公开(公告)号：US20130135772A1

公开(公告)日：2013-05-30

申请号：US13306887

申请日：2011-11-29

申请人： Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

发明人： Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

IPC分类号： G11B5/127 ,  C23F1/04

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  G11B5/3163 ,  G11B5/3193 ,  G11B5/398 ,  G11B2005/3996 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.

摘要翻译： 一种用于制造磁传感器的方法，包括沉积多个掩模层，然后在传感器层上形成条纹高度限定掩模。 执行第一离子铣削足以除去未被条形高度限定掩模保护的自由层的部分，第一离子铣削在非磁性阻挡层或间隔层处终止。 然后优选通过离子束沉积沉积介电层。 然后执行第二离子铣削以去除未被掩模保护的钉扎层结构的部分，在通过介电层进行第二离子铣削期间保护自由层。

公开(公告)号：US08615868B2

公开(公告)日：2013-12-31

申请号：US13306887

申请日：2011-11-29

申请人： Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

发明人： Yongchul Ahn ,  Xiaozhong Dang ,  Quang Le ,  Simon H. Liao

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  G11B5/3163 ,  G11B5/3193 ,  G11B5/398 ,  G11B2005/3996 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic sensor that includes depositing a plurality of mask layers, then forming a stripe height defining mask over the sensor layers. A first ion milling is performed just sufficiently to remove portions of the free layer that are not protected by the stripe height defining mask, the first ion milling being terminated at the non-magnetic barrier or spacer layer. A dielectric layer is then deposited, preferably by ion beam deposition. A second ion milling is then performed to remove portions of the pinned layer structure that are not protected by the mask, the free layer being protected during the second ion milling by the dielectric layer.

摘要翻译： 一种用于制造磁传感器的方法，包括沉积多个掩模层，然后在传感器层上形成条纹高度限定掩模。 执行第一离子铣削足以除去未被条形高度限定掩模保护的自由层的部分，第一离子铣削在非磁性阻挡层或间隔层处终止。 然后优选通过离子束沉积沉积介电层。 然后执行第二离子铣削以去除未被掩模保护的钉扎层结构的部分，在通过介电层进行第二离子铣削期间保护自由层。

公开(公告)号：US06940688B2

公开(公告)日：2005-09-06

申请号：US10277463

申请日：2002-10-21

申请人： Hai Jiang ,  Yingjian Chen ,  Xiaozhong Dang ,  James Wang

发明人： Hai Jiang ,  Yingjian Chen ,  Xiaozhong Dang ,  James Wang

IPC分类号： G11B5/17 ,  G11B5/31 ,  G11B5/147

CPC分类号： G11B5/313 ,  G11B5/17 ,  G11B5/3163

摘要： A method and system for providing a thin film recording head are disclosed. The method and system include providing a first pole, providing a second pole and providing a write gap separating the first pole from the second pole. The method and system further include providing at least one coil having a plurality of turns. A portion of each of the plurality of turns is between the first and the second pole. The plurality of turns wind around the second pole.

摘要翻译： 公开了一种用于提供薄膜记录头的方法和系统。 该方法和系统包括提供第一极，提供第二极，并提供将第一极与第二极分开的写入间隙。 该方法和系统还包括提供具有多个匝的至少一个线圈。 多个匝中的每一个的一部分在第一和第二极之间。 多个转动绕第二个极点。

公开(公告)号：US06912106B1

公开(公告)日：2005-06-28

申请号：US10213532

申请日：2002-08-06

申请人： Yingjian Chen ,  Qing He ,  Yugang Wang ,  Kroum Stoev ,  Francis Liu ,  Xiaozhong Dang

发明人： Yingjian Chen ,  Qing He ,  Yugang Wang ,  Kroum Stoev ,  Francis Liu ,  Xiaozhong Dang

IPC分类号： G11B5/31 ,  G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3143

摘要： A method and system for providing a recording head is disclosed. The method and system include providing a first pole, a second pole, a write gap and at least one coil. The write cap separates the first pole from the second pole. The coil(s) include a plurality of turns and is between the first and second poles. The first pole includes a pedestal that has a first portion and a second portion. The first portion includes a high moment electroplated material. The second portion includes a hot seed layer that has a high moment sputtered material. The second portion of the first pole is adjacent to the write gap.

摘要翻译： 公开了一种用于提供记录头的方法和系统。 该方法和系统包括提供第一极，第二极，写间隙和至少一个线圈。 写帽将第一极与第二极分开。 线圈包括多个匝并且在第一和第二极之间。 第一极包括具有第一部分和第二部分的基座。 第一部分包括高电流电镀材料。 第二部分包括具有高力矩溅射材料的热种子层。 第一极的第二部分与写入间隙相邻。

公开(公告)号：US06873494B2

公开(公告)日：2005-03-29

申请号：US10134799

申请日：2002-04-29

申请人： Yingjian Chen ,  Xiaozhong Dang

发明人： Yingjian Chen ,  Xiaozhong Dang

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/40

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3106 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/40 ,  G11B2005/3996

摘要： An inductive write head structure incorporating a high moment film in conjunction with at least one pole (e.g., the bottom pole) for use with magnetic storage media and a process for producing the same in which a lift-off photoresist mask is used prior to the deposition of the high moment sputtered film. Following the lift-off process, the high moment film remains on the bottom pole (“P1”) pedestal (in the case of a PDZT type write head) or on the P1 itself (in the case of a Stitched Pole write head). The edge of the lift-off sputtered film is then covered by cured photoresist insulation which is placed at a distance away from the air bearing surface (“ABS”). The coverage of insulation at the edge of the sputtered film is desirable in order to avoid forming a topographic step which may have undesired consequences in the subsequent top pole formation processes.

摘要翻译： 结合至少一个极（例如，底极）与磁存储介质一起使用的高力矩膜的感应写头结构及其制造方法，其中在剥离光刻胶掩模之前使用剥离光致抗蚀剂掩模 沉积高速溅射膜。 在剥离过程之后，高力矩胶片保留在底极（“P1”）底座上（在PDZT型写入头的情况下）或P1本身（在缝合杆写入头的情况下）。 然后，剥离溅射膜的边缘被固定的光致抗蚀剂绝缘体覆盖，该固化的光致抗蚀剂绝缘体被放置在远离空气支承表面（“ABS”）的一定距离处。 在溅射膜的边缘处的绝缘层的覆盖是期望的，以避免形成在随后的顶极形成过程中可能具有不期望的后果的地形步骤。

公开(公告)号：US06724572B1

公开(公告)日：2004-04-20

申请号：US10086756

申请日：2002-02-28

申请人： Kroum Stoev ,  Yugang Wang ,  Francis Liu ,  Yingjian Chen ,  Xiaozhong Dang

发明人： Kroum Stoev ,  Yugang Wang ,  Francis Liu ,  Yingjian Chen ,  Xiaozhong Dang

IPC分类号： G11B5147

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/187 ,  G11B5/23 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/332 ,  G11B5/3909 ,  G11B5/3967 ,  G11B2005/3996

摘要： In one aspect, an inductive transducer is disclosed having a leading pole layer and a leading pole tip, with the pole layer being further removed than the pole tip from a media-facing surface. In another aspect, an inductive transducer is disclosed having a magnetic pedestal disposed between a leading pole layer and a leading pole tip, with at least one of the pedestal and pole layer being further removed than the pole tip from a media-facing surface. In another aspect, a leading pole layer or pedestal may have a surface that slopes away from the media-facing surface with increasing distance forward from the leading pole tip.

摘要翻译： 在一个方面，公开了一种电感式换能器，其具有引导极层和引导极尖端，其中极层比面向介质的表面比极尖更进一步去除。 另一方面，公开了一种电感换能器，其具有设置在引导极层和前导极尖端之间的磁性基座，其中基座和极层中的至少一个比来自面向介质的表面的极尖更进一步地去除。 在另一方面，前导极层或基座可以具有远离所述面向介质的表面的表面，所述表面具有与所述引导极端部向前的距离增加的距离。

公开(公告)号：US09190080B1

公开(公告)日：2015-11-17

申请号：US11840113

申请日：2007-08-16

申请人： Anup Ghosh Roy ,  Xiaozhong Dang

发明人： Anup Ghosh Roy ,  Xiaozhong Dang

IPC分类号： G11B5/33 ,  G11B5/127 ,  G11B5/39 ,  G11B5/73

CPC分类号： G11B5/732 ,  G11B5/3903 ,  G11B5/3906 ,  G11B5/3932 ,  H01L43/08

摘要： A method and system for providing a magnetic transducer is described. The method and system include providing an underlayer, a seed structure, and a magnetically hard layer. The underlayer has a surface. The seed structure resides on the surface and includes an amorphous layer and a seed layer. The amorphous layer wets the surface of the underlayer. The seed layer having a natural growth texture. The magnetically hard layer resides on the seed structure. The seed layer resides between the magnetically hard layer and the amorphous layer. The magnetically hard layer has a desired crystal orientation corresponding to the natural growth texture of the seed layer.

摘要翻译： 描述了一种用于提供磁换能器的方法和系统。 该方法和系统包括提供底层，种子结构和磁性硬层。 底层有一个表面。 种子结构位于表面上并且包括非晶层和种子层。 非晶层润湿底层的表面。 种子层具有天然生长纹理。 磁性硬层位于种子结构上。 种子层位于磁性硬层和非晶层之间。 磁性硬质层具有与种子层的天然生长结构对应的所需晶体取向。

公开(公告)号：US07063753B1

公开(公告)日：2006-06-20

申请号：US10611633

申请日：2003-07-01

申请人： Yingjian Chen ,  Xiaozhong Dang

发明人： Yingjian Chen ,  Xiaozhong Dang

IPC分类号： D01F9/12 ,  H01L21/00

CPC分类号： D01F9/127 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y30/00 ,  H01L21/76838 ,  H01L51/0012 ,  H01L51/0048 ,  H01L51/0512 ,  H01L2221/1094 ,  Y10S977/75 ,  Y10S977/84 ,  Y10S977/888

摘要： Present invention provides enabling techniques of integrating novel nanotube elements into semiconductor devices, particularly in transistors, as gate channels or/and as interconnects. This is done in a series of process steps, which consist of fabricating magnetic-core-containing nanotubes of selected size (diameter and length), filtration of nanotube powders, preparing nanotube precursor in aqueous chemicals to form colloidal solutions of proper concentration, dispersing nanotube-containing solutions onto wafer surface, and finally positioning nanotubes at desired locations by magnetic means to complete nanotube device structure. The key to this invention is to provide miniature nanotubes with tangible physical properties, in this case, magnetic properties, so that they can be aligned, filtered, and precisely directed to desired locations for device application. Such processes enable nanotubes to be compatible with typical semiconductor wafer processing technologies.

摘要翻译： 本发明提供了将新型纳米管元件集成到半导体器件中，特别是在晶体管中作为栅极通道或/或作为互连的使能技术。 这是通过一系列工艺步骤完成的，其中包括制造选定尺寸（直径和长度）的含磁芯的纳米管，纳米管粉末的过滤，在含水化学品中制备纳米管前体以形成适当浓度的胶体溶液，分散纳米管 并且最后通过磁性手段将纳米管定位在期望的位置以完成纳米管装置结构。 本发明的关键是提供具有有形物理性能的微型纳米管，在这种情况下是磁性，使得它们可以对准，过滤并精确地定向到所需的位置用于器件应用。 这样的工艺使得纳米管能够与典型的半导体晶片处理技术兼容。

公开(公告)号：US06987302B1

公开(公告)日：2006-01-17

申请号：US10611448

申请日：2003-07-01

申请人： Yingjian Chen ,  Xiaozhong Dang

发明人： Yingjian Chen ,  Xiaozhong Dang

IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

CPC分类号： B82Y10/00 ,  B82Y25/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/168 ,  G01N27/4146 ,  H01F1/0054 ,  Y10S977/745 ,  Y10S977/936

摘要： Present invention provides enabling methods of integrating novel nanotube elements into semiconductor devices, such as transistor containing electronic device. This is done in a series of process steps, which consist of attaching magnetic nanoparticles to nanotubes, tailoring magnetic nanotubes of selected size (diameter and length), filtration of nanotube to pre-determined sizes, preparing nanotube precursor in aqueous chemicals to form colloidal solutions of proper concentration, dispersing nanotube-containing solutions onto wafer surface, and finally positioning nanotubes at desired locations by magnetically assisted assembly to complete nanotube device structure. The key to this invention is to provide miniature nanotubes with tangible physical properties, in this case, magnetic properties, so that they can be aligned, filtered, and precisely directed to desired locations for device application. Such processes enable nanotubes to be compatible with typical semiconductor wafer processing technologies.

摘要翻译： 本发明提供了将新型纳米管元件集成到诸如晶体管的电子器件等半导体器件中的使能方法。 这是通过一系列工艺步骤完成的，其中包括将磁性纳米颗粒附着到纳米管上，调整所选尺寸的磁性纳米管（直径和长度），将纳米管过滤到预定尺寸，在含水化学品中制备纳米管前体以形成胶体溶液 适当浓度，将含纳米管的溶液分散在晶片表面上，最后通过磁辅助组装将纳米管定位在所需位置，以完成纳米管器件结构。 本发明的关键是提供具有有形物理性能的微型纳米管，在这种情况下是磁性，使得它们可以对准，过滤并精确地定向到所需的位置用于器件应用。 这样的工艺使得纳米管能够与典型的半导体晶片处理技术兼容。

公开(公告)号：US06975486B2

公开(公告)日：2005-12-13

申请号：US10213339

申请日：2002-08-06

申请人： Yingjian Chen ,  Xiaozhong Dang ,  Mohamad T. Krounbi ,  George V. Kelley

发明人： Yingjian Chen ,  Xiaozhong Dang ,  Mohamad T. Krounbi ,  George V. Kelley

IPC分类号： G11B5/31 ,  G11B5/33 ,  G11B5/147

CPC分类号： G11B5/313 ,  G11B5/3116 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/332

摘要： A writer for high frequency, data storage heads. The writer includes a first magnetic pole upon which a write gap pedestal is formed with an upper pedestal layer of high moment material with a planar upper surface. An electrical coil is formed on the first magnetic pole. A write gap layer is deposited on the upper surface of the upper pedestal layer. The writer includes a second magnetic pole disposed above the first magnetic pole with a magnetic, flat, top pole layer. The second magnetic pole includes a bottom shaper fabricated from high moment material positioned between the coil and the top pole layer. An insulation insert separates the bottom shaper from the upper pedestal layer. The second magnetic pole includes a thin dielectric lamination layer that separates the top pole layer from the bottom shaper to disrupt the path of eddy current in the second magnetic pole.

摘要翻译： 高频数据存储头的写入器。 写入器包括第一磁极，写入间隙基座形成有具有平坦上表面的高力矩材料的上基座层。 在第一磁极上形成电线圈。 写间隙层沉积在上基座层的上表面上。 写入器包括设置在具有磁性，平坦的顶极层的第一磁极上方的第二磁极。 第二磁极包括由位于线圈和顶极层之间的高力矩材料制成的底部整形器。 绝缘插件将底部整形器与上基座层分开。 第二磁极包括将顶极层与底部整形器分离以破坏第二磁极中涡流的路径的薄介电层压层。