公开(公告)号：US20120145073A1

公开(公告)日：2012-06-14

申请号：US13401625

申请日：2012-02-21

申请人： Yoshiteru Fukutomi ,  Tsuyoshi MITSUHASHI ,  Hiroyuki OGURA ,  Kenya MORINISHI ,  Yasuo KAWAMATSU ,  Hiromichi NAGASHIMA

发明人： Yoshiteru Fukutomi ,  Tsuyoshi MITSUHASHI ,  Hiroyuki OGURA ,  Kenya MORINISHI ,  Yasuo KAWAMATSU ,  Hiromichi NAGASHIMA

IPC分类号： B05C11/00

CPC分类号： H01L21/67178 ,  B05B14/43 ,  B05B14/44 ,  B05C13/00 ,  B05C13/02 ,  B05D3/0486 ,  G03F7/26 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67225 ,  H01L23/34 ,  H01L2924/0002 ,  Y10S414/135 ,  H01L2924/00

摘要： A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units. The treating units include solution treating units and heat-treating units. The solution treating units are arranged at one side of the transporting space, the heat-treating units are arranged at the other side of the transporting space, and the main transport mechanism and the treating units are in substantially the same layout in plan view for the respective cells. The solution treating units are in substantially the same layout in side view for the respective cells, the heat-treating units are in substantially the same layout in side view for the respective cells, and treatments of the substrates carried out in the respective cells are the same.

摘要翻译： 一种基板处理装置，包括处理块，该处理块包括多个彼此排列的单元。 每个单元具有用于处理基板的处理单元和设置在用于将基板输送到处理单元的输送空间中的单个主输送机构。 处理单元包括溶液处理单元和热处理单元。 溶液处理单元布置在传送空间的一侧，热处理单元布置在传送空间的另一侧，主传送机构和处理单元在平面图中基本相同的布局 各自的细胞。 溶液处理单元在各个单元的侧视图中基本相同的布局，热处理单元在各个单元的侧视图中基本相同的布局，并且在各单元中执行的基板的处理是 相同。

公开(公告)号：US20090165712A1

公开(公告)日：2009-07-02

申请号：US12343292

申请日：2008-12-23

申请人： Hiroyuki OGURA ,  Tsuyoshi Mitsuhashi ,  Yoshiteru Fukutomi ,  Kenya Morinishi ,  Yasuo Kawamatsu ,  Hiromichi Nagashima

发明人： Hiroyuki OGURA ,  Tsuyoshi Mitsuhashi ,  Yoshiteru Fukutomi ,  Kenya Morinishi ,  Yasuo Kawamatsu ,  Hiromichi Nagashima

IPC分类号： B05C11/00

CPC分类号： H01L21/67225 ,  B05C9/12 ,  B05C9/14 ,  B05C13/00 ,  B05C13/02 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67196 ,  H01L21/67276 ,  H01L21/67742

摘要： A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.

摘要翻译： 用于处理基板的基板处理装置包括：垂直布置的多个基板处理线，用于在基板上大致水平地输送基板的同时在基板上进行多种处理;以及控制器，用于改变对基板的处理 底物处理线。 通过改变对于每个基板处理线的基板的处理过程，可以方便地对每个基板改变对基板进行的处理的处理。 因此，对于各个基板，可以并行地执行与基板处理线的数量相对应的多个不同的处理处理。

公开(公告)号：US20080314636A1

公开(公告)日：2008-12-25

申请号：US12133434

申请日：2008-06-05

申请人： Hiroyuki OGURA

发明人： Hiroyuki OGURA

IPC分类号： H05K9/00

CPC分类号： H01B11/1895 ,  H01B11/1808

摘要： A multilayer shielded wire includes an inner conductor, a first conductor which covers the inner conductor through a first insulating layer, and a second conductor which covers the first conductor through a second insulating layer. A predetermined interlayer distance between the first conductor and the second conductor are set. A conductive portion is provided between the first conductor and the second conductor to electrically connect the first conductor to the second conductor.

摘要翻译： 多层屏蔽线包括内导体，通过第一绝缘层覆盖内导体的第一导体和通过第二绝缘层覆盖第一导体的第二导体。 设定第一导体和第二导体之间的规定的层间距离。 导电部分设置在第一导体和第二导体之间，以将第一导体电连接到第二导体。

公开(公告)号：US20110298329A1

公开(公告)日：2011-12-08

申请号：US12886767

申请日：2010-09-21

申请人： Hiroyuki KINUGAWA ,  Hiroyuki OGURA ,  Tatsuhiro UJIIE

发明人： Hiroyuki KINUGAWA ,  Hiroyuki OGURA ,  Tatsuhiro UJIIE

IPC分类号： H02K3/28

CPC分类号： H02K3/28 ,  H02K1/148 ,  H02K3/18

摘要： A stator includes an iron core 3 in which a plurality of teeth 2 are connected into an integral body, and coil wires 5 each of which is wound in series around each set of a predetermined number of teeth included in the plurality of teeth. Each of the coil wires 5 is routed in a slanting direction between opposed faces of two adjacent teeth 2 in each set of the predetermined number of teeth 2, so that each of the coil wires makes a transition from a wire wound around one of teeth 2 to a wire wound around the other tooth 2.

摘要翻译： 定子包括：铁芯3，其中多个齿2连接成一体;以及线圈绕线5，每个线圈绕组包括在多个齿中包括的每组预定数量的齿。 每个线圈线5在每组预定数量的齿2中的两个相邻齿2的相对面之间沿倾斜方向布线，使得每个线圈线从缠绕在齿2之间的线转过 缠绕在另一根牙齿2上的线。