公开(公告)号：US06933186B2

公开(公告)日：2005-08-23

申请号：US09961009

申请日：2001-09-21

Applicant: John M. Cotte ,  Kenneth J. Stein ,  Seshadri Subbanna ,  Richard P. Volant

Inventor： John M. Cotte ,  Kenneth J. Stein ,  Seshadri Subbanna ,  Richard P. Volant

IPC: H01C17/26 ,  H01L21/02 ,  H01L21/337

CPC classification number: H01L28/24 ,  H01C17/262

Abstract: A method of improving the tolerance of a back-end-of-the-line (BEOL) thin film resistor is provided. Specifically, the method of the present invention includes an anodization step which is capable of converting a portion of base resistor film into an anodized region. The anodized resistor thus formed has a sheet resistivity that is higher than that of the base resistor film.

Abstract translation: 提供了一种改进后端（BEOL）薄膜电阻的公差的方法。 具体地，本发明的方法包括能够将基极电阻膜的一部分转变为阳极氧化区域的阳极氧化步骤。 如此形成的阳极氧化电阻的电阻率比基极电阻膜高。

公开(公告)号：US4300196A

公开(公告)日：1981-11-10

申请号：US613674

申请日：1975-09-15

Applicant: Philip V. Lopresti

Inventor： Philip V. Lopresti

IPC: H01C17/26 ,  G05B23/02 ,  G01R35/00

CPC classification number: H01C17/262

Abstract: Disclosed are methods of controlling the adjustment of a machine-adjustable component in a circuit wherein a feedback factor relates a change in a monitor parameter to a compensating change in the value of the adjustable component; and wherein, by machine means, a value for the change in the monitor parameter is determined, a target value for the adjustable component is calculated from the monitor parameter change and the feedback factor, and the adjustable component is adjusted to substantially its target value.

Abstract translation: 公开了一种控制电路中机器可调组件的调节的方法，其中反馈因数将监视参数的变化与可调组件的值的补偿变化相关联; 并且其中，通过机器装置确定监视参数的变化的值，根据监视参数改变和反馈因子计算可调组件的目标值，并将可调组件调整到基本上其目标值。

公开(公告)号：US3341445A

公开(公告)日：1967-09-12

申请号：US39410464

申请日：1964-09-01

Applicant: WESTERN ELECTRIC CO

Inventor： GERHARD ALLEN R

IPC: C25D21/12 ,  G01R27/02 ,  H01C17/26

CPC classification number: H01C17/262 ,  C25D21/12 ,  G01R27/02 ,  H01C17/26

公开(公告)号：US3159556A

公开(公告)日：1964-12-01

申请号：US7469160

申请日：1960-12-08

Applicant: BELL TELEPHONE LABOR INC

Inventor： MCLEAN DAVID A ,  PENDERGAST WARREN J

IPC: H01B1/00 ,  H01C17/26 ,  H01L49/02 ,  H05K7/18

CPC classification number: H05K7/18 ,  H01B1/00 ,  H01C17/26 ,  H01C17/262 ,  H01L49/02 ,  Y10T29/49082

公开(公告)号：US3661754A

公开(公告)日：1972-05-09

申请号：US3661754D

申请日：1969-11-07

Applicant: LIGNES TELEGRAPH TELEPHON

Inventor： JOLY JEAN ,  BLANGEARD GERARD

IPC: H01C17/26 ,  B01K3/00 ,  B23P1/02 ,  C23B5/70

CPC classification number: H01C17/262

Abstract: A method and an apparatus for carrying out said method for selectively adjusting by anodization the resistors of a thin film or hybrid circuit. The circuit is positioned under a thick mask provided with holes registering with the resistors on the circuit lay-out. A jellied electrolyte is spread over the circuit through the mask which is removed. Electrodes prepositioned with respect to the lay-out are placed on the electrolyte spots which are connected to an equipment. Each resistor is associated with three electrodes: two located at each end and connected in an arm of a measuring A.C. bridge, another arm of which is connected to the standard resistor, the third connected at the middle of the resistor and supplying the D.C. anodizing current. Balance of the bridge automatically stops the anodizing current.

公开(公告)号：US3520783A

公开(公告)日：1970-07-14

申请号：US3520783D

申请日：1967-02-10

Applicant: NORTHERN ELECTRIC CO

Inventor： CARROLL FRED W

IPC: G01N27/22 ,  H01C17/26 ,  C23B9/00

CPC classification number: H01C17/262

公开(公告)号：US3408274A

公开(公告)日：1968-10-29

申请号：US47570665

申请日：1965-07-29

Applicant: DU PONT

Inventor： HOFFMAN LEWIS C

IPC: H01C17/26

CPC classification number: H01C17/262 ,  Y10T29/49099

公开(公告)号：US3365379A

公开(公告)日：1968-01-23

申请号：US44772465

申请日：1965-04-13

Applicant: LOCKHEED AIRCRAFT CORP

Inventor： KAISER HAROLD R

IPC: C25D21/12 ,  H01C17/26

CPC classification number: C25D21/12 ,  H01C17/262

公开(公告)号：US4920635A

公开(公告)日：1990-05-01

申请号：US212477

申请日：1988-06-28

Applicant: Yasuhito Yajima

Inventor： Yasuhito Yajima

IPC: H05B3/42 ,  G01F1/68 ,  G01F1/692 ,  H01C7/02 ,  H01C17/24 ,  H01C17/26 ,  H05B3/20

CPC classification number: H01C17/262 ,  G01F1/68 ,  G01F1/692 ,  H01C17/24 ,  H01C17/2412 ,  H01C7/021 ,  Y10T29/49082 ,  Y10T29/49085

Abstract: A thermo-sensitive resistor including an electrically insulating substrate, a thin-film heating resistor formed on the substrate and lead wires electrically connected to the thin-film heating resistor, wherein the resistance of the thin-film heating resistor is adjusted by increasing or decreasing a film thickness of a previously formed base thin-film heating resistor by means of an electroplating method or an electroless plating method, and thus the area for heating of the thermo-sensitive resistor can remain constant even if the resistance adjustment is performed.

Abstract translation: 一种热敏电阻器，包括电绝缘基板，形成在基板上的薄膜加热电阻器和与薄膜加热电阻器电连接的引线，其中通过增加或减小来调节薄膜加热电阻器的电阻 通过电镀法或化学镀法预先形成的基底薄膜加热电阻体的膜厚，因此即使进行电阻调整，热敏电阻的加热面积也保持恒定。

公开(公告)号：US3855109A

公开(公告)日：1974-12-17

申请号：US34906173

申请日：1973-04-09

Applicant: GEN RADIO CO

Inventor： HOLTJE M

IPC: C25D11/26 ,  H01C17/26 ,  B01K3/00

CPC classification number: C25D11/26 ,  H01C17/262

Abstract: This disclosure deals with a novel technique for trimming thin film resistors and the like by continually determining during relatively rapid anodizing whether the resistor has obtained a value greater than or less than a desired value without actually determining the resistance value, and when the desired value is closely approached, more accurately making the determination while anodizing the resistor more slowly to the desired value.

Abstract translation: 本公开涉及用于通过在相对快速的阳极氧化期间连续确定电阻器是否获得大于或小于期望值的值而不实际确定电阻值的方法来修整薄膜电阻器等的新技术，并且当期望值为 紧密接近，更准确地确定阳极氧化电阻更慢到期望的值。