公开(公告)号：US09488468B2

公开(公告)日：2016-11-08

申请号：US14051855

申请日：2013-10-11

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Atsushi Tsujii ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01B11/14 ,  G01J3/28 ,  G01N21/55 ,  G01N21/25 ,  G01J1/04 ,  G01J1/42 ,  G01J3/42 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18 ,  G01B11/02 ,  G01B11/06 ,  G01J3/50

CPC classification number: G01B11/14 ,  G01B11/026 ,  G01B11/0608 ,  G01B2210/50 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/42 ,  G01J3/50

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract translation: 位移传感器包括：光源单元，被配置为沿着与平面测量对象的测量区域倾斜的方向施加不同多个波长的光;配置为测量由测量区域反射的光的光谱分布的分光镜;特征量提取模块 被配置为提取频谱分布的特征量;以及位移计算模块，被配置为基于所提取的特征量以及位移与先前获得的特征量之间的关系来计算测量区域的位移。

公开(公告)号：US09605949B2

公开(公告)日：2017-03-28

申请号：US15287869

申请日：2016-10-07

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Atsushi Tsujii ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01J3/00 ,  G01J3/04 ,  G01J3/42 ,  G01J3/52 ,  G01N21/55 ,  G01B11/14 ,  G01J3/02 ,  G01J3/50

CPC classification number: G01B11/14 ,  G01B11/026 ,  G01B11/0608 ,  G01B2210/50 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/42 ,  G01J3/50

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

公开(公告)号：US10982949B2

公开(公告)日：2021-04-20

申请号：US16697180

申请日：2019-11-27

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kazufumi Nishida ,  Hitoshi Hara ,  Kazuki Setsuda

IPC: G01B11/06 ,  G01N21/27 ,  G01N21/64

Abstract: A measurement apparatus includes a detection unit to detect a first light intensity of a light obtained by making a first light having a first wavelength transmitted through a measurement object, a second light intensity of a light obtained by making a second light having a second wavelength transmitted through the object, the second wavelength having a lower rate of absorption by a material of the object than the first wavelength, and a third light intensity of a light obtained by making a third light having a third wavelength transmitted through the object, the third wavelength having a lower rate of absorption by the material of the object than the first wavelength and having a lower rate of absorption by the object containing a fluid than the second wavelength, and a calculation unit to calculate the thickness of the object by using the first, second, and third light intensities.

公开(公告)号：US10345231B2

公开(公告)日：2019-07-09

申请号：US15822398

申请日：2017-11-27

Applicant: Yokogawa Electric Corporation

Inventor： Kazuki Setsuda ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01N21/3559 ,  H03F3/08 ,  G01N21/31 ,  G01N21/359

Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.

公开(公告)号：US20230384159A1

公开(公告)日：2023-11-30

申请号：US18201857

申请日：2023-05-25

Applicant: Yokogawa Electric Corporation

Inventor： Ryutaro Maki ,  Kazufumi Nishida

IPC: G01J3/50 ,  G01J3/10 ,  G01J3/02

CPC classification number: G01J3/501 ,  G01J3/10 ,  G01J3/0251 ,  G01J2003/102

Abstract: A colorimeter 1 that measures a chromaticity of a measured object A comprises: a first light source unit 11 that emits first irradiation light having a first spectrum S1; a second light source unit 12 that emits second irradiation light having a second spectrum S2 different from the first spectrum S1; an integrating sphere 61 that has irradiation light including the first irradiation light and the second irradiation light incident thereon; a light receiver 20 that detects measured light resulting from irradiation of the measured object A with the irradiation light emitted from the integrating sphere 61; and a controller 50 that calculates an optical spectrum of the measured light based on a detection signal of the measured light. A superimposed spectrum S of the first spectrum S1 and the second spectrum S2 corresponds to a reference spectrum S0 of a standard light source as reference for calculating the chromaticity.

公开(公告)号：US20230062325A1

公开(公告)日：2023-03-02

申请号：US17822661

申请日：2022-08-26

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kazufumi Nishida ,  Kumiko Horikoshi ,  Hitoshi Hara

IPC: G02B1/18 ,  G02B5/10 ,  G02B5/02

Abstract: An integrating sphere (10) of the present disclosure includes a hollow member (1) and a diffusive coating (4), on the inner surface of the hollow member (1), configured to scatter and reflect light from a light source within the hollow member (1) to yield diffused light. The diffusive coating (4) is coated with a hydrophobic coating (5). The accuracy of optical measurements using the integrating sphere (10) is improved by suppressed moisture absorption of the integrating sphere (10) and suppressed fluctuations in the efficiency of the integrating sphere (10).