Connection/inspection device for semiconductor elements
    2.
    发明授权
    Connection/inspection device for semiconductor elements 失效
    半导体元件连接/检查装置

    公开(公告)号:US06815962B2

    公开(公告)日:2004-11-09

    申请号:US10216836

    申请日:2002-08-13

    IPC分类号: G01R3104

    CPC分类号: G01R1/07307

    摘要: There is provided an electric connection-inspection device which does not impair a freedom of selection of using materials from a viewpoint of restriction in terms of product's function with the aptitude of electric features of electric resistance and physical properties of internal stress, and restriction in terms of manufacture as to the appropriation or not of employment of a plating method, and which has a fine construction provided with the excellent durability that an electrode element is hard to adhere and coagulate. An electric connection-inspection device for coming into electrically contact with an object to be inspected to input and output a signal, comprising a plurality of contact terminals, a coating of a second layer having the Young's modulus higher than that of a wiring base-material layer and whose specific resistance is not more than 1×10−4 &OHgr;cm being formed on the surface of the wiring base-material layer positioned at the extreme end of the contact terminal, and a coating of a third layer having a low coagulating property being formed on the surface of the second layer.