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21 条记录 (耗时 0.027 秒)

    THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD
    1.
    发明申请
    THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD 有权
    薄膜沉积装置，使用装置制造有机发光显示装置的方法，以及使用该方法制造的有机发光显示装置

    公开(公告)号：US20110168986A1

    公开(公告)日：2011-07-14

    申请号：US12987569

    申请日：2011-01-10

    申请人： Yun-Mi Lee ,  Sang-Soo Kim ,  Chang Mog Jo ,  Hyun-Sook Park

    发明人： Yun-Mi Lee ,  Sang-Soo Kim ,  Chang Mog Jo ,  Hyun-Sook Park

    IPC分类号： H01L51/52 ,  H01L51/56

    CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/243 ,  C23C14/568 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.

    摘要翻译： 薄膜沉积装置，使用薄膜沉积装置制造有机发光显示装置的方法以及使用该方法制造的有机发光显示装置。 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的具有不同长度的多个图案化缝隙; 以及阻挡板组件，其在所述第一方向上设置在所述沉积源喷嘴单元和所述图案化缝隙片之间，并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子区域的多个阻挡板， 沉积空间，其中所述薄膜沉积设备与所述基板分离预定距离，并且所述薄膜沉积设备和所述基板可相对于彼此移动。

    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
    2.
    发明授权
    Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method 有权
    薄膜沉积装置，使用该装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置

    公开(公告)号：US08859325B2

    公开(公告)日：2014-10-14

    申请号：US12987569

    申请日：2011-01-10

    申请人： Yun-Mi Lee ,  Sang-Soo Kim ,  Chang Mog Jo ,  Hyun-Sook Park

    发明人： Yun-Mi Lee ,  Sang-Soo Kim ,  Chang Mog Jo ,  Hyun-Sook Park

    IPC分类号： H01L51/40 ,  H01L51/00 ,  C23C14/24 ,  C23C14/56 ,  C23C14/04 ,  H01L51/56

    CPC分类号： H01L51/001 ,  C23C14/042 ,  C23C14/243 ,  C23C14/568 ,  H01L51/0011 ,  H01L51/56

    摘要： A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.

    摘要翻译： 薄膜沉积装置，使用薄膜沉积装置制造有机发光显示装置的方法以及使用该方法制造的有机发光显示装置。 薄膜沉积设备包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的具有不同长度的多个图案化缝隙; 以及阻挡板组件，其在所述第一方向上设置在所述沉积源喷嘴单元和所述图案化缝隙片之间，并且包括将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子区域的多个阻挡板， 沉积空间，其中所述薄膜沉积设备与所述基板分离预定距离，并且所述薄膜沉积设备和所述基板可相对于彼此移动。

    THIN FILM DEPOSITION APPARATUS
    5.
    发明申请
    THIN FILM DEPOSITION APPARATUS 审中-公开
    薄膜沉积装置

    公开(公告)号：US20110262625A1

    公开(公告)日：2011-10-27

    申请号：US13176701

    申请日：2011-07-05

    申请人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    发明人： Hyun-Sook PARK ,  Chang-Mog Jo ,  Hee-Cheol Kang ,  Yun-Mi Lee ,  Un-Cheol Sung ,  Yong-Sup Choi ,  Jong-Heon Kim ,  Jae-Kwang Ryu

    IPC分类号： B05D5/06 ,  B05C5/00

    CPC分类号： C23C14/042 ,  C23C14/12 ,  C23C14/24

    摘要： A thin film deposition apparatus including a chamber; a deposition source accommodated in the chamber and configured to discharge a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet located opposite the deposition source nozzle unit inside the chamber and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction, the patterning slit sheet being spaced apart from the substrate, and the thin film deposition apparatus being configured to perform a deposition while at least one of the substrate or the thin film deposition apparatus moves relative to the other in the first direction.

    摘要翻译： 一种薄膜沉积设备，包括：室; 沉积源，其容纳在所述室中并且构造成排出沉积材料; 沉积源喷嘴单元，位于沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 以及图案化缝隙片，其与所述腔室内的所述沉积源喷嘴单元相对，并且包括沿垂直于所述第一方向的第二方向布置的多个图案化狭缝，所述图案化缝隙片与所述衬底间隔开，并且所述薄膜沉积设备 被配置为在所述基板或所述薄膜沉积装置中的至少一个在所述第一方向上相对于另一个移动时执行沉积。