Abstract:
Disclosed are apparatus and methods for characterizing a potential defect of a semiconductor structure. A charged particle beam is scanned over a structure which has a potential defect. X-rays are detected from the scanned structure. The X-rays are in response to the charged particle beam being scanned over the structure. The potential defect of the scanned structure is characterized based on the detected X-rays. For example, it may be determined whether a potentially defective via has a SiO2 plug defect by comparing an X-ray count ratio of oxygen over silicon of the defective via with an X-ray count ratio of a known defect-free reference via. If the defective via has a relatively high ratio (more oxygen than silicon) as compared to the reference via, then it may be determined that a SiO2 plug defect is present within the defective via. Otherwise, the via may be defmed as having a different type of defect (e.g., not a SiO2 plug defect) or defined resulting in a “false” defect. Accordingly, specific embodiments of the present invention may be utilized to filter “false” defects from a defect sample.
Abstract:
Disclosed are methods and apparatus for etching a sample, such as a semiconductor device or wafer. In general terms, embodiments of the present invention allow dry etching of a material on a sample, such as a copper material, at room temperature using a reactive substance, such as a chorine based gas. For example, the mechanisms of the present invention allow precise etching of a copper material to produce fine feature patterns without heating up the whole device or substrate to an elevated temperature such as 50° C. and above. The etching is assisted by simultaneously scanning a charged particle beam, such as an electron beam, and a photon beam, such as a laser beam, over a same target area of the sample while the reactive substance is introduced near the same target area. The reactive substance, charged particle beam, and photon beam act in combination to etch the sample at the target area. For example, a copper layer may be etched using the mechanisms of the present invention.
Abstract:
Disclosed are methods and apparatus for characterizing a potential void or voids by analyzing the X-ray count of one or more emitted X-ray species as emitted from an interconnect structure under test in response to a impinging beam, such as an electron beam, directed towards the sample surface. For example, this analysis may be used to determine whether the structure (e.g., a contact, line or via) has one or more void(s). It may also he used to help determine where the void(s) are with respect to the interconnect structure. It may also be used to help determine other characteristics of the void(s) with respect to the interconnect structure such as the shape(s) and size(s) of the void(s). The analysis may also be used to help initially determine whether the structure under test is so out of specification that it cannot then be determined whether the structure has a defect of a particular type. This analysis can be used to evaluate the process variation of wafers.
Abstract:
The invention relates to an operational state determination apparatus (1) for determining whether a variation in a determined electrical parameter of an electrical network (2) is caused by a variation in an operational state of an electrical consumer of the electrical network. The electrical network comprises multiple electrical consumers (3, 4, 5) and a voltage source (6), wherein a variation classification unit (10) determines whether a variation in the determined electrical parameter of the electrical network is caused by a variation in the operational state of an electrical consumer of the network depending on a decision variable which depends on a variation in a measured voltage and a variation in a measured current of the electrical network. This determination can be performed, without directly using the variation in the determined electrical parameter of the electrical network and is therefore less influenced by random voltage fluctuations in the electrical network.
Abstract:
The present invention relates to a method of detecting one or more metals in as liquid sample. The method includes the step of extracting the metal from the liquid sample and retaining the metal on a binding material. The detection of the extracted metal can be performed with the metal retained on the binding material or alter the elution of the metal off the binding material.
Abstract:
A method, a computer program product, and an apparatus are provided. In one configuration, the apparatus transmits a first broadcast signal including information indicating an intention to use a unicast resource for a broadcast. In addition, the apparatus transmits a second broadcast signal in the unicast resource. In another configuration, the apparatus, which is a first wireless device, receives a first broadcast signal from a second wireless device including information indicating an intention to use a unicast resource for a broadcast. In addition, the apparatus receives a first scheduling signal from the second wireless device in a scheduling resource. The first scheduling signal is for indicating a second intention to use the unicast resource for transmitting a second broadcast signal. Furthermore, the apparatus refrains from transmitting a second scheduling signal in the scheduling resource in response to the first scheduling signal.
Abstract:
Techniques for performing transmit power control based on receiver gain setting in a wireless communication network are described. In an aspect, a terminal A may estimate pathloss to another terminal B, e.g., based on a peer discovery signal received from terminal B. Terminal A may then determine a transmit power level for a peer-to-peer (PTP) signal (e.g., a paging signal) based on the estimated pathloss, a receiver gain setting at terminal B, and a target received power level for the PTP signal. Terminal A may send the PTP signal at the determined transmit power level to terminal B. In another aspect, terminal B may use different receiver gain settings in different time intervals to receive PTP signals from other terminals. Terminal A may then select a suitable time interval to send the PTP signal based on the pathloss and the different receiver gain settings used by terminal B.
Abstract:
The disclosure is directed to predictive methods and personalized therapies for treating psoriatic arthritis (PsA). Specifically, this disclosure relates to methods of treating a patient having PsA by selectively administering an IL-17 antagonist, e.g., an IL-17 antibody, such as secukinumab, to the PsA patient on the basis of that patient being predisposed to have a favorable response to treatment with the IL-17 antagonist. Also disclosed herein are diagnostic methods useful in predicting the likelihood that a patient having PsA will respond to treatment with an IL-17 antagonist, e.g., an IL-17 antibody, such as secukinumab.
Abstract:
Novel compounds of structure Formula I: or an enantiomer, diastereomer, tautomer, prodrug or salt thereof, wherein A, D, Di, E, J, L, n, Q, R2 and R4 are defined herein, are provided which are GPR119 G protein-coupled receptor modulators. GPR119 G protein-coupled receptor modulators are useful in treating, preventing, or slowing the progression of diseases requiring GPR119 G protein-coupled receptor modulator therapy. Thus, the disclosure also concerns compositions comprising these novel compounds and methods of treating diseases or conditions related to the activity of the GPR119 G protein-coupled receptor by using any of these novel compounds or a composition comprising any of such novel compounds.
Abstract:
At least one crystalline hydrate of (S)—[N-3-(3′-fluoro-4′-(4″-phenyl piperazinyl))phenyl-2-oxo-5-oxazolidinyl]methyl acetamide, such as those with the following formula: wherein y is a number ranging from 1/12 to 1. Also provided are methods for the preparation of such crystalline hydrates, pharmaceutical compositions comprising such crystalline hydrates, and methods for their uses.