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1.发明授权公开(公告)号：US07312848B2
公开(公告)日：2007-12-25
申请号：US11378511
申请日：2006-03-17
CPC分类号： G03F7/70725 , G03F7/70875
摘要： This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.
摘要翻译： 本发明公开了一种具有基座和可移动体的装置，该移动体被驱动沿着底座移动。 该装置包括：发电机，其被配置为产生用于可移动体的驱动信号;温度调节机构，被配置为调节基座的温度;以及控制器，被配置为基于所产生的驱动信号来控制温度控制机构的操纵变量。
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公开(公告)号：US07321418B2
公开(公告)日：2008-01-22
申请号：US11249700
申请日：2005-10-13
CPC分类号： G03F7/70766
摘要： A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.
摘要翻译： 舞台装置包括基座，可在第一和第二方向上在基座上移动的台架，可在第一方向上相对于基座移动的第一构件，以及可相对于基座沿第二方向移动的第二构件。 第一个成员放置在第二个成员上。 通过这种布置，可以通过移动第一和第二构件来消除由于台的移动产生的驱动反作用力，导致容纳取消机构所需的较小的空间。
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公开(公告)号：US07212277B2
公开(公告)日：2007-05-01
申请号：US10941962
申请日：2004-09-16
申请人： Yoshikazu Miyajima , Hideo Tanaka
发明人： Yoshikazu Miyajima , Hideo Tanaka
CPC分类号： G03F7/707 , G03F7/70716 , H01F7/206
摘要： An object holding apparatus including a chuck for holding an object, a holder configured to hold the chuck, a generator provided in the holder and configured to generate a field related to an attraction force, a member provided in the chuck and configured to be attracted by the generator in accordance with the field, and a support configured to support one of the generator and the member. The support is configured to allow the one to move toward the other and away from the other, and the support includes a leaf spring.
摘要翻译： 一种物体保持装置，包括用于保持物体的卡盘，被构造成保持卡盘的保持器，设置在保持器中并被配置为产生与吸引力相关的场的发生器的发生器，设置在卡盘中的构件， 根据现场的发电机，以及被配置为支撑发电机和所述部件中的一个的支撑件。 支撑件被构造成允许该支撑件朝着另一个移动并远离另一个，并且支撑件包括板簧。
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公开(公告)号：US20050093666A1
公开(公告)日：2005-05-05
申请号：US10941962
申请日：2004-09-16
申请人： Yoshikazu Miyajima , Hideo Tanaka
发明人： Yoshikazu Miyajima , Hideo Tanaka
IPC分类号： G03F7/20 , H01F7/20 , H01L21/027 , H01L21/68 , H01L21/683
CPC分类号： G03F7/707 , G03F7/70716 , H01F7/206
摘要： Disclosed is technology for holding a substrate and, specifically, an object holding apparatus including a chuck for holding an object, a holding unit for holding the chuck, a generating unit provided in the holding unit, for generating a field related to an attraction force, a member provided in the chuck and attracted by the generating unit in accordance with the field, and a supporting unit for supporting one of the generating unit and the member, for movement at least in a direction nearing the other and in a direction away from the other.
摘要翻译： 公开了用于保持基板的技术，具体地，包括用于保持物体的夹头的物体保持装置，用于保持卡盘的保持单元，设置在保持单元中的用于产生与吸引力有关的场的发生单元， 设置在卡盘中并被根据现场被发电单元吸引的构件，以及用于支撑发电单元和构件中的一个的支撑单元，用于至少沿着接近另一方的方向并且沿远离 其他。
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公开(公告)号：US07999919B2
公开(公告)日：2011-08-16
申请号：US11675868
申请日：2007-02-16
申请人： Yoshikazu Miyajima , Hideo Tanaka
发明人： Yoshikazu Miyajima , Hideo Tanaka
CPC分类号： G03F7/707 , G03F7/70716 , H01F7/206
摘要： Disclosed is technology for holding a substrate and, specifically, an object holding apparatus including a chuck for holding an object, a holding unit for holding the chuck, a generating unit provided in the holding unit, for generating a field related to an attraction force, a member provided in the chuck and attracted by the generating unit in accordance with the field, and a supporting unit for supporting one of the generating unit and the member, for movement at least in a direction nearing the other and in a direction away from the other.
摘要翻译： 公开了用于保持基板的技术，具体地，包括用于保持物体的夹头的物体保持装置，用于保持卡盘的保持单元，设置在保持单元中的用于产生与吸引力有关的场的发生单元， 设置在卡盘中并被根据现场被发电单元吸引的构件，以及用于支撑发电单元和构件中的一个的支撑单元，用于至少沿着接近另一方的方向并且沿远离 其他。
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公开(公告)号：US20050254036A1
公开(公告)日：2005-11-17
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device includes a movable stage, a base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base as the stage moves. The base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the base. In addition, when the mass body is arranged in the base, the stage device can be more downsized.
摘要翻译： 舞台装置包括可移动舞台，支撑舞台的底座以及当舞台移动时移动以抵消作用在底座上的反作用力的质量体。 基座具有多个表面，并且台架和质量体由基座的不同表面支撑。 此外，当质量体布置在基座中时，能够使载物台装置更小型化。
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公开(公告)号：US07224432B2
公开(公告)日：2007-05-29
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.
摘要翻译： 一种舞台装置，包括可移动舞台，支撑舞台的板状底座以及根据活动舞台的运动而移动以消除作用在底座上的反作用力的质量体。 板状基部具有多个表面，台状体和主体由板状基体的不同表面支撑。
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8.发明申请公开(公告)号：US20060209287A1
公开(公告)日：2006-09-21
申请号：US11378511
申请日：2006-03-17
CPC分类号： G03F7/70725 , G03F7/70875
摘要： This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.
摘要翻译： 本发明公开了一种具有基座和可移动体的装置，该移动体被驱动沿着底座移动。 该装置包括：发电机，其被配置为产生用于可移动体的驱动信号;温度调节机构，被配置为调节基座的温度;以及控制器，被配置为基于所产生的驱动信号来控制温度控制机构的操纵变量。
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公开(公告)号：US20060082754A1
公开(公告)日：2006-04-20
申请号：US11249700
申请日：2005-10-13
IPC分类号： G03B27/58
CPC分类号： G03F7/70766
摘要： A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.
摘要翻译： 舞台装置包括基座，可在第一和第二方向上在基座上移动的台架，可在第一方向上相对于基座移动的第一构件，以及可相对于基座沿第二方向移动的第二构件。 第一个成员放置在第二个成员上。 通过这种布置，可以通过移动第一和第二构件来消除由于台的移动产生的驱动反作用力，导致容纳取消机构所需的较小的空间。
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公开(公告)号：US07379162B2
公开(公告)日：2008-05-27
申请号：US11002900
申请日：2004-12-03
申请人： Yoshikazu Miyajima
发明人： Yoshikazu Miyajima
CPC分类号： G03F7/70341 , G03B27/58 , G03F7/70716 , G03F7/70866
摘要： A substrate holding apparatus contacts an undersurface of a substrate and holds the substrate. At least a portion of a top surface of the substrate is to be immersed in liquid. The apparatus includes a chuck unit to attract the substrate and a preventing system to prevent the liquid from reaching the undersurface of the substrate.
摘要翻译： 基板保持装置接触基板的下表面并保持基板。 将衬底的顶表面的至少一部分浸入液体中。 该装置包括吸引基板的卡盘单元和防止液体到达基板的下表面的防止系统。
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