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1.发明申请VIBRATOR, RESONATOR USING THE SAME AND ELECTROMECHANICAL FILTER USING THE SAME 失效振动器，使用它的谐振器和使用它的电动过滤器公开(公告)号：US20090195330A1
公开(公告)日：2009-08-06
申请号：US12304602
申请日：2007-06-14
CPC分类号： H03H9/2463 , H03H3/0072 , H03H9/02244 , H03H9/1057 , H03H9/2405 , H03H9/2457 , H03H2009/02314 , H03H2009/02519
摘要： An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.
摘要翻译： 本发明的目的是提供一种谐振器和具有高Q值的振动器，其中振动器的振动中的振动能量的耗散小，并且梁结构的振动器的支撑部分的厚度比厚度 振动器和支撑部分相对于梁的长度方向以轴对称形成。 通过这种构造，支撑部件的脆性得到改善，并且来自支撑部件的振动能量的损失减小，并且还可以减小由振动器的表面的表面粗糙度引起的振动能量的损失，使得具有高Q值的谐振器 可以提供价值。
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公开(公告)号：US07209019B2
公开(公告)日：2007-04-24
申请号：US11201541
申请日：2005-08-11
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2001/0078 , H01H2059/0027
摘要： A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
摘要翻译： 开关包括电压施加装置，用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势，以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势，引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束，第一和第二光束可以高速电耦合在一起。 此外，在面向第一和第二光束的第三光束上产生静电力，以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时，第二光束向第三光束移动，从而释放电耦合的第一和第二光束。
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公开(公告)号：US07105758B2
公开(公告)日：2006-09-12
申请号：US10490395
申请日：2003-06-05
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H2001/0068 , H01H2059/0081
摘要： A switch that is capable of responding at a high rate at a lower DC potential while providing high isolation. In this switch, a microstructure group, having microstructures, is used. By slightly moving the microstructures a small amount the group, as a whole, achieves a large amount of movement. Also, by this configuration, it is possible to decrease a DC potential to apply to control electrodes of the microstructures. As a result, a high isolation switch capable of operating at a high rate at a lower DC potential is realized.
摘要翻译： 能够以较低的DC电位高速响应的开关，同时提供高隔离度。 在该开关中，使用具有微观结构的微结构组。 通过稍微移动微结构，该组织整体上实现了大量的运动。 另外，通过这种结构，可以降低施加到微结构的控制电极的DC电位。 结果，实现了能够以较低的DC电位高速工作的高隔离开关。
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公开(公告)号：US06995633B2
公开(公告)日：2006-02-07
申请号：US10474697
申请日：2003-01-31
CPC分类号： H03H9/02338 , H01P1/127 , H01P1/20 , H01P1/2013 , H03H3/0072 , H03H9/02259 , H03H9/2405 , H03H9/462 , H03H2009/02511 , Y10S977/733
摘要： A compact high-performance mechanical vibration filter which deals with high frequency band signals. Microcolumn beams as minute mechanical vibrators are used to increase a mechanical resonance frequency. The plural microcolumn beams are arranged in an array and a common detection electrode surrounds each microcolumn beam with prescribed gaps between them, thereby preventing an output signal from becoming weak. When some of the mechanical vibrators are restrained from vibrating, it is possible to monitor and remove a noise component generated in the output signal by direct electromagnetic coupling of an input signal.
摘要翻译： 一种紧凑的高性能机械振动滤波器，可处理高频信号。 使用微柱梁作为微机械振动器来增加机械共振频率。 多个微柱梁排列成阵列，公共检测电极围绕每个微柱具有规定的间隙，从而防止输出信号变弱。 当一些机械振动器被抑制振动时，可以通过输入信号的直接电磁耦合来监视和去除输出信号中产生的噪声分量。
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公开(公告)号：US20050162244A1
公开(公告)日：2005-07-28
申请号：US11063282
申请日：2005-02-22
CPC分类号： H01P1/127 , H01H59/0009
摘要： A switch for switching over a propagation path of external signal by contacting or non-contacting a movable member to or from an electrode. The switch comprises an input port for inputting an external signal, a movable member connected to the input port, a first electrode for propagating the external signal, a first control power supply connected to the first electrode and for generating a control signal, a second electrode for blocking the external signal, and a second control power supply connected to the second electrode and for generating a control signal. The first control power supply provides a control signal to the first electrode. The movable member is displaced by a driving force generated based on a potential difference between the movable member and first electrode and a potential difference between the movable member and second electrode, thereby being contacted to the first or second electrode.
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公开(公告)号：US06891454B1
公开(公告)日：2005-05-10
申请号：US10625154
申请日：2003-07-23
CPC分类号： H01P1/127 , H01H59/0009
摘要： A switch for switching over a propagation path of external signal by contacting or non-contacting a movable member to or from an electrode. The switch comprises an input port for inputting an external signal, a movable member connected to the input port, a first electrode for propagating the external signal, a first control power supply connected to the first electrode and for generating a control signal, a second electrode for blocking the external signal, and a second control power supply connected to the second electrode and for generating a control signal. The first control power supply provides a control signal to the first electrode. The movable member is displaced by a driving force generated based on a potential difference between the movable member and first electrode and a potential difference between the movable member and second electrode, thereby being contacted to the first or second electrode.
摘要翻译： 用于通过使可动构件接触或不接触电极来切换外部信号的传播路径的开关。 开关包括用于输入外部信号的输入端口，连接到输入端口的可动件，用于传播外部信号的第一电极，连接到第一电极并用于产生控制信号的第一控制电源，用于产生控制信号的第二电极 用于阻挡外部信号，以及连接到第二电极并用于产生控制信号的第二控制电源。 第一控制电源向第一电极提供控制信号。 通过基于可动构件和第一电极之间的电位差产生的驱动力和可动构件与第二电极之间的电位差而使可动构件位移，从而与第一或第二电极接触。
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公开(公告)号：US07405635B2
公开(公告)日：2008-07-29
申请号：US10572142
申请日：2004-12-20
IPC分类号： H01P1/10
CPC分类号： H01H59/0009 , H01H2001/0078
摘要： It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio.An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer 38, 40, a second conductive layer 30, 32 and a dielectric layer 34, 36 sandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam 42; at least one of the conductive beam 42 and the three-layer structure beams is displaced on a plane parallel to the substrate 46 due to an electrostatic force so that the conductive beam 42 and the first conductive layer 38, 40 can come into contact with each other; and a conductive path is formed between the conductive beam 42 and the second conductive layer 30, 32 when the conductive beam 42 and the first conductive layer are in contact with each other.
摘要翻译： 它是提供一种易于制造，微观且能够获得足够的开/关电容变化率的MEMS开关。 MEMS开关包括衬底46，形成在衬底表面上的导电束42和形成在衬底的表面上且与导电束相对设置的三层结构梁B 1和B 2。 MEMS开关的特征在于：三层结构梁中的每一个包括夹在第一导电层和第二导电层之间的第一导电层38,40，第二导电层30,32和介电层34,36 ; 第一导电层与导电束42相对; 导电束42和三层结构光束中的至少一个由于静电力而在平行于衬底46的平面上移位，使得导电束42和第一导电层38,40可以与每个 其他; 并且当导电束42和第一导电层彼此接触时，在导电束42和第二导电层30,32之间形成导电路径。
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公开(公告)号：US06982616B2
公开(公告)日：2006-01-03
申请号：US10624381
申请日：2003-07-22
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/40 , H01H2001/0078 , H01H2059/0027
摘要： A switch comprises voltage applying means for providing direct current potentials to first to third beams arranged with a spacing slightly distant one from another, and electrodes for inputting/outputting signals to/from the beams. By controlling the direct current potential provided to the beam, an electrostatic force is caused to thereby change the beam positions and change a capacitance between the beams. By causing an electrostatic force between the first and second beams and moving the both beams, the first and second beams can be electrically coupled together at high speed. Also, an electrostatic force is caused on the third beam arranged facing to the first and second beams, to previously place it close to the first and second beams. When the electrostatic force is released from between the first and second beams, the second beam moves toward the third beam thereby releasing the first and second beams of an electric coupling.
摘要翻译： 开关包括电压施加装置，用于向彼此稍微间隔的间隔布置的第一至第三波束提供直流电势，以及用于向/从波束输入/输出信号的电极。 通过控制提供给光束的直流电势，引起静电力从而改变光束位置并改变光束之间的电容。 通过在第一和第二光束之间引起静电力并移动两个光束，第一和第二光束可以高速电耦合在一起。 此外，在面向第一和第二光束的第三光束上产生静电力，以预先将其靠近第一和第二光束。 当静电力从第一和第二光束之间释放时，第二光束向第三光束移动，从而释放电耦合的第一和第二光束。
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公开(公告)号：US20070216496A1
公开(公告)日：2007-09-20
申请号：US11569501
申请日：2005-06-02
IPC分类号： H03H9/46
CPC分类号： H03H9/2405 , H03H3/0072 , H03H9/02433 , H03H9/462 , H03H2009/02519 , Y10S977/724 , Y10S977/932
摘要： An object is to provide an electromechanical filter which can define a vibration mode so that a vibrator can be excited only in a desired vibration mode, that is, a filter which can suppress any vibration mode other than a desired vibration mode. The electromechanical filter includes a first member for inputting a signal, a second member disposed at a predetermined distance from the first member so as to surround the first member and to be excited due to an electrostatic force caused by the signal input from the first member, and a third member disposed at a predetermined distance from the second member so as to surround the second member and to detect vibration of the second member. The second member is designed to receive an attractive force from the first member and the third member so as to be bound and regulated as to a vibration direction.
摘要翻译： 本发明的目的是提供一种能够限定振动模式的机电滤波器，使得振动器仅能够以期望的振动模式被激励，即，可以抑制除期望振动模式之外的任何振动模式的滤波器。 机电滤波器包括用于输入信号的第一部件，设置在距第一部件预定距离处的第二部件，以便围绕第一部件并由于由第一部件输入的信号引起的静电力而被激励， 以及第三构件，其以与第二构件相隔预定距离的方式设置，以围绕第二构件并且检测第二构件的振动。 第二构件被设计成从第一构件和第三构件接收吸引力，以便结合和调节振动方向。
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公开(公告)号：US06992551B2
公开(公告)日：2006-01-31
申请号：US10628549
申请日：2003-07-28
IPC分类号： H01H51/22
CPC分类号： H01H59/0009
摘要： Disclosed is a switch having a movable electrode to be separately driven downward and upward to secure signal transmission efficiency and insulation capability and operate for signal connection and disconnect at a high speed. The switch comprises a movable electrode, a fixed electrode positioned beneath the movable electrode, and a movable electrode driving fixed electrode positioned on both sides of the movable electrode with respect to a length wise direction thereof. Inside surfaces of the movable electrode, concave and convex parts are formed to arrange on both sides fixed electrodes having the corresponding concave and convex parts with a space.
摘要翻译： 公开了一种开关，其具有可分别向下并向上驱动的可动电极，以确保信号传输效率和绝缘能力，并且以高速度进行信号连接和断开操作。 该开关包括可动电极，位于可动电极下方的固定电极以及位于可动电极的相对于其长度方向两侧的可动电极驱动固定电极。 可动电极的内表面，凹凸部分形成为具有空间相对的具有相应凹凸部分的固定电极。
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