides with a predetermined ratio. Therefore, the length of the optical power divider becomes short and insertion loss can be lowered. Also, an optical power divider for the special application, providing different splitting ratios between inner and outer output ports, can be easily designed by controlling the lengths of a side of each beam separator and beam expanders, and the splitting ratio of the output optical power of the optical power divider can be controlled. Also, the cost of fabricating the optical power divider can be reduced.

摘要翻译： 一种使用光束分离器和光束扩展器的光功率分配器及其制造方法。 光功率分配器包括输入光波导，其具有用于接收入射光的输入端口，用于引导经由输入端口入射的光;多个输出光波导，具有至少两个输出端口，用于输出经由输入光学器件入射的光 波导到输出端口，其中输出光波导的数量等于输出端口的数量;以及位于入射到输入光波导的光向输出光波导发散的分支区域处的光束分离器，光束 分离器由折射率低于输入和输出光波导的芯的材料制成，用于以预定比例将光分离成输出光波导。 因此，光功率分配器的长度变短，并且可以降低插入损耗。 此外，通过控制每个光束分离器和光束扩展器的一侧的长度以及输出光焦度的分离比，可以容易地设计用于特殊应用的光功率分配器，其在内部和外部输出端口之间提供不同的分离比 的光功率分配器可以控制。 此外，可以降低制造光功率分配器的成本。

公开(公告)号：US6160945A

公开(公告)日：2000-12-12

申请号：US153147

申请日：1998-09-14

申请人： Tae-hyung Rhee ,  Woo-hyuk Jang ,  Eun-ji Kim ,  Yong-woo Lee

发明人： Tae-hyung Rhee ,  Woo-hyuk Jang ,  Eun-ji Kim ,  Yong-woo Lee

IPC分类号： G02B6/10 ,  C03C17/32 ,  C03C17/34 ,  G02B6/122 ,  G02B6/13 ,  G02B6/136 ,  C03B37/023

CPC分类号： C03C17/3405 ,  C03C17/32 ,  G02B6/122 ,  G02B6/136

摘要： An optical waveguide device for loss absorption, and a fabrication method thereof, are provided. The optical waveguide device for loss absorption includes: a substrate of a predetermined material; a lower cladding formed on the substrate; an optical waveguide formed on the lower cladding, and formed of a material having a refractive index greater than a refractive index of the lower cladding; an upper cladding formed so as to completely cover the optical waveguide; and an absorption layer formed of a material having refractive index greater than a refractive index of the upper cladding, and formed on the upper cladding to a thickness which can absorb a reflected or radiated optical signal. As described above, an absorption layer capable of absorbing light is formed in the waveguide device upon fabricating the optical waveguide, thus minimizing or removing loss due to reflection and radiation of an optical signal.

摘要翻译： 提供了一种用于损耗吸收的光波导器件及其制造方法。 用于损耗吸收的光波导装置包括：预定材料的基板; 形成在基板上的下包层; 形成在所述下包层上的光波导，并且由折射率大于所述下包层的折射率的材料形成; 形成为完全覆盖光波导的上包层; 以及由折射率大于上部包层的折射率的材料形成的吸收层，并且形成在上部包层上至可以吸收反射或辐射光学信号的厚度。 如上所述，在制造光波导时，在波导器件中形成能够吸收光的吸收层，从而最小化或去除由于光信号的反射和辐射引起的损耗。

公开(公告)号：US6136929A

公开(公告)日：2000-10-24

申请号：US148695

申请日：1998-09-04

申请人： Kwan-soo Han ,  Woo-hyuk Jang ,  Eun-ji Kim ,  Tae-hyung Rhee

发明人： Kwan-soo Han ,  Woo-hyuk Jang ,  Eun-ji Kim ,  Tae-hyung Rhee

IPC分类号： G02B6/12 ,  B32B27/00 ,  C08G65/38 ,  C08G65/40 ,  G02B6/00 ,  C08F283/08 ,  C08G65/42

CPC分类号： C08G65/4006 ,  C08G2650/48

摘要： Polyarylene ether for optical communications, expressed by the formula 1: ##STR1## The polyarylene ether has excellent resistance to heat and film processing properties and the light absorption loss in the wavelength range for optical communications is low. Also, by controlling the copolymerization ratio of a monomer whose hydrogen of C--H bond is substituted by F and a monomer whose hydrogen of C--H bond is substituted by Cl, the refractive index of the polymer can be adjusted to a level suitable for an optical material used for optical communications.

摘要翻译： 用于光通信的聚芳醚，由式1表示：聚亚芳基醚具有优异的耐热和薄膜加工性能，并且在光通信的波长范围内的光吸收损失低。 此外，通过控制由CH取代氢的单体被C取代的单体和CH键的氢被Cl取代的单体的共聚比，聚合物的折射率可以调整到适用于所用光学材料的水平 用于光通信。

公开(公告)号：US6055342A

公开(公告)日：2000-04-25

申请号：US110944

申请日：1998-07-07

申请人： Sang-yun Yi ,  Woo-hyuk Jang

发明人： Sang-yun Yi ,  Woo-hyuk Jang

IPC分类号： G02F1/1335 ,  G02F1/035 ,  G02F1/29 ,  G02F1/355

CPC分类号： G02F1/3558 ,  G02F1/035

摘要： An integrated optical intensity modulator and a method for fabricating it. The integrated optical intensity modulator includes a substrate having spontaneous polarization, cut in an axial direction; an optical waveguide on the substrate; domain-inversion areas having domains reverse from the direction of spontaneous polarization, arranged in a staggered pattern around the optical waveguide; a first electrode on the optical waveguide on a surface of the substrate, and second and third electrodes on the substrate on opposite sides of and on the same surface as the first electrode. When a voltage is applied to the first electrode, a light wave is deflected and scattered in a domain-inversion area in accordance with a change of the refractive index of the domain-inversion area in the optical waveguide and the refractive index of the spontaneous polarization area. Since the domain-inversion structure of the ferroelectric substrate has a staggered pattern around the optical waveguide, and an optical guided mode is deflected by an applied voltage, only half the driving voltage of prior art structures is required for the optical waveguide. Deflecting the optical guided mode to the right and to the left alternatively, in multiple stages, increases the extinction ratio.

摘要翻译： 一种集成光强度调制器及其制造方法。 集成光强度调制器包括：沿轴向切割的具有自发极化的基板; 基板上的光波导; 具有与自发极化方向相反的畴的畴反转区域，以交错图案布置在光波导周围; 在基板的表面上的光波导上的第一电极，以及在与第一电极相同的表面的相对侧的基板上的第二和第三电极。 当对第一电极施加电压时，光波根据光波导中的畴反转区域的折射率的变化和自发极化的折射率在畴反转区域中偏转和散射 区。 由于铁电体基板的畴反转结构在光波导周围具有交错图案，并且光引导模式被施加的电压偏转，因此光波导仅需要现有技术结构的驱动电压的一半。 可选择性地将光学导向模式向右和向左偏转，在多个阶段，增加消光比。

公开(公告)号：US20100017664A1

公开(公告)日：2010-01-21

申请号：US12503261

申请日：2009-07-15

申请人： Woo-hyuk Jang

发明人： Woo-hyuk Jang

IPC分类号： G11C29/12 ,  G06F11/27

CPC分类号： G11C29/16 ,  G11C16/04 ,  G11C2029/0401

摘要： Provided is an embedded flash memory test circuit, including an embedded flash memory call array a read-only memory (ROM) built-in self test (BIST) unit, a ROM BIST control unit and a comparison unit. The embedded flash memory cell array includes multiple flash memory cells, and simultaneously outputs m pieces of read data, where m is a natural number. The ROM BIST unit generates first compressed data by compressing the m pieces of read data. The ROM BIST controller controls the ROM BIST unit. The comparison unit compares the first compressed data and expected data.

摘要翻译： 提供了一种嵌入式闪存测试电路，其包括嵌入式闪存呼叫阵列，内置自检（BIST）单元的只读存储器（ROM），ROM BIST控制单元和比较单元。 嵌入式闪存单元阵列包括多个闪存单元，并且同时输出m个读取数据，其中m是自然数。 ROM BIST单元通过压缩m个读取数据来产生第一压缩数据。 ROM BIST控制器控制ROM BIST单元。 比较单元比较第一压缩数据和预期数据。