公开(公告)号：US20180374678A1

公开(公告)日：2018-12-27

申请号：US16014628

申请日：2018-06-21

申请人： TOKYO ELECTRON LIMITED

发明人： Yuki KAWADA ,  Koji KOYAMA

IPC分类号： H01J37/32 ,  H01Q13/10 ,  H01Q21/06 ,  H05H1/46 ,  H01L21/3213 ,  C23C16/511

CPC分类号： H01J37/3222 ,  C23C16/511 ,  H01J37/32238 ,  H01L21/32137 ,  H01Q1/366 ,  H01Q1/42 ,  H01Q13/10 ,  H01Q15/08 ,  H01Q21/0056 ,  H01Q21/064 ,  H05H1/46

摘要： In an antenna including a dielectric window and a slot plate provided on one surface of the dielectric window, in a case where a reference position g is a center position in a width direction of each slot S and a center position in a length direction in the slot plate, the reference position g of each slot is located on a virtual circle centered on a center of gravity G0, and line segments connecting the reference positions g of the slots S and virtual point G1 to which the slots belong are located radially from a virtual point G1, angles (β1 to β4) between adjacent line segments are equal to each other, and angles (θ1 to θ4) formed by the length directions of the slots S at the reference positions g and the line segments to which the slots belong are equal to each other.

公开(公告)号：US20170018400A1

公开(公告)日：2017-01-19

申请号：US15195214

申请日：2016-06-28

申请人： Electronics and Telecommunications Research Institute

发明人： Young Kyun CHO ,  Cheol Ho KIM ,  Bong Hyuk PARK

IPC分类号： H01J37/24 ,  H01J37/147 ,  H01L29/868

CPC分类号： H01J37/243 ,  H01J37/147 ,  H01Q1/366 ,  H01Q19/12 ,  H01Q19/18

摘要： Provided is a semiconductor plasma antenna apparatus. The apparatus includes: a cell array unit in which a plurality of PIN diode cells are arranged, and in which a cell pattern is formed by using a predefined PIN diode cell among the plurality of PIN diode cells; and a driver circuit unit configured to control a drive of the predefined PIN diode cell, wherein the driver circuit unit comprises: a direct-current conversion unit equipped with a DC-DC converter configured to drive a diode load of the cell pattern by applying an output voltage to a PIN diode cell corresponding to the cell patterns formed in the cell array unit; and a constant current controller configured to controlling a plasma concentration of the PIN diode cell by controlling a constant current for the diode load of the cell pattern.

摘要翻译： 提供了一种半导体等离子体天线装置。 该装置包括：单元阵列单元，其中布置有多个PIN二极管单元，并且其中通过在多个PIN二极管单元中使用预定义的PIN二极管单元形成单元图案; 以及驱动器电路单元，被配置为控制所述预定义PIN二极管单元的驱动，其中所述驱动器电路单元包括：配备有DC-DC转换器的直流转换单元，所述DC-DC转换器被配置为通过施加所述DC二极管单元驱动所述单元图案的二极管负载 对与形成在单元阵列单元中的单元图案对应的PIN二极管单元的输出电压; 以及恒流控制器，其被配置为通过控制所述电池图案的二极管负载的恒定电流来控制所述PIN二极管单元的等离子体浓度。

公开(公告)号：US20140333485A1

公开(公告)日：2014-11-13

申请号：US13892518

申请日：2013-05-13

申请人： Smartsky Networks, LLC

发明人： Ryan Mitchell Stone ,  Elbert Stanford Eskridge, Jr.

IPC分类号： H01Q1/36 ,  H01Q1/28

CPC分类号： H01Q1/366 ,  H01Q1/1271 ,  H01Q1/26 ,  H01Q1/28 ,  H01Q1/286 ,  H01Q3/22 ,  H01Q3/34

摘要： An aircraft communications system may include a RF-transparent enclosure, a plasma antenna element and a controller. The RF-transparent enclosure may be disposed substantially conformal with a portion of the aircraft. The plasma antenna element may be housed within the RF-transparent enclosure. The controller may be operably coupled to the plasma antenna element to provide control of operation of the plasma antenna element. The plasma antenna element may include one or more RF-conductive plasma devices that are selectively ionized to a plasma state under control of the controller.

摘要翻译： 飞机通信系统可以包括RF透明外壳，等离子天线元件和控制器。 RF透明外壳可以布置成与飞行器的一部分基本一致。 等离子体天线元件可以容纳在RF透明外壳内。 控制器可以可操作地耦合到等离子体天线元件以提供对等离子体天线元件的操作的控制。 等离子体天线元件可以包括在控制器的控制下选择性地电离到等离子体状态的一个或多个RF传导等离子体装置。

公开(公告)号：US07520246B2

公开(公告)日：2009-04-21

申请号：US11240358

申请日：2005-10-03

申请人： Ryuichi Matsuda ,  Noriaki Ueda ,  Kazuto Yoshida

发明人： Ryuichi Matsuda ,  Noriaki Ueda ,  Kazuto Yoshida

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： H01Q1/366 ,  H01Q7/00

摘要： A power supply antenna comprises a plurality of coils disposed concentrically. Power supply portions formed at opposite ends of the respective coils are located in different phases on the same plane such that spacing between the adjacent power supply portions is equal. The power supply antenna can generate a uniform electric field and a uniform magnetic field, although it has the plural coils.

公开(公告)号：US07456791B2

公开(公告)日：2008-11-25

申请号：US10964665

申请日：2004-10-15

申请人： Michel Pellet

发明人： Michel Pellet

IPC分类号： H01Q1/26

CPC分类号： H01Q1/366 ,  G02F1/3511 ,  H01Q1/34

摘要： The invention relates to the field of antennas and relates in particular to an generator of a laser radiation and means for coupling an electrical signal to this laser radiation, said antenna being characterized in that the generator of a laser radiation is a femtosecond laser.

摘要翻译： 本发明涉及天线领域，特别涉及激光辐射发生器和用于将电信号耦合到该激光辐射的装置，所述天线的特征在于激光辐射的发生器是飞秒激光。

公开(公告)号：US07453403B2

公开(公告)日：2008-11-18

申请号：US11841022

申请日：2007-08-20

申请人： Theodore R Anderson

发明人： Theodore R Anderson

IPC分类号： H01Q1/26

CPC分类号： H01Q1/366 ,  H05H1/46

摘要： A reduced noise and selectively configurable plasma device is capable of interpreting electromagnetic signals having an operating frequency and has a plasma mechanism with a plasma that is ionizable to a plasma frequency. An ionizing mechanism for ionizing the plasma and a control that is operative to control the ionizing mechanism, ionize the plasma to the plasma frequency by application of plasma ionizing energy pulses. An interpreting mechanism operates to interpret the electromagnetic signals only in a period between ionization of the plasma with the energy pulses.

摘要翻译： 降低噪声和可选择性配置的等离子体装置能够解释具有工作频率的电磁信号，并且具有等离子体机构，其具有可等离子体的等离子体。 用于电离等离子体的电离机构和用于控制电离机制的控制器，通过施加等离子体电离能量脉冲将等离子体电离至等离子体频率。 解释机制仅在电离电离等离子体与能量脉冲之间的时间内解释电磁信号。

公开(公告)号：US07342549B2

公开(公告)日：2008-03-11

申请号：US11024254

申请日：2004-12-28

申请人： Theodore R. Anderson

发明人： Theodore R. Anderson

IPC分类号： H01Q13/10

CPC分类号： H01Q1/366 ,  H01Q3/46 ,  H01Q15/006 ,  H01Q19/32

摘要： An reconfigurable array of variable conductive elements is provided for reflecting, filtering and steering electromagnetic radiation across a wide range of frequencies. The reconfigurable array is combined with a transmitting antenna to make a steerable antenna. The reconfigurable array surrounds the transmitting antenna and reflects all transmissions except on selected radials where apertures in the reconfigurable array are formed for permitting transmission lobes. The reconfigurable arrays can be arranged in stacked layers to make transceiving multiband antennas. Communications networks using the steerable antennas and arrays are also disclosed.

摘要翻译： 可变导电元件的可重构阵列被提供用于在宽范围的频率上反射，滤波和转向电磁辐射。 可重配置阵列与发射天线组合以制造可导向的天线。 可重构阵列围绕发射天线并且反射除了可重构阵列中的孔被形成以允许传输波瓣的选定径向外的所有传输。 可重配置阵列可以以堆叠层布置以形成收发多频带天线。 还公开了使用可转向天线和阵列的通信网络。

公开(公告)号：US20070215946A1

公开(公告)日：2007-09-20

申请号：US11716175

申请日：2007-03-10

申请人： Bernard John Eastlund

发明人： Bernard John Eastlund

IPC分类号： H01L27/01

CPC分类号： H01Q1/366

摘要： A new communications system is described in which the phased array heater used to create an artificial ionized plasma pattern in the atmosphere (AIPA) has an integrated phased array transmitter. By combining these two functions a simplified telecommunications system is created. The new system is called the Integrated Plasma Mirror. Another advantage is that a portion of the telecommunications signal is absorbed in the plasma pattern and contributes to the maintenance power level.

摘要翻译： 描述了一种新的通信系统，其中用于在大气中产生人造离子化等离子体图案的相控阵加热器具有集成的相控阵发射器。 通过组合这两个功能，创建了简化的电信系统。 新系统称为集成等离子体镜。 另一个优点是电信信号的一部分被吸收在等离子体图案中并有助于维持功率水平。

公开(公告)号：US20070018894A1

公开(公告)日：2007-01-25

申请号：US11184520

申请日：2005-07-19

申请人： James Wood

发明人： James Wood

IPC分类号： H01Q1/26

CPC分类号： H01Q1/366 ,  H01Q21/29 ,  H05H1/46

摘要： A fluid antenna generator includes a first source of electrically conductive fluid and a second source of electrically conductive fluid. The first source and the second source are oriented such that, when the first source and the second source are operated, the electrically conductive fluid generated by the first source intersects the electrically conductive fluid generated by the second source. A method for generating a fluid antenna includes generating a first electrically conductive fluid portion and generating a second electrically conductive fluid portion, such that the first electrically conductive fluid portion and the second electrically conductive fluid portion intersect.

摘要翻译： 流体天线发生器包括第一导电流体源和第二导电流体源。 第一源极和第二源极被定向成使得当第一源极和第二源极操作时，由第一源产生的导电流体与由第二源产生的导电流体相交。 用于产生流体天线的方法包括产生第一导电流体部分并产生第二导电流体部分，使得第一导电流体部分和第二导电流体部分相交。

公开(公告)号：US07097782B2

公开(公告)日：2006-08-29

申请号：US10293025

申请日：2002-11-12

申请人： Guy T. Blalock ,  Trung Tri Doan

发明人： Guy T. Blalock ,  Trung Tri Doan

IPC分类号： H01L21/00

CPC分类号： H01J37/3222 ,  H01J37/32192 ,  H01Q1/366

摘要： In certain implementations, methods and apparatus include an antenna assembly having at least two overlapping and movable surface microwave plasma antennas. The antennas have respective pluralities of microwave transmissive openings formed therethrough. At least some of the openings of the respective antennas overlap with at least some of the openings of another antenna, and form an effective plurality of microwave transmissive openings through the antenna assembly. Microwave energy is passed through the effective plurality of openings of the antenna assembly and to a flowing gas effective to form a surface microwave plasma onto a substrate received within the processing chamber. At least one of the antennas is moved relative to another of the antennas to change at least one of size and shape of the effective plurality of openings through the antenna assembly effective to modify microwave energy passed through the antenna assembly to the substrate.

摘要翻译： 在某些实施方案中，方法和装置包括具有至少两个重叠和可移动的表面微波等离子体天线的天线组件。 天线具有通过其形成的相应的多个微波透射开口。 各个天线的至少一些开口与另一个天线的至少一些开口重叠，并且通过天线组件形成有效的多个微波透射开口。 微波能量通过天线组件的有效多个开口并流过有效地将表面微波等离子体形成在接收在处理室内的衬底上的流动气体。 天线中的至少一个相对于另一个天线移动，以通过天线组件改变有效多个开口的尺寸和形状中的至少一个，其有效地将通过天线组件的微波能量修改到衬底。