公开(公告)号：US06442315B1

公开(公告)日：2002-08-27

申请号：US09195660

申请日：1998-11-18

申请人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Sang-yun Yi ,  Byong-gwon You

发明人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Sang-yun Yi ,  Byong-gwon You

IPC分类号： G02B626

CPC分类号： G02B6/305 ,  G02B2006/12195

摘要： An optical waveguide chip includes an output waveguide connected to an optical fiber, an optical fiber array module, or another optical waveguide chip. The output waveguide has a coupling cross-section wider than the core of the optical fiber, the core of an optical fiber of the optical fiber array module, and the waveguide of the other optical waveguide, respectively. The cross-section width of the output waveguide of the optical waveguide chip gradually increases toward an end of the waveguide with a slant angle of 10° or less. Therefore, when the optical waveguide chip is connected to the optical fiber, the optical fiber array module, or the other optical waveguide chip during packaging of an optical waveguide device, an offset of the optical axis of about ±20% of the width of the waveguide guide is allowable. As a result, there are no additional or extra steps in fabrication of an optical waveguide chip and no additional loss of the optical characteristics, and the required interconnection or production time is considerably reduced.

摘要翻译： 光波导芯片包括连接到光纤的输出波导，光纤阵列模块或另一光波导芯片。 输出波导具有比光纤的核心更宽的光耦合横截面，光纤阵列模块的光纤的核心和另一个光波导的波导。 光波导芯片的输出波导的横截面宽度以10°或更小的倾斜角朝向波导的端部逐渐增加。 因此，当光波导芯片在光波导器件的封装期间连接到光纤，光纤阵列模块或另一个光波导芯片时，光轴的偏移约为± 波导引导是允许的。 结果，在光波导芯片的制造中没有额外的或额外的步骤，并且没有额外的光学特性损失，并且所需的互连或生产时间大大降低。

公开(公告)号：US06396984B1

公开(公告)日：2002-05-28

申请号：US09488571

申请日：2000-01-21

申请人： Jung-Hwan Cho ,  Duk-Bong Kim ,  Sang-Yun Yi ,  Tae-Hyung Rhee

发明人： Jung-Hwan Cho ,  Duk-Bong Kim ,  Sang-Yun Yi ,  Tae-Hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/1228 ,  G02B6/136 ,  G02B6/138 ,  G02B6/305 ,  G02B2006/12069 ,  G02B2006/12097

摘要： A mode shape converter, interposed between an input or output terminal of a function executing unit included in an optical device and an optical fiber and adapted to couple a mode of the optical fiber with a mode of the input or output terminal of the function executing unit, includes a substrate, a lower clad coated over the substrate, the lower clad having an etched portion in a desired region, a lower rib waveguide formed on the etched portion of the lower clad, a core. formed over both the lower rib waveguide and a non-etched portion of the lower clad, an upper rib waveguide formed on the core such that it is aligned with the lower rib waveguide, the upper rib waveguide having a desired shape, and an upper clad formed over both the upper rib waveguide and a portion of the core not covered with the upper rib waveguide.

摘要翻译： 一种模式形状转换器，其插入在光学装置中包括的功能执行单元的输入或输出端子和光纤之间，并且适于将光纤的模式与功能执行单元的输入或输出端子的模式耦合 包括基板，涂覆在基板上的下部包层，下部包层具有期望区域中的蚀刻部分，形成在下部包层的蚀刻部分上的下部肋波导芯体。 形成在下肋波导和下包层的未蚀刻部分之上，形成在芯上的上肋波导使得其与下肋波导对准，上肋波导具有期望的形状，并且上包层 形成在上肋波导两侧和未被上肋波导覆盖的芯的一部分上。

公开(公告)号：US06345131B1

公开(公告)日：2002-02-05

申请号：US09598292

申请日：2000-06-21

申请人： Woo-Hyuk Jang ,  Hyun-Ki Kim ,  Jung-Hee Kim ,  Yong-Woo Lee ,  Tae-Hyung Rhee

发明人： Woo-Hyuk Jang ,  Hyun-Ki Kim ,  Jung-Hee Kim ,  Yong-Woo Lee ,  Tae-Hyung Rhee

IPC分类号： G02B642

CPC分类号： G02F1/3137 ,  G02F1/011 ,  G02F1/0147 ,  G02F2001/0113

摘要： A thermo-optic switch using a small drive power while exhibiting a reduction in the coupling loss caused by the coupling to optical fibers and a switch speed of several hundred microseconds or less. A method for manufacturing the thermo-optic switch and a method for changing an optical line switching using the thermo-optic switch are also disclosed. The thermo-optic switch includes a substrate having etched portions at regions respectively corresponding to input and output terminals of the thermo-optic switch, a lower clad layer formed over the substrate, the lower clad layer having an input taper formed at the region corresponding to the input terminal and adapted to convert a circular mode, input from an optical fiber connected to the input terminal, into an oval mode having a rib shape, and an output taper formed at the region corresponding to the output terminal and adapted to convert the oval mode into a circular mode allowed to be input to an optical fiber connected to the output terminal, a core layer formed over the lower clad layer and provided with branched waveguides having a rib structure, the branched waveguides selectively receiving the oval mode from the input taper and outputting the received oval mode to the output taper, an upper clad layer formed over the core layer, and switching electrodes formed on the upper clad layer and selectively activated to apply heat to an associated one of the branched waveguides in such a fashion that an effective refractive index difference occurs between the branched waveguides, thereby causing the branched waveguides to selectively receive the oval mode from the input taper.

摘要翻译： 使用小的驱动功率的光电开关，同时显示出由与光纤的耦合引起的耦合损耗的降低以及几百微秒或更少的开关速度。 还公开了一种用于制造热电开关的方法以及使用该热电开关改变光线路切换的方法。 所述热电开关包括在分别对应于所述热电开关的输入和输出端子的区域处具有蚀刻部分的基板，在所述基板上形成的下包层，所述下包层具有形成在对应于 输入端子，并且适于将从连接到输入端子的光纤输入的圆形模式转换成具有肋状的椭圆形模式，以及形成在对应于输出端子的区域处的输出锥形，并且适于将椭圆 模式进入允许输入到连接到输出端子的光纤的圆形模式，芯层形成在下包层上并具有肋结构的分支波导，分支波导从输入锥度选择性地接收椭圆模式 并将接收到的椭圆模式输出到输出锥形，形成在芯层上的上覆层，以及形成在上层的开关电极 并且选择性地激活以将热量施加到相关联的一个分支波导，使得在分支波导之间出现有效折射率差异，从而使分支波导从输入锥度选择性地接收椭圆模式。

公开(公告)号：US06201913B1

公开(公告)日：2001-03-13

申请号：US09186360

申请日：1998-11-05

申请人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yun Yi ,  Jung-hwan Cho ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B6/2804 ,  G02B2006/12147 ,  G02B2006/1215

摘要： In an optical power splitter for splitting input light into N equal optical waves, and a manufacturing method therefor, a main waveguide and (N−1) branched waveguides are arranged on one side or both sides of the main waveguide. The main waveguide and the (N−1) branched waveguides form a directional coupler. In each of the directional couplers, the branched waveguide has an appropriate phase mismatch, a proper coupling coefficient, and a suitable coupling length to output 1/N of input optical power in the main waveguide. In the optical power splitter, when the main waveguide is semicircular, a circular substrate can be effectively used when the optical power splitter is manufactured.

摘要翻译： 在用于将输入光分成N个相等光波的光功率分配器及其制造方法中，主波导和（N-1）分支波导布置在主波导的一侧或两侧。 主波导和（N-1）分支波导形成定向耦合器。 在每个定向耦合器中，分支波导具有适当的相位失配，适当的耦合系数和合适的耦合长度以输出主波导中的输入光功率的1 / N。 在光功率分配器中，当主波导是半圆形时，当制造光功率分配器时，可以有效地使用圆形基板。

公开(公告)号：US6118917A

公开(公告)日：2000-09-12

申请号：US124981

申请日：1998-07-30

申请人： Hyung-jae Lee ,  Byong-gwon You ,  Yong-woo Lee ,  Tae-hyung Rhee

发明人： Hyung-jae Lee ,  Byong-gwon You ,  Yong-woo Lee ,  Tae-hyung Rhee

IPC分类号： G02B6/40 ,  G02B6/00 ,  G02B6/30

CPC分类号： G02B6/30

摘要： An optical fiber passive alignment apparatus for passively aligning optical fibers with input/output optical waveguides of an integrated optical device includes an optical fiber array block on which the optical fibers are mounted with a uniform spacing and having alignment grooves parallel to the optical fibers, and an optical fiber fixing plate for fixing the mounted optical fibers to a substrate; an optical waveguide device chip having an input/output optical waveguide array consisting of optical waveguides corresponding to the optical fibers, for coupling with the optical fibers, and alignment holes; and an alignment platform having first alignment ridges separated by the same spacing as the alignment grooves, for coupling with the alignment grooves, alignment bumps in positions corresponding to the alignment holes, for coupling with the alignment holes, and a space between the first alignment ridges for preventing the optical fiber plate of the optical fiber block array from contacting the alignment platform. The optical fiber passive alignment apparatus does not require a light source and a photodetector, or precise alignment with respect to an alignment axis having six degrees of freedom, so that less time and cost are required for attaching optical fibers to the optical waveguide device chip.

摘要翻译： 用于将光纤与集成光学器件的输入/输出光波导无源对准的光纤无源对准装置包括光纤阵列块，光纤以均匀间隔安装在光纤阵列块上，并具有与光纤平行的对准槽，以及 用于将安装的光纤固定到基板的光纤固定板; 光波导器件芯片，其具有由与光纤对应的光波导构成的输入输出光波导阵列，用于与光纤耦合，以及对准孔; 以及对准平台，其具有与所述对准槽分开相同间隔的第一对准脊，用于与所述对准槽耦合，对准所述对准孔的位置中的对准凸块，用于与所述对准孔联接，以及所述第一对准脊 用于防止光纤块阵列的光纤板与对准平台接触。 光纤无源对准装置不需要光源和光电检测器，或者相对于具有六个自由度的对准轴的精确对准，因此将光纤连接到光波导器件芯片所需的时间和成本更少。

公开(公告)号：US6026209A

公开(公告)日：2000-02-15

申请号：US140449

申请日：1998-08-26

申请人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Byong-gwon You ,  Eun-ji Kim

发明人： Tae-hyung Rhee ,  Hyung-jae Lee ,  Byong-gwon You ,  Eun-ji Kim

IPC分类号： G02B6/122 ,  G02B6/10 ,  G02B6/12 ,  G02B6/125 ,  G02B6/13

CPC分类号： G02B6/12004 ,  G02B6/125 ,  G02B2006/12119

摘要： A hybrid optical waveguide having linear and curved sections through which optical signals pass, includes: a planar substrate layer; a lower cladding layer formed of a material having optical transparency in a predetermined range of optical communication wavelengths, on the planar substrate layer; a core layer formed on the lower cladding layer where the optical waveguide is formed, the waveguide constituted of the linear section formed of a first optical polymer having a higher refractive index than the lower cladding layer and the curved section formed of a second optical polymer having a higher refractive index than the first optical polymer; and an upper cladding layer formed of a material having a lower refractive index than the first and the second optical polymers, surrounding the waveguide core layer. The optical waveguide having the linear and curved sections has reduced traveling losses and optical fiber coupling losses, and minimizes the size of the waveguide cross-section.

摘要翻译： 具有光信号通过的线性和弯曲部分的混合光波导包括：平面基底层; 由在光学通信波长的预定范围内具有光学透明度的材料形成的下包层; 形成在形成有光波导的下包层的芯层，由具有比下包层更高的折射率的第一光聚合物形成的线状部和由具有第二光聚合物的第二光聚合物形成的弯曲部构成的波导构成的波导管， 比第一光学聚合物更高的折射率; 以及由包围波导芯层的折射率低于第一和第二光学聚合物的材料形成的上部包层。 具有线性和弯曲部分的光波导具有降低的行进损耗和光纤耦合损耗，并且使波导横截面的尺寸最小化。

公开(公告)号：US20080135169A1

公开(公告)日：2008-06-12

申请号：US11794767

申请日：2005-06-30

申请人： Tae Hyung Rhee ,  Hyung Jae Lee ,  Tae Hun Kim

发明人： Tae Hyung Rhee ,  Hyung Jae Lee ,  Tae Hun Kim

IPC分类号： G02B6/287

CPC分类号： G02B6/12016 ,  G02B6/1203 ,  G02B6/12033 ,  Y10T156/1062

摘要： Center wavelength of AWG is shifted due to the temperature variation. This invention described the method to compensate temperature dependency of center wavelength by adjusting optical input position passively by cutting the interface between the input slap waveguide (3) of AWG and the stripe waveguide circuit (1) connected to the input slab on a AWG chip, followed by attaching the lateral sliding rod (10) which has the larger CTE (Coefficient of Thermal Expansion) than AWG chip substrate (6). These cut-elements are passively re-aligned on the top surface of the alignment base substrate (7). At this process, the cut-element (6b) of AWG main body is firmly adhered on the alignment base substrate (7), and the cut-element (6a) of the stripe waveguide circuit (1) connected to the input slab is attached to the lateral sliding rod (10), which enables the position movement upon the temperature variation. The gap (16) between the facets (12a, 12b) of re-aligned two cut-elements (6a, 6b) is maintained by inserting thin film (8) followed by filling gap-fill material (9) with no flowing nature in order to minimize the degradation of the optical characteristics as well as to maintain the free lateral movement between these two cut-elements (6a, 6b).

摘要翻译： AWG的中心波长由于温度变化而偏移。 本发明描述了通过在AWG芯片上切割连接到输入板的条纹波导电路（1）之间的界面，通过切割AWG的输入波导波导（3）之间的界面来动态地调节光输入位置来补偿中心波长的温度依赖性的方法。 然后安装具有比AWG芯片基板（6）更大的CTE（热膨胀系数）的侧滑杆（10）。 这些切割元件被动地在对准基底基板（7）的顶表面上重新对准。 在该过程中，AWG主体的切割元件（6b）牢固地粘合在对准基板（7）上，条形波导电路（1）的切割元件（6a）连接到输入板 附接到横向滑动杆（10），这使得能够在温度变化时的位置移动。 重新排列的两个切割元件（6a，6b）的小平面（12a，12b）之间的间隙（16）通过插入薄膜（8），然后用间隙填充材料（9）填充来保持， 没有流动性质，以便最小化光学特性的劣化以及保持这两个切割元件（6a，6b）之间的自由横向移动。

公开(公告)号：US06404957B1

公开(公告)日：2002-06-11

申请号：US09186358

申请日：1998-11-05

申请人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

发明人： Sang-yung Shin ,  Hyun-chae Song ,  Sang-yun Yi ,  Woo-hyuk Jang ,  Tae-hyung Rhee

IPC分类号： G02B626

CPC分类号： G02B6/125 ,  G02B2006/1215

摘要： An optical power divider using a beam separator and a beam expander, and a fabrication method therefor. The optical power divider includes an input optical waveguide having an input port for receiving incident light, for guiding the light incident via the input port, a plurality of output optical waveguides having at least two output ports, for outputting the light incident via the input optical waveguide to the output ports, wherein the number of output optical waveguides is equal to that of the output ports, and a beam separator located at a branch area in which the light incident on the input optical waveguide diverges toward the output optical waveguides, the beam separator being made of a material having a refractive index lower than the core of the input and output optical waveguides, for separating the light to the output optical waveguides with a predetermined ratio. Therefore, the length of the optical power divider becomes short and insertion loss can be lowered. Also, an optical power divider for the special application, providing different splitting ratios between inner and outer output ports, can be easily designed by controlling the lengths of a side of each beam separator and beam expanders, and the splitting ratio of the output optical power of the optical power divider can be controlled. Also, the cost of fabricating the optical power divider can be reduced.

摘要翻译： 一种使用光束分离器和光束扩展器的光功率分配器及其制造方法。 光功率分配器包括输入光波导，其具有用于接收入射光的输入端口，用于引导经由输入端口入射的光;多个输出光波导，具有至少两个输出端口，用于输出经由输入光学器件入射的光 波导到输出端口，其中输出光波导的数量等于输出端口的数量;以及位于入射到输入光波导的光向输出光波导发散的分支区域处的光束分离器，光束 分离器由折射率低于输入和输出光波导的芯的材料制成，用于以预定比例将光分离成输出光波导。 因此，光功率分配器的长度变短，并且可以降低插入损耗。 此外，通过控制每个光束分离器和光束扩展器的一侧的长度以及输出光焦度的分离比，可以容易地设计用于特殊应用的光功率分配器，其在内部和外部输出端口之间提供不同的分离比 的光功率分配器可以控制。 此外，可以降低制造光功率分配器的成本。

公开(公告)号：US06210867B1

公开(公告)日：2001-04-03

申请号：US09031064

申请日：1998-02-26

申请人： Byong-gwon You ,  Hyung-jae Lee ,  Tae-hyung Rhee ,  Yong-woo Lee

发明人： Byong-gwon You ,  Hyung-jae Lee ,  Tae-hyung Rhee ,  Yong-woo Lee

IPC分类号： G02F135

CPC分类号： G02F1/365 ,  G02B2006/12069 ,  G02B2006/12142 ,  G02B2006/12145 ,  G02B2006/12147 ,  G02B2006/12159 ,  G02F1/065

摘要： A method for fabricating low-loss optically active device having an optical waveguide constructed of an optical waveguide core region (non-linear core region) necessitating the non-linear effect when waveguiding an optical signal, and an optical waveguide core region (linear core region) not necessitating the non-linear effect, the method includes method for fabricating an optically active device having an optical waveguide constructed of an optical waveguide core region (non-linear core region) necessitating the non-linear effect when waveguiding an optical signal, and an optical waveguide core region (linear core region) not necessitating the non-linear effect, the method includes the steps of: forming a lower clad layer having a refractive index lower than the material of the waveguide core regions and optical transparency on a substrate, forming a linear optical polymer layer on the lower clad layer by coating linear optical polymer having a refractive index lower than the material of the lower clad layer, forming a first metal layer at a region on the lower clad layer, other than the regions where the waveguide is to be disposed, etching a linear optical polymer layer without the first metal layer formed thereon, forming a non-linear optical polymer layer on the substrate having the non-linear core region, removing the non-linear optical polymer layer stacked to be higher than the waveguide core regions, removing the first metal layer, forming a second metal layer on the waveguide from which the first metal layer is removed, removing the linear optical polymer of the non-second metal layer portion, and forming an upper clad layer on the substrate with the linear optical polymer using a material having a refractive index lower than the waveguide core regions and optical transparency. The waveguide is formed using non-linear optical polymer only at the region where the non-linear effect such as optical modulation or optical switching occurs, and is formed using linear optical polymer at the remaining regions, thereby minimizing the overall waveguiding loss of the waveguide.

公开(公告)号：US06177290B1

公开(公告)日：2001-01-23

申请号：US09184232

申请日：1998-11-02

申请人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

发明人： Woo-hyuk Jang ,  Sang-yun Yi ,  Byong-gwon You ,  Jung-hee Kim ,  Tae-hyung Rhee

IPC分类号： H01L2131

CPC分类号： C03C17/02 ,  C03C17/3411 ,  C03C2218/33 ,  G02B6/136 ,  G02B2006/1215

摘要： A method of fabricating a planar optical waveguide in one chamber, comprising the steps of depositing a cladding layer and a core layer on a substrate, depositing an etch mask layer on the core layer, and forming a photoresist pattern on the etch mask layer. An etch mask pattern is formed by etching the etch mask layer according to the photoresist pattern using a first gas which reacts with the material of the etch mask layer, and removing the first gas. An optical waveguide is formed by etching the core layer according to the etch mask pattern using a second gas which reacts with the material of the core layer in the same chamber as the chamber where the above steps were performed, and removing the photoresist pattern and the second gas. The etch mask pattern is removed using the first gas which reacts with the material of the etch mask pattern in the same chamber as the chamber where the above steps were performed, and removing the first gas, and depositing an upper cladding layer formed of the same material as the core layer on the resultant structure of the above step. Accordingly, processes for fabricating an optical waveguide can be continuously performed in one chamber, thus simplifying and automating the optical waveguide fabrication method.

摘要翻译： 一种在一个室中制造平面光波导的方法，包括以下步骤：在衬底上沉积包覆层和芯层，在芯层上沉积蚀刻掩模层，以及在蚀刻掩模层上形成光致抗蚀剂图案。 通过使用与蚀刻掩模层的材料反应并且去除第一气体的第一气体，根据光致抗蚀剂图案蚀刻蚀刻掩模层来形成蚀刻掩模图案。 通过使用与在上述步骤的室相同的室中与芯层的材料反应的第二气体根据蚀刻掩模图案蚀刻芯层来形成光波导，并且去除光致抗蚀剂图案和 第二气。 使用与在其中执行上述步骤的室相同的腔室中与蚀刻掩模图案的材料反应的第一气体去除蚀刻掩模图案，并且去除第一气体，并沉积由其形成的上覆层 材料作为上述步骤的结果结构上的核心层。 因此，可以在一个室中连续地进行制造光波导的工艺，从而简化和自动化光波导制造方法。