公开(公告)号：US3919121A

公开(公告)日：1975-11-11

申请号：US47920474

申请日：1974-06-14

申请人： COLONIAL METALS INC

发明人： DAVIES RONALD F ,  BENVEGNO GEORGE J

IPC分类号： B01J23/42 ,  B01J35/00 ,  B01J37/00 ,  B01J37/03 ,  B01J21/04 ,  B01J23/56

CPC分类号： B01J23/42 ,  B01J35/0013 ,  B01J37/0018 ,  B01J37/031

摘要： A catalytic mixture includes a platinum-based compound, such as chloroplatinic acid or ammonium chloroplatinite, mixed with other constituents, including water. The acid could be mixed with various amounts of sodium citrate or with aluminum oxide, dextrose and triethanolamine. The ammonium chloroplatinite could be mixed with dimethyl formamide. Each of these mixtures can be deposited onto pads used in catalytic heaters, for example, and heated to precipitate the platinum onto the pads.

摘要翻译： 催化混合物包括与其它成分（包括水）混合的铂基化合物，例如氯铂酸或氯铂酸铵。 酸可以与各种量的柠檬酸钠或与氧化铝，葡萄糖和三乙醇胺混合。 氯铂酸铵可与二甲基甲酰胺混合。

公开(公告)号：US3915350A

公开(公告)日：1975-10-28

申请号：US33835273

申请日：1973-03-05

申请人： COLONIAL METALS INC

发明人： DAVIES RONALD F ,  BENVEGNO GEORGE J

IPC分类号： B01J23/96 ,  B01J35/12 ,  B01J37/02 ,  F01N3/28 ,  F01N3/30 ,  F01N13/02 ,  B67D5/06

CPC分类号： B01J37/0232 ,  B01J23/96 ,  B01J35/12 ,  F01N3/28 ,  F01N3/2885 ,  F01N3/30 ,  F01N13/009 ,  F01N13/0097 ,  F01N2230/04 ,  F01N2260/04 ,  F01N2330/02 ,  F01N2450/00 ,  F01N2490/06 ,  F01N2490/08 ,  Y02T10/20 ,  Y10S55/30

摘要： A pressurized aerosol package contains a metal-containing catalytic mixture of the type used in catalytic heaters. The mixture could contain, for example, chloroplatinic acid, with other materials, such as aluminum oxide, dextrose and triethanolamine all dissolved and mixed in water. In use, the mixture is sprayed onto, and impregnates, expended carrier pads of catalytic heaters to revive the pads and permit continued use of the heaters. In addition, the mixture can be sprayed into the exhaust system of an operating engine to coat the inner walls of the muffler of the system for antipollution purifying purposes.

摘要翻译： 加压气溶胶包含有用于催化加热器的类型的含金属的催化混合物。 该混合物可以含有例如氯铂酸，其它材料如氧化铝，葡萄糖和三乙醇胺全部溶解并混合在水中。

公开(公告)号：US07129170B2

公开(公告)日：2006-10-31

申请号：US11200073

申请日：2005-08-10

申请人： James E. Phillips ,  Len D. Spaulding

发明人： James E. Phillips ,  Len D. Spaulding

IPC分类号： H01L21/44

CPC分类号： H01L21/76838 ,  C22B5/12 ,  C22B11/02

摘要： The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal and form a ruthenium metal pattern on a semiconductor substrate without the need for high temperature processing or a complex series of wet processes. A gas stream including ozone (O3) is brought into contact with a ruthenium source in one or more reaction vessels to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where the gaseous ruthenium tetraoxide is reduced to form a ruthenium dioxide (RuO2) layer on a semiconductor substrate. The deposited ruthenium dioxide is then reduced, preferably with hydrogen, to produce highly pure ruthenium metal that may be, in turn, patterned and dry etched using ozone as an etchant gas.

摘要翻译： 本发明提供一种用于纯化钌源以获得高纯度钌金属并在半导体衬底上形成钌金属图案的方法，而不需要高温处理或复杂的一系列湿法。 使包含臭氧（O 3 3 N）的气流与一个或多个反应容器中的钌源接触以形成四氧化钌（RuO 4 S 4），其为化合物 反应条件下的气体。 然后将四氧化钌，以及未反应的臭氧和气流的其余部分进料到收集容器中，在该收集容器中，气态钌四氧化物被还原以在半导体衬底上形成二氧化钌（RuO 2 N 2）层 。 然后沉积的二氧化钌优选用氢气还原，以产生高纯度的钌金属，其可以使用臭氧作为蚀刻剂气体进行图案化和干蚀刻。

公开(公告)号：US4138220A

公开(公告)日：1979-02-06

申请号：US877474

申请日：1978-02-13

申请人： Ronald F. Davies ,  John P. Manly

发明人： Ronald F. Davies ,  John P. Manly

IPC分类号： B01D53/72 ,  B01D53/86 ,  B01J8/02 ,  B01J35/04

CPC分类号： B01D53/86 ,  B01D53/72

摘要： Method and apparatus for catalytically oxidating grease, fats, oils and/or other hydrocarbons in fumes rising from a source thereof. In particular, grease and odor-laden air streams, i.e. hydrocarbon-laden air streams, emanating from a source such as a cooking grill or the like are heated to a temperature at which passage over a catalyst causes flameless oxidation of the organic material in the air stream at a temperature below combustion temperature, the organic material being converted essentially to carbon dioxide and water, with release of at least some heat energy. The oxidized and heated air stream is ducted in countercurrent relation or in identically parallel direction, to the relatively cooler hydrocarbon-laden air stream which is being ducted toward the catalyst, heat exchange from the oxidized air stream to the hydrocarbon-laden air stream thereby occurring to at least partially heat the hydrocarbon-laden air stream. Additional heat energy can also be introduced if necessary into the unoxidized air stream prior to passage over the catalyst in order to raise the temperature of the airstream to the operating temperature of the catalyst.

摘要翻译： 用于从其来源上升的烟气中催化氧化油脂，脂肪，油和/或其它烃的方法和装置。 特别地，从源​​如烹饪格栅等发出的含油脂和气味的空气流，即含烃的空气流被加热到通过催化剂的过程中的有机材料的无焰氧化的温度 空气流在低于燃烧温度的温度下，有机材料基本上被转化为二氧化碳和水，释放至少一些热能。 氧化和加热的空气流以逆流关系或相同平行的方向被输送到朝向催化剂的相对较冷的载有烃的空气流中，从氧化空气流到载有烃的空气流的热交换从而发生 以至少部分地加热载有烃的空气流。 如果需要，还可以在通过催化剂之前将未经氧化的空气流中引入额外的热能，以将气流的温度升高到催化剂的操作温度。

公开(公告)号：US20050272238A1

公开(公告)日：2005-12-08

申请号：US11200073

申请日：2005-08-10

申请人： James Phillips ,  Len Spaulding

发明人： James Phillips ,  Len Spaulding

IPC分类号： C22B5/12 ,  C22B11/00 ,  C22B11/02 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/76838 ,  C22B5/12 ,  C22B11/02

摘要： The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal and form a ruthenium metal pattern on a semiconductor substrate without the need for high temperature processing or a complex series of wet processes. A gas stream including ozone (O3) is brought into contact with a ruthenium source in one or more reaction vessels to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where the gaseous ruthenium tetraoxide is reduced to form a ruthenium dioxide (RuO2) layer on a semiconductor substrate. The deposited ruthenium dioxide is then reduced, preferably with hydrogen, to produce highly pure ruthenium metal that may be, in turn, patterned and dry etched using ozone as an etchant gas.

摘要翻译： 本发明提供一种用于纯化钌源以获得高纯度钌金属并在半导体衬底上形成钌金属图案的方法，而不需要高温处理或复杂的一系列湿法。 使包含臭氧（O 3 3 N）的气流与一个或多个反应容器中的钌源接触以形成四氧化钌（RuO 4 S 4），其为化合物 反应条件下的气体。 然后将四氧化钌，以及未反应的臭氧和气流的其余部分进料到收集容器中，在该收集容器中，气态钌四氧化物被还原以在半导体衬底上形成二氧化钌（RuO 2 N 2）层 。 然后沉积的二氧化钌优选用氢气还原，以产生高纯度的钌金属，其可以使用臭氧作为蚀刻剂气体进行图案化和干蚀刻。

公开(公告)号：US4048092A

公开(公告)日：1977-09-13

申请号：US609494

申请日：1975-09-02

申请人： Ronald F. Davies ,  George J. Benvegno

发明人： Ronald F. Davies ,  George J. Benvegno

IPC分类号： B01J23/96 ,  B01J35/12 ,  B01J37/02 ,  F01N3/28 ,  F01N3/30 ,  F01N13/02 ,  B01D15/06

CPC分类号： F01N3/30 ,  B01J23/96 ,  B01J35/12 ,  B01J37/0232 ,  F01N13/009 ,  F01N13/0097 ,  F01N3/28 ,  F01N3/2885 ,  F01N2230/04 ,  F01N2260/04 ,  F01N2330/02 ,  F01N2450/00 ,  F01N2490/06 ,  F01N2490/08 ,  Y02T10/20

摘要： A pressurized aerosol package contains a metal-containing catalytic mixture of the type used in catalytic heaters. The mixture could contain, for example, chloroplatinic acid, with other materials, such as aluminum oxide, dextrose and triethanolamine all dissolved and mixed in water. In use, the mixture is sprayed onto, and impregnates, expended carrier pads of catalytic heaters to revive the pads and permit continued use of the heaters. In addition, the mixture can be sprayed into the exhaust system of an operating engine to coat the inner walls of the muffler of the system for antipollution purifying purposes.

摘要翻译： 加压气溶胶包含有用于催化加热器的类型的含金属的催化混合物。 该混合物可以含有例如氯铂酸，其它材料如氧化铝，葡萄糖和三乙醇胺全部溶解并混合在水中。 在使用中，将混合物喷洒并浸渍催化加热器的消耗载体垫以恢复垫并允许继续使用加热器。 此外，混合物可以喷射到操作发动机的排气系统中，以涂覆系统的消声器的内壁以获得抗污染净化的目的。

公开(公告)号：US3835066A

公开(公告)日：1974-09-10

申请号：US34807573

申请日：1973-04-05

申请人： COLONIAL METALS INC

发明人： DAVIES R ,  BENEVEGNO G

IPC分类号： B01J23/42 ,  B01J37/00 ,  B01J11/08

CPC分类号： B01J37/0018 ,  B01J23/42

摘要： A CATALYTIC MIXTURE INCLUDES A PLATINUM-BASED COMPOUND, SUCH AS CHLOROPLATINIC ACID OR AMMONIUM CHLOROPLATINITE, MIXED WITH OTHER CONSTITUENTS, INCLUDING WATER. THE ACID COULD BE MIXED WITH VARIOUS AMOUNT OF SODIUM CITRATE OR WITH ALUMINUM OXIDE, DEXTROSE AND TRIETHANOLAMINE. THE AMMONIUM CHLOROPLATINITE COULD BE MIXED WITH DIMETHYL FORMAMIDE. EACH OF THESE MIXTURES CAN BE DEPOSITED ONTO PADS USED IN CATALYTIC HEATERS, FOR EXAMPLE, AND HEATED TO PRECIPITATE THE PLATINUM ONTO THE PADS.