公开(公告)号：US09301379B2

公开(公告)日：2016-03-29

申请号：US13809582

申请日：2012-03-23

申请人： Yukio Watanabe ,  Miwa Igarashi ,  Masato Moriya ,  Hiroaki Nakarai

发明人： Yukio Watanabe ,  Miwa Igarashi ,  Masato Moriya ,  Hiroaki Nakarai

IPC分类号： G21K5/04 ,  H05G2/00 ,  G03F7/20

CPC分类号： H05G2/008 ,  G03F7/70033 ,  H05G2/003

摘要： An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.

摘要翻译： 用于产生极紫外光的装置可以包括：具有开口的腔室，激光束通过该开口引入腔室; 安装所述室的参考构件; 目标供应单元，用于将由激光束照射的目标材料供应到室内的预定区域; 激光束聚焦光学系统，用于将激光束聚焦在室内的预定区域中，以将靶材料转化为等离子体; 以及用于收集从等离子体发射的极紫外光的收集器反射镜。

公开(公告)号：US20130105713A1

公开(公告)日：2013-05-02

申请号：US13809582

申请日：2012-03-23

申请人： Yukio Watanabe ,  Miwa Igarashi ,  Masato Moriya ,  Hiroaki Nakarai

发明人： Yukio Watanabe ,  Miwa Igarashi ,  Masato Moriya ,  Hiroaki Nakarai

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  G03F7/70033 ,  H05G2/003

摘要： An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.

摘要翻译： 用于产生极紫外光的装置可以包括：具有开口的腔室，激光束通过该开口引入腔室; 安装所述室的参考构件; 目标供应单元，用于将由激光束照射的目标材料供应到室内的预定区域; 激光束聚焦光学系统，用于将激光束聚焦在室内的预定区域中，以将目标材料转换成等离子体; 以及用于收集从等离子体发射的极紫外光的收集器反射镜。

公开(公告)号：US08885680B2

公开(公告)日：2014-11-11

申请号：US13805300

申请日：2012-03-05

申请人： Hiroaki Nakarai ,  Osamu Wakabayashi ,  Hideo Hoshino

发明人： Hiroaki Nakarai ,  Osamu Wakabayashi ,  Hideo Hoshino

IPC分类号： H01S3/13 ,  H01S3/00 ,  H01S3/107 ,  H05G2/00 ,  H01S3/134 ,  H01S3/23 ,  H01S3/223

CPC分类号： H01S3/0057 ,  H01S3/107 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/235 ,  H01S3/2375 ,  H01S3/2391 ,  H05G2/008

摘要： A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam, at least one power source for varying an excitation intensity in the at least one amplifier, and a controller configured to control the pulse energy adjusting unit on a pulse-to-pulse basis for the pulse laser beam passing therethrough and to control the at least one power source for a group of multiple pulses of the pulse laser beam.

摘要翻译： 激光装置可以包括配置成输出脉冲激光束的种子激光装置，被配置为改变脉冲激光束的脉冲能量的脉冲能量调节单元，至少一个用于放大脉冲激光束的放大器，至少一个用于 改变所述至少一个放大器中的激发强度，以及控制器，被配置为基于脉冲至脉冲基准控制所述脉冲能量调节单元，以使所述脉冲激光束通过其中并且控制所述至少一个电源 多脉冲脉冲激光束。

公开(公告)号：US20110309270A1

公开(公告)日：2011-12-22

申请号：US13120998

申请日：2011-02-16

申请人： Yohichi Yamanouchi ,  Takashi Suganuma ,  Junichi Fujimoto ,  Osamu Wakabayashi ,  Hiroaki Nakarai ,  Hidenobu Kameda ,  Hitoshi Oga

发明人： Yohichi Yamanouchi ,  Takashi Suganuma ,  Junichi Fujimoto ,  Osamu Wakabayashi ,  Hiroaki Nakarai ,  Hidenobu Kameda ,  Hitoshi Oga

IPC分类号： G01J3/10 ,  H01S3/091

CPC分类号： G03F7/70975 ,  G03F7/70033 ,  H01S3/0071 ,  H01S3/03

摘要： Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.

摘要翻译： 提供一种激光装置，其安装在预定空间内并在预定的地板区域上，激光装置可包括：主振荡器; 至少一个放大单元，放大从主振荡器输出的激光束; 至少一个电源单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。

公开(公告)号：US20130099140A1

公开(公告)日：2013-04-25

申请号：US13805300

申请日：2012-03-05

申请人： Hiroaki Nakarai ,  Osamu Wakabayashi ,  Hideo Hoshino

发明人： Hiroaki Nakarai ,  Osamu Wakabayashi ,  Hideo Hoshino

IPC分类号： H01S3/00

CPC分类号： H01S3/0057 ,  H01S3/107 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/235 ,  H01S3/2375 ,  H01S3/2391 ,  H05G2/008

摘要： A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam, at least one power source for varying an excitation intensity in the at least one amplifier, and a controller configured to control the pulse energy adjusting unit on a pulse-to-pulse basis for the pulse laser beam passing therethrough and to control the at least one power source for a group of multiple pulses of the pulse laser beam.

摘要翻译： 激光装置可以包括配置成输出脉冲激光束的种子激光装置，被配置为改变脉冲激光束的脉冲能量的脉冲能量调节单元，至少一个用于放大脉冲激光束的放大器，至少一个用于 改变所述至少一个放大器中的激发强度，以及控制器，被配置为基于脉冲到脉冲基准控制所述脉冲能量调节单元，用于脉冲激光束通过其中并且控制所述至少一个电源的一组 多脉冲脉冲激光束。