公开(公告)号：US09605949B2

公开(公告)日：2017-03-28

申请号：US15287869

申请日：2016-10-07

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Atsushi Tsujii ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01J3/00 ,  G01J3/04 ,  G01J3/42 ,  G01J3/52 ,  G01N21/55 ,  G01B11/14 ,  G01J3/02 ,  G01J3/50

CPC classification number: G01B11/14 ,  G01B11/026 ,  G01B11/0608 ,  G01B2210/50 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/42 ,  G01J3/50

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

公开(公告)号：US10481082B2

公开(公告)日：2019-11-19

申请号：US16026759

申请日：2018-07-03

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kazuki Setsuda ,  Naomichi Chida

IPC: G01N21/86 ,  G01N21/25 ,  G01N21/3559 ,  G01N21/31 ,  G01N33/34 ,  G01N33/44

Abstract: A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.

公开(公告)号：US20190011353A1

公开(公告)日：2019-01-10

申请号：US16026759

申请日：2018-07-03

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Kazuki Setsuda ,  Naomichi Chida

IPC: G01N21/25 ,  G01N21/31

CPC classification number: G01N21/255 ,  G01N21/3103 ,  G01N21/3559 ,  G01N21/86 ,  G01N33/346 ,  G01N33/442 ,  G01N2021/3148 ,  G01N2021/8636 ,  G01N2021/8663 ,  G01N2021/869 ,  G01N2201/061

Abstract: A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.

公开(公告)号：US20150090885A1

公开(公告)日：2015-04-02

申请号：US14388298

申请日：2013-03-28

Applicant: YOKOGAWA ELECTRIC CORPORATION,

Inventor： Yasushi Ichizawa ,  Kumiko Horikoshi ,  Kazuki Setsuda ,  Naomichi Chida

IPC: G01N21/3559 ,  G01N21/86 ,  G01N21/59

CPC classification number: G01N21/3559 ,  G01N21/59 ,  G01N21/86 ,  G01N2021/3148 ,  G01N2021/3174 ,  G01N2021/3181 ,  G01N2021/8663 ,  G01N2201/0627

Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

Abstract translation: 材料性质测量装置包括：辐射源照射器，被配置为用测量目标材料照射具有n个不同波长的辐射束;检测器，被配置为检测在测量目标材料照射后具有各个波长的辐射束的强度;以及处理 单元，被配置为使用校正系数校正具有至少一部分各个波长的辐射束的检测强度，其中行和列分别由n或更小的阶数的矩阵表示，并且计算指示 基于校正后具有各波长的辐射束的相对强度，测量目标材料的特性。

公开(公告)号：US09488468B2

公开(公告)日：2016-11-08

申请号：US14051855

申请日：2013-10-11

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Atsushi Tsujii ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01B11/14 ,  G01J3/28 ,  G01N21/55 ,  G01N21/25 ,  G01J1/04 ,  G01J1/42 ,  G01J3/42 ,  G01J3/02 ,  G01J3/10 ,  G01J3/18 ,  G01B11/02 ,  G01B11/06 ,  G01J3/50

CPC classification number: G01B11/14 ,  G01B11/026 ,  G01B11/0608 ,  G01B2210/50 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/42 ,  G01J3/50

Abstract: A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

Abstract translation: 位移传感器包括：光源单元，被配置为沿着与平面测量对象的测量区域倾斜的方向施加不同多个波长的光;配置为测量由测量区域反射的光的光谱分布的分光镜;特征量提取模块 被配置为提取频谱分布的特征量;以及位移计算模块，被配置为基于所提取的特征量以及位移与先前获得的特征量之间的关系来计算测量区域的位移。

公开(公告)号：US10345231B2

公开(公告)日：2019-07-09

申请号：US15822398

申请日：2017-11-27

Applicant: Yokogawa Electric Corporation

Inventor： Kazuki Setsuda ,  Naomichi Chida ,  Kazufumi Nishida

IPC: G01N21/3559 ,  H03F3/08 ,  G01N21/31 ,  G01N21/359

Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.

公开(公告)号：US09170194B2

公开(公告)日：2015-10-27

申请号：US14388298

申请日：2013-03-28

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yasushi Ichizawa ,  Kumiko Horikoshi ,  Kazuki Setsuda ,  Naomichi Chida

IPC: G01N21/3559 ,  G01N21/59 ,  G01N21/86 ,  G01J5/02 ,  G01N21/31

CPC classification number: G01N21/3559 ,  G01N21/59 ,  G01N21/86 ,  G01N2021/3148 ,  G01N2021/3174 ,  G01N2021/3181 ,  G01N2021/8663 ,  G01N2201/0627

Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

Abstract translation: 材料性质测量装置包括：辐射源照射器，被配置为用测量目标材料照射具有n个不同波长的辐射束;检测器，被配置为检测在测量目标材料照射后具有各个波长的辐射束的强度;以及处理 单元，被配置为使用校正系数校正具有至少一部分各个波长的辐射束的检测强度，其中行和列分别由n或更小的阶数的矩阵表示，并且计算指示 基于校正后具有各波长的辐射束的相对强度，测量目标材料的特性。