公开(公告)号：US08185871B2

公开(公告)日：2012-05-22

申请号：US10958720

申请日：2004-10-05

申请人： Mark J. Nixon ,  Michael G. Ott ,  Larry O. Jundt ,  John Michael Lucas ,  Dennis L. Stevenson ,  Nancy Stevenson, legal representative

发明人： Mark J. Nixon ,  Michael G. Ott ,  Larry O. Jundt ,  John Michael Lucas ,  Dennis L. Stevenson

IPC分类号： G06F9/44 ,  G06B11/01

CPC分类号： G05B23/0216 ,  G05B2219/31336 ,  G05B2219/31472 ,  G06F8/34

摘要： An apparatus having a programmable processor and a memory for performing a plurality of user-selectable control functions includes a database for storing a plurality of items associated with each of the control functions. The items include, for each function, at least one procedure for performing an action associated with the control function and a specification of at least one state associated with the control function. The apparatus further includes software routines stored on the memory and adapted to be executed by the processor that facilitate selection of a procedure in the database, that access the database and cause performance of the selected procedure to achieve the state specified therein, and that monitor at least one resource associated with the action of the procedure and, based thereon, determine whether the specified state has been achieved.

摘要翻译： 具有可编程处理器和用于执行多个用户可选择控制功能的存储器的装置包括用于存储与每个控制功能相关联的多个项目的数据库。 对于每个功能，项目包括用于执行与控制功能相关联的动作的至少一个过程以及与控制功能相关联的至少一个状态的指定。 该装置还包括存储在存储器上并适于由处理器执行的软件例程，其便于选择数据库中的过程，访问数据库并导致执行所选择的过程以实现其中指定的状态，并监视 与该过程的动作相关联的至少一个资源，并且基于此确定是否已经实现了指定状态。

公开(公告)号：US20040054660A1

公开(公告)日：2004-03-18

申请号：US10243630

申请日：2002-09-13

发明人： Kevin Lee McCormick

IPC分类号： G06F017/30 ,  G06F007/00

CPC分类号： G06F17/30398 ,  G05B19/41875 ,  G05B2219/31336 ,  G05B2219/31426 ,  G05B2219/31472 ,  G05B2219/32283 ,  Y02P90/20 ,  Y02P90/22 ,  Y10S707/99933

摘要： A system and method for managing a manufacturing processing operation by integrating one or more data retrieval systems with a user station. Data stored on one or more data retrieval systems is communicatively interfaced with the user station. The user stations controls one or more manufacturing processing operation in a manufacturing environment. The interfaced data is displayed on the user station to assist an operator that monitors or controls the user station in making changes in the manufacturing processing operation.

摘要翻译： 一种用于通过将一个或多个数据检索系统与用户站集成来管理制造处理操作的系统和方法。 存储在一个或多个数据检索系统上的数据与用户站通信地接口。 用户站控制制造环境中的一个或多个制造处理操作。 接口数据显示在用户站上，以帮助操作者监视或控制用户站进行制造处理操作的改变。

公开(公告)号：US20080147225A1

公开(公告)日：2008-06-19

申请号：US11642502

申请日：2006-12-19

申请人： Nital S. Patel

发明人： Nital S. Patel

IPC分类号： G06F17/00

CPC分类号： G05B19/41865 ,  G05B2219/31336 ,  G05B2219/32057 ,  Y02P90/20

摘要： In one embodiment, an apparatus and method for implementing intelligent and accurate updates to state-based advanced process control (APC) models are disclosed. In one embodiment, the method comprises receiving at least one of a re-measurement or a data invalidation at a state-based advanced process control (APC) model, referencing a state value table and a state update table to determine the current state of lot measurements in the state-based APC model, updating the state value table and the state update table to reflect the at least one of the re-measurement or the data invalidation, and determining settings to apply to a lot at a process tool based on process variability patterns established by the state-based APC model from the updated values in the state value table and the state update table.

摘要翻译： 在一个实施例中，公开了一种用于实现对基于状态的先进过程控制（APC）模型的智能和准确更新的装置和方法。 在一个实施例中，该方法包括在基于状态的高级处理控制（APC）模型中接收重新测量或数据无效中的至少一个，参考状态值表和状态更新表以确定批次的当前状态 基于状态的APC模型中的测量，更新状态值表和状态更新表以反映重新测量或数据无效中的至少一个，以及基于过程来确定在处理工具上应用于批次的设置 由国家的APC模型根据状态值表和状态更新表中的更新值建立的变异性模式。

公开(公告)号：US07039632B2

公开(公告)日：2006-05-02

申请号：US10243630

申请日：2002-09-13

申请人： Kevin Lee McCormick

发明人： Kevin Lee McCormick

IPC分类号： G06F17/30

CPC分类号： G06F17/30398 ,  G05B19/41875 ,  G05B2219/31336 ,  G05B2219/31426 ,  G05B2219/31472 ,  G05B2219/32283 ,  Y02P90/20 ,  Y02P90/22 ,  Y10S707/99933

摘要： A system and method for managing a manufacturing processing operation by integrating one or more data retrieval systems with a user station. Data stored on one or more data retrieval systems is communicatively interfaced with the user station. The user stations controls one or more manufacturing processing operation in a manufacturing environment. The interfaced data is displayed on the user station to assist an operator that monitors or controls the user station in making changes in the manufacturing processing operation.

摘要翻译： 一种用于通过将一个或多个数据检索系统与用户站集成来管理制造处理操作的系统和方法。 存储在一个或多个数据检索系统上的数据与用户站通信地接口。 用户站控制制造环境中的一个或多个制造处理操作。 接口数据显示在用户站上，以帮助操作者监视或控制用户站进行制造处理操作的改变。

公开(公告)号：US06868538B1

公开(公告)日：2005-03-15

申请号：US09563212

申请日：2000-05-02

申请人： Mark J. Nixon ,  Dennis L. Stevenson ,  Michael G. Ott ,  Stephen G. Hammack

发明人： Mark J. Nixon ,  Dennis L. Stevenson ,  Michael G. Ott ,  Stephen G. Hammack

IPC分类号： G06F9/44 ,  G05B15/00

CPC分类号： G05B23/0216 ,  G05B2219/31336 ,  G05B2219/31472 ,  G06F8/34

摘要： An apparatus having a programmable processor and a memory for performing a plurality of user-selectable control functions includes a database for storing a plurality of items associated with each of the control functions. The items include, for each function, at least one procedure for performing an action associated with the control function and a specification of at least one state associated with the control function. The apparatus further includes software routines stored on the memory and adapted to be executed by the processor that facilitate selection of a procedure in the database, that access the database and cause performance of the selected procedure to achieve the state specified therein, and that monitor at least one resource associated with the action of the procedure and, based thereon, determine whether the specified state has been achieved.

摘要翻译： 具有可编程处理器和用于执行多个用户可选择控制功能的存储器的装置包括用于存储与每个控制功能相关联的多个项目的数据库。 对于每个功能，项目包括用于执行与控制功能相关联的动作的至少一个过程以及与控制功能相关联的至少一个状态的指定。 该装置还包括存储在存储器上并适于由处理器执行的软件例程，其便于选择数据库中的过程，访问数据库并导致执行所选择的过程以实现其中指定的状态，并监视 与该过程的动作相关联的至少一个资源，并且基于此确定是否已经实现了指定状态。

公开(公告)号：US20160334782A1

公开(公告)日：2016-11-17

申请号：US15219467

申请日：2016-07-26

申请人： Tokyo Electron Limited

发明人： Aaron Archer Waterman ,  Yuichiro Morozumi ,  Tetsushi Ozaki ,  Sanjeev Kaushal ,  Sukesh Janubhai Patel

IPC分类号： G05B19/418 ,  G06F17/30 ,  G06N99/00 ,  H01L21/67

CPC分类号： G05B19/41875 ,  G05B2219/31336 ,  G05B2219/32368 ,  G05B2219/37224 ,  G06F17/3053 ,  G06N99/005 ,  H01L21/67288

摘要： A system and method for autonomously tracing a cause of particle contamination during semiconductor manufacture is provided. A contamination analysis system analyzes tool process logs together with particle contamination data for multiple process runs to determine a relationship between systematic particle contamination levels and one or more tool parameters. This relationship is used to predict expected contamination levels associated with regular usage of the tool, and to identify which tool parameters have the largest impact on expected levels of particle contamination. The contamination analysis system also identifies process logs showing unexpected deviant particle contamination levels that exceed expected contamination levels, and traces the cause of the deviant particle contamination to particular process log parameter events.

摘要翻译： 提供了一种用于在半导体制造期间自主追踪颗粒污染原因的系统和方法。 污染分析系统分析工具过程日志以及多个过程运行的颗粒污染数据，以确定系统性颗粒污染水平与一个或多个工具参数之间的关系。 这种关系用于预测与工具的常规使用相关的预期污染水平，并确定哪些工具参数对颗粒污染的预期水平具有最大的影响。 污染分析系统还识别显示出超出预期污染水平的意外偏差颗粒污染水平的过程记录，并追踪特定过程日志参数事件的异常颗粒污染的原因。

公开(公告)号：US09405289B2

公开(公告)日：2016-08-02

申请号：US13706712

申请日：2012-12-06

申请人： Tokyo Electron Limited

发明人： Aaron Archer Waterman ,  Yuichiro Morozumi ,  Tetsushi Ozaki ,  Sanjeev Kaushal ,  Sukesh Janubhai Patel

IPC分类号： G06F17/40 ,  G05B19/418 ,  H01L21/67 ,  G06N99/00

CPC分类号： G05B19/41875 ,  G05B2219/31336 ,  G05B2219/32368 ,  G05B2219/37224 ,  G06F17/3053 ,  G06N99/005 ,  H01L21/67288

摘要： A system and method for autonomously tracing a cause of particle contamination during semiconductor manufacture is provided. A contamination analysis system analyzes tool process logs together with particle contamination data for multiple process runs to determine a relationship between systematic particle contamination levels and one or more tool parameters. This relationship is used to predict expected contamination levels associated with regular usage of the tool, and to identify which tool parameters have the largest impact on expected levels of particle contamination. The contamination analysis system also identifies process logs showing unexpected deviant particle contamination levels that exceed expected contamination levels, and traces the cause of the deviant particle contamination to particular process log parameter events.

摘要翻译： 提供了一种用于在半导体制造期间自主追踪颗粒污染原因的系统和方法。 污染分析系统分析工具过程日志以及多个过程运行的颗粒污染数据，以确定系统性颗粒污染水平与一个或多个工具参数之间的关系。 这种关系用于预测与工具的常规使用相关的预期污染水平，并确定哪些工具参数对颗粒污染的预期水平具有最大的影响。 污染分析系统还识别显示出超出预期污染水平的意外偏差颗粒污染水平的过程记录，并追踪特定过程日志参数事件的异常颗粒污染的原因。

公开(公告)号：US20090292385A1

公开(公告)日：2009-11-26

申请号：US12511719

申请日：2009-07-29

申请人： Gunnar Flach ,  Thomas Quarg

发明人： Gunnar Flach ,  Thomas Quarg

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/31336 ,  G05B2219/32184 ,  G05B2219/32191 ,  G05B2219/32201 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P80/114 ,  Y02P90/22 ,  Y02P90/26

摘要： An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be compared to reference data, for instance provided by dynamic simulation calculations, to identify high, as well as low, performing equipment on the basis of standard process control mechanisms.

摘要翻译： 提供了一种自动化吞吐量控制系统和方法。 通过在实体层面收集多个处理工具的工具特定信息，可以在适度的短时间间隔期间以高统计学意义来计算适当的吞吐量相关性能特征。 此外，从工具信息获得的性能特征可以与例如通过动态模拟计算提供的参考数据进行比较，以基于标准过程控制机制来识别高性能以及低的执行设备。

公开(公告)号：US20120053979A1

公开(公告)日：2012-03-01

申请号：US13318578

申请日：2010-04-26

申请人： Abhay Nalawade

发明人： Abhay Nalawade

IPC分类号： G06Q10/06

CPC分类号： G05B23/0232 ,  G05B19/4183 ,  G05B2219/31217 ,  G05B2219/31282 ,  G05B2219/31316 ,  G05B2219/31336 ,  G06Q10/06313 ,  Y02P90/10 ,  Y02P90/265 ,  Y02P90/86

摘要： Method for improving/optimizing equipment design for an installed base of engineering equipment and for managing equipment operation is disclosed. In one instance, the method includes continuously acquiring, utilizing acquisition systems, (measurements) data for equipment operating conditions, equipment environment conditions, energy consumed by the equipment, utilities consumed b\ the equipment, wastages resulting from the process, input data and output data of each one of a number of pieces of equipment, each one piece of equipment—belonging to an installed base of the same class equipment pieces, and analyzing, utilizing one or more processors, the acquired data in order to obtain patterns and relations for the installed base; the patterns and relations comprising factors that affect performance and efficiency, the patterns and relations being used for equipment design improvement/optimization and installed base management. In one instance, the method also includes recording (storing) the analysis results and providing the analysis results in multiple formats to desired stakeholders, such as original equipment manufacturers (OEMs) the format being customized to the intended recipient/stake-holder.

摘要翻译： 公开了一种改进/优化设备安装设计基础和设备操作管理方法。 在一种情况下，该方法包括连续获取，利用采集系统（设备）操作条件，设备环境条件，设备消耗的能量，设备消耗的设备，过程产生的浪费，输入数据和输出 每个设备的每一个的数据，每一个设备 - 属于相同类设备的安装基础，并且分析利用一个或多个处理器获取的数据，以获得模式和关系 安装基地; 模式和关系包括影响性能和效率的因素，用于设备设计改进/优化和安装基础管理的模式和关系。 在一种情况下，该方法还包括记录（存储）分析结果，并将分析结果以多种格式提供给期望的利益相关者，诸如原始设备制造商（OEM），其格式被定制到预期的接收者/利益相关者。

公开(公告)号：US20110009995A1

公开(公告)日：2011-01-13

申请号：US12833186

申请日：2010-07-09

申请人： Lengyel Attila ,  Yoichi Nonaka ,  Kadar Botond ,  Monostori Laszlo

发明人： Lengyel Attila ,  Yoichi Nonaka ,  Kadar Botond ,  Monostori Laszlo

IPC分类号： G06F19/00

CPC分类号： G05B19/41885 ,  G05B2219/31336 ,  G05B2219/45031 ,  Y02P90/26

摘要： A control unit (120) of a production index information generating device (100) groups, based on log information of a production device, processing targets to generate groups for which end time of processing falls within a predetermined interval, classifies the processing targets contained in the groups into classes based on a number of the processing targets contained in each of the groups, generates cycle time information for each of the classes, which specifies cycle time of each of the processing targets contained in corresponding one of the classes, and determines a production capability of the production device. Accordingly, an index specifying a capability of the production device may be obtained with ease.

摘要翻译： 生产指标信息生成装置（100）的控制部（120）基于生产装置的日志信息，分组处理目标，生成结束处理时间落在预定间隔内的组，对包含的处理目标进行分类 基于每个组中包含的处理目标的数量，将这些组分成类，生成每个类的周期时间信息，其指定包含在相应的一个类中的每个处理目标的周期时间，并且确定 生产装置的生产能力。 因此，可以容易地获得指定生产装置的能力的指标。