公开(公告)号：US20100091360A1

公开(公告)日：2010-04-15

申请号：US12449790

申请日：2008-02-20

Applicant: Bodo Kuehn ,  Stefan Ochs ,  Juergen Weber

Inventor： Bodo Kuehn ,  Stefan Ochs ,  Juergen Weber

IPC: G02B13/14 ,  C03C17/00 ,  G02B1/02

CPC classification number: C03B19/1453 ,  C03B2201/075 ,  C03B2201/10 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03C3/06 ,  C03C2201/10 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3441 ,  C03C2201/40 ,  G03F7/70958

Abstract: To provide an optical component of quartz glass for use in a projection objective for immersion lithography at an operating wavelength below 250 nm, which component is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should contain hydroxyl groups in the range of from 1 wtppm to 60 wtppm and chemically bound nitrogen, and that the mean hydrogen content of the quartz glass should be in the range of 5×1015 molecules/cm to 1×1017 molecules/cm3.

Abstract translation: 为了提供石英玻璃的光学部件，用于在250nm以下的工作波长下用于浸没式光刻的投影物镜，该成分被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应含有1〜60重量ppm的羟基和化学键合的氮，石英玻璃的平均氢含量应在5×1015的范围内 分子/ cm至1×1017分子/ cm 3。

公开(公告)号：US5523650A

公开(公告)日：1996-06-04

申请号：US302134

申请日：1994-09-07

Applicant: Joannes Terheijden ,  Peter E. M. Van Den Eijn-Den

Inventor： Joannes Terheijden ,  Peter E. M. Van Den Eijn-Den

IPC: C03C3/04 ,  C03C3/06 ,  H01K1/28 ,  H01K1/32 ,  H01K3/00 ,  H01K7/00

CPC classification number: H01K7/00 ,  C03C3/06 ,  H01K1/28 ,  H01K3/00 ,  C03C2201/3441 ,  C03C2201/36 ,  C03C2203/10

Abstract: The electric incandescent lamp has a quartz glass lamp vessel (1) or envelope (4') around the lamp vessel, which has a red coloured dope in the area at the side of the incandescent body (3). The quartz glass with red dope contains samarium.sup.II oxide, aluminium oxide and silicon dioxide, the analysis of the glass in its oxidised form being Sm.sub.2 O.sub.3 to 1 to 3% by weight, Al.sub.2 O.sub.3 up to 3% by weight, rest SiO.sub.2, the molar ratio Al/Sm being at least 2.

Abstract translation: 电白炽灯具有在灯泡周围的石英玻璃灯容器（1）或外壳（4'），其在白炽体（3）一侧的区域中具有红色涂料。 具有红色涂料的石英玻璃含有钐II氧化物，氧化铝和二氧化硅，将其氧化形式的玻璃分析为Sm 2 O 3至1至3重量％，Al 2 O 3至3重量％，其余为SiO 2，摩尔比Al / Sm至少为2。