Projection optical system and method for photolithography and exposure apparatus and method using same
    4.
    发明申请
    Projection optical system and method for photolithography and exposure apparatus and method using same 失效
    投影光学系统及光刻法及曝光装置及其使用方法

    公开(公告)号:US20080068724A1

    公开(公告)日:2008-03-20

    申请号:US11907908

    申请日:2007-10-18

    IPC分类号: G02B1/06

    摘要: A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.

    摘要翻译: 液浸光学系统包括第一光学透明构件和第二光学透明构件,其布置在第一光学透明构件和物体之间的光路中。 第一光学透明构件和第二光学透明构件之间的第一空间可由第一液体填充。 第二光学透明构件和物体之间的第二空间可以用第二液体填充。 第二光学透明构件可拆卸地布置在第一光学透明构件和物体之间的光路中。

    Imaging optical system configured with through the lens optics for producing control information
    6.
    发明申请
    Imaging optical system configured with through the lens optics for producing control information 失效
    成像光学系统通过透镜光学元件配置,用于产生控制信息

    公开(公告)号:US20070080281A1

    公开(公告)日:2007-04-12

    申请号:US11544833

    申请日:2006-10-05

    IPC分类号: G02B27/40

    摘要: A new and useful imaging concept is provided that is designed to improve the manner in which control information for an imaging optical system such as a lithographic imaging optical system can be generated. An imaging optical system comprises imaging optics defining a primary optical path along which a primary image is imaged, and a measurement optical path is established and includes at least part of the primary optical path. The imaging optical system is configured to obtain information from the measurement optical path for use in providing control information for the imaging optical system. Such a system is particularly useful for measuring the topography of a large region of the surface under investigation, like the entire instantaneous field of a wafer, instead being limited to a small patch or set of patches.

    摘要翻译: 提供了一种新的有用的成像概念,其被设计为改善可以生成诸如光刻成像光学系统的成像光学系统的控制信息的方式。 成像光学系统包括成像光学器件,其限定主要成像的主要光学路径,建立测量光学路径并且包括主要光学路径的至少一部分。 成像光学系统被配置为从用于提供成像光学系统的控制信息的测量光路获得信息。 这样的系统对于测量正在研究的表面的大区域的形貌特别有用,如晶片的整个瞬时场,而不是局限于小的贴片或一组贴片。

    Rapidly crystallizing polycarbonate composition

    公开(公告)号:US20060276580A1

    公开(公告)日:2006-12-07

    申请号:US11292457

    申请日:2005-12-02

    申请人: David Williamson

    发明人: David Williamson

    IPC分类号: C08K9/04

    摘要: This invention concerns a process for the preparation of semicrystalline polycarbonate compositions by synthesizing the polycarbonate in the presence of a sepiolite-type clay as a nucleating agent. The semicrystalline compositions produced are useful as starting materials for the production of high molecular weight polycarbonate by solid state polymerization.

    Performance of a data processing apparatus
    8.
    发明申请
    Performance of a data processing apparatus 审中-公开
    数据处理装置的性能

    公开(公告)号:US20060218124A1

    公开(公告)日:2006-09-28

    申请号:US11085254

    申请日:2005-03-22

    IPC分类号: G06F17/30

    摘要: Techniques for improving the performance of a data processing apparatus are disclosed. The data processing apparatus is operable to execute a data access instruction which causes a first plurality of data items to be transferred between registers and memory. The data processing apparatus is also operable to transfer a second plurality of data items between the registers and the memory in each processing cycle. The data processing apparatus comprises: decode logic operable in response to receipt of one of the data access instruction to determine a number of reserved processing cycles to be reserved for the execution of the data access instruction, the number of reserved processing cycles being determined to be a number of processing cycles which would enable greater than the first plurality of data items to be transferred in those reserved processing cycles. Hence, a greater number of processing cycles are reserved than are strictly necessary. Whilst it will be appreciated that this may have a slight performance impact on data access instructions which take the minimum possible time to execute, reserving more processing cycles than should be necessary helps to ensure that for those data access instructions which take longer to execute, a replay mechanism is unlikely to need to be invoked. It has been found that such an approach can significantly improve the performance of the data processing apparatus.

    摘要翻译: 公开了一种用于提高数据处理装置的性能的技术。 数据处理装置可操作以执行数据访问指令,该指令使得在寄存器和存储器之间传送第一多个数据项。 数据处理装置还可操作以在每个处理周期中在寄存器和存储器之间传送第二多个数据项。 数据处理装置包括:解码逻辑,可响应于数据访问指令之一的接收而被操作,以确定待保留用于执行数据访问指令的保留处理周期的数量,保留的处理周期数被确定为 多个处理周期将使得能够在那些保留的处理周期中大于第一多个数据项被传送。 因此,保留比严格必要的更多的处理周期。 虽然可以理解,这可能对数据访问指令具有轻微的性能影响,数据访问指令需要尽可能少的执行时间,保留比应该需要更多的处理周期,有助于确保对于执行更长时间的那些数据访问指令, 重播机制不太可能需要被调用。 已经发现,这种方法可以显着地提高数据处理装置的性能。

    Manufacture of macrocyclic polyester oligomers
    9.
    发明申请
    Manufacture of macrocyclic polyester oligomers 审中-公开
    制造大环聚酯低聚物

    公开(公告)号:US20060128935A1

    公开(公告)日:2006-06-15

    申请号:US11270020

    申请日:2005-11-09

    IPC分类号: C08G63/02

    摘要: Macrocyclic polyester oligomers can be manufactured in relatively high yields by contacting, a solution of a low oligomer of an organic diester and a diol, with an N-heterocyclic carbene-containing catalyst.

    摘要翻译: 通过使有机二酯和二醇的低聚物的溶液与含有N-杂环卡宾的催化剂接触,可以以相对高的产率制备大环聚酯低聚物。

    Tracing multiple data access instructions
    10.
    发明申请

    公开(公告)号:US20060117229A1

    公开(公告)日:2006-06-01

    申请号:US11264006

    申请日:2005-11-02

    IPC分类号: G06F11/00

    CPC分类号: G06F11/348 G06F2201/86

    摘要: A microprocessor integrated circuit 104 is provided with a trace controller 120 that is responsive to trace initiating conditions to trigger commencement of tracing operation and generation of a trace data stream. In the case of a multi-word data transfer instruction LSM, the trace controller 120 is able to trigger tracing partway through that instruction such that a subset of the transfer specified by that instruction are included within the trace data stream. All transfers subsequent to the triggering transfer may be traced with those transfers subsequent to the triggering transfer being marked with place holder codes rather than more informative full trace data for the triggering transfer.