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公开(公告)号：US20120105163A1
公开(公告)日：2012-05-03
申请号：US13257053
申请日：2010-03-15
申请人： Peter Steeneken
发明人： Peter Steeneken
CPC分类号： H03H9/02433 , H03H9/2405 , H03H9/2436 , H03H2009/02354 , H03H2009/0237 , H03H2009/0244 , H03H2009/02527 , H03H2009/2442
摘要： A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).
摘要翻译： 谐振器装置（200）包括基座（206），其包括锚（204）和连接到锚（204）的振动单元（212）。 振动单元（212）被配置为具有与第一振动模式（218）不同的第一振动模式（218）和第二振动模式（216）。 根据实施例，振动单元（212）构造成使得第一振动模式（218）和第二振动模式（216）在锚（204）处相消干涉。
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公开(公告)号：US20100019869A1
公开(公告)日：2010-01-28
申请号：US12499653
申请日：2009-07-08
申请人： Cédric Durand , Fabrice Casset
发明人： Cédric Durand , Fabrice Casset
IPC分类号： H01P7/10
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2436 , H03H9/2463 , H03H2009/0237 , H03H2009/02496 , H03H2009/2442
摘要： A resonator including a resonant element having a bulk and columns of a material having a Young's modulus with a temperature coefficient having a sign opposite to that of the bulk.
摘要翻译： 一种谐振器，包括具有本体的谐振元件和具有杨氏模量的材料的列，其温度系数具有与本体相反的符号。
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公开(公告)号：US08981874B2
公开(公告)日：2015-03-17
申请号：US13257053
申请日：2010-03-15
申请人： Peter Steeneken
发明人： Peter Steeneken
CPC分类号： H03H9/02433 , H03H9/2405 , H03H9/2436 , H03H2009/02354 , H03H2009/0237 , H03H2009/0244 , H03H2009/02527 , H03H2009/2442
摘要： A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).
摘要翻译： 谐振器装置（200）包括基座（206），其包括锚（204）和连接到锚（204）的振动单元（212）。 振动单元（212）被配置为具有与第一振动模式（218）不同的第一振动模式（218）和第二振动模式（216）。 根据实施例，振动单元（212）构造成使得第一振动模式（218）和第二振动模式（216）在锚（204）处相消干涉。
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公开(公告)号：US08149072B2
公开(公告)日：2012-04-03
申请号：US12470855
申请日：2009-05-22
CPC分类号： H03H9/2436 , H03H9/462 , H03H9/505 , H03H2009/0237 , H03H2009/02488
摘要： A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry.
摘要翻译： 谐振器包括具有多个对称轴的基本盘形部分，并且被配置为通过围绕多个对称轴对称地变形而以多个谐振模式谐振。
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公开(公告)号：US20080284544A1
公开(公告)日：2008-11-20
申请号：US11570924
申请日：2005-07-25
申请人： Akinori Hashimura
发明人： Akinori Hashimura
CPC分类号： H03H9/462 , B82Y10/00 , B82Y30/00 , H03H9/2436 , H03H9/505 , H03H2009/0237 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442 , Y10S977/742 , Y10S977/762 , Y10S977/766
摘要： An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
摘要翻译： 本发明的一个目的是提供具有设计灵活性和最小化质量负载效应的MEMS滤波器的耦合元件。 本发明提供了一种结构，其中通过使用具有非常小的质量的纳米尺度耦合元件，与微型MEMS谐振器（例如碳纳米管（CNT））作为耦合元件部分相比，质量负载效应未反映在MEMS滤波器特性上 。
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公开(公告)号：US08680951B2
公开(公告)日：2014-03-25
申请号：US12993486
申请日：2009-05-08
申请人： Peter G. Steeneken
发明人： Peter G. Steeneken
CPC分类号： H03H9/2436 , H03H9/02244 , H03H9/02433 , H03H2009/0237 , H03H2009/2442 , Y10T29/49002
摘要： A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
摘要翻译： 包括具有各向异性方向弹性特性的材料的微机电谐振器。 谐振器的形状使得从谐振器的质心到谐振器的周边边缘上的第一点的第一方向上的第一距离大于从质心到第二不同点的第二方向上的第二距离 在边缘。 对于每个第一方向和每第二方向都是如此，其中材料在第一方向上具有比第二方向更小的弹性模量。
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公开(公告)号：US20110063052A1
公开(公告)日：2011-03-17
申请号：US12993486
申请日：2009-05-08
申请人： Peter G. Steeneken
发明人： Peter G. Steeneken
CPC分类号： H03H9/2436 , H03H9/02244 , H03H9/02433 , H03H2009/0237 , H03H2009/2442 , Y10T29/49002
摘要： A micro-electromechanical resonator comprising a material having anisotropic directional elasticity characteristics. A shape of the resonator is such that a first distance in a first direction from a centroid of the resonator to a first point on a peripheral edge of the resonator is greater than a second distance in a second direction from the centroid to a second different point on the edge. This is true for every first direction and every second direction wherein the material has a lesser modulus of elasticity in the first direction than the second direction.
摘要翻译： 包括具有各向异性方向弹性特性的材料的微机电谐振器。 谐振器的形状使得从谐振器的质心到谐振器的周边边缘上的第一点的第一方向上的第一距离大于从质心到第二不同点的第二方向上的第二距离 在边缘。 对于每个第一方向和每第二方向都是如此，其中材料在第一方向上具有比第二方向更小的弹性模量。
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公开(公告)号：US20100295632A1
公开(公告)日：2010-11-25
申请号：US12470855
申请日：2009-05-22
IPC分类号： H03H9/00
CPC分类号： H03H9/2436 , H03H9/462 , H03H9/505 , H03H2009/0237 , H03H2009/02488
摘要： A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry.
摘要翻译： 谐振器包括具有多个对称轴的基本盘形部分，并且被配置为通过围绕多个对称轴对称地变形而以多个谐振模式谐振。
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9.发明授权MEMS filter device having a nanosize coupling element and manufacturing method thereof 失效具有纳米尺寸耦合元件的MEMS滤波器件及其制造方法公开(公告)号：US07696843B2
公开(公告)日：2010-04-13
申请号：US11570924
申请日：2005-07-25
申请人： Akinori Hashimura
发明人： Akinori Hashimura
CPC分类号： H03H9/462 , B82Y10/00 , B82Y30/00 , H03H9/2436 , H03H9/505 , H03H2009/0237 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442 , Y10S977/742 , Y10S977/762 , Y10S977/766
摘要： An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
摘要翻译： 本发明的一个目的是提供具有设计灵活性和最小化质量负载效应的MEMS滤波器的耦合元件。 本发明提供了一种结构，其中通过使用具有非常小的质量的纳米尺度耦合元件，与微型MEMS谐振器（例如碳纳米管（CNT））作为耦合元件部分相比，质量负载效应未反映在MEMS滤波器特性上 。
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10.发明申请公开(公告)号：US20090315644A1
公开(公告)日：2009-12-24
申请号：US12142487
申请日：2008-06-19
CPC分类号： H03H9/2436 , H03H2009/0237
摘要： A nanoresonator device with high quality factor and method for fabricating the same is disclosed herein. The nanoresonator device generally includes an input electrode, an output electrode, a nanoresonator anchored at its motionless nodal points of its resonance modes by support beam(s) and/or anchor. The nanoresonator device can be fabricated on various wafers including a silicon on insulator (SOI) wafer, which includes an insulating layer and a heavily doped silicon layer. The nano structures with high quality factor can be patterned on a film utilizing nano fabrication tools and the patterned structures can be utilized as a mask to form permanent nano structures on the silicon layer by reactive ion etching (RIE). The insulating layer can be removed to form the anchor beams and a cavity by wet etching utilizing an etching solution.
摘要翻译： 本文公开了具有高质量因素的纳米谐振器器件及其制造方法。 纳米谐振器装置通常包括输入电极，输出电极，通过支撑束和/或锚固在其谐振模式的静止节点处的纳米谐振器。 可以在包括绝缘层和重掺杂硅层的绝缘体上硅（SOI）晶片的各种晶片上制造纳米谐振器器件。 具有高质量因子的纳米结构可以利用纳米制造工具在膜上图案化，并且图案化结构可以用作掩模，以通过反应离子蚀刻（RIE）在硅层上形成永久性纳米结构。 可以通过使用蚀刻溶液的湿蚀刻来去除绝缘层以形成锚梁和空腔。
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