公开(公告)号：US06313906B1

公开(公告)日：2001-11-06

申请号：US09175543

申请日：1998-10-20

申请人： Yasushi Nagasaka ,  Jun Kohsaka ,  Kenji Takeshita

发明人： Yasushi Nagasaka ,  Jun Kohsaka ,  Kenji Takeshita

IPC分类号： G03B2754

CPC分类号： G02B26/123 ,  B41J2/473

摘要： Laser beams LK and LY are respectively emitted from laser diodes 51K and 51Y and incident on a mirror face of a polygon mirror 55 via collimator lenses 52K, 52Y and first cylindrical lenses 53K, 53Y. The laser beams LK and LY are reflected off the polygon mirror 55 and deflected. Incidence angles of the laser beams LK and LY are set so that the laser beams LK and LY intersect with each other at a position P which is located before the polygon mirror 55.

摘要翻译： 激光束LK和LY分别从激光二极管51K和51Y发射并通过准直透镜52K，52Y和第一柱面透镜53K，53Y入射到多面镜55的镜面上。 激光束LK和LY从多面镜55反射并偏转。 激光束LK和LY的入射角被设定为使得激光束LK和LY在位于多面镜55之前的位置P处彼此相交。

公开(公告)号：US06400488B1

公开(公告)日：2002-06-04

申请号：US09669894

申请日：2000-09-27

申请人： Yasushi Nagasaka ,  Jun Kohsaka ,  Kenji Takeshita

发明人： Yasushi Nagasaka ,  Jun Kohsaka ,  Kenji Takeshita

IPC分类号： G02B2608

CPC分类号： G02B26/12 ,  G02B26/121

摘要： A polygon mirror is enclosed in an airtight cap that is provided with a polygon window. By having the normal line to the surface of the polygon window tilt a predetermined angle in the main scanning direction with respect to the principal ray of the light beam that is to be applied to the polygon window, the reflected light, which is a part of the light beam reflected by the surface of the polygon window, is not applied to the image forming area of a photoconductive drum.

摘要翻译： 多面镜被封闭在设有多边形窗口的气密帽中。 通过使多边形窗口的表面的法线相对于要施加到多边形窗口的光束的主光线在主扫描方向上倾斜预定角度，反射光作为 由多边形窗口的表面反射的光束不被施加到感光鼓的图像形成区域。

公开(公告)号：US06341030B1

公开(公告)日：2002-01-22

申请号：US09613829

申请日：2000-07-11

申请人： Kenji Takeshita ,  Jun Kohsaka ,  Yasushi Nagasaka

发明人： Kenji Takeshita ,  Jun Kohsaka ,  Yasushi Nagasaka

IPC分类号： G02B2608

CPC分类号： G02B26/125

摘要： In an optical system, the scanning center axis of a scanning lens, the principal ray of a laser beam applied to the scanning lens, and the rotational axis of a polygon mirror are in one plane. By forming a thin film layer on the deflecting facets, the exposure quantity of a photo conductor, which decreases as the incident angle to the deflecting facet increases, is corrected. The thin film layer has the increasing ratio of the reflectance that increases as the incident angle, which principal ray of the laser beam forms with the normal line to the deflecting facet of the polygon mirror, increases.

摘要翻译： 在光学系统中，扫描透镜的扫描中心轴，施加到扫描透镜的激光束的主射线和多面镜的旋转轴在一个平面中。 通过在偏转小平面上形成薄膜层，校正随着偏转面的入射角度而减小的光导体的曝光量的增加。 薄膜层的反射率的比率随着入射角增加而增加，激光束的主光线与多边形反射镜的偏转小面的法线形成。

公开(公告)号：US5856669A

公开(公告)日：1999-01-05

申请号：US696066

申请日：1996-08-13

申请人： Yasushi Nagasaka ,  Kenji Takeshita ,  Hiroshi Hiraguchi ,  Jun Kohsaka ,  Nobuo Kanai ,  Keiji Ogoh

发明人： Yasushi Nagasaka ,  Kenji Takeshita ,  Hiroshi Hiraguchi ,  Jun Kohsaka ,  Nobuo Kanai ,  Keiji Ogoh

IPC分类号： B41J2/44 ,  B41J2/47 ,  G02B26/10 ,  G02B26/12 ,  G02B27/60

CPC分类号： B41J2/471 ,  G02B26/128 ,  G02B27/60

摘要： A laser beam scanning optical apparatus which has Moire fringes generating elements which is located near a position optically equivalent to a scanning surface and modulates a laser beam emitted from a laser source to generate Moire fringes. The Moire fringes generating elements comprises, for example, a first filter which has spatial grating and a second filter which has spatial grating which slants slightly with respect to the spatial grating of the first filter, the first filter and the second filter being arranged upstream and downstream respectively in an optical path. The laser beam scanning optical apparatus further has a light receiving element for receiving the Moire fringes generated by the Moire fringes generating elements. Focusing means for correcting a position of an image point of the laser beam is driven in accordance with an output of the light receiving element. For example, the light receiving element is a photoelectric element with a plurality of light receiving surfaces, each of which generates an electric signal in accordance with the laser beam incident thereto, and from a phase difference between the electric signals, the position of the image point is detected.

摘要翻译： 一种激光束扫描光学装置，其具有位于光学上等同于扫描表面的位置附近的莫尔条纹产生元件，并且调制从激光源发射的激光束以产生莫尔条纹。 莫尔条纹生成元件包括例如具有空间光栅的第一滤光器和具有相对于第一滤光器的空间光栅稍微倾斜的空间光栅的第二滤光器，第一滤光器和第二滤光器布置在上游， 分别在光路中。 激光束扫描光学装置还具有用于接收由莫尔条纹生成元件产生的莫尔条纹的光接收元件。 根据光接收元件的输出来驱动用于校正激光束的图像点的位置的聚焦装置。 例如，光接收元件是具有多个光接收表面的光电元件，每个光接收表面根据入射到其的激光束产生电信号，并且根据电信号之间的相位差，图像的位置 点检测。

公开(公告)号：US5969346A

公开(公告)日：1999-10-19

申请号：US887460

申请日：1997-07-02

申请人： Yasushi Nagasaka ,  Kenji Takeshita ,  Hiroshi Hiraguchi ,  Jun Kohsaka ,  Nobuo Kanai ,  Keiji Ogoh

发明人： Yasushi Nagasaka ,  Kenji Takeshita ,  Hiroshi Hiraguchi ,  Jun Kohsaka ,  Nobuo Kanai ,  Keiji Ogoh

IPC分类号： G02B26/12 ,  H01J3/14 ,  G01J1/20 ,  G02B26/08

CPC分类号： G02B26/128

摘要： A laser beam scanning optical apparatus which images and scans a laser beam emitted from a laser diode on a photo-sensitive drum through a focusing lens, a polygon mirror and an f.theta. lens. An SOS photosensor detects the scanned laser beam and generates a detection signal. The laser diode is controlled to perform pulse emission a specified time after the generation of the detection signal. The pulse beam is incident to a beam detector which adopts a knife edge method, and the amount of a focal shift is detected. The focusing lens is moved along the optical axis in accordance with the detected amount of a focal shift to correct the position of the image point.

摘要翻译： 一种激光束扫描光学装置，其通过聚焦透镜，多面镜和fθ透镜对从感光鼓上的激光二极管发射的激光束进行成像和扫描。 SOS光电传感器检测扫描的激光束并产生检测信号。 控制激光二极管在产生检测信号之后的指定时间内执行脉冲发射。 脉冲光束入射到采用刀刃法的光束检测器，并检测焦点偏移量。 根据检测到的焦点偏移量，聚焦透镜沿着光轴移动以校正图像点的位置。

公开(公告)号：US06323955B1

公开(公告)日：2001-11-27

申请号：US08972167

申请日：1997-11-17

申请人： Nobuo Kanai ,  Kenji Takeshita ,  Jun Kohsaka

发明人： Nobuo Kanai ,  Kenji Takeshita ,  Jun Kohsaka

IPC分类号： B41B1500

CPC分类号： H04N1/506 ,  B41J11/46 ,  G03G15/011 ,  G03G15/0194 ,  G03G2215/0119 ,  G03G2215/0161

摘要： The image forming apparatus provides a plurality of recording units to form images based on their respective image data, overlaying the images formed by the plurality of recording units on a single transfer member traveling in a predetermined direction, control means to sequentially cause registration patterns of predetermined shape to be formed by the plurality of recording units, and detecting means to detect each registration pattern on the transfer member in at least two locations in both the diretion of travel of the transfer member and a direction perpendicular thereto, and output non-integrated detection values.

摘要翻译： 图像形成装置提供多个记录单元，以基于它们各自的图像数据形成图像，将由多个记录单元形成的图像重叠在沿预定方向行进的单个传送构件上，控制装置依次导致预定的 形状由多个记录单元形成，以及检测装置，用于在传送构件的行进方向和与其垂直的方向上的至少两个位置检测转印构件上的每个配准图案，并输出非集成检测 价值观。

公开(公告)号：US6157478A

公开(公告)日：2000-12-05

申请号：US773644

申请日：1996-12-24

申请人： Toshio Naiki ,  Nobuo Kanai ,  Jun Kohsaka ,  Kenji Takeshita

发明人： Toshio Naiki ,  Nobuo Kanai ,  Jun Kohsaka ,  Kenji Takeshita

IPC分类号： B41J2/44 ,  G02B19/00 ,  G02B26/10 ,  G02B26/12 ,  G02B26/08

CPC分类号： G02B26/123 ,  B41J2/473

摘要： In a multibeam scanning optical apparatus of a type where two parallel lines are simultaneously scanned by two laser beams irradiated from two semiconductor lasers, stable images are formed on the scanned surface by the two laser beams and the cost is reduced. The two laser beams irradiated from the two semiconductor lasers are directed substantially in the same direction through a beam splitter and then shaped by a condenser lens into two luminous fluxes whose optical axes are substantially parallel to each other. In another arrangement, the semiconductor lasers are directly secured to a surface of the beam splitter by use of an ultraviolet setting resin.

摘要翻译： 在通过从两个半导体激光器照射的两个激光束同时扫描两条平行线的多光束扫描光学装置中，通过两个激光束在扫描表面上形成稳定的图像，并降低成本。 从两个半导体激光器照射的两个激光束通过分束器基本上指向相同的方向，然后通过聚光透镜成形为两个光束，其光轴基本上彼此平行。 在另一种布置中，半导体激光器通过使用紫外线固化树脂直接固定到分束器的表面。

公开(公告)号：US5808775A

公开(公告)日：1998-09-15

申请号：US814217

申请日：1997-03-11

申请人： Yoshihiro Inagaki ,  Nobuo Kanai ,  Jun Kohsaka ,  Kenji Takeshita ,  Keiji Ogoh ,  Hidenari Tachibe

发明人： Yoshihiro Inagaki ,  Nobuo Kanai ,  Jun Kohsaka ,  Kenji Takeshita ,  Keiji Ogoh ,  Hidenari Tachibe

IPC分类号： B41J2/44 ,  G02B13/00 ,  G02B13/18 ,  G02B26/10 ,  G02B26/12 ,  G02B26/08

CPC分类号： G02B26/124

摘要： A laser beam scanning optical apparatus which has a laser source unit, a collimator lens, a cylindrical lens, a polygon mirror and a scanning lens with an f.theta. function. The collimator lens is a bifocal lens, and because of the bifocal collimator lens, a part of the laser beam is focused on a point before the surface of a photosensitive member, and another part of the laser beam is focused on a point after the surface of the photosensitive member. Also, the cylindrical lens can be a bifocal lens. In this case, even when the magnification ratio in the sub scanning direction is designed small, the focal length of the cylindrical lens does not have to be lengthened.

摘要翻译： 一种具有激光源单元，准直透镜，柱面透镜，多面镜和具有fθ函数的扫描透镜的激光束扫描光学装置。 准直透镜是双焦点透镜，并且由于双焦点准直透镜，激光束的一部分聚焦在感光构件表面之前的点，并且激光束的另一部分聚焦在表面之后的点 的光敏元件。 此外，柱面透镜可以是双焦点透镜。 在这种情况下，即使将副扫描方向的倍率设计得较小，也不必延长柱面透镜的焦距。

公开(公告)号：US20120276747A1

公开(公告)日：2012-11-01

申请号：US13096697

申请日：2011-04-28

申请人： Youn-Jin Oh ,  Kenji Takeshita ,  Hitoshi Takahashi

发明人： Youn-Jin Oh ,  Kenji Takeshita ,  Hitoshi Takahashi

IPC分类号： H01L21/3065 ,  H01L21/308

CPC分类号： H01L21/31144 ,  H01L21/31116 ,  H01L21/31138

摘要： A method for etching features in an etch layer is provided. An organic mask layer is etched, using a hard mask as an etch mask. The hard mask is removed, by selectively etching the hard mask with respect to the organic mask and etch layer. Features are etched in the etch layer, using the organic mask as an etch mask.

摘要翻译： 提供了一种用于蚀刻蚀刻层中的特征的方法。 使用硬掩模作为蚀刻掩模蚀刻有机掩模层。 通过相对于有机掩模和蚀刻层选择性地蚀刻硬掩模，去除硬掩模。 在蚀刻层中蚀刻特征，使用有机掩模作为蚀刻掩模。

公开(公告)号：US20110097904A1

公开(公告)日：2011-04-28

申请号：US12604224

申请日：2009-10-22

申请人： Stephen M. Sirard ,  Kenji Takeshita ,  Andrew D. Bailey, III

发明人： Stephen M. Sirard ,  Kenji Takeshita ,  Andrew D. Bailey, III

IPC分类号： H01L21/3065

CPC分类号： H01L21/3105 ,  H01L21/76814 ,  H01L21/76826

摘要： A method for repairing damage to a silicon based low-k dielectric layer with organic compounds, where damage replaces a methyl attached to silicon with a hydroxyl attached to silicon is provided. A repair gas comprising CH4 gas is provided. The repair gas is formed into a plasma, while maintaining a pressure below 50 mTorr. Hydroxyl attached to silicon is replaced with methyl from the plasma formed by the repair gas.

摘要翻译： 提供了用有机化合物修复对基于硅的低k电介质层的损伤的方法，其中损伤用连接到硅上的羟基连接到硅上的甲基替代。 提供了包含CH 4气体的修复气体。 将修复气体形成为等离子体，同时保持低于50mTorr的压力。 与由修复气体形成的等离子体中的被甲基取代的羟基被甲基取代。