Abstract:
To provide an optical component of quartz glass for use in a projection objective for immersion lithography at an operating wavelength below 250 nm, which component is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should contain hydroxyl groups in the range of from 1 wtppm to 60 wtppm and chemically bound nitrogen, and that the mean hydrogen content of the quartz glass should be in the range of 5×1015 molecules/cm to 1×1017 molecules/cm3.
Abstract translation:为了提供石英玻璃的光学部件,用于在250nm以下的工作波长下用于浸没式光刻的投影物镜,该成分被优化用于线偏振UV激光辐射,特别是关于由各向异性密度变化引起的压实和双折射 根据本发明,建议石英玻璃应含有1〜60重量ppm的羟基和化学键合的氮,石英玻璃的平均氢含量应在5×1015的范围内 分子/ cm至1×1017分子/ cm 3。
Abstract:
To provide quartz-type glass for a microlithographic projection exposure apparatus, which contains at least 51 mass % of SiO2 and which further contains at least one member selected from the group consisting of lanthanum, aluminum, hafnium, nitrogen, scandium, yttrium and zirconium. It is a material which is useful for an illumination system for a microlithographic projection exposure apparatus or as a projection object lens and has a refractive index at 248 nm larger than 1.508 of quartz glass and a refractive index at 193 nm larger than 1.560 of quartz glass and which can be small-sized.
Abstract:
A modified silica glass composition for providing a reduction in the multiphonon quenching for a rare-earth dopant comprising: SiO2 in a host material; a rare-earth dopant; a first SiO2 modifier; and a second SiO2 modifier; such that said first modifier and said second modifier reduce multiphonon quenching of the rare-earth dopant contained therein.
Abstract:
This invention relates to the immobilization of toxic, e.g., radioactive materials, internally in a silicate glass or silica gel matrix for extremely long periods of time. Toxic materials, such as radioactive wastes containing radioactive anions, and in some cases cations, which may be in the form of liquids, or solids dissolved or dispersed in liquids or gases, are internally incorporated into a glass matrix, having hydrous organofunctionalsiloxy groups, e.g., hydrous aminoalkylsiloxy or carboxyorganosiloxy, bonded to silicon atoms of said glass and/or hydrous polyvalent metals bonded to silicon atoms of said glass through divalent oxygen linkages or otherwise immobilized therein, by a process which involves the ion exchange of said toxic, radioactive anions with hydroxyl groups attached to said organofunctionalsiloxy groups or with hydroxyl groups attached to the hydrous polyvalent metal. Thereafter, the resulting glass now characterized by a distribution of internally bonded or immobilized, toxic, radioactive anions can be packaged in suitable containers, and disposed of as by burial, and/or they can be sintered to collapse the pores thereof to disposal or for producing useful radiation sources. The porous glass or a porous silica gel having said silicon-bonded organofunctionalsiloxy groups and/or said hydrous polyvalent metal oxy groups, the pores of said glass or silica gel remaining open and uncollapsed, can be used advantageously as a backfill for an underground radioactive waste burial site and as overpack in the waste disposal container. Also included is a novel method for bonding the polyvalent metal to the porous silica glass or gel by substituting the protons of the silicon-bonded hydroxyl groups thereof with an alkali metal or ammonium cation followed by displacement of said cation with the non-radioactive polyvalent metal cation.
Abstract:
This invention relates to the immobilization of toxic, e.g., radioactive materials, internally in a silicate glass or silica gel matrix for extremely long periods of time. Toxic materials, such as radioactive wastes containing radioactive anions, and in some cases cations, which may be in the form of liquids, or solids dissolved or dispersed in liquids or gases, are internally incorporated into a glass matrix, having hydrous organofunctionalsiloxy groups, e.g., hydrous aminoalkylsiloxy or carboxyorganosiloxy, bonded to silicon atoms of said glass and/or hydrous polyvalent metals bonded to silicon atoms of said glass through divalent oxygen linkages or otherwise immobilized therein, by a process which involves the ion exchange of said toxic, radioactive anions with hydroxyl groups attached to said organofunctionalsiloxy groups or with hydroxyl groups attached to the hydrous polyvalent metal. Thereafter, the resulting glass now characterized by a distribution of internally bonded or immobilized, toxic, radioactive anions can be packaged in suitable containers, and disposed of as by burial, and/or they can be sintered to collapse the pores thereof prior to disposal or for producing useful radiation sources. The porous glass or a porous silica gel having said silicon-bonded organofunctionalsiloxy groups and/or said hydrous polyvalent metal oxy groups, the pores of said glass or silica gel remaining open and uncollapsed, can be used advantageously as a backfill for an underground radioactive waste burial site and as overpack in the waste disposal container. Also included is a novel method for bonding the polyvalent metal to the porous silica glass or gel by substituting the protons of the silicon-bonded hydroxyl groups thereof with an alkali metal or ammonium cation followed by displacement of said cation with the non-radioactive polyvalent metal cation.
Abstract:
An optical glass with high refractive index and low dispersion, having refractive index nd of 1.78-1.95, Abbe number vd of 32-50, and contains no GeO2, so it is not easily devitrified. An optical glass, represented by cation %, including: 1-20% of Si4+; 25-60% of B3+; 10-40% of La3+; 0-15% of Y3+; 0-20% of Nb5+; 0-15% of Ti4+; 0-10% of Ta5+; 0-5% of W6+; 0-15% of Zr4+; 0-10% of Zn2+; 0-10% of Bi3+. An optical glass with excellent transmittance, an optical glass preform and an optical element formed by the above optical glass. The optical element made by the above optical glass and the above glass preform or optical element blank, such as lens, can be used for optical systems.
Abstract:
The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.
Abstract:
A device amplifies light at wavelengths in the vicinity of 1420-1530 nm, using thulium doped silica-based optical fiber. This wavelength band is of interest as it falls in the low-loss optical fiber telecommunications window, and is somewhat shorter in wavelength than the currently standard erbium doped silica fiber amplifier. The device thus extends the band of wavelengths which can be supported for long-distance telecommunications. The additional wavelength band allows the data transmission rate to be substantially increased via wavelength division multiplexing (WDM), with minimal modification to the standard equipment currently used for WDM systems. The host glass is directly compatible with standard silica-based telecommunications fiber. The invention also enables modified silicate based amplifiers and lasers on a variety of alternative transitions. Specifically, an S-band thulium doped fiber amplifier (TDFA) using a true silicate fiber host is described.
Abstract:
A new class of nanostructured RE-doped SiO2-base materials that display superior fluorescence properties is provided. In particular, high gain combined with a broad and flat spectral band width is observed in material composed of a high fraction of a nano-dispersed metastable silicate phase in a glassy SiO2 matrix, produced by partial devitrification (crystallization) of several glassy Al2O3/Er2O3- and Y2O3/Er2O3-doped SiO2 compositions. Also, a highly deconvoluted spectral emission, with several prominent peaks, is observed in completely devitrified material, consisting of a uniform nano-dispersion of an equilibrium silicate phase in a crystobalite SiO2 matrix. Such enhanced fluorescence properties were observed in heat treated nanopowders prepared by vapor-phase, solgel, rapid solidification, and spray-pyrolysis methods.
Abstract translation:提供了一类新型的具有优异荧光性能的纳米结构的RE掺杂SiO 2基体材料。 特别地,在通过部分失透反应产生的玻璃状SiO 2基体中的高分数纳米分散的亚稳态硅酸盐相组成的材料中观察到具有宽的和平坦的光谱带宽的高增益( 几个玻璃状的Al 2 O 3 / O 2 O 3 - 和Y 2的结晶, O 3组成的二氧化硅组合物。 此外,在完全失透的材料中观察到具有几个突出的峰的高度去卷积的光谱发射,由平底硅酸盐相在均匀的SiO 2基体中的均匀的纳米分散体组成。 在通过气相,溶胶凝胶,快速凝固和喷雾热解方法制备的热处理纳米粉末中观察到这种增强的荧光性质。
Abstract:
The present invention concerns an optical guide (100) comprising an amplifier medium including: a core (10) in a main matrix of a transparent material, the main matrix containing particules (1, 2), each particule being formed of a submicronic matrix distinct from the main matrix and doped by an active metal element, an external guiding cladding (11) in contact with the core (10). The size of the particules (1, 2) is smaller than 20 nm. The present invention also concerns a method for producing this guide.