公开(公告)号：US10294108B2

公开(公告)日：2019-05-21

申请号：US15992586

申请日：2018-05-30

申请人： ZEON CORPORATION

发明人： Akiyoshi Shibuya

IPC分类号： C01B32/15 ,  C23C16/455 ,  C01B32/16 ,  B82Y40/00 ,  B82Y30/00

摘要： A method of producing a carbon nanostructure is provided that enables production of a high-quality carbon nanostructure with a high yield. The method of producing a carbon nanostructure includes supplying a feedstock gas to a catalyst and growing a carbon nanostructure by chemical vapor deposition. A gas X that is derived from the feedstock gas and that comes into contact with the catalyst contains a hydrocarbon A having at least one cyclopentadiene skeleton and a hydrocarbon B having at least one acetylene skeleton. A total volume concentration [A] of the hydrocarbon A is at least 0.06%.

公开(公告)号：US09815698B2

公开(公告)日：2017-11-14

申请号：US14652215

申请日：2013-12-18

申请人： ZEON CORPORATION

发明人： Akiyoshi Shibuya

IPC分类号： C23C16/00 ,  C01B31/02 ,  C23C16/52 ,  C01B32/162 ,  B82Y40/00

CPC分类号： C01B32/16 ,  B82Y40/00 ,  C01B32/162 ,  C23C16/52

摘要： This method improves a carbon nanotube growth environment. In this method of manufacturing carbon nanotubes, the supply amount of catalyst activating material supplied in a carbon nanotube growing step is adjusted to the supply amount of catalyst activating material supplied at the time of maximum concentration of a gas component among multiple measurements made in the growing step, the gas component being at least one selected from the group consisting of hydrogen, methane, and ethane.

公开(公告)号：US10011489B2

公开(公告)日：2018-07-03

申请号：US15021743

申请日：2014-09-30

申请人： ZEON CORPORATION

发明人： Akiyoshi Shibuya

IPC分类号： C01B31/02 ,  C23C16/455 ,  C01B32/15 ,  C01B32/16 ,  B82Y30/00 ,  B82Y40/00

CPC分类号： C01B32/15 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16 ,  C01B2202/32 ,  C01B2202/36 ,  C23C16/455 ,  Y10S977/742 ,  Y10S977/843

摘要： A method of producing a carbon nanostructure is provided that enables production of a high-quality carbon nanostructure with a high yield. The method of producing a carbon nanostructure includes supplying a feedstock gas to a catalyst and growing a carbon nanostructure by chemical vapor deposition. A gas X that is derived from the feedstock gas and that comes into contact with the catalyst contains a hydrocarbon A having at least one cyclopentadiene skeleton and a hydrocarbon B having at least one acetylene skeleton. A total volume concentration [A] of the hydrocarbon A is at least 0.06%.

公开(公告)号：US09682863B2

公开(公告)日：2017-06-20

申请号：US14949697

申请日：2015-11-23

申请人： ZEON CORPORATION ,  National Institute of Advanced Industrial Science and Technology

发明人： Akiyoshi Shibuya ,  Kenji Hata ,  Motoo Yumura

IPC分类号： C01B31/02 ,  C23C16/02 ,  C23C16/455 ,  C23C16/26 ,  C23C16/44 ,  B01J15/00 ,  B01J19/00 ,  B01J19/22 ,  B82Y30/00 ,  B82Y40/00

CPC分类号： C01B31/024 ,  B01J15/005 ,  B01J19/0006 ,  B01J19/0073 ,  B01J19/22 ,  B01J2219/00159 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/164 ,  C01B2202/08 ,  C23C16/0218 ,  C23C16/26 ,  C23C16/4408 ,  C23C16/4412 ,  C23C16/45502 ,  Y02P20/149

摘要： Provided is a production apparatus (100) for continuously producing aligned carbon nanotube aggregates on a substrate supporting a catalyst while continuously transferring the substrate. The production apparatus (100) includes gas mixing prevention means (12, 13) for preventing gas present outside a growth furnace (3a) from flowing into the growth furnace (3a). The gas mixing prevention means (12, 13) includes a seal gas ejection section (12b, 13b) so that the seal gas does not flow into the growth furnace through the openings of the growth furnace. The production apparatus prevents the outside air from flowing into the production apparatus, uniformly controls, within a range suitable to production of CNTs, a concentration distribution(s) and a flow rate distribution(s) of a raw material gas and/or a catalyst activation material on the substrate, and does not disturb gas flow as much as possible in the growth furnace.

公开(公告)号：US09499904B2

公开(公告)日：2016-11-22

申请号：US14392223

申请日：2014-06-26

申请人： ZEON CORPORATION

发明人： Akiyoshi Shibuya

IPC分类号： C23C16/26 ,  C23C16/44 ,  C01B31/02 ,  B82Y40/00 ,  B82Y30/00 ,  C23C16/54 ,  C23C16/02

CPC分类号： C23C16/4405 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/16 ,  C01B32/162 ,  C11D11/0041 ,  C23C16/0272 ,  C23C16/26 ,  C23C16/54 ,  Y10S977/742 ,  Y10S977/843

摘要： The disclosed method of manufacturing carbon nanotubes includes the steps of growing CNTs on a substrate 12 and cleaning the inside of a growth furnace 13 by supplying a cleaning gas that contains water into the growth furnace 13. In the cleaning step, the cleaning is performed such that 0.7≦(2[CO2]+[CO])/[H2]≦1.3 is satisfied, where [H2], [CO2], and [CO] denote the concentrations of hydrogen, carbon dioxide, and carbon monoxide, respectively, in a gas within the growth furnace 13.

摘要翻译： 所公开的制造碳纳米管的方法包括以下步骤：在基材12上生长CNT并通过向生长炉13中提供含有水的清洗气体来清洗生长炉13的内部。在清洁步骤中， 满足0.7≤（2 [CO2] + [CO]）/ [H2]≤1.3，其中[H2]，[CO2]和[CO]分别表示氢，二氧化碳和一氧化碳的浓度， 在生长炉13内的气体中。