公开(公告)号：US07368403B2

公开(公告)日：2008-05-06

申请号：US10969954

申请日：2004-10-22

申请人： Yoshiaki Ikuta ,  Noriyuki Agata

发明人： Yoshiaki Ikuta ,  Noriyuki Agata

IPC分类号： C03C3/06

CPC分类号： G03F7/70958 ,  C03C3/06 ,  C03C2201/21 ,  G02B1/02

摘要： A synthetic quartz glass for an optical member, which is to be used in an optical device employing an ArF excimer laser beam as a light source at an energy density of at most 2 mJ/cm2/pulse or in an optical device employing a KrF excimer laser beam as a light source at an energy density of at most 30 mJ/cm2/pulse, characterized in that the hydrogen molecule concentration is within a range of at least 1×1016 molecules/cm3 and less than 5×1016 molecules/cm3.

摘要翻译： 一种用于光学构件的合成石英玻璃，其用于以能量密度为至多2mJ / cm 2 /脉冲的ArF准分子激光束作为光源的光学装置，或 在使用KrF准分子激光束作为光源的能量密度为至多30mJ / cm 2 /脉冲的光学装置中，其特征在于，所述氢分子浓度在至少 1×10 16分子/ cm 3和小于5×10 16分子/ cm 3。

公开(公告)号：US20050068644A1

公开(公告)日：2005-03-31

申请号：US10969954

申请日：2004-10-22

申请人： Yoshiaki Ikuta ,  Noriyuki Agata

发明人： Yoshiaki Ikuta ,  Noriyuki Agata

IPC分类号： C03C3/06 ,  G02B1/02 ,  G03F7/20 ,  G02B5/04

CPC分类号： G03F7/70958 ,  C03C3/06 ,  C03C2201/21 ,  G02B1/02

摘要： A synthetic quartz glass for an optical member, which is to be used in an optical device employing an ArF excimer laser beam as a light source at an energy density of at most 2 mJ/cm2/pulse or in an optical device employing a KrF excimer laser beam as a light source at an energy density of at most 30 mJ/cm2/pulse, characterized in that the hydrogen molecule concentration is within a range of at least 1×1016 molecules/cm3 and less than 5×1016 molecules/cm3.

摘要翻译： 一种用于光学构件的合成石英玻璃，其用于使用ArF准分子激光束作为能量密度为至多2mJ / cm 2 /脉冲的光源的光学装置中，或者在采用 KrF准分子激光束作为能量密度为至多30mJ / cm 2 /脉冲的光源，其特征在于氢分子浓度在至少1×10 16分子/ cm 3的范围内 和小于5×10 16分子/ cm 3。

公开(公告)号：US07514382B2

公开(公告)日：2009-04-07

申请号：US11398669

申请日：2006-04-06

申请人： Yoshiaki Ikuta ,  Noriyuki Agata

发明人： Yoshiaki Ikuta ,  Noriyuki Agata

IPC分类号： C03C3/06 ,  C03B20/00

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/36 ,  Y02P40/57

摘要： A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5×1014 defects/cm3 and at least 1×1013 defects/cm3. The fluorine concentration is preferably at most 100 ppm.

摘要翻译： 得到不含压实和稀释的用于光学构件的合成石英玻璃。 用于光学元件的合成石英玻璃，其用于使用波长最多为400nm且至少170nm的光作为光源的光学元件，其基本上不含氧过剩缺陷，溶解氧分子或还原型 其浓度最多为50ppm，OH基浓度为100ppm以下，含有缺氧缺陷量为5×1014个/ cm 3以下且至少1×10 13个缺陷/ cm 3以下的缺陷缺陷。 氟浓度优选为100ppm以下。

公开(公告)号：US20060183623A1

公开(公告)日：2006-08-17

申请号：US11398669

申请日：2006-04-06

申请人： Yoshiaki Ikuta ,  Noriyuki Agata

发明人： Yoshiaki Ikuta ,  Noriyuki Agata

IPC分类号： C03C3/06 ,  C03B37/07 ,  C03B37/018

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/36 ,  Y02P40/57

摘要： A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5×1014 defects/cm3 and at least 1×1013 defects/cm3. The fluorine concentration is preferably at most 100 ppm.

摘要翻译： 得到不含压实和稀释的用于光学构件的合成石英玻璃。 用于光学元件的合成石英玻璃，其用于使用波长最多为400nm且至少170nm的光作为光源的光学元件，其基本上不含氧过剩缺陷，溶解氧分子或还原型 缺陷，其氯浓度最多为50ppm，OH基浓度为至多100ppm，并且其含有缺氧缺陷的浓度范围至多为5×10 14个/ cm 2以下 > 3％和至少1×10 3个缺陷/ cm 3。 氟浓度优选为100ppm以下。

公开(公告)号：US08257675B2

公开(公告)日：2012-09-04

申请号：US12336017

申请日：2008-12-16

申请人： Noriyuki Agata ,  Shinya Kikugawa ,  Yutaka Shimizu ,  Kazumi Yoshida ,  Masatoshi Nishimoto

发明人： Noriyuki Agata ,  Shinya Kikugawa ,  Yutaka Shimizu ,  Kazumi Yoshida ,  Masatoshi Nishimoto

IPC分类号： C01B33/12

CPC分类号： C03C3/06 ,  C03C2201/02 ,  C03C2201/32 ,  C03C2201/50 ,  C30B7/10 ,  C30B29/18 ,  Y10T117/1008

摘要： An object of the present invention is to provide an artificial quartz member inhibited from suffering the decrease in transmittance in a laser light wavelength region which is caused by long-term irradiation with a laser light having a wavelength of 200 nm or shorter; and a process for producing the artificial quartz member. The invention provides an artificial quartz member for use as an optical element to be irradiated with a laser light having a wavelength of 200 nm or shorter, having an aluminum content of 200 ppb or lower.

摘要翻译： 本发明的目的在于提供一种人造石英部件，该人造石英部件由于长时间照射波长为200nm以下的激光而导致的激光波长区域的透射率降低; 以及人造石英部件的制造方法。 本发明提供一种人造石英部件，其用作要用200ppm或更低的铝含量的波长为200nm或更短的激光照射的光学元件。