Method and system for defect detection

    公开(公告)号:US20060199287A1

    公开(公告)日:2006-09-07

    申请号:US11201279

    申请日:2005-08-10

    IPC分类号: H01L21/66 G01R31/26

    CPC分类号: G01N21/9501

    摘要: A method for inspecting objects such as semiconductor wafers. A staging platform and an optical platform are arranged so that the object may be staged and its surface scanned by optical equipment situated on the optical platform. During the scanning process, the surface is illuminated with light of a plurality of wavelengths, each strobed at a predetermined rate so that multiple images may be collected using time and frequency multiplexing. The multiple images are stored in a database for analysis, which includes processing selected ones of the multiple images according to one or more algorithms. The defect-detection algorithms used for each object are determined by referenced to a predetermined or calculated defect detection protocol, then a defect mask is created for each pixel in the images that is suspected to be defective. The defect mask is then compared to threshold parameters to determine which if any of the suspected defects should be reported.

    System and method for detecting defects on a structure-bearing surface using optical inspection
    2.
    发明授权
    System and method for detecting defects on a structure-bearing surface using optical inspection 有权
    使用光学检查检测结构轴承表面缺陷的系统和方法

    公开(公告)号:US06813376B1

    公开(公告)日:2004-11-02

    申请号:US09697807

    申请日:2000-10-27

    IPC分类号: G06K900

    摘要: A method of collating and using captured semiconductor-wafer image data in an automated defect analysis. The method includes the steps of receiving image data and, if necessary, converting it to a digital format. Once the data is in pixel-by-pixel form, each pixel is assigned a slope value derived from the direction of the structure edge, if any, on which it lies. The pixel-slope data is then evaluated to determine whether a photo-resist anomaly is present. The method may also include evaluated an average pixel slope value for each inspected wafer. Dependant claims further define the invention to claim an inspection system for employing the method.

    摘要翻译: 一种在自动化缺陷分析中整理和使用捕获的半导体晶片图像数据的方法。 该方法包括接收图像数据的步骤,如有必要,将其转换为数字格式。 一旦数据以像素为单位的形式,每个像素被分配一个从它所在的结构边缘(如果有的话)的方向导出的斜率值。 然后评估像素斜率数据以确定是否存在光刻胶异常。 该方法还可以包括评估每个被检查晶片的平均像素斜率值。 从属权利要求进一步限定本发明以要求用于采用该方法的检查系统。

    System and method for performing optical inspection utilizing diffracted light
    3.
    发明授权
    System and method for performing optical inspection utilizing diffracted light 失效
    利用衍射光进行光学检查的系统和方法

    公开(公告)号:US06864971B2

    公开(公告)日:2005-03-08

    申请号:US10094119

    申请日:2002-03-08

    IPC分类号: G01N21/95 G01N21/88

    CPC分类号: G01N21/9501

    摘要: A system and method for performing optical inspection of structures on the surface of a semiconductor wafer. The wafer surface is illuminated with a polychromatic light source. A multiple-charged couple-device (CCD) camera is positioned to capture light diffracted by the structures on the wafer surface at the first order of diffraction. The captured light is then separated into a plurality of component wavelengths which are directed onto the CCDs. A digital filter creates a plurality of digitized diffractive images of the wafer surface at different component wavelengths. The diffractive images may be integrated and analyzed to detect defects in the structures, or may be, analyzed individually. An image at a particular wavelength may be selected and analyzed by using the known grating pitch of the structures to calculate the wavelength.

    摘要翻译: 一种用于对半导体晶片的表面上的结构执行光学检查的系统和方法。 用多色光源照射晶片表面。 定位多电荷耦合器件(CCD)照相机以捕获在第一衍射级上由晶片表面上的结构衍射的光。 然后将捕获的光分离成指向CCD的多个分量波长。 数字滤波器在不同的分量波长处产生晶片表面的多个数字化的衍射图像。 衍射图像可以被整合和分析以检测结构中的缺陷,或者可以单独地分析。 可以通过使用结构的已知光栅间距来选择和分析特定波长的图像以计算波长。

    Method and system for defect detection
    4.
    发明授权
    Method and system for defect detection 有权
    缺陷检测方法和系统

    公开(公告)号:US07539583B2

    公开(公告)日:2009-05-26

    申请号:US11201279

    申请日:2005-08-10

    IPC分类号: G01N37/00

    CPC分类号: G01N21/9501

    摘要: A method for inspecting objects such as semiconductor wafers. A staging platform and an optical platform are arranged so that the object may be staged and its surface scanned by optical equipment situated on the optical platform. During the scanning process, the surface is illuminated with light of a plurality of wavelengths, each strobed at a predetermined rate so that multiple images may be collected using time and frequency multiplexing. The multiple images are stored in a database for analysis, which includes processing selected ones of the multiple images according to one or more algorithms. The defect-detection algorithms used for each object are determined by referenced to a predetermined or calculated defect detection protocol, then a defect mask is created for each pixel in the images that is suspected to be defective. The defect mask is then compared to threshold parameters to determine which if any of the suspected defects should be reported.

    摘要翻译: 用于检查诸如半导体晶片的物体的方法。 布置了分段平台和光学平台,使得物体可以通过位于光学平台上的光学设备进行分级和其表面扫描。 在扫描过程中,表面被多个波长的光照射,每个以预定的速率被选通,使得可以使用时间和频率复用来收集多个图像。 多个图像存储在用于分析的数据库中,其包括根据一种或多种算法处理多个图像中的选定的图像。 通过参照预定或计算的缺陷检测协议来确定用于每个对象的缺陷检测算法,然后为怀疑是有缺陷的图像中的每个像素创建缺陷掩码。 然后将缺陷掩模与阈值参数进行比较,以确定是否应报告任何可疑缺陷。

    Addressing method, addressing apparatus, fabric manager, switch, and data routing method
    5.
    发明授权
    Addressing method, addressing apparatus, fabric manager, switch, and data routing method 有权
    寻址方法,寻址装置,Fabric管理器,交换机和数据路由方法

    公开(公告)号:US09160701B2

    公开(公告)日:2015-10-13

    申请号:US13294636

    申请日:2011-11-11

    摘要: The present disclosure provides an addressing method, an addressing apparatus, a fabric manager, a switch, and a data routing method for data center networks. The addressing apparatus includes a tree creating unit for, sequentially with each of switches as a root, creating a tree containing all hosts by means of network topology discovery function, to obtain a plurality of trees; a tree selecting unit for selecting a tree having a minimum height among the created plurality of trees; and an address assigning unit for assigning addresses to each of switches and each of hosts in a network with respect to each selected tree having a minimum height. The present disclosure is adaptable to various topologies employed by the data center. The present disclosure can achieve aggregation of locator addresses so that a forwarding table can be shortened, and can achieve load balance of the network.

    摘要翻译: 本公开提供了一种用于数据中心网络的寻址方法,寻址装置,结构管理器,交换机和数据路由方法。 寻址装置包括:树生成单元,用于依次以每个交换机为根,通过网络拓扑发现功能创建包含所有主机的树,以获得多个树; 树选择单元,用于选择所生成的多个树中具有最小高度的树; 以及地址分配单元,用于相对于具有最小高度的每个所选树分配地址到每个交换机和网络中的每个主机。 本公开适用于数据中心采用的各种拓扑。 本公开可以实现定位器地址的聚合,从而可以缩短转发表,并且可以实现网络的负载平衡。

    Lead frame sheet
    6.
    发明授权
    Lead frame sheet 有权
    引线框架板

    公开(公告)号:US08486540B2

    公开(公告)日:2013-07-16

    申请号:US13008914

    申请日:2011-01-19

    IPC分类号: H01L23/495

    摘要: A lead frame sheet made of an electrically conductive material has lead frames integrally formed on it. Spacing members also are formed from the sheet. A first one of the spacing members is proximal to a first longitudinal edge of the sheet and a second one of the spacing members is proximal to a second longitudinal edge of the sheet. The spacing members extend from an underside surface of the sheet and, in use, space the underside surface from a planar support such as a surface of a heating block.

    摘要翻译: 由导电材料制成的引线框架片一体地形成在其上。 间距构件也由片材形成。 间隔构件中的第一个靠近片材的第一纵向边缘,并且间隔构件中的第二个靠近片材的第二纵向边缘。 间隔构件从片材的下侧表面延伸,并且在使用中将下表面从诸如加热块的表面的平面支撑件间隔开。

    DETERMINING A LEGITIMATE ACCESS POINT RESPONSE
    8.
    发明申请
    DETERMINING A LEGITIMATE ACCESS POINT RESPONSE 有权
    确定一个良好的访问点响应

    公开(公告)号:US20160149935A1

    公开(公告)日:2016-05-26

    申请号:US14900202

    申请日:2013-07-04

    IPC分类号: H04L29/06 H04W12/10

    摘要: A first request is sent from a station to an access point. The station receives a first response from the access point that includes a first sequence number, and stores the first sequence number. The station sends a second request to the access point and sets a waiting period for receiving a response from the access point. The station receives a second response from the access point and a third response from a second access point during the waiting period. The second response includes a second sequence number and the third response includes a third sequence number. The station determines that the second response is a legitimate response by comparing the second and third sequence numbers to the first sequence number.

    摘要翻译: 第一个请求从站点发送到接入点。 站从接入点接收包括第一序列号的第一响应,并存储第一序列号。 该站向接入点发送第二个请求,并设置从接入点接收响应的等待时间。 在等待期间,站接收来自接入点的第二响应和来自第二接入点的第三响应。 第二响应包括第二序列号,第三响应包括第三序列号。 通过将第二和第三序列号与第一序列号进行比较,站确定第二响应是合法响应。

    Network interference evaluating method, dynamic channel assignment method and apparatus used in wireless networks
    9.
    发明授权
    Network interference evaluating method, dynamic channel assignment method and apparatus used in wireless networks 失效
    网络干扰评估方法,无线网络中使用的动态信道分配方法和装置

    公开(公告)号:US08411585B2

    公开(公告)日:2013-04-02

    申请号:US12498878

    申请日:2009-07-07

    CPC分类号: H04W72/082

    摘要: There are disclosed a network interference evaluating method, a dynamic channel assignment method and apparatus used in wireless networks. The dynamic channel assignment method used in a wireless network, comprising steps of: calculating each pair of visual delayed time for each pair of basic service sets based on received signal strength indicators, traffic information and rate information, and evaluating an overall network interference under a current channel allocation based on the calculated visual delayed time; constructing an undirected graph so that each basic service set is located at a vertex, and each connection line between each pair of basic service sets has a weight obtained from the pair of visual delayed time for this pair of basic service sets; coloring the undirected graph to get a new channel allocation approach and an optimized minimal overall network interference under this new channel allocation approach; comparing a difference between the evaluated overall network interference under the current channel allocation and the optimized minimal overall network interference with a predetermined threshold; and changing channel allocation for the basic service sets according to the new channel allocation approach if the difference is larger than the predetermined threshold.

    摘要翻译: 公开了一种在无线网络中使用的网络干扰评估方法,动态信道分配方法和装置。 一种在无线网络中使用的动态信道分配方法,包括以下步骤:基于接收到的信号强度指示符,业务信息和速率信息,计算每对基本业务集合的每对视觉延迟时间,以及评估一个 基于计算出的视觉延迟时间的当前频道分配; 构造无向图,使得每个基本服务集位于顶点,并且每对基本服务集之间的每个连接线具有从该对基本服务集合的一对视觉延迟时间获得的权重; 着色无向图,以获得新的信道分配方法,并在此新的信道分配方法下优化最小的总体网络干扰; 将当前信道分配下的所评估的总网络干扰与所述优化的最小总网络干扰之间的差与预定阈值进行比较; 以及如果差值大于预定阈值,则根据新的信道分配方法改变基本业务集的信道分配。

    Server, method and system for providing node information for P2P network
    10.
    发明授权
    Server, method and system for providing node information for P2P network 失效
    为P2P网络提供节点信息的服务器,方法和系统

    公开(公告)号:US08483089B2

    公开(公告)日:2013-07-09

    申请号:US13000981

    申请日:2010-06-21

    IPC分类号: H04W16/02

    摘要: The invention provides a server, a method and a system for providing node information for P2P network. A server in a peer-to-peer (P2P) network comprises: a location information storage unit which stores coordinate information indicating a coordinate of each data node in the P2P network in a coordinate system that is created based on communication delays among data nodes in the P2P network; and a node information providing unit which, upon receipt of a request for information on data nodes having a first data item, selects one or more data nodes from data nodes having the first data item based on the coordinate information, and provides information indicating the selected one or more data nodes.

    摘要翻译: 本发明提供了一种用于为P2P网络提供节点信息的服务器,方法和系统。 点对点(P2P)网络中的服务器包括:位置信息存储单元,其存储在基于数据节点之间的通信延迟创建的坐标系中的指示P2P网络中每个数据节点的坐标的坐标信息 P2P网络; 以及节点信息提供单元,其在接收到关于具有第一数据项的数据节点的信息的请求时,基于所述坐标信息从具有所述第一数据项的数据节点中选择一个或多个数据节点,并且提供指示所选择的 一个或多个数据节点。