Electron beam irradiation method and scanning electronic microscope
    1.
    发明授权
    Electron beam irradiation method and scanning electronic microscope 有权
    电子束照射法和扫描电子显微镜

    公开(公告)号:US09257259B2

    公开(公告)日:2016-02-09

    申请号:US13807577

    申请日:2011-06-08

    Abstract: Provided is an electron beam scanning method for forming an electric field for appropriately guiding electrons emitted from a pattern to the outside of the pattern, and also provided is a scanning electron microscope. When an electron beam for forming charge is irradiated to a sample, a first electron beam is irradiated to a first position (1) and a second position (2) having the center (104) of a pattern formed on the sample as a symmetrical point, and is then additionally irradiated to two central positions (3, 4) between the first and second irradiation position, the two central positions (3, 4) being on the same radius centered on the symmetrical point as are the first and second positions. Further, after that, the irradiation of the first electron beam to the central positions between existing scanning positions on the radius is repeated.

    Abstract translation: 提供了一种电子束扫描方法,用于形成用于将从图案发射的电子适当地引导到图案的外部的电场,并且还提供了扫描电子显微镜。 当用于形成电荷的电子束照射到样品时,第一电子束被照射到第一位置(1)和第二位置(2),其具有在样品上形成的图案的中心(104)作为对称点 然后另外照射到第一和第二照射位置之间的两个中心位置(3,4),两个中心位置(3,4)处于与第一和第二位置对称的点对中的相同的半径上。 此外,在此之后,重复将第一电子束照射到半径上的现有扫描位置之间的中心位置。

    Method for forming a multi-level conductive black matrix for a flat
panel display
    2.
    发明授权
    Method for forming a multi-level conductive black matrix for a flat panel display 失效
    用于形成用于平板显示器的多层导电黑矩阵的方法

    公开(公告)号:US6030269A

    公开(公告)日:2000-02-29

    申请号:US85396

    申请日:1998-05-26

    Applicant: Paul M. Drumm

    Inventor: Paul M. Drumm

    CPC classification number: H01J9/242 H01J29/085 H01J2201/025 H01J2329/00

    Abstract: A multi-level conductive matrix structure for separating rows and columns of sub-pixels on the faceplate of a flat panel display device. In one embodiment, the present invention is formed partially of a first plurality of conductive ridges which are disposed on the faceplate between respective adjacent rows of sub-pixel regions. The present invention is further formed of a second plurality of conductive ridges which are orthogonally oriented with respect to and integral with the first plurality of conductive ridges such that a matrix structure is formed. In the conductive matrix of the present invention, the second plurality of conductive ridges have a height which is greater than the height of the first plurality of conductive ridges such that a multi-level conductive matrix is formed. However, the height of the second plurality of conductive ridges decreases to approximately the height of the first plurality of conductive ridges at respective intersections of the first and second plurality of conductive ridges. In so doing, the present invention provides a multi-level conductive matrix for separating rows and columns of sub-pixels on the faceplate of a flat panel display device.

    Abstract translation: 一种用于分离平板显示装置的面板上的子像素的行和列的多级导电矩阵结构。 在一个实施例中,本发明部分地由在相邻的相邻行子像素区域之间设置在面板上的第一多个导电脊。 本发明还由第二多个导电脊构成,第二多个导电脊与第一多个导电脊相对并且与第一多个导电脊成一体,从而形成矩阵结构。 在本发明的导电矩阵中,第二多个导电脊的高度大于第一多个导电脊的高度,从而形成多层导电矩阵。 然而,第二多个导电脊的高度在第一和第二多个导电脊的相应交点处降低到大约第一多个导电脊的高度。 这样做,本发明提供一种用于分离平板显示装置的面板上的子像素列和列的多层导电矩阵。

    Field emission device
    3.
    发明授权
    Field emission device 失效
    场发射装置

    公开(公告)号:US5760535A

    公开(公告)日:1998-06-02

    申请号:US740583

    申请日:1996-10-31

    CPC classification number: H01J3/022 H01J2201/025

    Abstract: A field emission device (200, 300, 400, 500) includes a supporting substrate (210, 310, 410, 510), a cathode (215, 315, 415, 515) formed thereon, a plurality of electron emitters (270, 370, 470, 570) and a plurality of gate extraction electrodes (250, 350, 450, 550) proximately disposed to the plurality of electron emitters (270, 370, 470, 570) for effecting electron emission therefrom, a major dielectric surface (248, 348, 448, 548) disposed between the plurality of gate extraction electrodes (250, 350, 450, 550), a charge dissipation layer (252, 352, 452, 552) formed on the major dielectric surface (248, 348, 448, 548), and an anode (280, 380, 480, 580) spaced from the gate extraction electrodes (250, 350, 450, 550).

    Abstract translation: 场致发射器件(200,300,400,500)包括支撑衬底(210,310,410,510),形成在其上的阴极(215,315,415,515),多个电子发射器(270,370 ,多个栅极引出电极(250,350,450,550),所述多个栅极引出电极(250,350,450,550)近似地设置在所述多个电子发射器(270,370,470,570)中,用于从其发射电子发射,主电介质表面(248 ,348,448,548),其布置在所述多个栅极引出电极(250,350,450,550)之间,形成在所述主电介质表面(248,348,448)上的电荷耗散层(252,352,452,552) ,548)以及与栅极引出电极(250,350,450,550)间隔开的阳极(280,380,480,580)。

    ELECTRON BEAM IRRADIATION METHOD AND SCANNING ELECTRONIC MICROSCOPE
    4.
    发明申请
    ELECTRON BEAM IRRADIATION METHOD AND SCANNING ELECTRONIC MICROSCOPE 有权
    电子束辐射方法和扫描电子显微镜

    公开(公告)号:US20130187045A1

    公开(公告)日:2013-07-25

    申请号:US13807577

    申请日:2011-06-08

    Abstract: Provided is an electron beam scanning method for forming an electric field for appropriately guiding electrons emitted from a pattern to the outside of the pattern, and also provided is a scanning electron microscope. When an electron beam for forming charge is irradiated to a sample, a first electron beam is irradiated to a first position (1) and a second position (2) having the center (104) of a pattern formed on the sample as a symmetrical point, and is then additionally irradiated to two central positions (3, 4) between the first and second irradiation position, the two central positions (3, 4) being on the same radius centered on the symmetrical point as are the first and second positions. Further, after that, the irradiation of the first electron beam to the central positions between existing scanning positions on the radius is repeated.

    Abstract translation: 提供了一种电子束扫描方法,用于形成用于将从图案发射的电子适当地引导到图案的外部的电场,并且还提供了扫描电子显微镜。 当用于形成电荷的电子束照射到样品时,第一电子束被照射到第一位置(1)和第二位置(2),其具有形成在样品上的图案的中心(104)作为对称点 然后另外照射到第一和第二照射位置之间的两个中心位置(3,4),两个中心位置(3,4)处于与第一和第二位置对称的点对中的相同的半径上。 此外,在此之后,重复将第一电子束照射到半径上的现有扫描位置之间的中心位置。

    Structure and fabrication of flat panel display with specially arranged
spacer
    5.
    发明授权
    Structure and fabrication of flat panel display with specially arranged spacer 失效
    平板显示器的结构和制造,具有特别布置的间隔

    公开(公告)号:US6049165A

    公开(公告)日:2000-04-11

    申请号:US8129

    申请日:1998-01-16

    Abstract: A flat-panel display having a backplate structure (330), a faceplate structure (320), and a spacer (340) situated between the two plate structures is configured so that the electric potential field along the spacer approximates the potential field that would be present at the same location in free space, i.e., in the absence of the spacer, between the two plate structures. Consequently, the presence of the spacer does not significantly affect the trajectories of electrons moving from the backplate structure to the faceplate structures. Alternatively, the spacer is arranged to produce electron deflection that largely compensates for undesired electron deflection which occurs during earlier electron travel from the backplate structure to the faceplate structure. The net electron deflection is small.

    Abstract translation: 配置有位于两个板结构之间的具有背板结构(330),面板结构(320)和间隔物(340)的平板显示器,使得沿着间隔物的电势场近似于将是 存在于两个板结构之间的自由空间的相同位置,即不存在间隔件的位置。 因此,间隔物的存在不会显着影响从背板结构移动到面板结构的电子的轨迹。 或者,间隔件被布置成产生电子偏转,其大大补偿了在从背板结构到面板结构的早期电子行进期间发生的不期望的电子偏转。 净电子偏转小。

    Spacer locator design for three-dimensional focusing structures in a
flat panel display
    6.
    发明授权
    Spacer locator design for three-dimensional focusing structures in a flat panel display 失效
    用于平板显示器中三维聚焦结构的间隔定位器设计

    公开(公告)号:US5859502A

    公开(公告)日:1999-01-12

    申请号:US684270

    申请日:1996-07-17

    Abstract: A flat panel display has a faceplate structure, a backplate structure, a focusing structure, and a plurality of spacers. The backplate structure includes an electron emitting structure which faces the faceplate structure. The focusing structure has a first surface coupled to the electron emitting structure, and a second surface which extends away from the electron emitting structure. The electrical end of the combination of the focusing structure and the electron emitting structure is located at an imaginary plane located intermediate the first and second surfaces of the focusing structure. A spacers is located between the focusing structure and the light emitting structure. The spacer is typically located within a corresponding groove in the focusing structure such that the electrical end of the spacer is coincident with the electrical end of the combination of the focusing structure and the electron emitting structure. In other embodiments, the electrical end of the spacer is located above the electrical end of the combination of the focusing structure and the electron emitting structure. In these embodiments, a face electrode on the spacer compensates for the resulting voltage distribution.

    Abstract translation: 平板显示器具有面板结构,背板结构,聚焦结构和多个间隔件。 背板结构包括面向面板结构的电子发射结构。 聚焦结构具有耦合到电子发射结构的第一表面和远离电子发射结构延伸的第二表面。 聚焦结构和电子发射结构的组合的电端位于位于聚焦结构的第一和第二表面中间的假想平面处。 间隔物位于聚焦结构和发光结构之间。 间隔件通常位于聚焦结构中的相应凹槽内,使得间隔物的电端与聚焦结构和电子发射结构的组合的电端重合。 在其他实施例中,间隔物的电端位于聚焦结构和电子发射结构的组合的电端的上方。 在这些实施例中,间隔物上的面电极补偿所得到的电压分布。

    Support structure for flat panel displays

    公开(公告)号:US5939822A

    公开(公告)日:1999-08-17

    申请号:US914291

    申请日:1997-08-18

    Abstract: A support structure is provided that enables the use of high-voltage phosphors in field-emission flat panel displays, to maintain the vacuum gap between the cathode and the anode at a constant distance and to prevent distortion of the transparent view screen and backing plate of the display. A number of independent techniques each contributes to the solution of the problem of secondary electron emission. One technique is to alter the geometry of the triple junction of the support structure, the cathode, and the vacuum gap, thereby reducing the electrostatic field created at the triple junction. Reducing the electrostatic field reduces the initial primary electron bombardment originating at the triple junction. Altering the geometry of the support surface with respect to the field lines present at the triple junction also increases the probability that impinging electrons will impact at or nearly at right angles, and will also tend to be directed by the field lines back into the "pocket" created by the shaping of the support structure edge, preventing secondary electrons from escaping and traveling along the structure surface to the anode. In accordance with another technique, the support structure is fluted so as to reduce the average coefficient of secondary electron emission, to trap a proportion of secondary electrons, and to limit the number of hops of other secondary electrons. In another technique, a high resistivity conductive layer is formed at the triple junction in order to reduce the field potential at the triple junction. A similar conductive layer may be formed at the opposite junction of the support structure, the anode, and the vacuum gap. A high resistivity conductive material coated on the surface of the insulating spacer can be used to decrease the charge relaxation time of the insulator, thereby maintaining a constant field potential over the surface of the insulator, reducing areas of high field potential which will tend to accelerate secondary electron emissions. In accordance with other techniques, the support structure is made of a non-porous material and may be coated with a coating having low secondary emission characteristics.

    Field emission display having an ion shield
    8.
    发明授权
    Field emission display having an ion shield 失效
    具有离子屏蔽的场发射显示

    公开(公告)号:US5929560A

    公开(公告)日:1999-07-27

    申请号:US36303

    申请日:1998-03-06

    CPC classification number: H01J3/022 H01J2201/025

    Abstract: A field emission display (100) includes a dielectric layer (132) having a plurality of emitter wells (134), a plurality of electron emitters (136) disposed one each within the plurality of emitter wells (134), a plurality of conductive rows (138, 140, 142) disposed on the dielectric layer (132) and having sacrificial portions (154), an ion shield (139) disposed on the dielectric layer (132) and spaced apart from the sacrificial portions (154) of the plurality of conductive rows (138, 140, 142), and an anode (121) opposing the plurality of electron emitters (136) and defining a projected area (122) at the plurality of conductive rows (138, 140, 142). The sacrificial portions (154) of the plurality of conductive rows (138, 140, 142) extend beyond the projected area (122) of the anode (121).

    Abstract translation: 场发射显示器(100)包括具有多个发射极阱(134)的电介质层(132),多个发射极阱(134)中的每一个都设置的多个电子发射器(136),多个导电行 (138,140,​​142),设置在电介质层(132)上并具有牺牲部分(154),设置在电介质层(132)上并离开多个牺牲部分(154)的离子屏蔽(139) 的导电行(138,140,​​142)以及与所述多个电子发射器(136)相对并且在所述多个导电行(138,140,​​142)处限定投影区域(122)的阳极(121)。 多个导电行(138,140,​​142)的牺牲部分(154)延伸超过阳极(121)的投影区域(122)。

    Flat-panel display with intensity control to reduce light-centroid shifting
    10.
    发明授权
    Flat-panel display with intensity control to reduce light-centroid shifting 有权
    平板显示屏具有强度控制,减少轻质心跳

    公开(公告)号:US06414428B1

    公开(公告)日:2002-07-02

    申请号:US09302698

    申请日:1999-04-30

    Abstract: The intensity at which electrons emitted by a first plate structure (10) in a flat-panel display strike a second plate structure (12) for causing it to emit light is controlled so as to reduce image degradation that could otherwise arise from undesired electron-trajectory changes caused by effects such as the presence of a spacer system (14) between the plate structures. An electron-emissive region (20) in the first plate structure typically contains multiple laterally separated electron-emissive portions (201 and 202) for selectively emitting electrons. An electron-focusing system in the first plate structure has corresponding focus openings (42P1 and 42P2) through which electrons emitted by the electron-emissive portions respectively pass. Upon being struck by the so-emitted electrons, a light-emissive region (22) in the second plate structure emits light to produce at least part of a dot of the display's image.

    Abstract translation: 控制由平板显示器中的第一板结构(10)发射的电子撞击用于使其发光的第二板结构(12)的强度,以便减少否则可能由不期望的电子发射引起的图像劣化, 由诸如板结构之间的隔离系统(14)的影响引起的轨迹变化。 第一板结构中的电子发射区(20)通常包含用于选择性地发射电子的多个横向分离的电子发射部分(201和202)。 第一板结构中的电子聚焦系统具有相应的聚焦开口(42P1和42P2),电子发射部分发射的电子分别通过该开口。 在被所发射的电子撞击时,第二板结构中的发光区域(22)发光,以产生显示器图像的至少一部分点。

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