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公开(公告)号：US20090229518A1
公开(公告)日：2009-09-17
申请号：US12382222
申请日：2009-03-11
申请人： Tokunobu Akao , Kazuyoshi Yamamoto
发明人： Tokunobu Akao , Kazuyoshi Yamamoto
IPC分类号： B05C11/00
CPC分类号： G05B19/4183 , G05B2219/31291 , G05B2219/31304 , H01L21/67276 , Y02P90/10 , Y02P90/18
摘要： There is provided a substrate processing apparatus that can easily grasp the relationship of a defect substrate between plural batches.A substrate processing apparatus 10 includes: a display unit 16; a storage unit that accumulates and stores production information of the substrate for each batch, the production information being produced when the substrate is processed; a selection receiving unit that receives the selection of plural batches stored in the storage unit; and a display control unit that controls such that substrate information is displayed on the display part, the substrate information being information relating to a state in which the substrates are held the substrate holding part in the plural batches received by the selection receiving unit.
摘要翻译： 提供了能够容易地掌握多个批次之间的缺陷基板的关系的基板处理装置。 基板处理装置10包括：显示单元16; 存储单元，其累积并存储每批的所述基板的生产信息，所述生产信息在所述基板被处理时产生; 选择接收单元，其接收存储在所述存储单元中的多个批次的选择; 以及显示控制单元，其控制使得在显示部分上显示基板信息，所述基板信息是与由所述选择接收单元接收的多个批次中所述基板被保持的所述基板保持部分的状态有关的信息。
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公开(公告)号：US08795433B2
公开(公告)日：2014-08-05
申请号：US12382222
申请日：2009-03-11
申请人： Tokunobu Akao , Kazuyoshi Yamamoto
发明人： Tokunobu Akao , Kazuyoshi Yamamoto
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , G06F19/00 , G05B19/418 , H01L21/67
CPC分类号： G05B19/4183 , G05B2219/31291 , G05B2219/31304 , H01L21/67276 , Y02P90/10 , Y02P90/18
摘要： There is provided a substrate processing apparatus that can easily grasp the relationship of a defect substrate between plural batches.A substrate processing apparatus 10 includes: a display unit 16; a storage unit that accumulates and stores production information of the substrate for each batch, the production information being produced when the substrate is processed; a selection receiving unit that receives the selection of plural batches stored in the storage unit; and a display control unit that controls such that substrate information is displayed on the display part, the substrate information being information relating to a state in which the substrates are held the substrate holding part in the plural batches received by the selection receiving unit.
摘要翻译： 提供了能够容易地掌握多个批次之间的缺陷基板的关系的基板处理装置。 基板处理装置10包括：显示单元16; 存储单元，其累积并存储每批的所述基板的生产信息，所述生产信息在所述基板被处理时产生; 选择接收单元，其接收存储在所述存储单元中的多个批次的选择; 以及显示控制单元，其控制使得在显示部分上显示基板信息，所述基板信息是与由所述选择接收单元接收的多个批次中所述基板被保持的所述基板保持部分的状态有关的信息。
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公开(公告)号：US5936369A
公开(公告)日：1999-08-10
申请号：US875422
申请日：1997-07-28
CPC分类号： G05B19/19 , G05B2219/31291 , G05B2219/41368 , G05B2219/41389 , G05B2219/41396
摘要： A disturbance load estimation method for a servomotor in which an disturbance load externally exerted on the servomotor can be accurately estimated even when the voltage is saturated. Actual values (Ir, Is, It) of three-phase alternating current determined by current loop processing (term 1) are converted by DQ conversion, and an effective current component (Iq) that contributes to a torque generated by the servomotor is obtained (term 4). Based on the obtained effective current component, a motor acceleration is estimated (term 5), a difference between the estimated acceleration and an actual motor acceleration (term 6) is obtained, and the disturbance load is estimated based on the acceleration difference (term 7).
摘要翻译： PCT No.PCT / JP96 / 03474 Sec。 371日期1997年7月28日第 102（e）日期1997年7月28日PCT 1996年11月27日PCT公布。 公开号WO97 / 20260 PCT 日期：1997年6月5日即使在电压饱和的情况下也能够精确地估计伺服电动机的外部施加的干扰负荷的伺服电动机的扰动负荷估计方法。 通过电流环路处理（项1）确定的三相交流电的实际值（Ir，Is，It）通过DQ转换转换，并且获得有助于由伺服电动机产生的转矩的有效电流分量（Iq）（ 术语4）。 根据获得的有效电流分量，估计电动机加速度（项5），获得推定加速度与实际电动机加速度（项6）之间的差异，根据加速度差（项7）来估计干扰负荷 ）。
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公开(公告)号：US20180181097A1
公开(公告)日：2018-06-28
申请号：US15841369
申请日：2017-12-14
申请人： FANUC CORPORATION
发明人： Akihiro YANAGITA
IPC分类号： G05B19/042
CPC分类号： G05B19/0426 , G05B19/4183 , G05B2219/31088 , G05B2219/31291 , G05B2219/31325 , G05B2219/31336 , G06F16/90328 , G06Q50/08 , Y02P90/10 , Y02P90/18
摘要： Information representing an operating state of each of a plurality of robots, etc. operating under different operation conditions are retrieved and outputted. A retrieval system (1) includes; an acquisition means (24) for acquiring, from a plurality of machines (25) being used under respectively different operation conditions, information representing an operating state of each of the plurality of machines; an accumulation means (13) for accumulating information representing a plurality of operating states thus acquired; and a search means (12) for accepting search criteria for searching the information accumulated in the accumulation means (13), retrieving information representing an operating state agreeing with the search criteria from the accumulation means (13), and outputting a search result.
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