FLAME DOPING METHOD
    4.
    发明公开
    FLAME DOPING METHOD 审中-公开

    公开(公告)号:US20240234147A9

    公开(公告)日:2024-07-11

    申请号:US18375677

    申请日:2023-10-02

    CPC classification number: H01L21/22 C23C4/129

    Abstract: One embodiment of the present invention provides a flame doping method. Specifically, the present invention provides a flame doping method, which does not significantly change crystallinity, does not damage a substrate even while applying a high temperature, is usable as a doping method suitable for mass production, is advantageous in a process difficulty and a cost compared to other doping processes (thermal diffusion and ion implantation), and has high process stability.

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