-
公开(公告)号：US20120295440A1
公开(公告)日：2012-11-22
申请号：US13565455
申请日：2012-08-02
IPC分类号： H01L21/768 , B23K26/36
CPC分类号： B23K26/03 , B23K26/06 , B23K26/0624 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2101/40 , B23K2103/50 , H01L31/022441 , H01L31/0682 , H01L31/18 , Y02E10/547
摘要： Embodiments of the present invention generally provide methods and apparatus for material removal using lasers in the fabrication of solar cells. In one embodiment, an apparatus is provided that removes portions of a dielectric layer deposited on a solar cell substrate according to a desired pattern. In certain embodiments, methods for removing a portion of a material via a laser without damaging the underlying substrate are provided. In one embodiment, the intensity profile of the beam is adjusted so that the difference between the maximum and minimum intensity within a spot formed on a substrate surface is reduced to an optimum range. In one example, the substrate is positioned such that the peak intensity at the center versus the periphery of the substrate is lowered. In one embodiment, the pulse energy is improved to provide thermal stress and physical lift-off of a desired portion of a dielectric layer.
摘要翻译： 本发明的实施例一般提供了在制造太阳能电池中使用激光去除材料的方法和装置。 在一个实施例中，提供了根据期望的图案去除沉积在太阳能电池基板上的电介质层的部分的装置。 在某些实施例中，提供了用于通过激光去除材料的一部分而不损坏下面的衬底的方法。 在一个实施例中，调整光束的强度分布，使得在衬底表面上形成的斑点内的最大和最小强度之间的差减小到最佳范围。 在一个示例中，衬底被定位成使得在中心处的衬底的峰值强度相对于衬底的周边被降低。 在一个实施例中，改善脉冲能量以提供电介质层的期望部分的热应力和物理剥离。
-
公开(公告)号：US20100055901A1
公开(公告)日：2010-03-04
申请号：US12545488
申请日：2009-08-21
CPC分类号： B23K26/03 , B23K26/06 , B23K26/0624 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2101/40 , B23K2103/50 , H01L31/022441 , H01L31/0682 , H01L31/18 , Y02E10/547
摘要： Embodiments of the present invention generally provide methods and apparatus for material removal using lasers in the fabrication of solar cells. In one embodiment, an apparatus is provided that precisely removes portions of a dielectric layer deposited on a solar cell substrate according to a desired pattern and deposits a conductive layer over the patterned dielectric layer. In one embodiment, the apparatus also removes portions of the conductive layer in a desired pattern. In certain embodiments, methods for removing a portion of a material via a laser without damaging the underlying substrate are provided. In one embodiment, the intensity profile of the beam is adjusted so that the difference between the maximum and minimum intensity within a spot formed on a substrate surface is reduced to an optimum range. In one example, the substrate is positioned such that the peak intensity at the center versus the periphery of the substrate is lowered. In one embodiment, the pulse energy is improved to provide thermal stress and physical lift-off of a desired portion of a dielectric layer.
摘要翻译： 本发明的实施例一般提供了在制造太阳能电池中使用激光去除材料的方法和装置。 在一个实施例中，提供了一种装置，其根据期望的图案精确地去除沉积在太阳能电池基板上的电介质层的部分，并且在图案化的电介质层上沉积导电层。 在一个实施例中，该装置还以期望的图案去除导电层的部分。 在某些实施例中，提供了用于通过激光去除材料的一部分而不损坏下面的衬底的方法。 在一个实施例中，调整光束的强度分布，使得在衬底表面上形成的斑点内的最大和最小强度之间的差减小到最佳范围。 在一个示例中，衬底被定位成使得在中心处的衬底的峰值强度相对于衬底的周边被降低。 在一个实施例中，改善脉冲能量以提供电介质层的期望部分的热应力和物理剥离。
-
公开(公告)号：US20100190290A1
公开(公告)日：2010-07-29
申请号：US12624668
申请日：2009-11-24
IPC分类号： H01L21/3213
CPC分类号： H01L31/022425 , H01L31/068 , H01L31/0682 , H01L31/0747 , Y02E10/547
摘要： Embodiments of the present invention generally provide methods for forming conductive structures on the surfaces of a solar cell. In one embodiment, conductive structures are formed on the front surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing metal layers over the front surface of the solar cell, and performing lift off of the metal layers deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent. In another embodiment, conductive structures are formed on the back surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing a metal layer over the back surface of the solar cell, and performing lift off of the metal layer deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent, and completing selective metallization of the remaining metal lines.
摘要翻译： 本发明的实施例通常提供在太阳能电池的表面上形成导电结构的方法。 在一个实施例中，通过沉积牺牲聚合物层在导电结构的前表面上形成导电结构，通过流体射流在牺牲聚合物中形成图案线，在太阳能电池的前表面上沉积金属层，并执行电梯 通过用水基溶剂溶解牺牲聚合物来沉积在牺牲聚合物上的金属层。 在另一个实施例中，通过沉积牺牲聚合物层，在牺牲聚合物中形成图案化线，经由流体射流，在太阳能电池的背面上沉积金属层，并在 通过用水基溶剂溶解牺牲聚合物，从而沉积在牺牲聚合物上沉积的金属层，并完成其余金属线的选择性金属化。
-
公开(公告)号：US20110076847A1
公开(公告)日：2011-03-31
申请号：US12891525
申请日：2010-09-27
申请人： Derek Aqui , Steven M. Zuniga , Venkateswaran Subbaraman , Kirk Liebscher , John Alexander , Zhenhua Zhang , Virendra V.S. Rana
发明人： Derek Aqui , Steven M. Zuniga , Venkateswaran Subbaraman , Kirk Liebscher , John Alexander , Zhenhua Zhang , Virendra V.S. Rana
IPC分类号： H01L21/768
CPC分类号： H01L21/67207 , C23C14/5813 , C23C14/5893 , C23C16/56 , H01L31/0463 , H01L31/186 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
摘要翻译： 提供了一种用于处理太阳能电池基板的装置和方法。 在一个实施例中，一种用于处理放置在载体中的太阳能电池基板的激光烧制室，包括位于载体一侧的激光模块，所述激光模块适于在多个 太阳能电池基板和适于通过激光束的输出区域传送载体的传送装置。
-
公开(公告)号：US20100240172A1
公开(公告)日：2010-09-23
申请号：US12562734
申请日：2009-09-18
IPC分类号： H01L31/18
CPC分类号： H01L31/03529 , H01L21/02532 , H01L21/02573 , H01L21/02667 , H01L31/022441 , H01L31/068 , H01L31/0682 , H01L31/1872 , Y02E10/547 , Y02P70/521
摘要： A method for obtaining a desired dopant profile of an emitter for a solar cell which includes depositing a first amorphous silicon layer having a first doping level over an upper surface of the crystalline silicon substrate, depositing a second amorphous silicon layer having a second doping level on the first amorphous silicon layer, and heating the crystalline silicon substrate and the first and second amorphous silicon layers to a temperature sufficient to cause solid phase epitaxial crystallization of the first and second amorphous silicon layers, such that the first and second amorphous silicon layers, after heating, have the same grain structure and crystal orientation as the underlying crystalline silicon substrate
摘要翻译： 一种用于获得用于太阳能电池的发射器的期望掺杂物分布的方法，其包括在所述晶体硅衬底的上表面上沉积具有第一掺杂水平的第一非晶硅层，将具有第二掺杂水平的第二非晶硅层沉积在 第一非晶硅层，并且将晶体硅衬底和第一和第二非晶硅层加热到足以引起第一和第二非晶硅层的固相外延结晶的温度，使得第一和第二非晶硅层在 加热，具有与下面的晶体硅衬底相同的晶粒结构和晶体取向
-
公开(公告)号：US20100167461A1
公开(公告)日：2010-07-01
申请号：US12403931
申请日：2009-03-13
IPC分类号： H01L31/18
CPC分类号： H01L31/1804 , H01L31/1816 , H01L31/202 , Y02E10/547 , Y02P70/521
摘要： A method and apparatus for cleaning layers of solar cell substrates is disclosed. The substrate is exposed to a reactive gas that may comprise neutral radicals comprising nitrogen and fluorine, or that may comprise anhydrous HF and water, alcohol, or a mixture of water and alcohol. The reactive gas may further comprise a carrier gas. The reactive gas etches the solar cell substrate surface, removing oxygen and other impurities. When exposed to the neutral radicals, the substrate grows a thin film containing ammonium hexafluorosilicate, which is subsequently removed by heat treatment.
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.02 秒)