SYSTEM FOR MONITORING MULTI-ORDERABLE MEASUREMENT DATA
    1.
    发明申请
    SYSTEM FOR MONITORING MULTI-ORDERABLE MEASUREMENT DATA 审中-公开
    监控多种测量数据的系统

    公开(公告)号:US20100017009A1

    公开(公告)日:2010-01-21

    申请号:US12164603

    申请日:2008-06-30

    IPC分类号: G06F19/00

    摘要: A computer-based measurement monitoring system and method for monitoring multi-stage processes capable of producing multi-orderable data and identifying, at any stage in the monitored process, unacceptable deviations from an expected value at particular stages of the process, and communicating same detected deviation to facilitate corrective action in the process. The system and method consolidate data obtained at various stages of the process, arrange the measurement data in a multi-orderable data framework, compare the multi-orderable framework data with expected parameter values corresponding to the various stages, and detects unacceptable deviations from the expected values. The unacceptable deviations are communicated to responsible personnel, and the system and method provides same personnel with supplemental information useful in diagnosing the root cause of the problem leading to the detected deviations.

    摘要翻译: 一种基于计算机的测量监测系统和方法,用于监测能够产生多重数据的多级过程,并且在所监视的过程的任何阶段识别在该过程的特定阶段与期望值的不可接受的偏差,并且将所检测到的通信 偏差以促进过程中的纠正措施。 该系统和方法整合在该过程的各个阶段获得的数据,将测量数据安排在多重数据框架中,将多阶段框架数据与对应于各个阶段的预期参数值进行比较,并检测出与预期的不符合的偏差 价值观。 将不可接受的偏差传达给负责人员,系统和方法为相同的人员提供补充信息,这些补充信息有助于诊断导致检测到的偏差的问题的根本原因。

    Direct maintenance system for unscheduled, predictive, and preventive maintenance of critical process equipment
    4.
    发明申请
    Direct maintenance system for unscheduled, predictive, and preventive maintenance of critical process equipment 审中-公开
    用于关键过程设备的非计划,预测和预防性维护的直接维护系统

    公开(公告)号:US20040181549A1

    公开(公告)日:2004-09-16

    申请号:US10387995

    申请日:2003-03-13

    发明人: James D. Pate

    IPC分类号: G06F017/00

    摘要: A maintenance database is provided, which includes maintenance instruction documents. A communications system generates alarm messages, which include maintenance instructions for resolving the alarm condition. The communications system may distribute these alarm messages to appropriate personnel. A direct maintenance viewer receives alarm messages and presents an interface for viewing the maintenance instructions. The maintenance instruction documents may present maintenance instructions as a series of main steps. Each main step may include one or more detailed step. Each main step or detailed step may have a media file associated therewith. Media files may include audio instructions, photographs, diagrams, three-dimensional models, and/or video instructions. The direct maintenance viewer may forward alarm messages and return acknowledgement and resolution messages.

    摘要翻译: 提供维护数据库,其中包括维护说明文件。 通信系统产生报警消息,其中包括解决报警条件的维护说明。 通信系统可以将这些报警消息分发给适当的人员。 直接维护查看器接收报警消息,并提供用于查看维护指令的界面。 维护说明文件可以将维护说明作为一系列主要步骤。 每个主要步骤可以包括一个或多个详细步骤。 每个主要步骤或详细步骤可以具有与其相关联的媒体文件。 媒体文件可以包括音频指令,照片,图表,三维模型和/或视频指令。 直接维护查看器可以转发报警消息并返回确认和解决消息。

    SYSTEMS AND METHODS FOR RULE-BASED CONTROL SYSTEM RELIABILITY
    5.
    发明申请
    SYSTEMS AND METHODS FOR RULE-BASED CONTROL SYSTEM RELIABILITY 有权
    基于规则控制系统可靠性的系统和方法

    公开(公告)号:US20140031958A1

    公开(公告)日:2014-01-30

    申请号:US13557125

    申请日:2012-07-24

    IPC分类号: G05B15/02

    摘要: In one embodiment, a system includes system includes a data collection system configured to collect a data from a control system. The system further includes a configuration management system configured to manage a hardware configuration and a software configuration for the control system based on the data. The system additionally includes a rule engine configured to use the data as input and to output a health assessment by using a rule database configured to store at least one rule, and a report generator configured to provide a health assessment for the control system. The system also includes a rule editor configured to create the at least one rule, update the at least one rule, delete the at least one rule, or a combination thereof.

    摘要翻译: 在一个实施例中,系统包括系统,其包括被配置为从控制系统收集数据的数据收集系统。 该系统还包括配置管理系统,其被配置为基于该数据来管理控制系统的硬件配置和软件配置。 所述系统还包括被配置为使用所述数据作为输入并且通过使用被配置为存储至少一个规则的规则数据库来输出健康评估的规则引擎,以及被配置为提供所述控制系统的健康评估的报告生成器。 该系统还包括配置用于创建至少一个规则,更新至少一个规则,删除至少一个规则或其组合的规则编辑器。

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    6.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    基板加工装置及制造半导体装置的方法

    公开(公告)号:US20100144145A1

    公开(公告)日:2010-06-10

    申请号:US12631152

    申请日:2009-12-04

    IPC分类号: H01L21/203 B05C11/00

    摘要: When a step is delayed, an operator can be rapidly informed of the delay. A substrate processing apparatus comprises a process system configured to process a substrate, a control unit configured to control the process system for performing a plurality of steps, and a manipulation unit configured to monitor progresses of the steps. While the control unit waits for completion of a predetermined one of the steps after the control unit controls the process system to start the predetermined step, if a time elapsing from the start of the predetermined step exceeds an allowable time previously allocated to each of the steps, the control unit transmits an alarm message to the manipulation unit so as to report that the allowable time is exceeded.

    摘要翻译: 当一个步骤被延迟时,可以迅速地通知操作者延迟。 基板处理装置包括被配置为处理基板的处理系统,被配置为控制用于执行多个步骤的处理系统的控制单元和被配置为监视步骤的进行的操作单元。 当控制单元在控制单元控制处理系统开始预定步骤之后等待完成预定的一个步骤时,如果从预定步骤的开始经过的时间超过先前分配给每个步骤的允许时间 控制单元向操作单元发送报警信息,以报告超过允许时间。

    Method for operating a process plant, process plant and computer program product
    7.
    发明申请
    Method for operating a process plant, process plant and computer program product 有权
    操作过程工厂,过程工厂和计算机程序产品的方法

    公开(公告)号:US20080004723A1

    公开(公告)日:2008-01-03

    申请号:US11803377

    申请日:2007-05-14

    IPC分类号: G05B13/02

    摘要: A method for operating a process plant, in which at the process level a number of items of alarm information are generated to display improper operating procedures of the process plant, has a defined number of process states of the process plant, wherein each process state is correlated with the total of all items of alarm information that can be generated. A first value or a second value is allocated as the correlation value to each pair formed from a process state and an item of alarm information. A current operating state of the process plant is determined As a function of the determined process state, items of alarm information are not displayed to which the first value has been allocated as the correlation value.

    摘要翻译: 一种用于操作过程工厂的方法,其中在处理级别生成若干项目的报警信息以显示过程工厂的不正确的操作过程,具有确定数量的过程工厂的过程状态,其中每个处理状态为 与可以生成的所有报警信息的总数相关联。 分配第一值或第二值作为从处理状态和报警信息项形成的每对对应的相关值。 确定处理工厂的当前操作状态根据所确定的处理状态的函数,不显示已经分配了第一个值的报警信息项作为相关值。

    Method and apparatus for sequentially collecting and analyzing real time data with interactive monitoring
    8.
    发明授权
    Method and apparatus for sequentially collecting and analyzing real time data with interactive monitoring 失效
    用于通过交互式监控顺序收集和分析实时数据的方法和装置

    公开(公告)号:US07209859B2

    公开(公告)日:2007-04-24

    申请号:US10090102

    申请日:2002-03-02

    申请人: Alex G. Zeif

    发明人: Alex G. Zeif

    IPC分类号: G06F19/00

    摘要: A system, comprising a plurality of slave devices collecting real time data from process stations, a master device receiving the collected data from the plurality of slave devices, wherein the master device polls the plurality of slave devices in a predetermined order and an analysis device processing the collected data and producing output data as a function of the collected data.

    摘要翻译: 一种系统,包括从处理站收集实时数据的多个从设备,主设备从多个从设备接收收集的数据,其中主设备以预定顺序轮询多个从设备,以及分析设备处理 收集的数据并产生作为收集的数据的函数的输出数据。

    Plant for controlling process equipment
    9.
    发明授权
    Plant for controlling process equipment 失效
    用于控制过程设备的设备

    公开(公告)号:US07085608B2

    公开(公告)日:2006-08-01

    申请号:US10854682

    申请日:2004-05-27

    IPC分类号: G05B11/01

    摘要: In a plant for controlling an equipment (4) adapted to carry out a process a superior arrangement (1) exists and has a first interface (2) to a programming unit (3) and a second interface (5) between the process equipment (4) and the arrangement. The arrangement has members (6) for transmitting information between the two interfaces. A memory member (9) adapted to store important data required for describing and defining the process of the process equipment is arranged in the process equipment itself. The arrangement (1) is provided with a rule data base (8) and a text data base (7) containing a configuration file for communication between the process equipment and the arrangement through the second interface by utilising a general process application protocol and a text file, respectively, adapted to the format of said data in the memory member of the process equipment.

    摘要翻译: 在用于控制适于执行处理的设备(4)的设备中存在优越的布置(1),并且具有第一接口(2)到编程单元(3)和处理设备之间的第二接口(5) 4)和安排。 该装置具有用于在两个接口之间传输信息的成员(6)。 适于存储用于描述和定义处理设备的过程所需的重要数据的存储器构件(9)被布置在处理设备本身中。 布置(1)具有规则数据库(8)和文本数据库(7),该文本数据库(7)包含用于通过第二接口在处理设备和布置之间进行通信的配置文件,该文档数据库通过利用一般的过程应用协议和文本 文件分别适应于处理设备的存储器中的所述数据的格式。

    System and method for determining condition of plant
    10.
    发明授权
    System and method for determining condition of plant 有权
    用于确定植物状况的系统和方法

    公开(公告)号:US06594621B1

    公开(公告)日:2003-07-15

    申请号:US09519630

    申请日:2000-03-06

    申请人: James H. Meeker

    发明人: James H. Meeker

    IPC分类号: G06F1700

    摘要: The system and method can determine the condition of a plant, its equipment and facilities, at inspection sites identified by identification codes. A portable processing device with an inspection transducer can sense and store at least one measured characteristic of the plant equipment. This device can also read at least one of the identification codes of the plant equipment. A central processing system can communicate with and upload from the portable processing device at least measured characteristics and identification codes. The central processing system can, in response to at least one measured characteristic and at least one of the identification codes, produce a condition signal signifying the condition of some aspect of the plant.

    摘要翻译: 该系统和方法可以在识别代码识别的检验点确定工厂及其设备和设施的状况。 具有检查传感器的便携式处理装置可以感测并存储至少一个测量的设备特性。 该设备还可以读取工厂设备的至少一个识别代码。 中央处理系统可以至少测量特征和识别码与便携式处理设备进行通信和上传。 中央处理系统可以响应于至少一个测量特性和至少一个识别码,产生表示设备某些方面的状况的条件信号。