摘要:
An immersion optical system includes a plurality of lenses disposed along a light beam path of the immersion optical system. The plurality of lenses include a liquid immerged lens which is contactable with a liquid layer. An optically conjugate point of an object surface is formed in the light beam path of the immersion optical system. The object surface is contactable with a liquid.
摘要:
An optical system for ultraviolet light includes a plurality of optical elements made of a material transparent to ultraviolet light. At least two of the optical elements are utilized for forming at least one liquid lens group that has a first delimiting optical element, a second delimiting optical element, and a liquid lens, which is arranged in an interspace between the first delimiting optical element and the second delimiting optical element and contains a liquid transparent to ultraviolet light.
摘要:
Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection system and method include a final lens which decreases the marginal ray angle of the optical path before light passes into the immersion liquid to impinge on the image plane.
摘要:
A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.
摘要:
The disclosed overboard extractor provides overboard extraction of compressor fluid at multiple extraction points. The overboard extractor includes multiple extraction manifolds and a delivery manifold for extracting the compressor fluid from the multiple extraction points. The overboard extractor also includes extraction valves and a delivery valve to control the extraction flow through each extraction manifold. The overboard extractor can operate in a delivery mode, a closed loop mode, or a mixed mode.
摘要:
A new and useful imaging concept is provided that is designed to improve the manner in which control information for an imaging optical system such as a lithographic imaging optical system can be generated. An imaging optical system comprises imaging optics defining a primary optical path along which a primary image is imaged, and a measurement optical path is established and includes at least part of the primary optical path. The imaging optical system is configured to obtain information from the measurement optical path for use in providing control information for the imaging optical system. Such a system is particularly useful for measuring the topography of a large region of the surface under investigation, like the entire instantaneous field of a wafer, instead being limited to a small patch or set of patches.
摘要:
This invention concerns a process for the preparation of semicrystalline polycarbonate compositions by synthesizing the polycarbonate in the presence of a sepiolite-type clay as a nucleating agent. The semicrystalline compositions produced are useful as starting materials for the production of high molecular weight polycarbonate by solid state polymerization.
摘要:
Techniques for improving the performance of a data processing apparatus are disclosed. The data processing apparatus is operable to execute a data access instruction which causes a first plurality of data items to be transferred between registers and memory. The data processing apparatus is also operable to transfer a second plurality of data items between the registers and the memory in each processing cycle. The data processing apparatus comprises: decode logic operable in response to receipt of one of the data access instruction to determine a number of reserved processing cycles to be reserved for the execution of the data access instruction, the number of reserved processing cycles being determined to be a number of processing cycles which would enable greater than the first plurality of data items to be transferred in those reserved processing cycles. Hence, a greater number of processing cycles are reserved than are strictly necessary. Whilst it will be appreciated that this may have a slight performance impact on data access instructions which take the minimum possible time to execute, reserving more processing cycles than should be necessary helps to ensure that for those data access instructions which take longer to execute, a replay mechanism is unlikely to need to be invoked. It has been found that such an approach can significantly improve the performance of the data processing apparatus.
摘要:
Macrocyclic polyester oligomers can be manufactured in relatively high yields by contacting, a solution of a low oligomer of an organic diester and a diol, with an N-heterocyclic carbene-containing catalyst.
摘要:
A microprocessor integrated circuit 104 is provided with a trace controller 120 that is responsive to trace initiating conditions to trigger commencement of tracing operation and generation of a trace data stream. In the case of a multi-word data transfer instruction LSM, the trace controller 120 is able to trigger tracing partway through that instruction such that a subset of the transfer specified by that instruction are included within the trace data stream. All transfers subsequent to the triggering transfer may be traced with those transfers subsequent to the triggering transfer being marked with place holder codes rather than more informative full trace data for the triggering transfer.