摘要:
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
摘要:
A flat-panel display (FPD) manufacturing apparatus is disclosed which not only includes a load lock chamber, a feeding chamber, and a processing chamber, at least one of which has a vertically-stacked chamber structure to achieve an enhancement in substrate processing efficiency, but also includes a temporary substrate storing space for temporarily storing substrates in the feeding chamber to reduce the time taken to feed substrates. Another FPD manufacturing apparatus is disclosed which includes a load lock chamber, a feeding chamber connected to the load lock chamber, a temporary substrate storing space arranged at a predetermined portion of the feeding chamber, and at least one processing chamber connected to the feeding chamber.
摘要:
An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.
摘要:
A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.
摘要:
Disclosed herein is a plasma processing apparatus, which generates plasma within a vacuum chamber to process semiconductor substrates using the plasma. The apparatus comprises a substrate mounting table, an outer lifting bar, and a baffle. The outer lifting bar comprises a driving shaft, and a substrate supporting member coupled perpendicular to an upper end of the driving shaft. The baffle comprises a baffle plate coupled to the upper end of the driving shaft, and a shielding portion coupled to a lower surface of the baffle plate. The substrate supporting member is a foldable substrate supporting member. The baffle and the substrate supporting member are driven up and down at the same time by the driving shaft. As a result, it is possible to protect the substrate supporting member from plasma, and to prevent interference between the baffle and the outer lifting bar during operation of the plasma processing apparatus.
摘要:
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.
摘要:
The present invention provides a flat fluorescent lamp. The flat fluorescent lamp comprises a single plate. Consequently, the flat fluorescent lamp is structurally safe, brightness of the flat fluorescent lamp is high, and efficiency of the flat fluorescent lamp is also high without the provision of other additional optical components. The present invention also provides a method of manufacturing such a flat fluorescent lamp.
摘要:
Provided is an electrochemical device comprising two types of separators having different energy to break, wherein the outermost electrode layer of the electrode assembly includes an active material non-coated cathode, an active material non-coated anode, and a separator (second separator) disposed between the cathode and anode and having relatively low energy to break compared to that of separators (first separator) in other electrode layers. Therefore, it is possible to remarkably improve safety of the battery by inducing primary short-circuiting in the outermost electrode layer of a battery, thus facilitating heat dissipation of the battery, upon application of external impact.
摘要:
A network component comprising at least one processor configured to implement a method comprising transmitting a request to compute a routing assignment, a wavelength assignment, or both for a signal in a wavelength switched optical network, wherein the request comprises a lightpath constraint and wherein the request is transmitted using a path computation element protocol. Also disclosed is a network comprising a first path computation element (PCE) and a path computation client (PCC) in communication with the PCE, wherein the PCC is configured to send a request to and receive a reply from the PCE using a PCE protocol, wherein the request comprises a lightpath constraint. Included is a method comprising sending a discovery advertisement to the at least one PCE that calculates a wavelength assignment, receiving a response comprising a PCE capability information from the PCE, wherein the request and the reply are communicated via a PCE protocol.
摘要:
An apparatus comprising an application cross-stratum optimization (CSO) gateway (ACG) coupled to an application layer that handles a plurality of servers, a network CSO gateway (NCG) coupled to a network layer that handles a plurality of network nodes and configured to communicate with the ACG using a CSO protocol (CSOP), and a CSO interface established between the ACG and the NCG that enables the exchange of a plurality of CSOP messages to allow joint application-network resource allocation, provisioning, and optimization. Also disclosed is a network apparatus implemented method comprising sending a user profile from a user plane to an application plane, sending an application profile from the application plane to a network plane via a CSO interface between an ACG and a NCG, and sending network capability information from the network plane to the application plane via the CSO interface.