公开(公告)号：US20060186544A1

公开(公告)日：2006-08-24

申请号：US11252646

申请日：2005-10-18

申请人： Sung-Joon Won ,  Oh Kwon ,  Sung Lee

发明人： Sung-Joon Won ,  Oh Kwon ,  Sung Lee

IPC分类号： H01L23/48

CPC分类号： H01L24/45 ,  H01L24/43 ,  H01L2224/43848 ,  H01L2224/45015 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/48095 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/78301 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01021 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01031 ,  H01L2924/01033 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/0105 ,  H01L2924/01055 ,  H01L2924/01059 ,  H01L2924/01061 ,  H01L2924/01064 ,  H01L2924/01073 ,  H01L2924/01075 ,  H01L2924/01076 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01084 ,  H01L2924/01087 ,  H01L2924/01088 ,  H01L2924/01203 ,  H01L2924/01205 ,  H01L2924/10252 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/20755 ,  H01L2924/30105 ,  H01L2924/0106 ,  H01L2924/01004 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/013 ,  H01L2924/00015 ,  H01L2924/01062 ,  H01L2924/01071 ,  H01L2924/01085

摘要： Provided is a copper bonding wire formed of a high purity copper of 99.999% or more including at least one of P and Nb within a range between 20 wt ppm and 100 wt ppm and at least one of Zr, Sn, Be, Nd, Sc, Ga, Fr, and Ra within a range between 1 wt ppm and 100 wt ppm. Here, a total content of the added elements is restricted within a range between 20 wt ppm and 200 wt ppm, and a residual amount of the copper bonding wire is a high purity copper of 99.98% or more. As a result, metal squeeze out and chip cratering can be reduced in a general semiconductor chip and a low dielectric semiconductor chip. Also, a short tail of the copper bonding wire occurring during bonding of the copper bonding wire to a lead finger can be reduced.

摘要翻译： 提供一种由99.999％以上的高纯度铜构成的铜键合线，其包含在20〜100重量ppm的范围内的P和Nb中的至少一种，以及Zr，Sn，Be，Nd，Sc中的至少一种 ，Ga，Fr和Ra在1重量ppm至100重量ppm的范围内。 这里，添加元素的总含量限制在20重量ppm〜200重量ppm的范围内，铜键合线的残留量为99.98％以上的高纯度铜。 结果，在一般的半导体芯片和低介电半导体芯片中，可以减少金属挤出和芯片凹坑。 此外，可以减少在铜接合线与引线指的接合期间发生的铜接合线的短尾。