Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method
    2.
    发明申请
    Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method 审中-公开
    样品观察方法,显微镜和固体浸没透镜,该方法中使用的光学接触液体

    公开(公告)号:US20080158667A1

    公开(公告)日:2008-07-03

    申请号:US12071895

    申请日:2008-02-27

    IPC分类号: G02B21/00

    摘要: Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S104), and a solid immersion lens is set thereon (S105). The inserted position of the solid immersion lens is then adjusted (S106). The optical contact liquid is then dried (S108), and thereby the solid immersion lens is brought into optically-close contact with the semiconductor device. As a result, a sample observation method and a microscope or the like can be realized, in which the solid immersion lens can be easily aligned to a desired position on the sample, and the solid immersion lens can be securely brought into optically-close contact with the sample.

    摘要翻译: 将含有两亲性分子的光学接触液滴在作为检查对象的样品的半导体器件上(S104),在其上设置固体浸没透镜(S105)。 然后调整固体浸没透镜的插入位置(S106)。 然后干燥光学接触液体(S108),从而将固体浸没透镜与半导体器件进行光学 - 紧密接触。 结果,可以实现样品观察方法和显微镜等,其中固体浸没透镜可以容易地对准样品上的期望位置,并且固体浸没透镜可以牢固地进行光学紧密接触 与样品。

    Microscope and sample observation method
    3.
    发明授权
    Microscope and sample observation method 有权
    显微镜和样品观察法

    公开(公告)号:US07221502B2

    公开(公告)日:2007-05-22

    申请号:US10804195

    申请日:2004-03-19

    IPC分类号: G02B21/00

    摘要: For a semiconductor device S as a sample of an observed object, there are provided an image acquisition part 1 for carrying out observation of the semiconductor device S, and an optical system 2 comprising an objective lens 20. A solid immersion lens (SIL) 3 for magnifying an image of the semiconductor device S is arranged movable between an insertion position where the solid immersion lens includes an optical axis from the semiconductor device S to the objective lens 20 and is in close contact with a surface of the semiconductor device S, and a standby position off the optical axis. Then an image containing reflected light from SIL 3 is acquired with the SIL 3 at the insertion position, and the insertion position of SIL 3 is adjusted by SIL driver 30, with reference to the image. This realizes a semiconductor inspection apparatus (microscope) capable of readily performing observation of the sample necessary for an analysis of microstructure of a semiconductor device or the like, and a semiconductor inspection method (sample observation method) therewith.

    摘要翻译: 对于作为观察对象的样本的半导体器件S,提供了用于执行半导体器件S的观察的图像获取部分1和包括物镜20的光学系统2。 用于放大半导体器件S的图像的固体浸没透镜(SIL)3被布置成可以在固体浸没透镜包括从半导体器件S到物镜20的光轴的插入位置和与物镜20紧密接触的位置之间移动 半导体器件S的表面和离开光轴的待机位置。 然后,通过SIL 3在插入位置获取包含来自SIL 3的反射光的图像,并且参考图像,通过SIL驱动器30调整SIL 3的插入位置。 这实现了能够容易地观察对半导体装置等的微结构进行分析所需的样品的半导体检查装置(显微镜)以及半导体检查方法(样本观察方法)。

    Tissue specimen holder
    4.
    发明授权
    Tissue specimen holder 有权
    组织样本架

    公开(公告)号:US06856458B2

    公开(公告)日:2005-02-15

    申请号:US09973109

    申请日:2001-10-09

    摘要: A tray or holder for tissue specimens, especially of excised tissue, such as biopsied specimens, is used with a confocal imaging system. The tray may be disposable after imaging of the specimen carried therein or may archive the specimen. A window supports the specimen. Clamps mounted inside the tray restrain the tissue. A compliant bag is mounted outside the tray on one side of a window of the tray on which the specimen is disposed. During imaging the specimen is immersed in a liquid contained in the tray having an index of refraction which closely matches the index of refraction of the tissue. The bag also contains an index matching liquid preferably having the same index as the liquid in the tray. Selecting an immersion liquid, which equals the refractive index of the near surface tissue, minimizing wavefront distortion which may result from an effectively corrugated surface of the specimen.

    摘要翻译: 用于组织标本的托盘或保持器,特别是切除的组织,例如活检标本,与共聚焦成像系统一起使用。 托盘在其中携带的样本成像后可以是一次性的,或可以归档样品。 一个窗口支撑样本。 安装在托盘内的夹具限制纸巾。 将合适的袋安装在托盘外侧的托盘的一侧,其中放置有试样。 在成像期间,将样品浸入包含在托盘中的液体中,该折射率与组织的折射率非常匹配。 该袋还包含一种优选地具有与托盘中的液体相同的指数的折射率匹配液体。 选择等于近表面组织的折射率的浸液,最小化可能由于样品的有效波纹表面产生的波前畸变。

    Tissue specimen holder
    5.
    发明申请

    公开(公告)号:US20020101655A1

    公开(公告)日:2002-08-01

    申请号:US09973109

    申请日:2001-10-09

    摘要: A tray or holder for tissue specimens, especially of excised tissue, such as biopsied specimens, is used with a confocal imaging system, especially a laser scanning confocal microscope system. The tray may be disposable after imaging of the specimen carried therein or may archive the specimen. A window supports the specimen. Clamps mounted inside the tray restrain the tissue. A compliant bag is mounted outside the tray on one side of a window of the tray on which the specimen is disposed. During imaging the specimen is immersed in a liquid contained in the tray having an index of refraction which closely matches the index of refraction of the tissue. The bag also contains an index matching liquid preferably having the same index as the liquid in the tray. A stabilizing plate is attached to a surface of the bag which faces the window. An objective lens of the confocal imaging system receives and supports the plate, preferably by a magnetic coupling ring around the plate which is magnetically attached to the barrel of the objective lens. The lens may be fixed and a mechanism for positioning the tray with respect to the lens in a direction along the optical axis of the lens and in orthogonal directions perpendicular to that axis shares a common support with the lens. Wavefront distortion which may result from an effectively corrugated surface of the specimen is minimized by selecting an immersion liquid which equals the refractive index of the near surface tissues. The tissue determines the index of the immersion fluid. The thicknesses and refractive indices of the window and plate are then determined to correct the residual aberration of the optical system. Different trays having different window and plate thicknesses and indices may be provided for different specimen species such as kidney, liver, cervix, et cetera. Thus, a generic confocal imaging system with a generic objective lens is corrected for image aberration and wavefront distortion due to the surface corrugations of the tissue. The correction is simplified since the bag is compliant and compresses so that the optical thickness along the axis between the objective lens and the focal plane in or at the specimen is substantially invariant whether the beam is focused at the interface between the specimen and the window or within the specimen over a focusing range which can extend over several millimeters.

    METHOD FOR REDUCING LOSS OF ELECTROMAGNETIC RADIATION IN DETECTION APPLICATIONS
    7.
    发明申请
    METHOD FOR REDUCING LOSS OF ELECTROMAGNETIC RADIATION IN DETECTION APPLICATIONS 审中-公开
    用于减少检测应用中电磁辐射损失的方法

    公开(公告)号:US20120133933A1

    公开(公告)日:2012-05-31

    申请号:US13319938

    申请日:2010-05-10

    申请人: Peng Zou Dustin Levy

    发明人: Peng Zou Dustin Levy

    摘要: The application provides a method for reducing the loss of electromagnetic radiation caused by passing electromagnetic radiation through material with a rough surface. The method comprises applying a surface layer, such as a liquid or plastic film, to the material. The surface layer masks or decreases the surface irregularities or effects therefrom resulting in decreased loss of electromagnetic energy.

    摘要翻译: 该应用提供了一种减少由电磁辐射通过具有粗糙表面的材料引起的电磁辐射损失的方法。 该方法包括将表面层(例如液体或塑料膜)施加到材料上。 表面层掩盖或减少表面不规则或其影响从而导致电磁能的损失减少。

    Method for evaluation of a gemstone
    8.
    发明申请
    Method for evaluation of a gemstone 有权
    宝石评估方法

    公开(公告)号:US20090147241A1

    公开(公告)日:2009-06-11

    申请号:US11990693

    申请日:2006-08-21

    IPC分类号: G01N21/87

    CPC分类号: G01N21/87 G01N2021/0342

    摘要: A method of determining the position of inclusions in a gemstone, comprising:(a) placing the gemstone within a material having a refractive index within 0.5, optionally 0.2 or 0. 1, of that of the gemstone;(b) illuminating the gemstone and imaging the illuminated gemstone; and(c) determining the position of inclusions based on images of the inclusions in the images.

    摘要翻译: 一种确定宝石中夹杂物的位置的方法,包括:(a)将宝石放置在折射率在宝石的折射率的0.5,任选地0.2或0.1的材料内; (b)照亮宝石并对照明的宝石进行成像; 和(c)基于图像中的夹杂物的图像确定夹杂物的位置。

    Microscope and sample observation method
    9.
    发明申请
    Microscope and sample observation method 审中-公开
    显微镜和样品观察法

    公开(公告)号:US20070146871A1

    公开(公告)日:2007-06-28

    申请号:US11711638

    申请日:2007-02-28

    IPC分类号: G02B21/00

    摘要: For a semiconductor device S as a sample of an observed object, there are provided an image acquisition part 1 for carrying out observation of the semiconductor device S, and an optical system 2 comprising an objective lens 20. A solid immersion lens (SIL) 3 for magnifying an image of the semiconductor device S is arranged movable between an insertion position where the solid immersion lens includes an optical axis from the semiconductor device S to the objective lens 20 and is in close contact with a surface of the semiconductor device S, and a standby position off the optical axis. Then an image containing reflected light from SIL 3 is acquired with the SIL 3 at the insertion position, and the insertion position of SIL 3 is adjusted by SIL driver 30, with reference to the image. This realizes a semiconductor inspection apparatus (microscope) capable of readily performing observation of the sample necessary for an analysis of microstructure of a semiconductor device or the like, and a semiconductor inspection method (sample observation method) therewith.

    摘要翻译: 对于作为观察对象的样本的半导体器件S,设置有用于执行半导体器件S的观察的图像获取部分1和包括物镜20的光学系统2.固体浸没透镜(SIL)3 用于放大半导体器件S的图像的布置可以在固体浸没透镜包括从半导体器件S到物镜20的光轴并且与半导体器件S的表面紧密接触的插入位置之间移动,以及 离开光轴的待机位置。 然后,通过SIL 3在插入位置获取包含来自SIL 3的反射光的图像,并且参考图像,通过SIL驱动器30调整SIL 3的插入位置。 这实现了能够容易地观察对半导体装置等的微结构进行分析所需的样品的半导体检查装置(显微镜)以及半导体检查方法(样本观察方法)。

    Tissue specimen holder
    10.
    发明授权
    Tissue specimen holder 有权
    组织样本架

    公开(公告)号:US06330106B1

    公开(公告)日:2001-12-11

    申请号:US09506135

    申请日:2000-02-17

    IPC分类号: G02B2134

    摘要: A tray or holder for tissue specimens, especially of excised tissue, such as biopsied specimens, is used with a confocal imaging system, especially a laser scanning confocal microscope system. The tray may be disposable after imaging of the specimen carried therein or may archive the specimen. A window supports the specimen. Clamps mounted inside the tray restrain the tissue. A compliant bag is mounted outside the tray on one side of a window of the tray on which the specimen is disposed. During imaging the specimen is immersed in a liquid contained in the tray having an index of refraction which closely matches the index of refraction of the tissue. The bag also contains an index matching liquid preferably having the same index as the liquid in the tray. A stabilizing plate is attached to a surface of the bag which faces the window. Selecting an immersion liquid, which equals the refractive index of the near surface tissues, minimizes wavefront distortion which may result from an effectively corrugated surface of the specimen.

    摘要翻译: 用于组织标本的托盘或保持器,特别是切除的组织,例如活检标本,与共焦成像系统,特别是激光扫描共聚焦显微镜系统一起使用。 托盘在其中携带的样本成像后可以是一次性的,或可以归档样品。 一个窗口支撑样本。 安装在托盘内的夹具限制纸巾。 将合适的袋安装在托盘外侧的托盘的一侧,其中放置有试样。 在成像期间,将样品浸入包含在托盘中的液体中,该折射率与组织的折射率非常匹配。 该袋还包含一种优选地具有与托盘中的液体相同的指数的折射率匹配液体。 稳定板附着在面向窗户的袋子的表面上。 选择等于近表面组织的折射率的浸没液体可以最小化可能由试样的有效波纹表面产生的波前失真。