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    FUNCTIONAL ELEMENT PACKAGE AND FABRICATION METHOD THEREFOR
    1.
    发明申请
    FUNCTIONAL ELEMENT PACKAGE AND FABRICATION METHOD THEREFOR 失效
    功能元件包装及其制造方法

    公开(公告)号：US20100072562A1

    公开(公告)日：2010-03-25

    申请号：US12531552

    申请日：2008-03-17

    申请人： Yukito Sato ,  Joerg Froemel

    发明人： Yukito Sato ,  Joerg Froemel

    IPC分类号： H01L29/84 ,  H01L21/50

    CPC分类号： B81C1/00301 ,  B81B2207/095 ,  B81B2207/097 ,  B81B2207/098 ,  B81C2203/019 ,  H01L23/04 ,  H01L23/10 ,  H01L2224/48091 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/3011 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A functional element package includes a silicon substrate with a functional element having one of a mobile portion and a sensor thereon; a seal member being bonded with the silicon substrate to form an airtightly sealed space therein, and including a step portion in its height direction; a first wiring portion being connected with the functional element and extending from the airtightly sealed space to an outside thereof; a second wiring portion being different from the first wiring portion and extending from the step portion to an upper surface of the seal member; and a bump on the second wiring portion, in which the first wiring portion is bent towards the airtightly sealed space and connected via a photoconductive member with the second wiring portion on the step portion.

    摘要翻译： 功能元件封装包括具有功能元件的硅衬底，功能元件具有可移动部分和传感器之一; 密封构件与硅衬底结合以在其中形成气密密封的空间，并且在其高度方向上包括台阶部分; 第一布线部分与功能元件连接并从气密密封的空间延伸到其外部; 第二布线部分，其不同于第一布线部分并且从台阶部分延伸到密封构件的上表面; 以及第二布线部分上的凸起，其中第一布线部分朝向气密密封的空间弯曲并且经由感光体与台阶部分上的第二布线部分连接。

    Functional element package and fabrication method therefor
    2.
    发明授权
    Functional element package and fabrication method therefor 失效
    功能元件封装及其制造方法

    公开(公告)号：US08164180B2

    公开(公告)日：2012-04-24

    申请号：US12531552

    申请日：2008-03-17

    申请人： Yukito Sato ,  Joerg Froemel

    发明人： Yukito Sato ,  Joerg Froemel

    IPC分类号： H01L29/84

    CPC分类号： B81C1/00301 ,  B81B2207/095 ,  B81B2207/097 ,  B81B2207/098 ,  B81C2203/019 ,  H01L23/04 ,  H01L23/10 ,  H01L2224/48091 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/3011 ,  H01L2924/00014 ,  H01L2924/00

    摘要： A functional element package includes a silicon substrate with a functional element having one of a mobile portion and a sensor thereon; a seal member being bonded with the silicon substrate to form an airtightly sealed space therein, and including a step portion in its height direction; a first wiring portion being connected with the functional element and extending from the airtightly sealed space to an outside thereof; a second wiring portion being different from the first wiring portion and extending from the step portion to an upper surface of the seal member; and a bump on the second wiring portion, in which the first wiring portion is bent towards the airtightly sealed space and connected via a photoconductive member with the second wiring portion on the step portion.

    摘要翻译： 功能元件封装包括具有功能元件的硅衬底，功能元件具有可移动部分和传感器之一; 密封构件与硅衬底结合以在其中形成气密密封的空间，并且在其高度方向上包括台阶部分; 第一布线部分与功能元件连接并从气密密封的空间延伸到其外部; 第二布线部分，其不同于第一布线部分并且从台阶部分延伸到密封构件的上表面; 以及第二布线部分上的凸起，其中第一布线部分朝向气密密封的空间弯曲并且经由感光体与台阶部分上的第二布线部分连接。

    OPTICAL DEFLECTOR AND OPTICAL DEVICE
    3.
    发明申请
    OPTICAL DEFLECTOR AND OPTICAL DEVICE 有权
    光学偏转器和光学器件

    公开(公告)号：US20080225363A1

    公开(公告)日：2008-09-18

    申请号：US12048694

    申请日：2008-03-14

    申请人： Tetsurou SAITOH ,  Eiji Mochizuki ,  Yukito Sato ,  Yoshiaki Yasuda ,  Masahiro Akamatsu ,  Masanao Tani

    发明人： Tetsurou SAITOH ,  Eiji Mochizuki ,  Yukito Sato ,  Yoshiaki Yasuda ,  Masahiro Akamatsu ,  Masanao Tani

    IPC分类号： G02B26/10

    CPC分类号： G02B26/0858

    摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

    摘要翻译： 光学偏转器包括使得反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转地摆动的多个压电单晶振荡体（210a至210d）。 光学偏转器通过连接一组振动板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）形成单一结构 将压电单晶振荡体（210a至210d）的振动板（23a至23d）的端子连接到柔性支撑单元（2a和2b），并将另一组端子连接到 支撑体（9）。 此外，多个压电单晶体振荡体（210a〜210d）各自分别包括多个平行的振荡体（23a，1〜23a-3,23b-1〜23b-3,23c-1〜 23c-3）和（23d-1至23d-3）以及一组平行致动器（28a-1至28a-3,28c-1至28c-3和28d- 1〜28d-3）。

    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus
    4.
    发明授权
    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus 有权
    偏转镜，偏转镜制造方法，光学写入装置和图像形成装置

    公开(公告)号：US07190507B2

    公开(公告)日：2007-03-13

    申请号：US11082765

    申请日：2005-03-18

    申请人： Yukito Sato

    发明人： Yukito Sato

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841

    摘要： The present invention provides a deflection mirror including a mirror substrate having a mirror face that reflects a light, a beam, and a supporting member that supports the mirror substrate through the beam. A movable electrode is formed at a free side of the mirror substrate. A fixed electrode is operably linked through the movable electrode at a gap that is formed in the supporting member. The mirror substrate is driven by electrostatic force between the movable electrode and the fixed electrode and vibrates centering of the beam. An end of at least one of the fixed electrode and the movable electrode is smaller in the thickness direction than the other end.

    摘要翻译： 本发明提供了一种偏转镜，其包括具有反射光的镜面的反射镜基板，光束和通过光束支撑镜面基板的支撑部件。 可动电极形成在镜基板的自由侧。 固定电极通过可动电极以形成在支撑构件中的间隙可操作地连接。 反射镜基板由可动电极和固定电极之间的静电力驱动，并振动光束的中心。 固定电极和可动电极中的至少一个的端部的厚度方向比另一端小。

    Optical deflector and optical device
    9.
    发明授权
    Optical deflector and optical device 有权
    光学偏转器和光学装置

    公开(公告)号：US08553306B2

    公开(公告)日：2013-10-08

    申请号：US12048694

    申请日：2008-03-14

    申请人： Tetsurou Saitoh ,  Eiji Mochizuki ,  Yukito Sato ,  Yoshiaki Yasuda ,  Masahiro Akamatsu ,  Masanao Tani

    发明人： Tetsurou Saitoh ,  Eiji Mochizuki ,  Yukito Sato ,  Yoshiaki Yasuda ,  Masahiro Akamatsu ,  Masanao Tani

    IPC分类号： G02B26/08

    CPC分类号： G02B26/0858

    摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

    摘要翻译： 光学偏转器包括使反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转摆动的多个压电单晶振荡体（210a至210d）。 光学偏转器通过将一组端子连接在一起，形成振荡板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）的单一结构 压电单晶振荡体（210a〜210d）组合到柔性支撑单元（2a和2b）的振动板（23a至23d），并将另一组端子连接到支撑体（9）上。 此外，多个压电单晶振荡体（210a〜210d）分别分别包括多个并联振荡体（23a1〜23a-3,23b-1〜23b-3，23c-1〜23c-3），（23d -1〜23d-3）和一组平行的致动器（28a-1〜28a-3,28c-1〜28c-3，以及28d-1〜28d-3）。

    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus
    10.
    发明申请
    Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus 有权
    偏转镜，偏转镜制造方法，光学写入装置和图像形成装置

    公开(公告)号：US20050231793A1

    公开(公告)日：2005-10-20

    申请号：US11082765

    申请日：2005-03-18

    申请人： Yukito Sato

    发明人： Yukito Sato

    IPC分类号： B41J2/44 ,  B81B3/00 ,  B81C1/00 ,  G02B26/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/036 ,  H04N1/113

    CPC分类号： G02B26/0841

    摘要： A deflection mirror and a manufacturing method thereof are disclosed. A mirror substrate, beams, and a supporting member are formed in one body; movable electrodes are formed in the shape of comb-teeth at free sides of the mirror substrate; and fixed electrodes are formed in the shape of comb-teeth on the supporting member. The movable electrodes and the fixed electrodes gear through at a minute gap when the mirror substrate is driven by electrostatic force between the movable electrodes and the fixed electrodes. The cross-sectional shape of the movable electrodes and the fixed electrodes is like a trapezoid, or alternatively, the thickness of the fixed electrodes is greater than the movable electrodes. In a region of the fixed electrodes, the region not countering the movable electrodes when the mirror substrate is stopped, the portion having a width greater than a portion of a region that counters the movable electrodes, is provided. The movable electrodes may be structured thicker than the fixed electrodes.

    摘要翻译： 公开了偏转镜及其制造方法。 镜体基板，梁和支撑构件形成在一体中; 可动电极在镜基板的自由侧形成为梳齿形状; 并且固定电极在支撑构件上形成为梳齿形状。 当可动电极和固定电极之间的静电力驱动反射镜基板时，可移动电极和固定电极以微小间隙齿轮穿过。 可动电极和固定电极的截面形状类似梯形，或者固定电极的厚度大于可动电极。 在固定电极的区域中，设置当反射镜基板停止时不与可移动电极相抵的区域，具有大于与可动电极对置的区域的一部分的宽度的部分。 可动电极的结构可以比固定电极厚。