摘要:
A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the thin-film platinum temperature-sensitive resistor comprising a platinum layer, the platinum layer having a maximum crystal grain size above a reference grain size of 800 Å. The thin-film platinum temperature-sensitive resistor is formed by a sputtering process to provide a temperature coefficient of resistance TCR above a reference TCR level of 3200 ppm.
摘要:
A flow sensor includes a first heating portion, provided at a first position in a flow of a fluid, which heats the fluid and outputs a voltage in response to a temperature of the first position. A second heating portion, provided at a second, downstream position in the flow of the fluid, heats the fluid and outputs a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid. An intermediate heater, provided between the first heating portion and the second heating portion, heats the fluid at an intermediate position between the first position and the second position.
摘要:
A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the thin-film platinum temperature-sensitive resistor comprising a platinum layer, the platinum layer having a maximum crystal grain size above a reference grain size of 800 .ANG.. The thin-film platinum temperature-sensitive resistor is formed by a sputtering process to provide a temperature coefficient of resistance TCR above a reference TCR level of 3200 ppm.
摘要:
A method of calibrating a zero point of a flow sensor includes the steps of detecting a transition of output of the flow sensor caused in response to a shut down of a fluid, and adjusting the zero point of a characteristic curve representing the output of the flow sensor and a flow rate, such that the indicated flow rate is zero immediately after the transition of the flow sensor output.
摘要:
A liquid dispenser head includes a plurality of nozzles, a plurality of liquid chambers, and a plurality of vibration members. The nozzle is used to discharge liquid. The liquid chamber communicates with the nozzle. The vibration member has a vibration portion, which is used as a deformable wall face of the liquid chamber. The vibration member includes a metal member and a resin layer directly formed on the metal member, and the resin layer has a coefficient of linear expansion greater than a coefficient of linear expansion of the metal member.
摘要:
A spectrum measuring device including a ribbon element, a light detection element, and circuitry. The ribbon element includes a first light reflector including a plurality of first light reflection surfaces configured to be translated in an out-of-plane direction, and a second light reflector including a plurality of second light reflection surfaces that are fixed. The circuitry supplies a drive signal to the ribbon element in such a manner that a change of a displacement amount difference between the first light reflection surfaces and the second light reflection surfaces corresponds to a predetermined frequency; and acquires the light quantity data detected by the light detection element at a predetermined sampling frequency.
摘要:
A disclosed magnetic sensor includes a substrate having a plane surface and multiple sloping surfaces; multiple soft magnetic films each disposed on a different one of the sloping surfaces and magnetized according to strength of a magnetic field; and multiple detecting devices each disposed on the plane surface, including a free layer and a pinned layer and configured to produce a detection output according to magnetization of the free layer and the pinned layer. Each of the soft magnetic films is magnetically coupled with the free layer of a different one of the detecting devices. The pinned layers of the detecting devices have magnetization directions different from each other.
摘要:
An ink jet head of the present invention compresses ink with an electrostatic force generated between each vibration plate and a counter electrode facing it. A glass substrate is formed with through holes in which a conductor is buried. A metal wiring pattern and conductor bumps are provided on the rear of each counter electrode. The conductor bumps and counter electrodes associated therewith are electrically connected together. Ink is fed from the rear of the glass substrate to a common ink chamber via a through hole assigned to ink feed. A metal wiring pattern on the rear of the glass substrate allows the conductor bumps to be arranged at any desired positions. The head does not need any flexible printed circuit board or any wiring substrate.
摘要:
A frame, a spectroscope, a spectrometry unit, and an image forming apparatus. The frame has hollow structure and includes at least four apertures including a first aperture, a second aperture, a third aperture through which light enters the frame, and a fourth aperture, a concave diffraction grating disposed at a position of the first aperture, and a movable reflector disposed at a position of the second aperture to reflect light dispersed by the concave diffraction grating and change a reflection angle of the reflected light. Through the fourth aperture of the frame, the light reflected by the movable reflector exits the frame. The spectroscope includes the frame, and the frame further includes an optical entrance disposed at a position of the third aperture, and an optical exit disposed at a position of the fourth aperture.
摘要:
An electrostatic actuator includes a diaphragm caused to vibrate by electrostatic force, an electrode substrate opposing the diaphragm, an electrode formed on the electrode substrate so as to oppose said diaphragm with a gap being formed between the electrode and the diaphragm, an anti-corrosive thin film formed on said diaphragm, and diaphragm deflection prevention means preventing the diaphragm from deflecting.