公开(公告)号：US20170069455A1

公开(公告)日：2017-03-09

申请号：US15353980

申请日：2016-11-17

申请人： KLA-TENCOR CORPORATION

发明人： YUNG-HO ALEX CHUANG ,  JOHN FIELDEN

IPC分类号： H01J29/38 ,  H01L27/148 ,  H01J31/50 ,  H01J1/34 ,  H01J31/26

CPC分类号： H01J29/385 ,  G01N21/9501 ,  G02B21/125 ,  H01J1/34 ,  H01J31/26 ,  H01J31/50 ,  H01L27/14643 ,  H01L27/148 ,  H01L27/14806 ,  H01L27/14893

摘要： A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent oxidation of the silicon, a thin (e.g., 1-5 nm) boron layer is disposed directly on the output surface using a process that minimizes oxidation and defects. An optional second boron layer is formed on the illuminated (top) surface, and an optional anti-reflective material layer is formed on the second boron layer to enhance entry of photons into the silicon substrate. An optional external potential is generated between the opposing illuminated (top) and output (bottom) surfaces. The photocathode forms part of novel electron-bombarded charge-coupled device (EBCCD) sensors and inspection systems.

摘要翻译： 在具有相对的照明​​（顶部）和输出（底部）表面的单晶硅衬底上形成光电阴极。 为了防止硅的氧化，使用最小化氧化和缺陷的工艺将薄（例如1-5nm）的硼层直接设置在输出表面上。 在照明（顶部）表面上形成可选的第二硼层，并且在第二硼层上形成可选的抗反射材料层以增强光子进入硅衬底。 在相对的照明​​（顶部）和输出（底部）表面之间产生可选的外部电位。 光电阴极形成新型电子轰击电荷耦合器件（EBCCD）传感器和检测系统的一部分。

公开(公告)号：US06320303B1

公开(公告)日：2001-11-20

申请号：US09196140

申请日：1998-11-20

申请人： Takashi Noji ,  Mitsumasa Hiroi ,  Junji Taniguchi ,  Yoshinobu Sekijima

发明人： Takashi Noji ,  Mitsumasa Hiroi ,  Junji Taniguchi ,  Yoshinobu Sekijima

IPC分类号： H01J3100

CPC分类号： H01J31/501 ,  H01J29/385 ,  H01J29/863

摘要： The object of the present invention is to provide a radioactive-ray image tube having less deformations, such as the twist of an input substrate, less aberration over the entire regions of an output image, excellent resolution and good brightness uniformity and contrast characteristics. This radioactive-ray image tube 1a comprises an input window 10 formed on one side surface of a vacuum vessel 2a and allowing radioactive-rays to enter the vacuum vessel 2a, an input screen 5 for converting the radioactive-rays incident on the input window 10 into a fluorescent image or a photoelectric image, and an input substrate 4a holding the input screen 5, is characterized in that the input substrate 4a comprises of a clad material 13 having an aluminum alloy material 11 on the radioactive-ray incidence side and a pure aluminum material 12 on the input screen 5 side provided integrally with each other.

摘要翻译： 本发明的目的是提供一种具有较少变形的放射线图像管，例如输入基板的扭曲，输出图像的整个区域的像差小，分辨率优异，亮度均匀性和对比度特性良好。 该放射线图像管1a包括形成在真空容器2a的一个侧表面上并允许放射线进入真空容器2a的输入窗口10，用于转换入射在输入窗口10上的放射线的输入屏幕5 进入荧光图像或光电图像，以及保持输入屏幕5的输入基板4a的特征在于，输入基板4a包括在放射线入射侧具有铝合金材料11的包覆材料13和纯的 输入屏幕5侧的铝材12彼此一体地设置。

公开(公告)号：US06169360A

公开(公告)日：2001-01-02

申请号：US09068453

申请日：1998-07-17

申请人： Kazutoshi Tanno ,  Yoshinobu Sekijima ,  Hitoshi Yamada ,  Takashi Noji

发明人： Kazutoshi Tanno ,  Yoshinobu Sekijima ,  Hitoshi Yamada ,  Takashi Noji

IPC分类号： H01J3149

CPC分类号： H01J29/385 ,  G21K4/00 ,  G21K2004/06 ,  G21K2004/12 ,  H01J31/501 ,  H01J2231/50036 ,  H01J2231/50063 ,  H01J2231/5053

摘要： The present invention assures a satisfactory adhesiveness of an input screen 13 of an X-ray image intensifier, high resolution of an output image and brightness uniformity as required, by configuring an aluminum or aluminum alloy substrate 21 so to have a concave surface with minute irregularities of the substrate material removed by burnishing, excepting gentle irregularities 21c without directivity which are caused by pressing. The gentle irregularities 21c of the substrate 21 preferably have an average length L in a range of 50 &mgr;m to 300 &mgr;m between the neighboring bottoms and an average height H in a range of 0.3 &mgr;m to 4.0 &mgr;m from peaks to bottoms. The invention improves resolution with light on the substrate surface suppressed from being scattered, and decreases image noises which are caused by the minute irregularities.

摘要翻译： 本发明通过将铝或铝合金基板21配置成具有微小不规则的凹面，确保X射线图像增强器的输入屏幕13，输出图像的高分辨率和亮度均匀性的令人满意的粘合性 通过抛光除去基板材料，除了由压制引起的没有方向性的柔和的凹凸21c。 基板21的缓和凹凸21c的平均长度L优选在相邻底部之间的平均长度L为50μm〜300μm，平均高度H为从峰到底为0.3μm〜4.0μm的范围。 本发明通过抑制基板表面的光分散而提高分辨率，并且减小由微小不规则性引起的图像噪声。

公开(公告)号：US6005239A

公开(公告)日：1999-12-21

申请号：US988236

申请日：1997-12-10

申请人： Hideki Suzuki ,  Minoru Kondo ,  Masuo Ito ,  Yoshitoshi Ishihara

发明人： Hideki Suzuki ,  Minoru Kondo ,  Masuo Ito ,  Yoshitoshi Ishihara

IPC分类号： G02B6/06 ,  G02B6/08 ,  H01J29/18 ,  H01J29/38 ,  H01J29/89 ,  H01J31/50 ,  H01J29/24

CPC分类号： G02B6/08 ,  H01J29/385 ,  H01J29/892

摘要： In an image intensifier comprising an entrance faceplate, made of a material transparent to light, having a photoelectric surface, formed on a surface opposite to a light entrance surface, for photoelectrically converting incident light into an electron; and an optical fiber block, constituted by a plurality of optical fibers bundled together, having a phosphor face at an end face of each optical fiber on the light entrance side, for emitting light in response to the electron incident thereon; the photoelectric surface of the entrance faceplate and the phosphor face of the optical fiber block opposing each other, while a vacuum atmosphere being formed therebetween; the optical fiber block is provided with a pit in which an end face of a core portion of each optical fiber is recessed from an end face of a cladding portion thereof, the bottom of the pit is filled with a phosphor, the surface of this phosphor is provided with a metal back layer, the cladding portion projects from the surface of the phosphor toward the entrance surface by a predetermined height, and the projecting surface of the cladding portion is provided with a metal film.

摘要翻译： 在包括由与光入射面相反的表面上形成的具有光电表面的由光透明的材料制成的入射面板的图像增强器中，用于将入射光光电转换成电子; 以及由多个光纤束组合构成的光纤块，在光入射侧的每个光纤的端面上具有荧光体面，用于响应于入射到其上的电子发光; 入口面板的光电面和光纤块的荧光体面彼此相对，同时在其间形成真空气氛; 光纤块设置有凹坑，其中每个光纤的芯部的端面从其包层部分的端面凹陷，凹坑的底部填充有荧光体，该荧光体的表面 设置有金属背层，包层部从荧光体的表面向入射面突出规定的高度，并且包层部的突出面设置有金属膜。

公开(公告)号：US5367155A

公开(公告)日：1994-11-22

申请号：US959811

申请日：1992-10-13

申请人： Johannes K. E. Colditz ,  Henricus F. C. Diebels ,  Tiemen Poorter ,  August L. H. Simons ,  Johnny W. Van Der Velden

发明人： Johannes K. E. Colditz ,  Henricus F. C. Diebels ,  Tiemen Poorter ,  August L. H. Simons ,  Johnny W. Van Der Velden

IPC分类号： G21K4/00 ,  H01J29/38 ,  H01J31/50

CPC分类号： G21K4/00 ,  H01J29/385 ,  H01J31/501 ,  G21K2004/06 ,  H01J2231/50036 ,  H01J2231/50063

摘要： In an X-ray image intensifier tube an entrance section is optimized in respect of image quality, optical aberrations and efficiency. To achieve this, notably in order to avoid photocathode charging phenomena, a separating layer having an adapted electrical transverse conduction is provided. In order to reduce scattered radiation, an edge portion of the entrance screen is deactivated for relevant examinations. In order to increase efficiency, use is made of a double phosphor layer having different X-ray absorption properties. In order to compensate for vignetting a radial variation of the thickness or of the radiation properties of a separating layer or of the luminescent layer itself is used.

摘要翻译： 在X射线图像增强管中，对于图像质量，光学像差和效率优化入口部分。 为了实现这一点，特别是为了避免光电阴极充电现象，提供了具有适应的电横向导电的分离层。 为了减少散射辐射，进入屏幕的边缘部分被禁用以进行相关的检查。 为了提高效率，使用具有不同X射线吸收特性的双荧光体层。 为了补偿渐晕，使用分离层或发光层本身的厚度或辐射特性的径向变化。

公开(公告)号：US5311010A

公开(公告)日：1994-05-10

申请号：US11918

申请日：1993-02-01

申请人： Hans W. Kruger

发明人： Hans W. Kruger

IPC分类号： H01J29/38 ,  H01J31/50 ,  H01J47/00 ,  H01J40/14

CPC分类号： H01J31/501 ,  H01J29/385 ,  H01J47/001 ,  H01J2231/50015 ,  H01J2231/50021 ,  H01J2231/50026

摘要： A buffer assembly for a gamma-insensitive gas avalanche focal plane array operating in the ultra-violet/visible/infrared energy wavelengths and using a photocathode and an avalanche gas located in a gap between an anode and the photocathode. The buffer assembly functions to eliminate chemical compatibility between the gas composition and the materials of the photocathode. The buffer assembly in the described embodiment is composed of two sections, a first section constructed of glass honeycomb under vacuum and a second section defining a thin barrier film or membrane constructed, for example, of Al and Be, which is attached to and supported by the honeycomb. The honeycomb section, in turn, is supported by and adjacent to the photocathode.

摘要翻译： 用于以紫外/可见/红外能量波长工作的伽马不敏感气体雪崩焦平面阵列的缓冲组件，并且使用位于阳极和光电阴极之间的间隙中的光电阴极和雪崩气体。 缓冲装置的作用是消除气体组成与光电阴极材料之间的化学相容性。 所述实施例中的缓冲组件由两部分构成，第一部分由真空下的玻璃蜂窝构成，第二部分限定由例如Al和Be构成的薄的阻挡膜或膜，该第二部分附着到并由 蜂窝。 蜂窝部分又由光电阴极支撑并邻近光电阴极。

公开(公告)号：US4855589A

公开(公告)日：1989-08-08

申请号：US119829

申请日：1987-11-12

申请人： Richard S. Enck ,  F. Dan Meadows

发明人： Richard S. Enck ,  F. Dan Meadows

IPC分类号： G21K4/00 ,  H01J9/12 ,  H01J29/38 ,  H01J31/50

CPC分类号： G21K4/00 ,  H01J29/385 ,  H01J31/505 ,  H01J9/12

摘要： A multistage, proximity type, radiation image intensifier tube having improved performance characteristics and more rugged construction is provided. A scintillator assembly is comprised of a first ceramic, cellular substrate defining an array of hexagonally shaped cells. The cell walls taper to an edge and are coated with a conductive material such as aluminum. The cells are filled with a scintillation material such as cesium iodide. A first flat photocathode is provided adjacent the first substrate. An intermediate assembly spaced from the scintillator assembly is provided comprised of a second ceramic, cellular substrate similar to the first. The cell walls are coated with a conductive material such as aluminum. A support layer is mounted to the substrate on an end opposite the scintillator assembly. A first flat phosphor display screen is mounted to the support layer on a side internal the second substrate. A second photocathode is provided adjacent the second substrate. An output assembly spaced from the intermediate assembly is provided and is comprised of a third ceramic cellular substrate which is similar to the first nd second substrate. The cell walls are coated with a conductive material such as aluminum. A second flat phosphor display screen is mounted to the third substrate on an end opposite the second substrate. An output window mounted to the tube envelope and adjacent the second display screen is provided. Means are provided for applying separate electrostatic potentials between the various substrates.

摘要翻译： 提供了一种具有改进的性能特性和更坚固结构的多级接近型放射增强管。 闪烁体组件包括限定六边形形状的单元阵列的第一陶瓷，多孔基底。 细胞壁向边缘逐渐变细并涂覆有诸如铝的导电材料。 用闪烁体材料如碘化铯填充电池。 第一平面光电阴极设置在第一基板附近。 提供了与闪烁体组件间隔开的中间组件，其包括与第一陶瓷相似的第二陶瓷多孔基片。 细胞壁涂覆有诸如铝的导电材料。 支撑层在与闪烁体组件相对的端部上安装到基板。 第一平面荧光体显示屏安装在第二基板的内侧的支撑层上。 在第二基板附近提供第二光电阴极。 提供了与中间组件间隔开的输出组件，并且包括与第一和第二基底类似的第三陶瓷细胞基底。 细胞壁涂覆有诸如铝的导电材料。 第二平面荧光体显示屏在与第二基板相对的一端安装到第三基板。 提供安装到管壳并邻近第二显示屏的输出窗口。 提供了用于在各种基板之间施加单独静电电势的装置。

公开(公告)号：US4847482A

公开(公告)日：1989-07-11

申请号：US167244

申请日：1988-03-11

申请人： Hiroshi Kubo

发明人： Hiroshi Kubo

IPC分类号： G21K4/00 ,  H01J29/38 ,  H01J31/50 ,  H05G1/64

CPC分类号： H01J29/385 ,  G21K4/00 ,  H05G1/64

摘要： An X-ray image intensifier comprises a vacuum envelope having an input window, through which X-rays are incident on said vacuum envelope, an input fluorescent screen for converting the X-rays into light rays, a photoelectric layer for converting the light rays into electrons, an anode and a focusing electrode forming an electron lens for accelerating and focusing the electrons and an output fluorescent screen for converting the electrons accelerated and focused by the electron lens into a visible image. The input fluorescent screen includes a first phosphor layer having a first density and a second phosphor layer having a second density higher than the first density. The second phosphor layer is placed on that side of the first phosphor layer which faces the photoelectric layer. The thickness of the second phosphor layer is greater at the peripheral areas than the central part of the input fluorescent screen.

公开(公告)号：US4821306A

公开(公告)日：1989-04-11

申请号：US744792

申请日：1985-06-13

申请人： Hendrik Mulder

发明人： Hendrik Mulder

IPC分类号： H04N5/32 ,  A61B6/00 ,  A61B6/03 ,  A61B6/06 ,  G01N23/04 ,  G01N23/08 ,  G01T1/36 ,  G21K1/10 ,  H01J29/38 ,  H05G1/26 ,  G21K3/00

CPC分类号： G01N23/083 ,  A61B6/06 ,  A61B6/4035 ,  A61B6/482 ,  G21K1/10 ,  H01J29/385 ,  H05G1/26

摘要： A system comprising an X-ray source (1), an elongate detector tube (3) including at least one cathode (5) extending in the longitudinal direction of the tube and at least one anode (6) located opposite to the cathode, a slit diaphragm (2), and a filter (4) mounted in the path between the X-ray source (1) and the detector tube (3). The filter (4) blocks relatively low energy X-radiation in a portion of the beam emitted by the source (1). The cathode (5) is provided with an X-ray detection layer consisting of two strips (8',8") extending in the longitudinal direction of the tube (3). One strip (8") receives the radiation passed by the filter (4) and the other strip (8') receives the unfiltered radiation. The one strip (8") is of considerably greater thickness than the other strip (8').

摘要翻译： 一种包括X射线源（1），细长检测器管（3）的系统，包括沿管的纵向方向延伸的至少一个阴极（5）和与阴极相对的至少一个阳极（6）， 狭缝膜片（2）和安装在X射线源（1）和检测管（3）之间的路径中的过滤器（4）。 过滤器（4）阻挡由源（1）发射的光束的一部分中的相对低能量的X射线。 阴极（5）设置有由在管（3）的长度方向延伸的两条条（8'，8“）组成的X射线检测层。 一个条带（8“）接收由过滤器（4）通过的辐射，而另一条带（8'）接收未过滤的辐射。 一条（8“）的厚度比另一条（8'）大得多。

公开(公告)号：US4803366A

公开(公告)日：1989-02-07

申请号：US897938

申请日：1986-08-19

申请人： Gerard Vieux ,  Henri Rougeot

发明人： Gerard Vieux ,  Henri Rougeot

IPC分类号： G21K4/00 ,  C09K11/00 ,  G01T1/20 ,  H01J9/12 ,  H01J9/22 ,  H01J29/38 ,  H01J31/50 ,  H01J1/62

CPC分类号： H01J9/12 ,  H01J29/385

摘要： The present invention provides an input screen scintillator for a radiological image intensifier tube in which the cesium iodide needles of the scintillator are coated with a refractory, transparent of reflecting, material having an optical index close to or less than that of the cesium iodide. Different methods may be used for coating, such as chemical vapor phase deposition, activated by thermal excitation, plasma excitation or photonic excitation; or such as diffusion deposition of a colloidal solution; or such as polymerization of a polymer resin. After coating, is realized the heat treatment which ensures the luminescence of the screen.

摘要翻译： 本发明提供了一种用于放射图像增强管的输入屏幕闪烁体，其中闪烁体的碘化铯针涂覆有具有接近或小于碘化铯的光学指数的反射材料的耐火材料透明的材料。 可以使用不同的方法来涂覆，例如通过热激发，等离子体激发或光子激发激活的化学气相沉积; 或诸如胶体溶液的扩散沉积; 或诸如聚合物树脂的聚合。 涂布后，实现了确保屏幕发光的热处理。