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公开(公告)号：US20090315644A1
公开(公告)日：2009-12-24
申请号：US12142487
申请日：2008-06-19
CPC分类号： H03H9/2436 , H03H2009/0237
摘要： A nanoresonator device with high quality factor and method for fabricating the same is disclosed herein. The nanoresonator device generally includes an input electrode, an output electrode, a nanoresonator anchored at its motionless nodal points of its resonance modes by support beam(s) and/or anchor. The nanoresonator device can be fabricated on various wafers including a silicon on insulator (SOI) wafer, which includes an insulating layer and a heavily doped silicon layer. The nano structures with high quality factor can be patterned on a film utilizing nano fabrication tools and the patterned structures can be utilized as a mask to form permanent nano structures on the silicon layer by reactive ion etching (RIE). The insulating layer can be removed to form the anchor beams and a cavity by wet etching utilizing an etching solution.
摘要翻译： 本文公开了具有高质量因素的纳米谐振器器件及其制造方法。 纳米谐振器装置通常包括输入电极，输出电极，通过支撑束和/或锚固在其谐振模式的静止节点处的纳米谐振器。 可以在包括绝缘层和重掺杂硅层的绝缘体上硅（SOI）晶片的各种晶片上制造纳米谐振器器件。 具有高质量因子的纳米结构可以利用纳米制造工具在膜上图案化，并且图案化结构可以用作掩模，以通过反应离子蚀刻（RIE）在硅层上形成永久性纳米结构。 可以通过使用蚀刻溶液的湿蚀刻来去除绝缘层以形成锚梁和空腔。
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公开(公告)号：US20100001355A1
公开(公告)日：2010-01-07
申请号：US12168647
申请日：2008-07-07
CPC分类号： H01H59/0009 , H01H2001/0084
摘要： An RF MEMS switch having a beam composed of a material having a high resistivity and a large Young's modulus may provide a large restoring force, a large electrostatic force at a low actuation voltage, and good isolation between signal input and output. RF MEMS switch reliability may be improved by reducing failures due to stiction by providing a large restoring force. A reliable contact may be provided with a large electrostatic force.
摘要翻译： 具有由具有高电阻率和大杨氏模量的材料构成的光束的RF MEMS开关可以提供大的恢复力，在低致动电压下具有大的静电力，以及在信号输入和输出之间的良好隔离。 RF MEMS开关的可靠性可以通过提供大的恢复力来减少由于静摩擦引起的故障来改善。 可以提供可靠的接触，具有大的静电力。
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公开(公告)号：US06175515B1
公开(公告)日：2001-01-16
申请号：US09224368
申请日：1998-12-31
IPC分类号： G11C1502
CPC分类号： G11C11/18
摘要： A vertically integrated magnetic memory with Hall effect sensing or reading. It has a ferromagnetic structure with a nearly enclosed magnetic path, which is a vertical structure integrated on a chip. Each memory cell has a closed magnetic field that has high strength for a strong Hall effect. The magnet is a closed loop, robust reproducible magnet. A memory array of such cells uses little power in that only few cells need to draw the read current for a short time required to read the information. A silicon or GaAs chip implementation of the memory is one embodiment, among others, wherein the field required to saturate the electrons can be achieved without excessive power.
摘要翻译： 具有霍尔效应感测或读取功能的垂直集成磁记忆体。 它具有铁磁结构，具有几乎封闭的磁路，其是集成在芯片上的垂直结构。 每个存储单元都具有一个闭合的磁场，具有很强的霍尔效应强度。 磁铁是一个闭环，坚固可重现的磁铁。 这样的单元的存储器阵列使用的功率很小，因为只有少数单元需要在读取信息所需的短时间内绘制读取电流。 存储器的硅或GaAs芯片实现方案是其中一个实施例，其中可以在没有过多功率的情况下实现饱和电子所需的场。
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4.发明授权Integrated heterostructure acoustic charge transport (HACT) and heterostructure insulated gate field effects transistor (HIGFET) devices 失效集成异质结构声电荷传输（HACT）和异质结构绝缘栅场效应晶体管（HIGFET）器件
公开(公告)号：US5298772A
公开(公告)日：1994-03-29
申请号：US843470
申请日：1992-02-28
申请人： Andrzej Peczalski , David E. Grider , James F. Detry , George A. Kilgore , William J. Tanski , Thomas W. Grudkowski , Robert N. Sacks
发明人： Andrzej Peczalski , David E. Grider , James F. Detry , George A. Kilgore , William J. Tanski , Thomas W. Grudkowski , Robert N. Sacks
CPC分类号： H03H9/02976 , H01L27/0605
摘要： A monolithic integrated circuit device combines integrated heterostructure acoustic charge transport (HACT) devices and heterostructure insulated gate field effect transistor (HIGFET) devices in a single structure in which the HACT and HIGFET layers are grown in as a contiguous composite heterostructure.
摘要翻译： 单片集成电路器件将集成的异质结构声电荷传输（HACT）器件和异质结构绝缘栅场效应晶体管（HIGFET）器件结合在一起，其中HACT和HIGFET层作为连续的复合异质结构生长。
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5.发明授权Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes 有权用于微机电系统（MEMS）器件制造工艺的气凝胶制成的牺牲层公开(公告)号：US08293657B2
公开(公告)日：2012-10-23
申请号：US12940348
申请日：2010-11-05
申请人： James F. Detry
发明人： James F. Detry
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： B81C1/00047 , B81B2203/0118 , B81B2203/0315 , B81C2201/0109
摘要： Systems and methods for processing sacrificial layers in MEMS device fabrication are provided. In one embodiment, a method comprises: applying a patterned layer of Aerogel material onto a substrate to form an Aerogel sacrificial layer; applying at least one non-sacrificial silicon layer over the Aerogel sacrificial layer, wherein the non-sacrificial silicon layer is coupled to the substrate through one or more gaps provided in the patterned layer of Aerogel material; and removing the Aerogel sacrificial layer by exposing the Aerogel sacrificial layer to a removal liquid.
摘要翻译： 提供了用于在MEMS器件制造中处理牺牲层的系统和方法。 在一个实施例中，一种方法包括：将图案化的气凝胶材料层施加到基底上以形成气凝胶牺牲层; 在所述气凝胶牺牲层上施加至少一个非牺牲硅层，其中所述非牺牲硅层通过设置在所述图案化的气凝胶材料层中的一个或多个间隙而耦合到所述衬底; 并通过将气凝胶牺牲层暴露于去除液体来除去气凝胶牺牲层。
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6.发明申请APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES 审中-公开用于在微型化装置中提供组分之间的分离的装置和方法公开(公告)号：US20120219760A1
公开(公告)日：2012-08-30
申请号：US13036922
申请日：2011-02-28
申请人： James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
发明人： James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
CPC分类号： B81B3/0081 , B81B3/0086 , B81B7/0012 , Y10T428/24496 , Y10T428/249953 , Y10T428/249981 , Y10T428/24999
摘要： An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer.
摘要翻译： 提供了一种用于提供微加工装置中的部件之间的隔离的装置和方法。 在一个实施例中，微加工装置包括：基层; 微加成分; 以及与所述微细成分接触并且在所述基底层上支撑所述微细加热的热成分的非牺牲气凝胶层。 非牺牲气凝胶层被定位成提供微加工热组分和基层之间的热，电或声隔离中的至少一种。
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公开(公告)号：US20090212386A1
公开(公告)日：2009-08-27
申请号：US12034905
申请日：2008-02-21
申请人： Jeff A. Ridley , Robert Higashi , James F. Detry
发明人： Jeff A. Ridley , Robert Higashi , James F. Detry
IPC分类号： H01L31/058 , H01L21/00
CPC分类号： B81B7/0087 , B81B2201/0242 , B81B2201/0278
摘要： A MEMS device includes a P-N device formed on a silicon pin, which is connected to a silicon sub-assembly, and where the P-N device is formed on a silicon substrate that is used to make the silicon pin before it is embedded into a first glass wafer. In one embodiment, forming the P-N device includes selectively diffusing an impurity into the silicon pin and configuring the P-N device to operate as a temperature sensor.
摘要翻译： MEMS器件包括形成在硅引脚上的PN器件，其连接到硅子组件，并且其中PN器件形成在硅衬底上，硅衬底在其被嵌入第一玻璃中之前用于制造硅销 晶圆。 在一个实施例中，形成P-N器件包括选择性地将杂质扩散到硅引脚中并且将P-N器件配置为用作温度传感器。
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公开(公告)号：US20090196623A1
公开(公告)日：2009-08-06
申请号：US12026458
申请日：2008-02-05
申请人： James F. Detry
发明人： James F. Detry
IPC分类号： H04B10/04
CPC分类号： G02B6/136 , G02B6/12002 , G02B6/4214
摘要： An Optical bench communicates light through free space in a plurality of trenches formed in the bench, each of the trenches formed by deep ion reactive etching and defined by two opposing side walls, such that the free space is between the opposing side walls. An exemplary embodiment has a first trench operable to receive the beam of light and operable to communicate the beam of light through the free space in the first trench; an angled reflection side wall operable to receive the beam of light routed through the first trench and operable to reflect at least a portion of the beam of light; and a second trench operable to receive the portion of the beam of light reflected from the angled reflection side wall and operable to route the portion of the beam of light through the free space in the second trench.
摘要翻译： 光学工作台通过在台座上形成的多个沟槽中的自由空间进行光通过，每个沟槽由深离子反应蚀刻形成并由两个相对的侧壁限定，使得自由空间位于相对的侧壁之间。 示例性实施例具有可操作以接收光束并可操作以将光束通过第一沟槽中的自由空间的第一沟槽; 角度反射侧壁，其可操作以接收通过第一沟槽布线的光束，并可操作以反射光束的至少一部分; 以及第二沟槽，其可操作以接收从所述成角度的反射侧壁反射的所述光束的所述部分，并且可操作以将所述光束的所述部分穿过所述第二沟槽中的自由空间。
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公开(公告)号：US20110102894A1
公开(公告)日：2011-05-05
申请号：US12611474
申请日：2009-11-03
CPC分类号： G02B6/423 , G02B6/4214 , G02B7/003 , G02B7/1822
摘要： An optical component is provided. The optical component includes an optical-path portion including an arm-connecting portion and a lower portion, a first arm extending from a first end of the arm-connecting portion, and a second arm extending from a second end of the arm-connecting portion. The first arm has at least one resting feature and the second arm has at least one resting feature. The optical-path portion has an input surface. When the resting features of the first arm and the second arm are positioned on a top surface at short edges of a trench in a trench system, the optical-path portion is vertically aligned in the trench.
摘要翻译： 提供光学部件。 该光学部件包括：包括臂连接部和下部的光路部，从臂连接部的第一端延伸的第一臂和从臂连接部的第二端延伸的第二臂 。 第一臂具有至少一个休息特征，而第二臂具有至少一个休息特征。 光路部分具有输入表面。 当第一臂和第二臂的静止特征位于沟槽系统中的沟槽的短边缘的顶表面上时，光路部分在沟槽中垂直对准。
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公开(公告)号：US20100027022A1
公开(公告)日：2010-02-04
申请号：US12182027
申请日：2008-07-29
CPC分类号： G01C19/721
摘要： An improved resonator fiber-optic gyro (RFOG). An example RFOG includes a closed-coil resonator where counter-propagating laser beams are done by fiber couplers. Signals are extracted from the ring resonator using other fiber couplers. The fiber couplers may be fiber spliced couplers, free-space fiber-to-fiber coupling elements or comparable coupling devices. A silicon structure may be used to align components of the gyro or just the coupling elements. The resonator includes a hollow-core fiber.
摘要翻译： 改进的谐振器光纤陀螺（RFOG）。 RFOG的示例包括闭环线圈谐振器，其中反向传播的激光束由光纤耦合器完成。 使用其他光纤耦合器从环形谐振器中提取信号。 光纤耦合器可以是光纤耦合器，自由空间光纤到光纤耦合元件或类似的耦合器件。 可以使用硅结构来对准陀螺仪的组件或仅耦合元件。 谐振器包括中空芯纤维。
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