公开(公告)号：US20040184709A1

公开(公告)日：2004-09-23

申请号：US10712200

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US20040118481A1

公开(公告)日：2004-06-24

申请号：US10727191

申请日：2003-12-03

Applicant: Xerox Corporation.

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01F001/03

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

公开(公告)号：US20030057977A1

公开(公告)日：2003-03-27

申请号：US10225555

申请日：2002-08-21

Applicant: Xerox Corporation

Inventor： Alan J. Werner JR. ,  Fred F. Hubble III ,  Stanley J. Wallace ,  R. Enrique Viturro ,  Eric Peeters ,  Joel A. Kubby

IPC: G01R029/12 ,  G01R031/02

CPC classification number: G01R29/12

Abstract: An electrostatic type voltmeter for measuring the potential on a surface, the voltmeter including a probe; a support for supporting the probe in spaced relationship with the surface, the probe having a plurality of spacing element sites thereon for measuring a distance between each of the plurality of spacing element sites and a corresponding area on the surface opposite of each of the plurality of spacing element sites; a plurality of electrostatic element sites, intermixed and adjacent to the plurality of spacing element sites on the probe, for measuring a voltage between each of the plurality of spacing element sites and an area on the surface adjacent to the corresponding area opposite of each of the plurality of spacing element sites. A processor for compensating an output signal of the probe in response to the measurements received from the plurality of spacing element sites and the plurality of electrostatic element sites.

Abstract translation: 一种用于测量表面上的电位的静电型电压表，所述电压表包括探针; 用于支撑所述探针与所述表面间隔开的关系，所述探针在其上具有多个间隔元件位置，用于测量所述多个间隔元件位置中的每一个之间的距离以及与所述多个 间距单元; 多个静电元件位置，与探针上的多个间隔元件位置相互混合并相邻，用于测量多个间隔元件位置中的每一个之间的电压，以及与表面上相邻的相应区域相邻的表面上的区域 多个间距元件位置。 一种处理器，用于响应于从多个间隔元件位置和多个静电元件位点接收的测量值来补偿探针的输出信号。

公开(公告)号：US20040184760A1

公开(公告)日：2004-09-23

申请号：US10721724

申请日：2003-11-24

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kristine A. German ,  Peter M. Gulvin

IPC: G02B006/00

CPC classification number: G02B6/3508 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12145

Abstract: Methods for applying electrical stimuli to optical micro-electro-mechanical system (MEMS) devices are disclosed. Electrical stimuli may be applied to one or more released current carrying elements mounted above a supporting substrate biased to minimize electrostatic force between the one or more current released current carrying elements and the supporting substrate. Additionally, the electrical stimuli bias minimizes electrical potential difference between the one or more released current carrying elements and one or more non-current carrying elements mounted above the supporting substrate that come in contact or close proximity during operation of the one or more released current carrying elements.

Abstract translation: 公开了将电刺激应用于光学微机电系统（MEMS）装置的方法。 可以将电刺激施加到安装在支撑基板上方的一个或多个释放的载流元件，偏置以最小化一个或多个电流释放的载流元件与支撑基板之间的静电力。 此外，电刺激偏压最小化一个或多个释放的载流元件与安装在支撑基板上方的一个或多个非电流承载元件之间的电势差，该一个或多个非电流承载元件在一个或多个释放的电流载体的操作期间接触或接近 元素。

公开(公告)号：US20020168144A1

公开(公告)日：2002-11-14

申请号：US09844574

申请日：2001-04-30

Applicant: Xerox Corporation

Inventor： Jingkuang Chen ,  Joel A. Kubby ,  Decai Sun

IPC: G02B006/26 ,  G02B006/30

CPC classification number: G02B6/35 ,  G02B6/3512 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3598 ,  G02B6/4214

Abstract: A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.

Abstract translation: 基于MEMS的可调镜组件可以更快，更低成本，更容易地将光纤对准衬底。 形成在基板上的移动镜允许在安装光纤后调整光路，之后将镜子固定到位以防止未对准。

公开(公告)号：US20040145738A1

公开(公告)日：2004-07-29

申请号：US10672207

申请日：2003-09-26

Applicant: Xerox Corporation

Inventor： Decai Sun ,  Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran ,  Patrick Y. Maeda

IPC: G01J003/28

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/20

Abstract: A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.

Abstract translation: 具有旋转圆柱反射衍射光栅的可调谐微机电（MEMS）分光光度计与单片硅衬底上的Rowland圆上的光电检测器和光纤光源集成。

公开(公告)号：US20030087468A1

公开(公告)日：2003-05-08

申请号：US09986107

申请日：2001-11-07

Applicant: XEROX CORPORATION

Inventor： Peter M. Gulvin ,  Elliott A. Eklund ,  Joel A. Kubby

IPC: H01L021/00

CPC classification number: B81C1/00476 ,  B81B2203/0127 ,  B81C2201/053

Abstract: A structure for a micro-device is fabricated by forming: a first layer of sacrificial material, a layer of structural material over the first sacrificial material layer, a second layer of sacrificial material over the structural material layer and a protective layer over the second sacrificial material layer. A release etch is used to remove the first and second sacrificial material layers at approximately the same rate. A structural feature may also be fabricated by forming: a first layer of a first material; a layer of structural material over the first layer of the first material; at least one cut in the structural material layer; and, a first layer of a sacrificial material, different from the first material, over the structural material layer such that an interface is created between the first layer of the sacrificial material and the first layer of the first material at the at least one cut.

Abstract translation: 通过在第一牺牲材料层上形成第一牺牲材料层，结构材料层，在结构材料层上形成第二牺牲材料层，在第二牺牲层上形成保护层，制成微器件结构 材料层。 使用释放蚀刻以大致相同的速率去除第一和第二牺牲材料层。 还可以通过形成第一材料的第一层来制造结构特征; 在第一材料的第一层上方的结构材料层; 在结构材料层中至少有一个切口; 以及在所述结构材料层上方的与所述第一材料不同的牺牲材料的第一层，使得在所述牺牲材料的第一层和所述至少一个切口处的所述第一材料的所述第一层之间形成界面。

公开(公告)号：US20010023523A1

公开(公告)日：2001-09-27

申请号：US09863637

申请日：2001-05-23

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Jingkuang Chen ,  Feixia Pan

IPC: H04R017/00 ,  B23P017/00

CPC classification number: H04R17/00 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2002/041 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49156 ,  Y10T29/49401

Abstract: A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.

Abstract translation: 公开了容易在标准多晶硅表面微加工工艺中制造的微机电流体喷射器，其可以使用现有的外部铸造能力以低成本批量制造。 此外，表面微加工工艺已被证明与集成的微电子学兼容，允许致动器与寻址电子器件的单片集成。 还公开了用于致动可变形膜的电源的电压驱动模式和充电驱动模式。

公开(公告)号：US20040184720A1

公开(公告)日：2004-09-23

申请号：US10703382

申请日：2003-11-07

Applicant: Xerox Corporation

Inventor： Joel A. Kubby

IPC: G02B006/26

CPC classification number: G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US20040184710A1

公开(公告)日：2004-09-23

申请号：US10712203

申请日：2003-11-12

Applicant: Xerox Corporation

Inventor： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC: G02B006/26

CPC classification number: G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B2006/12145

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an MnullN optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

Abstract translation: 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重构光插座多路复用器（ROADM）。