摘要:
A liquid circulation unit adapted to be provided in a liquid circulation apparatus to circulate a liquid, including, a first liquid storage unit to store the liquid, a sensor to detect a fluid level of the liquid stored in the first liquid storage unit, a liquid sending pump to send the liquid to an outside from the first liquid storage unit based on a detection result of the sensor, a pipe arrangement for deaeration to remove a dissolved gas in the liquid sent from the liquid sending pump, a filter to remove an impurity in the liquid sent from the liquid sending pump, a diaphragm valve which opens when the liquid is sent to the outside from the first liquid storage unit, and a cock valve which opens when the liquid is sent to the first liquid storage unit from the outside, wherein the liquid circulation unit is adapted to be provided so as to be detachable to or from the liquid circulation apparatus.
摘要:
A liquid circulation unit adapted to be provided in a liquid circulation apparatus to circulate a liquid, including, a first liquid storage unit to store the liquid, a sensor to detect a fluid level of the liquid stored in the first liquid storage unit, a liquid sending pump to send the liquid to an outside from the first liquid storage unit based on a detection result of the sensor, a pipe arrangement for deaeration to remove a dissolved gas in the liquid sent from the liquid sending pump, a filter to remove an impurity in the liquid sent from the liquid sending pump, a diaphragm valve which opens when the liquid is sent to the outside from the first liquid storage unit, and a cock valve which opens when the liquid is sent to the first liquid storage unit from the outside, wherein the liquid circulation unit is adapted to be provided so as to be detachable to or from the liquid circulation apparatus.
摘要:
According to one embodiment, a coating apparatus includes, a stage which supports an object of coating, and a coating head integrally includes a material discharge unit, which is movable relative to the stage and configured to discharge a coating material to the object of coating on the stage, and a gas injection unit, which, along with the material discharge unit, is movable relative to the stage and configured to inject a gas to the object of coating on the stage.
摘要:
Provided is a droplet jetting applicator including: a droplet jetting head configured to jet liquid supplied from a liquid storage unit; a liquid supply unit configured to supply the liquid from the liquid storage unit to the droplet jetting head through a liquid supply channel; a first buffer liquid reservoir positioned closer to the droplet jetting head than the liquid supply unit in the liquid supply channel, and formed so that the inflow liquid drops thereinto; a liquid return unit configured to return the liquid from the droplet jetting head to one of the liquid storage unit and the first buffer liquid reservoir through a liquid return channel; and a second buffer liquid reservoir positioned closer to the droplet jetting head than the liquid return unit in the liquid return channel, and formed so that the inflow liquid drops thereinto.
摘要:
Provided is a droplet jetting applicator including: a droplet jetting head configured to jet liquid supplied from a liquid storage unit; a liquid supply unit configured to supply the liquid from the liquid storage unit to the droplet jetting head through a liquid supply channel; a first buffer liquid reservoir positioned closer to the droplet jetting head than the liquid supply unit in the liquid supply channel, and formed so that the inflow liquid drops thereinto; a liquid return unit configured to return the liquid from the droplet jetting head to one of the liquid storage unit and the first buffer liquid reservoir through a liquid return channel; and a second buffer liquid reservoir positioned closer to the droplet jetting head than the liquid return unit in the liquid return channel, and formed so that the inflow liquid drops thereinto.
摘要:
A method for manufacturing a product includes: filling, with a dispersion medium, an internal flow path and a liquid chamber of a droplet-jetting head for jetting droplets of liquid filled in the liquid chamber through the internal flow path, the internal flow path and the liquid chamber communicating with each other; filling the internal flow path and the liquid chamber of the droplet-jetting head with a dispersion liquid containing particles in place of the dispersion medium filled in the internal flow path and the liquid chamber; and applying the dispersion liquid droplets onto an object to be coated from the droplet-jetting head filled with the dispersion liquid.
摘要:
According to one embodiment, a film-forming apparatus includes a coating unit which introduces a liquid material to a substrate with a groove and fills the liquid material into the groove, thereby forming a liquid layer, a drying unit which solidifies the liquid layer by drying, and a vapor supply unit which applies a vapor to a surface of the liquid layer during the drying
摘要:
A droplet jetting applicator includes a coating unit jetting and coating droplets to a to-be-coated object; a storage space storing the to-be-coated object coated with the droplets; an exhaust section exhausting gas in the storage space; an adjustment unit adjusting an outlet flow of the gas exhausted by the exhaust section from the storage space; and a control section controlling the adjustment unit so that the outlet flow is changed in a stepwise manner.
摘要:
Liquid-drops of a coating liquid, which contain a plurality of solvents having different boiling points, are jet coated onto a surface of a material to be coated. After that, the coating liquid coated on the surface of the coated material are heated while sequentially increasing a heating temperature according to each boiling point temperature of the plurality of solvents in the coating liquid, and are dried.
摘要:
A droplet jetting applicator includes a coating unit jetting and coating droplets to a to-be-coated object; a storage space storing the to-be-coated object coated with the droplets; an exhaust section exhausting gas in the storage space; an adjustment unit adjusting an outlet flow of the gas exhausted by the exhaust section from the storage space; and a control section controlling the adjustment unit so that the outlet flow is changed in a stepwise manner.