摘要:
A fluid degassing device can include a shell configured to retain a selectively permeable hollow fiber bundle, wherein the shell defines a first flow port and a second flow port and at least a third flow port, and a selectively permeable hollow fiber bundle having a plurality of hollow fibers disposed within the shell such that a first flow circuit is defined between the first flow port and the second flow port, and a second flow circuit is defined in fluid communication with at least the third port such that an inner channel of one or more of the hollow fibers is in fluid communication with at least the third flow port, wherein second flow circuit is partially fluidly isolated from the first flow circuit such that at least one first fluid cannot pass through a wall of one or more hollow fibers, but such that at least one second fluid can pass through the wall of the one or more hollow fibers. The shell and the fiber bundle include a non-cylindrical shape.
摘要:
An immersion lithographic apparatus is described in which a two-phase flow is separated into liquid-rich and gas-rich flows by causing the liquid-rich flow to preferentially flow along a surface.
摘要:
The ventilation pipe 60 having the openings at both the ceiling side and the bottom side is provided in the area where the rectification boards 50a to 50f are arranged, thereby nitrogen released from water (nitrogen released from water based on that gas dissolved in water is substituted by oxygen) can be moved to the ceiling side of the retainer body through the ventilation pipe 60. Thereby, nitrogen can be effectively exhausted from the exhaust opening 30a, thus it can be restrained that nitrogen is accumulated in the retainer body 10. Accordingly, it can be restrained that oxygen concentration (partial pressure) in the retainer body 10 decreases. Since oxygen quantity dissolved in water is increased, gas dissolved in water can be effectively substituted.
摘要:
A release device for releasing a specific gas component from a rich absorption liquid which is an absorption liquid containing the specific gas component absorbed therein, the release device including a channel structure internally having a release channel which is connected to a rich absorption liquid supply unit so as to receive the rich absorption liquid supplied from the rich absorption liquid supply unit and connected to a liberating agent supply unit so as to receive a liberating agent supplied from the liberating agent supply unit, the liberating agent having a boiling point lower than a boiling point of the rich absorption liquid and being incompatible with the rich absorption liquid. The release channel is a microchannel configured to guide the received rich absorption liquid so that the received rich absorption liquid releases the specific gas component while flowing. The release channel has a treatment channel part which guides the rich absorption liquid and vapor of the liberating agent while bringing the rich absorption liquid and the vapor of the liberating agent into contact with each other so that the specific gas component is liberated from the rich absorption liquid to be transferred to the vapor of the liberating agent.
摘要:
Disclosed is a cyclone separator for separating a fluid into a gas phase and a liquid phase, which comprises: a vertically oriented vessel with cylindrical symmetry and which has a gas phase outlet at the upper end of the vessel and a liquid phase outlet at the lower end of the vessel, at least one tangentially oriented fluid inlet at the upper end below the gas phase outlet of the vessel, able to form a helical liquid flow down along the internal wall of the vessel, a liquid extractor extracting liquid through the liquid phase outlet at a rate which forms a bulk liquid phase at the lower end of the vessel with a relatively constant height level of the bulk liquid-gas interphase, a gas extractor extracting gas through the gas phase outlet, wherein the cyclone separator comprises at least one flow velocity deflector located at a level in proximity of the bulk liquid-gas interphase which changes the vertical velocity component of a liquid film travelling down the internal wall of the vessel to a horizontally oriented velocity component. A method of fluid separation is also disclosed.
摘要:
A liquid purifying device for separation and removal of volatile contaminants from liquids, and more particularly relating to such a device that is secured directly to the liquid source and utilizes improvements which allows the device to operate through a wide variety of angles from horizontal to vertical.
摘要:
An immersion lithographic apparatus is described in which a two-phase flow is separated into liquid-rich and gas-rich flows by causing the liquid-rich flow to preferentially flow along a surface.
摘要:
A device and process for separating liquid and gas phases in a flowstream containing a liquefied gas or supercritical fluid under pressure mixed with a liquid. A splitter vessel separates the liquid from gas phases and transfers liquid to a collection container while conducting the gas phase out of the splitter. Separation of liquid phase out of the flowstream is provided without additional pressure schemes or solvent extractions imposed on the stream.
摘要:
A degassing device capable of regulating an amount of air dissolved in a liquid. A device for measuring amounts of dissolved oxygen measures the amount of oxygen dissolved in one of a coating liquid which has yet to be degassed, and is to be fed to a film degassing device, and a coating liquid which has been degassed and discharged from the film degassing device. Based on measured results, a control unit regulates the degree of opening of a vacuum valve so as to change the degree of degassing performed by the film degassing device, thereby suppressing fluctuations in an amount of oxygen dissolved in the coating liquid. A load never constantly acts on the film all the time, the film life can accordingly be extended, thus resulting in reductions in running costs.
摘要:
This disclosure relates to a method for deaerating a liquid layer such as a coating solution using electrostatic forces. A flow of charged particles is created above and moved towards a low conductivity liquid layer. The flow of charged particles causes localized thinning of the liquid layer which facilitates the removal of bubbles of entrained gas from the liquid by bringing those bubbles closer to the exposed surface of the liquid and rupturing them at that surface. This electrostatic deaeration technique is combined with other non-electrostatic liquid layer thinning techniques or degassing techniques to further facilitate removal of bubbles from the liquid in preparation of further processing of the liquid. The liquid layer may be stationary or flowing with respect to the application of charge particles.