Non-destructive root cause analysis on blocked contact or via
    1.
    发明授权
    Non-destructive root cause analysis on blocked contact or via 有权
    对破坏性接触或通过的非破坏性根本原因分析

    公开(公告)号:US06777676B1

    公开(公告)日:2004-08-17

    申请号:US10303267

    申请日:2002-11-21

    CPC classification number: G01N23/225 H01J2237/2561

    Abstract: Disclosed are apparatus and methods for characterizing a potential defect of a semiconductor structure. A charged particle beam is scanned over a structure which has a potential defect. X-rays are detected from the scanned structure. The X-rays are in response to the charged particle beam being scanned over the structure. The potential defect of the scanned structure is characterized based on the detected X-rays. For example, it may be determined whether a potentially defective via has a SiO2 plug defect by comparing an X-ray count ratio of oxygen over silicon of the defective via with an X-ray count ratio of a known defect-free reference via. If the defective via has a relatively high ratio (more oxygen than silicon) as compared to the reference via, then it may be determined that a SiO2 plug defect is present within the defective via. Otherwise, the via may be defmed as having a different type of defect (e.g., not a SiO2 plug defect) or defined resulting in a “false” defect. Accordingly, specific embodiments of the present invention may be utilized to filter “false” defects from a defect sample.

    Abstract translation: 公开了用于表征半导体结构的潜在缺陷的装置和方法。 带电粒子束在具有潜在缺陷的结构上扫描。 从扫描结构检测X射线。 X射线响应于在结构上扫描的带电粒子束。 基于检测到的X射线来表征扫描结构的潜在缺陷。 例如,可以通过将有缺陷的通孔的硅上的氧的X射线计数比与已知的无缺陷参考通孔的X射线计数比进行比较,来确定潜在缺陷通孔是否具有SiO 2插塞缺陷。 如果故障通孔与参考通孔相比具有相对高的比率(比硅更多的氧),则可以确定在缺陷通孔内存在SiO 2插塞缺陷。 否则,可以将通孔定义为具有不同类型的缺陷(例如,不是SiO2插塞缺陷)或定义导致“假”缺陷。 因此,可以利用本发明的具体实施例来从缺陷样品中过滤“假”缺陷。

    Methods and apparatus for electron beam assisted etching at low temperatures
    2.
    发明授权
    Methods and apparatus for electron beam assisted etching at low temperatures 有权
    低温电子束辅助蚀刻的方法和装置

    公开(公告)号:US08202440B1

    公开(公告)日:2012-06-19

    申请号:US11670928

    申请日:2007-02-02

    CPC classification number: C23F4/00 H01L21/32136

    Abstract: Disclosed are methods and apparatus for etching a sample, such as a semiconductor device or wafer. In general terms, embodiments of the present invention allow dry etching of a material on a sample, such as a copper material, at room temperature using a reactive substance, such as a chorine based gas. For example, the mechanisms of the present invention allow precise etching of a copper material to produce fine feature patterns without heating up the whole device or substrate to an elevated temperature such as 50° C. and above. The etching is assisted by simultaneously scanning a charged particle beam, such as an electron beam, and a photon beam, such as a laser beam, over a same target area of the sample while the reactive substance is introduced near the same target area. The reactive substance, charged particle beam, and photon beam act in combination to etch the sample at the target area. For example, a copper layer may be etched using the mechanisms of the present invention.

    Abstract translation: 公开了用于蚀刻诸如半导体器件或晶片的样品的方法和装置。 一般来说,本发明的实施方案允许使用反应性物质如基于氯化物的气体在室温下在样品(例如铜材料)上干燥蚀刻材料。 例如,本发明的机构允许铜材料的精确蚀刻以产生精细的特征图案,而不会将整个装置或基板加热到升高的温度,例如50℃及以上。 通过在样品的相同目标区域上同时扫描诸如电子束的带电粒子束和诸如激光束的光子束来辅助蚀刻,同时将反应物质引入到相同目标区域附近。 反应物质,带电粒子束和光子束组合起来,以在目标区域刻蚀样品。 例如,可以使用本发明的机构蚀刻铜层。

    Void characterization in metal interconnect structures using X-ray emission analyses
    3.
    发明授权
    Void characterization in metal interconnect structures using X-ray emission analyses 有权
    使用X射线发射分析的金属互连结构中的空隙表征

    公开(公告)号:US06924484B1

    公开(公告)日:2005-08-02

    申请号:US10691940

    申请日:2003-10-22

    Abstract: Disclosed are methods and apparatus for characterizing a potential void or voids by analyzing the X-ray count of one or more emitted X-ray species as emitted from an interconnect structure under test in response to a impinging beam, such as an electron beam, directed towards the sample surface. For example, this analysis may be used to determine whether the structure (e.g., a contact, line or via) has one or more void(s). It may also he used to help determine where the void(s) are with respect to the interconnect structure. It may also be used to help determine other characteristics of the void(s) with respect to the interconnect structure such as the shape(s) and size(s) of the void(s). The analysis may also be used to help initially determine whether the structure under test is so out of specification that it cannot then be determined whether the structure has a defect of a particular type. This analysis can be used to evaluate the process variation of wafers.

    Abstract translation: 公开了通过分析从被测互连结构发射的一个或多个发射的X射线物质的X射线计数来响应于诸如电子束的入射光束来指示潜在空隙或空隙的方法和装置,例如电子束 朝向样品表面。 例如,该分析可用于确定结构(例如,接触,线或通孔)是否具有一个或多个空隙。 他也可以帮助确定空隙相对于互连结构的位置。 它还可以用于帮助确定相对于互连结构的空隙的其它特征,例如空隙的形状和尺寸。 该分析还可以用于帮助最初确定被测结构是否超出规范,以致不能确定该结构是否具有特定类型的缺陷。 该分析可用于评估晶圆的工艺变化。

    Coexistence of priority broadcast and unicast in peer-to-peer networks
    6.
    发明授权
    Coexistence of priority broadcast and unicast in peer-to-peer networks 有权
    优先级广播和单播在对等网络中的共存

    公开(公告)号:US09237553B2

    公开(公告)日:2016-01-12

    申请号:US13454963

    申请日:2012-04-24

    CPC classification number: H04W72/005

    Abstract: A method, a computer program product, and an apparatus are provided. In one configuration, the apparatus transmits a first broadcast signal including information indicating an intention to use a unicast resource for a broadcast. In addition, the apparatus transmits a second broadcast signal in the unicast resource. In another configuration, the apparatus, which is a first wireless device, receives a first broadcast signal from a second wireless device including information indicating an intention to use a unicast resource for a broadcast. In addition, the apparatus receives a first scheduling signal from the second wireless device in a scheduling resource. The first scheduling signal is for indicating a second intention to use the unicast resource for transmitting a second broadcast signal. Furthermore, the apparatus refrains from transmitting a second scheduling signal in the scheduling resource in response to the first scheduling signal.

    Abstract translation: 提供了一种方法,计算机程序产品和装置。 在一种配置中,设备发送包括表示使用广播资源的意图的信息的第一广播信号。 另外,该装置在单播资源中发送第二广播信号。 在另一种配置中,作为第一无线设备的设备从第二无线设备接收包括指示使用用于广播的单播资源的意图的信息的第一广播信号。 此外,该装置在调度资源中从第二无线装置接收第一调度信号。 第一调度信号用于指示使用单播资源发送第二广播信号的第二意图。 此外,该设备响应于第一调度信号,避免在调度资源中发送第二调度信号。

    Transmit power control based on receiver gain setting in a wireless communication network
    7.
    发明授权
    Transmit power control based on receiver gain setting in a wireless communication network 有权
    基于无线通信网络中接收机增益设置的发射功率控制

    公开(公告)号:US09014104B2

    公开(公告)日:2015-04-21

    申请号:US12264679

    申请日:2008-11-04

    CPC classification number: H04W52/52 H04W52/242 H04W52/383

    Abstract: Techniques for performing transmit power control based on receiver gain setting in a wireless communication network are described. In an aspect, a terminal A may estimate pathloss to another terminal B, e.g., based on a peer discovery signal received from terminal B. Terminal A may then determine a transmit power level for a peer-to-peer (PTP) signal (e.g., a paging signal) based on the estimated pathloss, a receiver gain setting at terminal B, and a target received power level for the PTP signal. Terminal A may send the PTP signal at the determined transmit power level to terminal B. In another aspect, terminal B may use different receiver gain settings in different time intervals to receive PTP signals from other terminals. Terminal A may then select a suitable time interval to send the PTP signal based on the pathloss and the different receiver gain settings used by terminal B.

    Abstract translation: 描述了基于无线通信网络中的接收机增益设置来执行发射功率控制的技术。 在一方面,终端A可以例如基于从终端B接收到的对等体发现信号来估计到另一个终端B的路径损耗。终端A然后可以确定对等(PTP)信号的发射功率电平(例如, ,寻呼信号),基于所估计的路径损耗,终端B的接收机增益设置以及PTP信号的目标接收功率电平。 终端A可以以确定的发射功率电平向终端B发送PTP信号。另一方面,终端B可以在不同的时间间隔中使用不同的接收机增益设置来从其他终端接收PTP信号。 然后,终端A可以根据终端B使用的路径损耗和不同的接收机增益设置来选择合适的时间间隔来发送PTP信号。

    METHODS OF TREATING PSORIATIC ARTHRITIS (PSA) USING IL-17 ANTAGONISTS AND PSA RESPONSE OR NON-RESPONSE ALLELES
    8.
    发明申请
    METHODS OF TREATING PSORIATIC ARTHRITIS (PSA) USING IL-17 ANTAGONISTS AND PSA RESPONSE OR NON-RESPONSE ALLELES 审中-公开
    使用IL-17拮抗剂和PSA反应或无反应物质治疗精神分裂症(PSA)的方法

    公开(公告)号:US20150064193A1

    公开(公告)日:2015-03-05

    申请号:US14358504

    申请日:2012-06-07

    Applicant: Ying Wang

    Inventor: Ying Wang

    Abstract: The disclosure is directed to predictive methods and personalized therapies for treating psoriatic arthritis (PsA). Specifically, this disclosure relates to methods of treating a patient having PsA by selectively administering an IL-17 antagonist, e.g., an IL-17 antibody, such as secukinumab, to the PsA patient on the basis of that patient being predisposed to have a favorable response to treatment with the IL-17 antagonist. Also disclosed herein are diagnostic methods useful in predicting the likelihood that a patient having PsA will respond to treatment with an IL-17 antagonist, e.g., an IL-17 antibody, such as secukinumab.

    Abstract translation: 本公开涉及用于治疗牛皮癣关节炎(PsA)的预测方法和个性化疗法。 具体地,本公开涉及通过基于该患者倾向于具有有利的方式来选择性地向PsA患者施用IL-17拮抗剂(例如IL-17抗体,例如塞沙单抗)来治疗患有PsA的患者的方法 对IL-17拮抗剂治疗的反应。 本文还公开了可用于预测具有PsA的患者将对IL-17拮抗剂(例如IL-17抗体例如塞苏单抗)治疗反应的可能性的诊断方法。

    Bicyclic heteroaryl compounds as GPR119 modulators
    9.
    发明授权
    Bicyclic heteroaryl compounds as GPR119 modulators 有权
    双环杂芳基化合物作为GPR119调节剂

    公开(公告)号:US08940716B2

    公开(公告)日:2015-01-27

    申请号:US13696103

    申请日:2011-05-04

    CPC classification number: C07D417/14 C07D401/14 C07D413/14 C07D417/12

    Abstract: Novel compounds of structure Formula I: or an enantiomer, diastereomer, tautomer, prodrug or salt thereof, wherein A, D, Di, E, J, L, n, Q, R2 and R4 are defined herein, are provided which are GPR119 G protein-coupled receptor modulators. GPR119 G protein-coupled receptor modulators are useful in treating, preventing, or slowing the progression of diseases requiring GPR119 G protein-coupled receptor modulator therapy. Thus, the disclosure also concerns compositions comprising these novel compounds and methods of treating diseases or conditions related to the activity of the GPR119 G protein-coupled receptor by using any of these novel compounds or a composition comprising any of such novel compounds.

    Abstract translation: 其中A,D,D,E,J,L,n,Q,R 2和R 4在本文中定义的结构式I的新型化合物或其对映异构体,非对映异构体,互变异构体,前药或其盐是GPR119G 蛋白偶联受体调节剂。 GPR119 G蛋白偶联受体调节剂可用于治疗,预防或减缓需要GPR119 G蛋白偶联受体调节剂治疗的疾病进展。 因此,本公开还涉及包含这些新化合物的组合物以及通过使用任何这些新化合物或包含任何这些新化合物的组合物来治疗与GPR119G蛋白偶联受体的活性有关的疾病或病症的方法。

    Certain crystalline hydrates, pharmaceutical compositions thereof and methods for preparation and use thereof
    10.
    发明授权
    Certain crystalline hydrates, pharmaceutical compositions thereof and methods for preparation and use thereof 有权
    某些结晶水合物,其药物组合物及其制备和使用方法

    公开(公告)号:US08916567B2

    公开(公告)日:2014-12-23

    申请号:US12938555

    申请日:2010-11-03

    Applicant: Feng Que Ying Wang

    Inventor: Feng Que Ying Wang

    CPC classification number: C07D263/22 A61K31/496

    Abstract: At least one crystalline hydrate of (S)—[N-3-(3′-fluoro-4′-(4″-phenyl piperazinyl))phenyl-2-oxo-5-oxazolidinyl]methyl acetamide, such as those with the following formula: wherein y is a number ranging from 1/12 to 1. Also provided are methods for the preparation of such crystalline hydrates, pharmaceutical compositions comprising such crystalline hydrates, and methods for their uses.

    Abstract translation: (S) - [N-3-(3'-氟-4' - (4“ - 苯基哌嗪基))苯基-2-氧代-5-恶唑烷基]甲基乙酰胺的至少一种结晶水合物, 下式:其中y是范围从1/12至1的数字。还提供了制备这种结晶水合物的方法,包含这种结晶水合物的药物组合物,及其用途的方法。

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