公开(公告)号：US20040102764A1

公开(公告)日：2004-05-27

申请号：US10416587

申请日：2003-11-12

发明人： Peter Balling

IPC分类号： A61B018/20 ,  B23K026/02

CPC分类号： B23K26/382 ,  A61B18/20 ,  A61B2018/00904 ,  A61F9/008 ,  A61F9/00817 ,  A61F9/00825 ,  A61F2009/00844 ,  A61F2009/00897 ,  B23K26/032 ,  B23K26/0624 ,  B23K26/389 ,  B23K26/40 ,  B23K2103/32 ,  B23K2103/50

摘要： The invention provides a method for measuring in situ the amount of material removed by laser ablation with ultrashort laser pulses. The method relies on the geometrical information provided by the backscattered light from the ablating laser. The temporal structure of the backscattered laser light is used to provide an accurate measure for the depth of the ablated area, since the round-trip time for the short laser pulses uniquely determines the distance to the object under illumination. For femtosecond laser pulses a depth resolution of a few micrometers can be achieved. According to the invention, imaging of the backscattered light from a single ablating pulse provides all the information necessary to derive a cross-sectional profile across the ablated region.

摘要翻译： 本发明提供一种用于通过超短激光脉冲激光烧蚀去除材料的量的原位测量方法。 该方法依赖于来自烧蚀激光器的背散射光提供的几何信息。 后向散射激光的时间结构用于提供烧蚀区域的深度的精确测量，因为短激光脉冲的往返时间唯一地确定了在照明下对物体的距离。 对于飞秒激光脉冲，可以实现几微米的深度分辨率。 根据本发明，来自单个烧蚀脉冲的后向散射光的成像提供了在整个烧蚀区域上导出横截面轮廓所需的全部信息。

公开(公告)号：US20030222065A1

公开(公告)日：2003-12-04

申请号：US10156886

申请日：2002-05-28

发明人： Peter Leibinger ,  Thomas Rauser ,  Leonid Zeygerman

IPC分类号： B23K026/02 ,  B23K026/08

CPC分类号： B23K26/0884 ,  B23K26/38 ,  B23K37/0235 ,  B23Q1/012 ,  B23Q1/626

摘要： A tool for machining workpieces by motion of the machining tool relative to the workpiece has a support extending in the X-axis over a work support table and movable in the Y-axis. A machining tool housing is movable on the support in the Y-axis. A portion of the housing containing the machining tool is movable with respect to the mounted portion in the Y-axis within a limited range of motion. A computer control effects operation of drive motors to move the housing along the support and the support along the machining tool table to machine a workpiece supported on said worktable in X and Y axes, and the computer control can also effect operation of another drive motor to rapidly move of the housing portion and machining tool in the Y-axis when the desired length of motion in the Y-axis is within its range of motion.

摘要翻译： 通过加工工具相对于工件的运动来加工工件的工具具有在工件支撑台上在X轴上延伸并可在Y轴上移动的支撑件。 加工工具壳体可以在Y轴上的支撑件上移动。 容纳加工工具的壳体的一部分可在有限的运动范围内相对于Y轴上的安装部分移动。 计算机控制对驱动电机进行操作，以沿壳体和支撑沿着加工工具台移动壳体，以对在X轴和Y轴上支撑在所述工作台上的工件进行加工，并且计算机控制还可以实现另一个驱动马达的操作 当Y轴的所需运动长度在其运动范围内时，壳体部分和机械加工工具在Y轴上快速移动。

公开(公告)号：US20030192868A1

公开(公告)日：2003-10-16

申请号：US10366384

申请日：2003-02-14

发明人： Stefan Dietrich ,  Matthias Hauth ,  Juergen Pflaum

IPC分类号： B23K026/02

CPC分类号： B23K26/04 ,  B23K26/02 ,  B23K26/70 ,  H05K1/0268 ,  H05K3/0026

摘要： A method is for determining the accuracy of processing machines, in which the provision of test marks on a test object and the recording of the spatial position of the test marks are carried out at the same point in relation to the processing machine. Each test mark is provided as close as possible to a predetermined position, known as the relative setpoint position, the spatial position of which in relation to a reference mark is exactly known. The accuracy verification takes place by the relative position of the test mark provided in relation to a corresponding reference mark being recorded and consequently the relative actual position of the test mark being determined. The deviation between the relative setpoint position and the relative actual position is a measure of the accuracy of the processing machine. The measuring between the setpoint position and the actual position preferably takes place by an image acquisition device, which has a camera arranged on the processing machine. This allows the accuracy verification to be carried out directly by the processing machine.

摘要翻译： 一种用于确定加工机器的精度的方法，其中在与加工机器相同的点处执行在测试对象上提供测试标记和测试标记的空间位置的记录。 每个测试标记被提供为尽可能靠近预定位置，被称为相对设定点位置，其相对于参考标记的空间位置是完全已知的。 精度验证是通过相对于正在记录的相应参考标记提供的测试标记的相对位置进行的，因此确定测试标记的相对实际位置。 相对设定点位置和相对实际位置之间的偏差是对加工机精度的度量。 设定点位置与实际位置之间的测量优选由图像采集装置进行，图像采集装置具有布置在处理机器上的相机。 这允许精确度验证由加工机器直接进行。

公开(公告)号：US20020144988A1

公开(公告)日：2002-10-10

申请号：US09828240

申请日：2001-04-09

发明人： Kent Gregg

IPC分类号： B23K026/02

CPC分类号： B23K26/0884 ,  A42C2/00 ,  B23K26/08 ,  H05K1/0284 ,  H05K3/0082

摘要： A method of forming at least one conductive path on a curved surface, such as on a helmet. The method includes aiming a beam of light to the curved surface, providing relative movement between the beam of light and the curved surface causing the beam of light to form a path on the curved surface, laying conductive material on the path, and possibly laying a protective overcoat on the path. The beam of light may be aimed using robotics, such as a robotic arm, to position and move a laser providing the beam of light. Instead of robotics, the method can include using a triaxial light beam source capable of focusing a beam of light in three dimensions. A computer controls the robotics, or the triaxial light beam source, to create and expose the paths.

摘要翻译： 在诸如头盔上的曲面上形成至少一个导电路径的方法。 该方法包括将光束瞄准弯曲表面，提供光束与弯曲表面之间的相对运动，使得光束在弯曲表面上形成路径，将导电材料铺设在路径上，并且可能铺设 防护罩在路上。 可以使用诸如机器人臂的机器人瞄准光束来定位和移动提供光束的激光。 代替机器人技术，该方法可以包括使用能够在三维中聚焦光束的三轴光束源。 计算机控制机器人或三轴光束源，以创建和暴露路径。

公开(公告)号：US20020117481A1

公开(公告)日：2002-08-29

申请号：US10077691

申请日：2002-02-15

发明人： Mark Unrath ,  Kelly Bruland ,  Ho Wai Lo ,  Stephen Swaringen

IPC分类号： H01S003/00 ,  B23K026/00 ,  B23K026/02 ,  B23K026/08 ,  B23K026/10

CPC分类号： G02B26/101 ,  B23K26/042 ,  B23K26/082 ,  G02B26/0816 ,  H01L23/5258 ,  H01L2924/0002 ,  H01L2924/00

摘要： Laser beam positioners (300, 340) employ a steering mirror (236, 306) that performs small-angle deflection of a laser beam (270) to compensate for cross-axis (110) settling errors of a positioner stage (302). A two-axis mirror is preferred because either axis of the positioner stages may be used for performing work. In one embodiment, the steering mirror is used for error correction only without necessarily requiring coordination with the positioner stage position commands. A fast steering mirror employing a flexure mechanism and piezoelectric actuators to tip and tilt the mirror is preferred in semiconductor link processing (nullSLPnull) applications. This invention compensates for cross-axis settling time, resulting in increased SLP system throughput and accuracy while simplifying complexity of the positioner stages because the steering mirror corrections relax the positioner stage servo driving requirements.

摘要翻译： 激光束定位器（300,340）使用执行激光束（270）的小角度偏转以补偿定位器台（302）的横轴（110）沉降误差的转向镜（236,306）。 优选两轴镜，因为定位器台的任一轴可用于执行作业。 在一个实施例中，导向镜仅用于纠错，而不需要与定位器台位置命令协调。 在半导体连接处理（“SLP”）应用中，优选采用挠曲机构的快速转向镜和压电致动器来使倾斜反射镜。 本发明补偿横轴建立时间，从而提高了SLP系统的吞吐量和精度，同时简化了定位器台的复杂性，因为导向镜校正放松了定位器级的伺服驱动要求。

公开(公告)号：US20040159643A1

公开(公告)日：2004-08-19

申请号：US10771962

申请日：2004-02-04

发明人： Yoshihiro Mutoh ,  Masaki Itoh ,  Tetsuichi Kitamoto ,  Yoshihiro Nagata

IPC分类号： B23K026/02

CPC分类号： B23K26/046

摘要： Laser beam radiating means has a center electrode at an inner periphery of an annular electrode. Center electrode potential control means controls potential of the center electrode so as to keep zero (0) or positive constant voltage, so that it is possible to absorb charged particles in plasma generating by radiation of laser beam through the center electrode, and dispersion of plasma can be restricted thereby. Even if a large volume of plasma is generated, a line of electric force from the annular electrode is not disturbed by plasma, and the variation of capacitance generating between the annular electrode and a workpiece can be prevented, thereby.

摘要翻译： 激光束辐射装置在环形电极的内周具有中心电极。 中心电极电位控制装置控制中心电极的电位以保持零（0）或正恒定电压，使得可以吸收通过中心电极的激光束的辐射产生的等离子体产生的带电粒子，以及等离子体的分散 可以被限制。 即使产生大体积的等离子体，来自环形电极的电力线也不会被等离子体干扰，因此可以防止在环形电极和工件之间产生的电容的变化。

公开(公告)号：US20040149706A1

公开(公告)日：2004-08-05

申请号：US10661351

申请日：2003-09-12

申请人： Tamicare Ltd.

发明人： Ehud Giloh

IPC分类号： B23K026/02

CPC分类号： B23K26/0853 ,  B23K26/04 ,  B23K26/08 ,  B23K26/082 ,  B23K26/10 ,  B29C41/14 ,  B29C41/34 ,  B29C2793/0009 ,  B29C2793/009

摘要： An apparatus and method for perforating, cutting, or engraving a workpiece using a focused laser system to produce a focused laser. The apparatus includes a workpiece former having a complex shape to which the workpiece substantially conforms. The apparatus also includes a positioner that makes an adjustment to keep the focused laser substantially focused on the workpiece as the positional relationship between the workpiece former and the focused laser system changes to an operating position that changes the distance between the workpiece and the focused laser system due to the complex shape of the workpiece former.

摘要翻译： 一种使用聚焦激光系统对工件进行穿孔，切割或雕刻以产生聚焦激光的装置和方法。 该装置包括具有工件基本上符合的复杂形状的工件成型件。 该装置还包括定位器，其进行调整以使聚焦激光器基本上聚焦在工件上，因为工件形成器和聚焦激光器系统之间的位置关系改变为改变工件与聚焦激光系统之间的距离的操作位置 由于工件形状复杂。

公开(公告)号：US20030024913A1

公开(公告)日：2003-02-06

申请号：US10019522

申请日：2002-04-15

发明人： Joseph P. Downes ,  J Miles Kane ,  Frank B Hunt, Jr. ,  Rainer Schramm ,  Donald J Svetkoff

IPC分类号： B23K026/08 ,  B23K026/02

CPC分类号： B23K26/032 ,  B23K26/0838 ,  B23K2101/42 ,  B41J2/47 ,  H01L23/544 ,  H01L2924/0002 ,  H05K1/0266 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/0097 ,  H05K2203/107 ,  H05K2203/1545 ,  H01L2924/00

摘要： A laser scanning method and system for marking articles is provided wherein control is provided by a single central controller. The system includes a conveyor for conveying the articles in a first direction at a marking station. A conveyor controller controls the conveyor in response to conveyor control signals. A laser and an optical subsystem are optically coupled to the laser for generating a focused laser beam in response to laser control signals. A scan head includes a laser beam deflector for steering the focused laser beam along two substantially orthogonal intersecting axes at the marking station to mark a first predetermined region on at least one of the articles in response to deflection control signals. An actuator is coupled to at least part of the scan head for displacing the axes in a second direction substantially orthogonal to the first direction at the marking station in response to displacement control signals wherein the laser beam deflector steers the focused laser beam along the displaced axes to mark a second predetermined region on the at least one article. A central controller is provided for generating the deflection control signals, the laser control signals, the displacement control signals and the conveyor control signals in response to input data representing marking locations and marking content.

摘要翻译： 提供了用于标记物品的激光扫描方法和系统，其中控制由单个中央控制器提供。 该系统包括用于在标记站处沿第一方向输送物品的输送机。 输送机控制器响应输送机控制信号控制输送机。 激光器和光学子系统光耦合到激光器，以响应于激光控制信号产生聚焦的激光束。 扫描头包括激光束偏转器，用于在标记位置处沿着两个基本上正交的交叉轴转向聚焦激光束，以响应于偏转控制信号标记至少一个物品上的第一预定区域。 致动器耦合到扫描头的至少一部分，用于响应于位移控制信号在基准正交于标记位置的第一方向的第二方向上移动轴，其中激光束偏转器沿聚焦激光束沿着位移轴 以标记所述至少一个物品上的第二预定区域。 中央控制器被提供用于响应于表示标记位置和标记内容的输入数据产生偏转控制信号，激光控制信号，位移控制信号和输送机控制信号。

公开(公告)号：US20030000927A1

公开(公告)日：2003-01-02

申请号：US10175831

申请日：2002-06-21

申请人： NIPPEI TOYAMA CORPORATION

发明人： Shuso Kanaya ,  Yuichi Morita

IPC分类号： B23K026/38 ,  B23K026/14 ,  B23K026/02

CPC分类号： B23K26/04 ,  B23K26/389 ,  B60R21/2165

摘要： A laser beam machining apparatus forms blind holes at predetermined intervals in a workpiece by intermittently irradiating a laser beam from a laser nozzle to the workpiece while the laser nozzle and the workpiece being moved relatively. During the time the workpiece is subjected to machining, the electrostatic capacity between the support member and the laser nozzle is detected by an electrostatic capacity sensor while the workpiece made of conductive material is supported on the support member. The irradiation output power is controlled by a control unit which operates to vary the number of output pulses from the laser nozzle each time one hole is formed according to the result detected in response to variation in the thickness of the workpiece.

摘要翻译： 激光束加工装置通过在激光喷嘴和工件相对移动的同时间歇地将来自激光喷嘴的激光束照射到工件上而以预定间隔在工件上形成盲孔。 在对工件进行加工的过程中，由导电材料制成的工件支撑在支撑部件上时，通过静电电容传感器检测支撑部件与激光喷嘴之间的静电电容。 照射输出功率由控制单元控制，该控制单元根据响应于工件厚度变化而检测到的结果，每次形成一个孔时，操作来改变来自激光喷嘴的输出脉冲的数量。

公开(公告)号：US20020003132A1

公开(公告)日：2002-01-10

申请号：US09898110

申请日：2001-07-03

发明人： Loris Scalzotto

IPC分类号： B23K026/02

CPC分类号： B23K26/0884

摘要： A focusing head for a laser machine, comprising: a base (16) rotating about a first axis and carrying a first mirror (20) designed to receive a laser beam along said first axis (A); a body (18) which can turn with respect to the base about a second axis (B) and which carries a second mirror (24) designed to receive the laser beam deflected by the first mirror (20) along the second axis (B) and to deflect said beam along a third axis (F); a focusing lens (46) which receives said laser beam along the third axis (F) and sends a focused laser beam towards a beam-exit nozzle (30); and means for varying the position of the aforesaid lens (46) along the aforesaid third axis (F) downstream of the rotation points about the aforesaid axes (A, B).

摘要翻译： 一种用于激光机的聚焦头，包括：围绕第一轴旋转的基座（16），并承载设计成沿所述第一轴线（A）接收激光束的第一反射镜（20）。 相对于基部围绕第二轴线（B）转动的本体（18），并且该主体（18）承载设计成接收沿第二轴线（B）由第一反射镜（20）偏转的激光束的第二反射镜（24） 并且使所述光束沿着第三轴线（F）偏转; 聚焦透镜（46），其沿着所述第三轴线（F）接收所述激光束，并将聚焦的激光束朝向光束出射喷嘴（30）发送; 以及用于沿着上述第三轴线（F）改变上述透镜（46）在围绕上述轴线（A，B）的旋转点下游的位置的装置。