公开(公告)号：US07910885B2

公开(公告)日：2011-03-22

申请号：US10564131

申请日：2004-07-12

申请人： Zvika Rosenberg ,  Ovadya Menadeva ,  Aviram Tam

发明人： Zvika Rosenberg ,  Ovadya Menadeva ,  Aviram Tam

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/1478 ,  G01B15/04 ,  G01N23/2251 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2487 ,  H01J2237/2611 ,  H01J2237/2814 ,  H01J2237/2816 ,  H01J2237/2817

摘要： A system and method for determining a cross sectional feature of a measured structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method starts by a first step of scanning, at a first tilt state, a first portion of a reference structural element and at least the first traverse section of the measured structural element, to determine a first relationship between the reference structural element and the first traverse section. The first step is followed by a second step of scanning, at a second tilt state, a second portion of a reference structural element and at least the second traverse section of the measured structural element, to determine a second relationship between the reference structural element and the second traverse section. The method ends by a third step of determining a cross sectional feature of the measured structural element in response to the first and second relationships.

摘要翻译： 用于确定具有亚微米横截面的测量结构元件的横截面特征的系统和方法，所述横截面由位于第一和第二横移部分之间的中间部分限定。 该方法开始于在第一倾斜状态下扫描参考结构元件的第一部分和至少所测量的结构元件的第一横向部分的第一步骤，以确定参考结构元件和第一 横截面。 第一步骤之后是在第二倾斜状态下扫描参考结构元件的第二部分和至少所测量的结构元件的第二横移部分的第二步骤，以确定参考结构元件和 第二横越部分。 该方法结束于第三步骤，其响应于第一和第二关系确定测量的结构元件的横截面特征。

公开(公告)号：US20070051888A1

公开(公告)日：2007-03-08

申请号：US10564131

申请日：2004-07-12

申请人： Zvika Rosenberg ,  Ovadya Menadeva ,  Avlram Tam

发明人： Zvika Rosenberg ,  Ovadya Menadeva ,  Avlram Tam

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/1478 ,  G01B15/04 ,  G01N23/2251 ,  G01R31/307 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2487 ,  H01J2237/2611 ,  H01J2237/2814 ,  H01J2237/2816 ,  H01J2237/2817

摘要： A system and method for determining a cross sectional feature of a measured structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method starts by a first step of scanning, at a first tilt state, a first portion of a reference structural element and at least the first traverse section of the measured structural element, to determine a first relationship between the reference structural element and the first traverse section. The first step is followed by a second step of scanning, at a second tilt state, a second portion of a reference structural element and at least the second traverse section of the measured structural element, to determine a second relationship between the reference structural element and the second traverse section. The method ends by a third step of determining a cross sectional feature of the measured structural element in response to the first and second relationships.

摘要翻译： 用于确定具有亚微米横截面的测量结构元件的横截面特征的系统和方法，所述横截面由位于第一和第二横移部分之间的中间部分限定。 该方法开始于在第一倾斜状态下扫描参考结构元件的第一部分和至少所测量的结构元件的第一横向部分的第一步骤，以确定参考结构元件和第一 横截面。 第一步骤之后是在第二倾斜状态下扫描参考结构元件的第二部分和至少所测量的结构元件的第二横移部分的第二步骤，以确定参考结构元件和 第二横越部分。 该方法结束于第三步骤，其响应于第一和第二关系确定测量的结构元件的横截面特征。

公开(公告)号：US06674075B2

公开(公告)日：2004-01-06

申请号：US10146218

申请日：2002-05-13

申请人： Igor Petrov ,  Zvika Rosenberg

发明人： Igor Petrov ,  Zvika Rosenberg

IPC分类号： H01J3726

CPC分类号： G01N23/22 ,  H01J37/1472 ,  H01J37/1478 ,  H01J37/244

摘要： A beam directing method and device are presented for spatially separating between a primary charged particle beam and a beam of secondary particles returned from a sample as a result of its interaction with the primary charged particle beam. The primary charged particle beam is directed towards the beam directing device along a first axis passing an opening in a detector, which has charged particle detecting regions outside this opening. The trajectory of the primary charged particle beam is then affected to cause the primary charged particle beam propagation to the sample along a second axis substantially parallel to and spaced-apart from the first axis. This causes the secondary charged particle beam propagation to the detecting region outside the opening in the detector.

摘要翻译： 提出了一种射束引导方法和装置，用于通过与初级带电粒子束的相互作用在空间上分离初级带电粒子束和从样品返回的二次粒子束之间的空间分离。 初级带电粒子束沿着通过检测器中的开口的第一轴线朝向光束引导装置，该检测器具有在该开口外部的带电粒子检测区域。 然后影响初级带电粒子束的轨迹，使得初级带电粒子束沿着基本上平行于第一轴线并与第一轴线间隔开的第二轴线传播到样品。 这导致二次带电粒子束传播到检测器中的开口外部的检测区域。

公开(公告)号：US20060049348A1

公开(公告)日：2006-03-09

申请号：US10937802

申请日：2004-09-08

申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

公开(公告)号：US06825475B2

公开(公告)日：2004-11-30

申请号：US10247104

申请日：2002-09-19

申请人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

发明人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

IPC分类号： H01J3710

CPC分类号： H01J37/1475

摘要： A deflection system is presented for use in a lens arrangement of a charged particle beam column for inspecting a sample. The system comprises a magnetic deflector operable to create a magnetic field, and a pole piece assembly at least partly accommodated within the magnetic field. The pole piece assembly has a portion made of a soft magnetic material and is formed with an opening for a charged particle beam propagation therethrough. The deflection system allows for conducting the magnetic field created by the magnetic deflector through the pole piece assembly towards the opening in the pole piece assembly. This enables to increase the magnetic field value in the vicinity of the sample at the optical axis of the lens arrangement at a given electric current through the excitation coils of the magnetic deflector, without a need to increase a working distance.

摘要翻译： 呈现偏转系统用于带电粒子束柱的透镜布置，用于检查样品。 该系统包括可操作以产生磁场的磁偏转器和至少部分地容纳在磁场内的极片组件。 极片组件具有由软磁材料制成的部分，并且形成有用于带电粒子束传播的开口。 偏转系统允许通过磁极组件朝磁极组件的开口传导由磁偏转器产生的磁场。 这样就能够使透镜装置的光轴附近的样品在通过磁导流板的激励线圈的给定电流上增加磁场值，而不需要增加工作距离。

公开(公告)号：USD677325S1

公开(公告)日：2013-03-05

申请号：US29414447

申请日：2012-02-28

申请人： Zvika Rosenberg ,  Steve Matteson ,  Shmuel Yair

设计人： Zvika Rosenberg ,  Steve Matteson ,  Shmuel Yair

公开(公告)号：US07223974B2

公开(公告)日：2007-05-29

申请号：US10154530

申请日：2002-05-22

申请人： Igor Petrov ,  Zvika Rosenberg

发明人： Igor Petrov ,  Zvika Rosenberg

IPC分类号： H01J37/256 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/244

摘要： A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing assembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement.

摘要翻译： 提出了一种方法和带电粒子束柱，用于将初级带电粒子束引导到样品上。 沿着波束传播的初始轴向聚焦组件传播的主要带电粒子束通过束形成器，其影响初级带电粒子束的横截面以补偿由聚焦场的散光效应引起的聚焦像差 由聚焦组件的物镜布置产生，然后通过光束轴对准系统，其使主要带电粒子束的轴线相对于物镜装置的光轴对准。

公开(公告)号：US07067807B2

公开(公告)日：2006-06-27

申请号：US10937802

申请日：2004-09-08

申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

IPC分类号： H01J37/28 ,  H01J37/145

CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

摘要翻译： 提出了一种用于控制带有带电粒子束的样品检查的方法和系统。 将一定的给定电压提供给柱的阳极以提供用于带电粒子束的所需加速电压。 向选择的样品提供一定的负电压，以便在阳极的所述给定电压下提供柱的期望的高有效电压。 向位于更靠近样品的透镜装置的电极提供一定电压，该电压被选择为满足以下条件之一：电极电压等于或略低于样品的电压; 电极电压明显高于样品。

公开(公告)号：US07034297B2

公开(公告)日：2006-04-25

申请号：US10382789

申请日：2003-03-05

申请人： Igor Petrov ,  Zvika Rosenberg ,  Pavel Adamec ,  Igor Krayvitz

发明人： Igor Petrov ,  Zvika Rosenberg ,  Pavel Adamec ,  Igor Krayvitz

IPC分类号： G21G5/00 ,  G01R31/28 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/20207

摘要： A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle θ1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle θ2 between the primary beam propagation axis and said optical axis.

摘要翻译： 提出了一种用于监测带有带电粒子束的样品的方法和装置。 提供了由样品表面限定的平面和由光束引导装置限定的光轴之间的机械位移，以使样品相对于光轴以一定的非直角θ1取向 。 向样品传播的初级带电粒子束被偏转，以影响初级带电粒子束的轨迹，以在主光束传播轴和所述光轴之间提供一定的非零角度θ2。